Systems and methods for image enhancement for a multi-beam charged-particle inspection system (English)
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- New search for: GOOSEN MAIKEL ROBERT
- New search for: MANGNUS ALBERTUS VICTOR GERARDUS
- New search for: KUINDERSMA LUCAS
- New search for: GOOSEN MAIKEL ROBERT
- New search for: MANGNUS ALBERTUS VICTOR GERARDUS
- New search for: KUINDERSMA LUCAS
2024
- Patent / Electronic Resource
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Title:Systems and methods for image enhancement for a multi-beam charged-particle inspection system
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Patent number:US11961700
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Patent applicant:
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Patent family:
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Contributors:GOOSEN MAIKEL ROBERT ( author ) / MANGNUS ALBERTUS VICTOR GERARDUS ( author ) / KUINDERSMA LUCAS ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-04-16
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J / G06T
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