Analysis method and analysis system of voltage contrast defect (English)
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- New search for: YEN YUE-YING
- New search for: YEN YUE-YING
2024
- Patent / Electronic Resource
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Title:Analysis method and analysis system of voltage contrast defect
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Patent number:US11927625
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Patent applicant:
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Patent family:
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Contributors:YEN YUE-YING ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-03-12
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: G01R / G06T / H01J / H01L
- Further information on International Patent Classification
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Classification:
IPC: G01R Messen elektrischer Größen, MEASURING ELECTRIC VARIABLES / G06T Bilddatenverarbeitung oder Bilddatenerzeugung allgemein, IMAGE DATA PROCESSING OR GENERATION, IN GENERAL / H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
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