SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING (English)
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2020
- Patent / Electronic Resource
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Title:SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING
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Additional title:MÉTROLOGIE DES SEMI-CONDUCTEURS BASÉE SUR L'IMAGERIE HYPERSPECTRALE
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Patent number:WO2020146438
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Patent applicant:
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Patent family:
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Contributors:WANG DAVID Y ( author ) / BUETTNER ALEXANDER ( author ) / PANDEV STILIAN ( author ) / SAERCHEN EMANUEL ( author ) / SHCHEGROV ANDREI V ( author ) / BLASENHEIM BARRY ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2020-07-16
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: G01N / G01B / G06T
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Classification:
IPC: G01N Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften, INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES / G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS, Messen der Länge, der Dicke oder ähnlicher linearer Abmessungen / G06T Bilddatenverarbeitung oder Bilddatenerzeugung allgemein, IMAGE DATA PROCESSING OR GENERATION, IN GENERAL -
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