BBP ASSISTED DEFECT DETECTION FLOW FOR SEM IMAGES (English)
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- New search for: BHATTACHARYYA SANTOSH
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2021
- Patent / Electronic Resource
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Title:BBP ASSISTED DEFECT DETECTION FLOW FOR SEM IMAGES
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Additional title:FLUX DE DÉTECTION DE DÉFAUTS ASSISTÉ PAR BBP D'IMAGES DE MEB
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Patent number:WO2021087014
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Patent applicant:
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Patent family:
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Contributors:BHATTACHARYYA SANTOSH ( author ) / CONG GE ( author ) / PARK SANGBONG ( author ) / HUANG BOSHI ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2021-05-06
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
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