Superresolution metrology methods based on singular distributions and deep learning (English)
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2023
- Patent / Electronic Resource
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Title:Superresolution metrology methods based on singular distributions and deep learning
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Patent number:US11694453
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Contributors:SIRAT GABRIEL Y ( author )
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- New search for: Europäisches Patentamt
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Publication date:2023-07-04
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
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