Feedforward temperature control for plasma processing apparatus (English)
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2016
- Patent / Electronic Resource
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Title:Feedforward temperature control for plasma processing apparatus
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Patent number:US9338871
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Patent applicant:
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Patent family:
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Contributors:MAHADESWARASWAMY CHETAN ( author ) / MERRY WALTER R ( author ) / SHOJI SERGIO FUKUDA ( author ) / ZHANG CHUNLEI ( author ) / PATTAR YASHASWINI B ( author ) / NGUYEN DUY D ( author ) / TSONG TINA ( author ) / NEVIL SHANE C ( author ) / BUCHBERGER JR DOUGLAS A ( author ) / SILVEIRA FERNANDO M ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2016-05-10
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
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Classification:
IPC: G01L Messen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden, MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE / C23F Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen, NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES / G01R Messen elektrischer Größen, MEASURING ELECTRIC VARIABLES / H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES / H05H Plasmatechnik, PLASMA TECHNIQUE -
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