Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers (English)
Free access
- New search for: SASTRI SURI A
- New search for: BALASUBRAMANIAN SREERAM
- New search for: GOLDMAN LEE M
- New search for: SASTRI SURI A
- New search for: BALASUBRAMANIAN SREERAM
- New search for: GOLDMAN LEE M
2017
- Patent / Electronic Resource
-
Title:Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers
-
Patent number:US9637415
-
Patent applicant:
-
Patent family:
-
Contributors:
-
Publisher:
- New search for: Europäisches Patentamt
-
Publication date:2017-05-02
-
Type of media:Patent
-
Type of material:Electronic Resource
-
Language:English
- New search for: C01B / C04B
- Further information on International Patent Classification
-
Classification:
-
Source: