Method to increase barrier film removal rate in bulk tungsten slurry (English)
Free access
- New search for: WARD WILLIAM J
- New search for: CARNES MATTHEW E
- New search for: CUI JI
- New search for: HUANG HELIN
- New search for: WARD WILLIAM J
- New search for: CARNES MATTHEW E
- New search for: CUI JI
- New search for: HUANG HELIN
2023
- Patent / Electronic Resource
-
Title:Method to increase barrier film removal rate in bulk tungsten slurry
-
Patent number:US11597854
-
Patent applicant:
-
Patent family:
-
Contributors:WARD WILLIAM J ( author ) / CARNES MATTHEW E ( author ) / CUI JI ( author ) / HUANG HELIN ( author )
-
Publisher:
- New search for: Europäisches Patentamt
-
Publication date:2023-03-07
-
Type of media:Patent
-
Type of material:Electronic Resource
-
Language:English
-
Classification:
IPC: C09G Poliermittelmischungen, ausgenommen Möbelpolituren, POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH / C08K Verwendung von anorganischen oder nichtmakromolekularen organischen Stoffen als Zusatzstoffe, USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES AS COMPOUNDING INGREDIENTS / C08L COMPOSITIONS OF MACROMOLECULAR COMPOUNDS, Massen auf Basis makromolekularer Verbindungen / C09K Materialien für Anwendungen, soweit nicht anderweitig vorgesehen, MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR / C23F Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen, NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
Source: