MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE USING SETTINGS ADJUSTED TO AN INSPECTION SITE (English)
Free access
- New search for: SCHUBERT STEFAN
- New search for: SCHUBERT STEFAN
2024
- Patent / Electronic Resource
-
Title:MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE USING SETTINGS ADJUSTED TO AN INSPECTION SITE
-
Patent number:US2024087838
-
Patent applicant:
-
Patent family:
-
Contributors:SCHUBERT STEFAN ( author )
-
Publisher:
- New search for: Europäisches Patentamt
-
Publication date:2024-03-14
-
Type of media:Patent
-
Type of material:Electronic Resource
-
Language:English
- New search for: H01J
- Further information on International Patent Classification
-
Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS -
Source: