ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS (English)
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2023
- Patent / Electronic Resource
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Title:ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
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Patent number:US2023138138
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Patent applicant:
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Patent family:
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Contributors:MACDONALD MATTHEW R ( author ) / LEHMANN JOHN F ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-05-04
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: C07F / C23C
- Further information on International Patent Classification
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Classification:
IPC: C07F Acyclische, carbocyclische oder heterocyclische Verbindungen, die andere Elemente als Kohlenstoff, Wasserstoff, Halogen, Sauerstoff, Stickstoff, Schwefel, Selen oder Tellur enthalten, ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM / C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL -
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