Charged-particle beam device (English)
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- New search for: KAWAMOTO YUTA
- New search for: IKEGAMI AKIRA
- New search for: EBIZUKA YASUSHI
- New search for: BAN NAOMA
- New search for: KAWAMOTO YUTA
- New search for: IKEGAMI AKIRA
- New search for: EBIZUKA YASUSHI
- New search for: BAN NAOMA
2021
- Patent / Electronic Resource
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Title:Charged-particle beam device
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Patent number:US11056310
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Patent applicant:
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Patent family:
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Contributors:KAWAMOTO YUTA ( author ) / IKEGAMI AKIRA ( author ) / EBIZUKA YASUSHI ( author ) / BAN NAOMA ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2021-07-06
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J
- Further information on International Patent Classification
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Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS -
Source: