A Cmos Microsystem Combining Magnetic Actuation and In-Situ Optical Detection of Microparticles (English)
- New search for: Lehmann, U.
- New search for: Sergio, M.
- New search for: Pietrocola, S.
- New search for: Niclass, C.
- New search for: Charbon, E.
- New search for: Gijs, M.A.M.
- New search for: Lehmann, U.
- New search for: Sergio, M.
- New search for: Pietrocola, S.
- New search for: Niclass, C.
- New search for: Charbon, E.
- New search for: Gijs, M.A.M.
In:
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
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2493-2496
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2007
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ISBN:
- Conference paper / Electronic Resource
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Title:A Cmos Microsystem Combining Magnetic Actuation and In-Situ Optical Detection of Microparticles
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Contributors:Lehmann, U. ( author ) / Sergio, M. ( author ) / Pietrocola, S. ( author ) / Niclass, C. ( author ) / Charbon, E. ( author ) / Gijs, M.A.M. ( author )
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Published in:
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Publisher:
- New search for: IEEE
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Publication date:2007-06-01
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Size:3883581 byte
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ISBN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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MEMS and Nano Technology for the Handheld, Portable Electronic and the Automotive MarketsPisano, Albert P. et al. | 2007
- 5
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Concepts for Carbon Nanotube SensorsHierold, Christofer et al. | 2007
- 11
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Micro and Nano Chemical System on ChipKitamori, Takehiko et al. | 2007
- 17
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Contraction Measurements of Cardiomyocytes Grown on Silicon CantileversTodorova, M. / Stucklin, Ph. / Bertsch, A. / Rohr, S. / Renaud, Ph. et al. | 2007
- 21
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Micro Heater with PT-CR Thin Film Thermo-Couple for High Speed Biological MeasurementsGillot, F. / Arata, H.F. / Morin, F.O. / Collard, D. / Fujita, H. et al. | 2007
- 25
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Spatially Focused Reagent Injection System for Cell Analysis using 3-D Sheath Flow ScannerSuzuki, Yasuo / Kanai, Masaki / Kawai, Kentaro / Nishimoto, Takahiro / Shoji, Shuichi et al. | 2007
- 29
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Monolithic Integration of Micro-Channel on Disposable Flow Sensors for Medical ApplicationsBillat, S. / Kliche, K. / Gronmaier, R. / Nommensen, P. / Auber, J. / Hedrich, F. / Zengerle, R. et al. | 2007
- 33
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Autonomous Genetic Analysis System to Study Space Effects on Microorganisms: Results from OrbitRicco, Antonio J. / Hines, John W. / Piccini, M. / Parra, M. / Timucin, L. / Barker, V. / Storment, C. / Friedericks, C. / Agasid, E. / Beasley, C. et al. | 2007
- 39
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A Manufacturable Chip-Scale Atomic ClockYoungner, D. W. / Lust, L. M. / Carlson, D. R. / Lu, S. T. / Forner, L. J. / Chanhvongsak, H. M. / Stark, T. D. et al. | 2007
- 45
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From the implementation to the characterisation and assembling of microfabricated optical alkali vapor cell for MEMS atomic clocksNieradko, L. / Gorecki, C. / Dziuban, J. / Douahi, A. / Giordano, V. / Beugnot, J.C. / Guerandel, S. / Moraja, M. et al. | 2007
- 45
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From the Implementation to the Characterisation and Assembling of Microfabricated Optical Alcali Vapor Cell for MEMS Atomic ClocksNieradko, L. / Gorecki, C. / Dziuban, J. / Douahi, A. / Giordano, V. / Beugnot, J.C. / Guerandel, S. / Moraja, M. et al. | 2007
- 49
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MEMS Oscillators for High Volume Commercial ApplicationsLutz, M. / Partridge, A. / Gupta, P. / Buchan, N. / Klaassen, E. / McDonald, J. / Petersen, K. et al. | 2007
- 53
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A Low-Voltage Temperature-Stable Micromechanical Piezoelectric OscillatorAbdolvand, Reza / Mirilavasani, Hossein / Ayazi, Farrokh et al. | 2007
- 57
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Novel Ultrasound Read-Out for a Wireless Implantable Passive Strain Sensor (WIPSS)Gattiker, F. / Umbrecht, F. / Muller, D. / Neuenschwander, J. / Sennhauser, U. / Wendlandt, M. / Hierold, Ch. et al. | 2007
- 61
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7-GHZ CMOS RF Front-End Monolithically Integrated with Inverted-F Antenna for Wireless Sensor SystemIkebe, M. / Ueo, D. / Osabe, H. / Inafune, K. / Sano, E. / Koutani, M. / Ikeda, M. / Mashiko, K. et al. | 2007
- 65
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Closed-Loop Transductor-Compensated Class E Driver for Inductive LinksLenaerts, B. / Peeters, F. / Puers, R. et al. | 2007
- 69
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An Implantable Microsystem for Wireless Multi-Channel Cortical RecordingSodagar, Amir M. / Perlin, Gayatri E. / Yao, Ying / Wise, Kensall D. / Najafi, Khalil et al. | 2007
- 73
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Wirelessly Powered Sensor Transponder for UHF RFIDPursula, P. / Marjonen, J. / Ronkainen, H. / Jaakkola, K. et al. | 2007
- 77
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Achievements and Perspectives of the Drie Technology for the Microsystems MarketPuech, M. / Thevenoud, J.M. / Gruffat, J.M. / Launay, N. / Godinat, P. / Le Barillec, O. et al. | 2007
- 81
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A New Method for High-Rate Deep Dry Etching of Silicate Glass with Variable ETCH ProfileBertz, A. / Fendler, R. / Schuberth, R. / Hentsch, W. / Gessner, Th. et al. | 2007
- 85
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A Novel Deep Hole Etching in NLD Plasma Low GWP GasesMorikawa, Yasuhiro / Murayama, Takahide / Suu, Koukou et al. | 2007
- 89
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Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching ProcessXiao, Zhiyong / Feng, Chunhua / Chan, Philip C.H. / Hsing, I-Ming et al. | 2007
- 93
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The Progress of Biochip Development for Research and Consumer MarketCheng, Jing et al. | 2007
- 95
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Scanning Magnetic Tunnel Junction Sensor for the Detection of Magnetically Labeled DNA MicroarrayChan, Mei-Lin / Jaramillo, Gerardo M. / Horsley, David A. et al. | 2007
- 99
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Characterization of a D-Amino Acid Oxidase Microbiosensor for D-Serine Detection in the Central Nervous SystemPernot, Pierre / Mothet, Jean-Pierre / Schuvailo, Oleg / Soldatkin, Alexey / Pollegioni, Loredano / Pilone, Mirella / Cespuglio, Raymond / Marinesco, Stephane et al. | 2007
- 103
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Towards the Formation of Neuro-Transistor Artificial Chemical SynapseGoykhman, I. / Korbakov, N. / Bartic, C. / Borghs, G. / Spira, M. E. / Shappir, J. / Yitzchaik, S. et al. | 2007
- 107
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Advances in Thick-Film SensorsWhite, N.M. et al. | 2007
- 113
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Direct Metal Imprinting Lithography Based on Pulsed Laser HeatingLee, Yung-Chun / Chen, Chun-Hung et al. | 2007
- 117
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Full Wafer Fabrication Process for Microfluidic Glass Chips with Electroplated ElectrodesVulto, P. / Igel, G. / Urban, G.A. et al. | 2007
- 121
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Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined PrintheadLeblanc, Valerie / Chen, Jianglong / Mardilovich, Peter / Bulovic, Vladimir / Schmidt, Martin A. et al. | 2007
- 125
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A Surface Mountable Glucose Fuel Cell for Medical ImplantsKerzenmacher, S. / Sumbharaju, R. / Ducree, J. / Zengerle, R. / von Stetten, F. et al. | 2007
- 129
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Harvesting Energy from Vibrations by a Micromachined Electret GeneratorSterken, T. / Fiorini, P. / Altena, G. / Van Hoof, C. / Puers, R. et al. | 2007
- 133
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Microstructured In-Plane Thermoelectric Generators with Optimized Heat PathKockmann, N. / Huesgen, T. / Woias, P. et al. | 2007
- 137
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Tunable Capacitor Based on Polymer-Dispersed Liquid Crystal for Optimum Micro-Power HarvestingChung, S.-Y. / Chen, Y.-Y. / Wu, W.-J. / Shih, W.-P. / Chang, P.-Z. et al. | 2007
- 141
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Electrostatic Transducers for Micro Energy Harvesting Based on SOI TechnologyBartsch, U. / Trautmann, A. / Ruther, P. / Gaspar, J. / Paul, O. et al. | 2007
- 145
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Novel Effa-Based Thin-Film RF-MEMS TechnologyRottenberg, X. / Ekkels, P. / Brebels, S. / Webers, T. / Czarnecki, P. / Mertens, R. P. / Nauwelaers, B. / Puers, R. / Marchand, L. / De Wolf, I. et al. | 2007
- 149
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A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending ControlIkehashi, T. / Ogawa, E. / Yamazaki, H. / Ohguro, T. et al. | 2007
- 153
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Smart Individual Switch Addressing of 5 × 5 and 20 × 20 MEMS Double-Switch ArraysBraun, Stefan / Oberhammer, Joachim / Stemme, Goran et al. | 2007
- 157
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An Rfmems Switched Capacitor Array for a Tunable Band Pass FilterLee, S.-S. / Uchida, H. / Soda, S. / Nishino, T. / Inoue, H. / Izuo, S. / Yoshida, Y. / Miyazaki, M. et al. | 2007
- 161
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Monolithic Phase Shifter Based on Mechanically Tunable Saw Delay LineKuypers, J.H. / Schmidt, M.E. / Tanaka, S. / Esashi, M. et al. | 2007
- 165
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Non-Contact Nanoliter & Picoliter Liquid DispensingKoltay, P. / Zengerle, R. et al. | 2007
- 171
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High Generation Rate of Uniform Oil-In-Water Droplets Formed by Multi-Stage Divergence Microflow DeviceMurakami, Y. / Arakawa, T. / Jeong, E. H. / Go, J. S. / Shoji, S. et al. | 2007
- 175
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Inkjet Printhead Arrays with No Separating Wall Between BubblesChang, C.M. / Yang, I.D. / Yu, R.J. / Lin, Y.L. / Tseng, F.G. / Chieng, C.C. et al. | 2007
- 179
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Studies of Phosphorylation During Innate Immune Signaling using On-Chip Cell Preparation and Downstream Flow CytometrySrivastava, Nimisha / Brennan, James S. / Throckmorton, Daniel J. / Branda, Steven S. / Zhang, Zhaodou / Singh, Anup K. / Herr, Amy E. et al. | 2007
- 183
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Preparation and Characterization of Tin Oxide Nanowires on SICBianchi, S. / Comini, E. / Ferroni, M. / Sberveglieri, G. / Pandolfi, L. / Kaciulis, S. / Wlodarski, W. / Shafiei, M. / Kandasamy, S. et al. | 2007
- 187
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SWNT Growth by LPCVD on Ferritin-Based Iron Catalyst Nanoparticles Towards CNT SensorsDurrer, L. / Helbling, T. / Zenger, C. / Jungen, A. / Stampfer, C. / Hierold, C. et al. | 2007
- 191
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Simple Technique for Direct Patterning of Nanowires using a Nanoslit Shadow-MaskTong, H.D. / Jansen, H.V. / Tas, N.R. / Gadgil, V.J. / Carlen, E.T. / van den Berg, A. et al. | 2007
- 195
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Towards Reliable 100-Nanometer Scale Stencil Lithography on Fullwafer: Progress and ChallengesMena, O. Vazquez / van den Boogaart, M.A.F. / Brugger, J. et al. | 2007
- 199
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Polymer Surface Morphology Control for Microfluidic DevicesNabesawa, H. / Hitobo, T. / Wakabayashi, S. / Asaji, T. / Abe, T. / Nakatani, I. / Seki, M. et al. | 2007
- 203
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A Three Dimensional Real-Time MEMS Based Optical Biopsy System for In-Vivo Clinical ImagingMcCormick, Daniel T. / Jung, Woonggyu / Ahn, Yeh-Chan / Chen, Zhongping / Tien, Norman C. et al. | 2007
- 209
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A Novel Micro-Biopsy Actuator for Capsular Endoscope using LIGA ProcessPark, Sunkil / Koo, Kyo-In / Kim, Gil-Sub / Bang, Seoung Min / Song, Si Young / Byun, Jung-Won / Chu, Chong-Nam / Cho, Dongil "Dan" et al. | 2007
- 213
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Photochemically Patterned Biliary Stents with Integrated Permanent Magnets and Deformable Assembly Features for Wireless Magnetoelastic Tissue Growth SensingGreen, Scott R. / Richardson, Mark T. / Shariff, Farah A. / Gianchandani, Yogesh B. et al. | 2007
- 219
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Optical Characterisation of Bone Tissue for Diffusion Optical Tomography Applied to Skeletal ImplantsMargallo-Balbas, E. / Pifferi, A. / Taroni, P. / Comelli, D. / Farina, A. / Cubbedu, R. / van Veen, A.J. / van Ruijven, L.J. / Smit, Th. H. / French, P.J. et al. | 2007
- 225
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An in Vivo Blood Microsampling Device for Pharmacokinetic ApplicationsLi, Tao / Barnett, Adam / Xiao, Deqing / Zhong, Min / Gianchandani, Yogesh B. et al. | 2007
- 229
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Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree AccuracyJha, C. M. / Bahl, G. / Melamud, R. / Chandorkar, S. A. / Hopcroft, M. A. / Kim, B. / Agarwal, M. / Salvia, J. / Mehta, H. / Kenny, T. W. et al. | 2007
- 233
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Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-ExcitationVerd, J. / Uranga, A. / Teva, J. / Abadal, G. / Torres, F. / Arcamone, J. / Lopez, J.L. / Perez-Murano, F. / Fraxedas, J. / Esteve, J. et al. | 2007
- 237
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Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability ProductTorres, F. / Abadal, G. / Arcamone, J. / Teva, J. / Verd, J. / Uranga, A. / Lopez, J.Ll. / Borrise, X. / Perez-Murano, F. / Barniol, N. et al. | 2007
- 241
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Dual-Harmonic Oscillator for Quartz Crystal Resonator SensorsFerrari, M. / Ferrari, V. / Kanazawa, K.K. et al. | 2007
- 245
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Geometrical Optimization of Resonant Cantilever SensorsNaeli, Kianoush / Tandon, Prateek / Brand, Oliver et al. | 2007
- 249
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Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS PreconcentrationCamara, E. H. M. / Pijolat, C. / Courbat, J. / Breuil, P. / Briand, D. / de Rooij, N. F. et al. | 2007
- 253
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Rapid Micro Array System for Passive Batch-Filling and Parallel-Printing Protein SolutionsHo, Cheng-En / Chieng, Chin-Chang / Chen, Min-Hung / Tseng, Fan-Gang et al. | 2007
- 257
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High Through-Put Parallel Biomolecules Sorting Microsystem with Three Dimensional PDMS StackNara, Y. / Sugino, H. / Arakawa, T. / Shirasaki, Y. / Funatsu, T. / Shoji, S. et al. | 2007
- 261
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PPB-Level Detection of Benzene Diluted in Water by Bubbling Extraction System and UV Spectroscopy Based MeasurementsCamou, S. / Shimizu, A. / Horiuchi, T. / Haga, T. et al. | 2007
- 265
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Monodisperse Double Emulsions Generated by Microfluidic Chips Utilizing Flow Focusing and Pneumatic Chopping DevicesLao, K.L. / Lee, G.B. et al. | 2007
- 269
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Radioisotope Powered Electrostatic Microactuators and ElectronicsLal, Amit / Duggirala, Rajesh / Tin, Steven et al. | 2007
- 275
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A Wideband Electromagnetic Micro Power Generator for Wireless MicrosystemsSari, Ibrahim / Balkan, Tuna / Kulah, Haluk et al. | 2007
- 279
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3D Silicon Betavoltaics Microfabricated using a Self-Aligned Process for 5 Milliwatt/CC Average, 5 Year Lifetime MicrobatteriesDuggirala, Rajesh / Tin, Steven / Lal, Amit et al. | 2007
- 283
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Design and Fabrication of MEMS-Based Monolithic Fuel CellsKuriyama, Nariaki / Kubota, Tadahiro / Okamura, Daisuke / Suzuki, Toshifumi / Sasahara, Jun et al. | 2007
- 287
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Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8Lau, GK / Duc, T Chu / Goosen, JFL / Sarro, PM / van Keulen, F et al. | 2007
- 291
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Surface Hydrophilic Polyurea Film for PMMA Blood Analysis Chip Realized by Vacuum Ultraviolet Light IrradiationShinohara, H. / Takahashi, Y. / Nishi, T. / Uemura, K. / Takahashi, C. / Mizuno, J. / Shoji, S. et al. | 2007
- 295
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Droplet Manipulation by Electrowetting on Polymer Dispersed Liquid CrystalChiu, Cheng-Pu / Lin, Shang-Chih / Fan, Shih-Kang et al. | 2007
- 299
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Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe ArrayBao, Haifei / Liu, Bin / Li, Xinxin et al. | 2007
- 303
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Ultra-Thick Optical Components using LF55GN Photosensitive FlexopolymerSayah, A. / Parashar, V.K. / Gijs, M.A.M. et al. | 2007
- 307
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An MSI Micromechanical Differential Disk-Array FilterLi, Sheng-Shian / Lin, Yu-Wei / Ren, Zeying / Nguyen, Clark T.-C. et al. | 2007
- 313
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Aqueous Transduction of Poly-Sige Disk ResonatorsChandrahalim, Hengky / Bhave, Sunil A. / Quevy, Emmanuel P. / Howe, Roger T. et al. | 2007
- 317
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Micromachined Bulk Wave Acoustic Bandgap DevicesOlsson, Roy H. / Fleming, James G. / El-Kady, Ihab F. / Tuck, Melanie R. / McCormick, Frederick B. et al. | 2007
- 323
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UHF Nickelmicromechanical Spoke-Supported Ring ResonatorsHuang, Wen-Lung / Li, Sheng-Shian / Ren, Zeying / Nguyen, Clark T.-C. et al. | 2007
- 327
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Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical ResonatorsFeng, X.L. / He, R.R. / Yang, P.D. / Roukes, M.L. et al. | 2007
- 331
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Using MEMS to Build the Device and the PackageKim, B. / Hopcroft, M. / Jha, C.M / Melamud, R. / Chandorkar, S. / Agarwal, M. / Chen, K. L. / Park, W. T. / Candler, R. / Yama, G. et al. | 2007
- 335
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A Generic Environment-Resistant Packaging Technology for MEMSLee, S.-H. / Lee, S. W. / Najafi, K. et al. | 2007
- 339
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The Influence of surface Profile on Leakage in Roomtemperature Seal-BondingOkada, H. / Itoh, T. / Suga, T. et al. | 2007
- 343
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Thin Filmencapsulation of microstructures using Sacrificial CF-PolymerReuter, D. / Bertz, A. / Werner, T. / Nowack, M. / Gessner, T. et al. | 2007
- 347
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Healthcare Chip for Home Medical DiagnosisHoriike, Y. / Ogawa, H. / Nagai, M. / Koda, H. / Chang, C.-H. / Hashioka, S. / Takai, M. / Morimoto, Y. et al. | 2007
- 351
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In-Vitro Rapid Centimeter-Scale Reconstruction of Lobule-Mimetic Liver Tissue Employing Dielectrophoresis-Based Cell PatterningHo, Chen-Ta / Lin, Ruei-Zeng / Chang, Hwan-You / Liu, Cheng-Hsien et al. | 2007
- 355
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Hydrolyticmicroneedles as Transdermal Drug Delivery SystemMiyano, T. / Miyachi, T. / Okanishi, T. / Todo, H. / Sugibayashi, K. / Uemura, T. / Takano, N. / Konishi, S. et al. | 2007
- 359
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A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon ReservoirEvans, Allan T. / Park, Jong M. / Nellis, Gregory F. / Klein, Sanford A. / Feller, Jeffrey R. / Salerno, Louis / Gianchandani, Yogesh B. et al. | 2007
- 363
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Dielectric Charging Sensitivity on MEMS SwitchesSouchon, F. / Charvet, PL. / Maeder-Pachurka, C. / Audoin, M. et al. | 2007
- 367
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Effects of Relative Humidity and Actuation Voltage on MEMS ReliabilityHon, M. / DelRio, F. W. / Carraro, C. / Maboudian, R. et al. | 2007
- 371
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Non-Destructive Functionality and Reliability Assessment of Dynamic MEMS using Acoustic Phonon CharacterizationWong, Wai-Kin / Wong, Chee-Leong / Palaniapan, Moorthi / Tay, Francis Eng Hock et al. | 2007
- 375
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Effects of Environmental Condition on the Strength of Submicron-Thick Single Crystal Silicon FilmNakao, S. / Ando, T. / Shikida, M. / Sato, K. et al. | 2007
- 379
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Comparison of Bulge Test and Point Deflection Methods for the Mechanical Characterisation of Submicron Thick Composite MembranesMartins, P. / Delobelle, P. / Malhaire, C. / Brida, S. / Barbier, D. et al. | 2007
- 383
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A Novel Circular Ferro-Fluid Driven Flow-Through Microchip for Rapid DNA AmplificationSun, Y. / Kwok, Y. C. / Nguyen, N. T. et al. | 2007
- 387
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One-Step Pathogen Specific DNA Extraction from Whole Blood on a Centrifugal Microfluidic DeviceCho, Yoon-Kyoung / Lee, Jeong-Gun / Park, Jong-Myeon / Lee, Beom-Seok / Lee, Youngsun / Ko, Christopher et al. | 2007
- 391
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NANO-PCR: Breaking the Bottom Limit of the PCR Denaturation Temperature using NanogoldLin, Yu-Cheng / Wu, Hua-Lin et al. | 2007
- 395
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Electrical and Mechanical Characteristics of DNA Bundles Revealed by Silicon NanotweezersYamahata, Christophe / Takekawa, Tetsuya / Kumemura, Momoko / Hosogi, Maho / Hashiguchi, Gen / Collard, Dominique / Fujita, Hiroyuki et al. | 2007
- 399
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Nanopore with Transverse Nanoelectrodes for Electrical Characterization and Sequencing of DNAGierhart, Brian C. / Howitt, David G. / Chen, Shiahn J. / Zhu, Zhineng / Kotecki, David E. / Smith, Rosemary L. / Collins, Scott D. et al. | 2007
- 403
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Self-Assembled ZNO Nanowires Via Local Vapor Transport Synthesis as UV SensorLuo, L. / Lin, L. et al. | 2007
- 407
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Process-Independent, Ultrasound-Enhanced, Electrostatic Batch AssemblyArdanuc, Serhan / Lal, Amit / Reyes, David et al. | 2007
- 411
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Micro-Scale System Integration Via Molten-Alloy Driven Self-Assembly and Scaling of Metal InterconnectsMorris, Christopher J. / Parviz, Babak A. et al. | 2007
- 415
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Multi-Object Conveyance by Peripherally Controlled Micro Actuator/Sensor ArrayAtaka, M. / Mita, M. / Fujita, H. et al. | 2007
- 419
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A Wafer Transfer Technology for Integration of RF MEMS and CMOS on Organic SubstrateZhang, Q. X. / Yu, A. B. / Tang, M. / Li, H. Y. / Yang, R. / Liao, E. B. / Guo, L. H. / Kumar, R. / Liu, A. Q. / Lo, G. Q. et al. | 2007
- 423
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Towards a Fully-Integrated CMOS-Based in VIVO Neural Imaging and Interface DeviceNg, D. C. / Nakagawa, T. / Mizuno, T. / Tokuda, T. / Nunoshita, M. / Tamura, H. / Ishikawa, Y. / Shiosaka, S. / Ohta, J. et al. | 2007
- 427
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An Autonomous Implantable Distraction Nail Controlled by an Inductive Power and Data LinkVan Ham, J. / Reynders-Frederix, P. / Puers, R. et al. | 2007
- 431
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Wearable Line-of-Sight Detection System Utilizing Dye-Sensitized Photovoltaic DevicesShigeoka, T. / Miki, N. et al. | 2007
- 435
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Wearable Sensor System for Human Behavior Recognition (First Report: Basic Architecture and Behavior Prediction Method)Mizuno, H. / Nagai, H. / Sasaki, K. / Hosaka, H. / Sugimoto, C. / Khalil, K. / Tatsuta, S. et al. | 2007
- 439
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Three-Dimensional in VIVO Real Time Imaging by a Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS ScannerPiyawattanametha, W. / Ra, H. / Mandella, M. J. / Liu, J. T. C. / Wong, L. K. / Du, C. B. / Wang, T. D. / Contag, C. H. / Kino, G. S. / Solgaard, O. et al. | 2007
- 443
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Electrostatically Actuated Nonconductive Polymermicroresonators with Amplified Quality Factor in Gaseous and Aqueous EnvironmentSchmid, S. / Senn, P. / Hierold, C. et al. | 2007
- 447
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Built-In Upwards-Bending Electrostatic Actuator Capable of Three-Level-Structural Variable CapacitorKonishi, Hiroshi / Nishiyama, Madoka / Suzuki, Junji / Tezuka, Yasuo / Komai, Atsushi / Suzuki, Yoshihiko / Suzuki, Kenichiro et al. | 2007
- 451
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Novelmicro Transportation Systems Based on Ratchetmechanism and Electrostatic ActuatorsPham, Phuc Hong / Dao, Dzung Viet / Amaya, Satoshi / Kitada, Ryoji / Sugiyama, Susumu et al. | 2007
- 455
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Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic ActuationNielson, G. N. / Olsson, R. H. / Bogart, G. R. / Resnick, P. R. / Spahn, O. B. / Tigges, C. / Grossetete, G. / Barbastathis, G. et al. | 2007
- 461
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A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMSSegueni, K. / Rollier, A.-S. / Le Garrec, L. / Robin, R. / Touati, S. / Kanciurzewski, A. / Buchaillot, L. / Millet, O. et al. | 2007
- 465
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Aqueous Droplets as Single-Molecule Reaction ContainersChiu, Daniel T. et al. | 2007
- 469
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Using Electric Cell-Substrate Impedance Sensing to Measure Changes in the Projected Area of Individual CellsSeriburi, Pahnit / Shastry, Ashutosh / Ren, Tim / Gales, Steven / Bohringer, Karl F. / Meldrum, Deirdre et al. | 2007
- 473
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Assembly of Single Cells Array using Image DielectrophoresisLu, Y. S. / Liang, Y. L. / Huang, Y. P. / Huang, J. Y. / Lee, C. / Yeh, J. Andrew et al. | 2007
- 477
-
Phototransistor-Based Optoelectronic Tweezers for Cell Manipulation in Highly Conductive SolutionHsu, H. Y. / Ohta, A. T. / Chiou, P. Y. / Jamshidi, A. / Wu, M. C. et al. | 2007
- 481
-
MEMS Process Flow Insensitive to Timed ETCH Induced Anchor Perimeter Variation on SOI and Bulk Silicon Wafer SubstratesO'Brien, G. J. / Monk, D. J. et al. | 2007
- 485
-
Wet Release of Multipolymeric Structures with a Nanoscale Release LayerPesantez, Daniel / Gadre, A.P. et al. | 2007
- 489
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Fabrication of Reinforced Nanoporous MembranesHoogerwerf, A.C. / Hinderling, C. / Krishnamoorthy, S. / Hibert, C. / Spassov, V. / Overstolz, T. et al. | 2007
- 493
-
Tapered Deep Reactive Ion Etching: Method and CharacterizationRoxhed, Niclas / Griss, Patrick / Stemme, Goran et al. | 2007
- 497
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In-Situ Isotropic and Anisotropic DRIE Sequence for Massive Parallel Multistage Brownian RatchetsPham, Hoa T.M. / Wei, Jia / de Boer, Charles R. / Sarro, Pasqualina M. et al. | 2007
- 501
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Fast Dry Fabrication Process with Ultra-Thin Atomic Layer Deposited Mask for Released MEMS-Devices with High Electromechanical CouplingKoskenvuori, M. / Chekurov, N. / Airaksinen, V-M. / Tittonen, I. et al. | 2007
- 505
-
Silicon Undercut Characterization in a CMOS-MEMS ProcessLiu, Jingwei / Fedder, Gary K. et al. | 2007
- 509
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Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS ApplicationsFu, X. A. / Trevino, J. / Noh, S. / Zorman, C. A. / Mehregany, M. et al. | 2007
- 513
-
Electrodeposited Metal Structures in High Aspect Ratio Cavities using Vapor Deposited Polymer Molds and Laser MicromachiningHerrault, F. / Ji, C.-H. / Rajaraman, S. / Shafer, R.H. / Allen, M.G. et al. | 2007
- 517
-
Solid Phase Direct Write (SPDW) of Carbon Via Scanning Force MicroscopySpinney, Patrick S. / Collins, Scott D. / Smith, Rosemary L. et al. | 2007
- 521
-
Atomic Layer Deposition of Al2O3, TiO2 and ZnO Films into High Aspect Ratio PoresSirvio, S. / Sainiemi, L. / Franssila, S. / Grigoras, K. et al. | 2007
- 525
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Micropatterning of Streptavidin-Functionalized Magnetic Beads on Glass using Electrostatic Self-AssemblySivagnanam, V. / Sayah, A. / Vandevyver, C. / Gijs, M.A.M. et al. | 2007
- 529
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Qualification and Applications of a Piezoelectric MEMS ProcessPoppe, E. / Ostbo, N. P. / Booij, W. / Tyholdt, F. / Calame, F. / Hok, B. / Jensen, F. / Raeder, H. / Muralt, P. et al. | 2007
- 533
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A High Aspect Ratio, Flexible, Transparent and Low-Cost Parylene-C Shadow Mask Technology for Micropatterning ApplicationsSelvarasah, S. / Chao, S. H. / Chen, C.-L. / Mao, D. / Hopwood, J. / Ryley, S. / Sridhar, S. / Khademhosseini, A. / Busnaina, A. / Dokmeci, M. R. et al. | 2007
- 537
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Photosensitive Poly(Dimethylsiloxane) (Photopdms) for Rapid and Simple Polymer FabricationBhagat, Ali Asgar S. / Jothimuthu, Preetha / Papautsky, Ian et al. | 2007
- 541
-
Thermally Driven Bimorph Nano Actuators Fabricated using Focused Ion Beam Chemical Vapor DepositionChang, Jiyoung / Kim, Jongbaeg / Min, Byung-Kwon / Lin, Liwei et al. | 2007
- 545
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Moving-Mask UV Lithography for 3-Dimensional Positive-And Negative-Tone Thick Photoresist MicrostructuringHirai, Y. / Inamoto, Y. / Sugano, K. / Tsuchiya, T. / Tabata, O. et al. | 2007
- 549
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Cavity-Through Deep Reactive Ion Etching of Directly-Bonded Silicon WafersKang, Piljoong / Tanaka, Shuji / Esashi, Masayoshi et al. | 2007
- 555
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Mechanical Properties of Electrodeposited Permalloy Thin Film Measured by using a Tensile TestLi, Xueping / Ding, Guifu / Wang, Hong / Ando, Taeko / Shikida, Mitsuhiro / Sato, Kazuo et al. | 2007
- 559
-
A New Method for Protection of Anchors in Releasing Microstructure by using XeF2 Etching ProcessFei, Feng / Guangli, Yang / Bin, Xiong / Yuelin, Wang et al. | 2007
- 563
-
Self-Formed High-Aspect-Ratio Polymer Nanopillars by RIEChen, M.-H. / Hsu, T.-H. / Chuang, Y.-J. / Chen, P.-H. / Tseng, F.-G. et al. | 2007
- 567
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Laser Microfabrication of Long Thin Holes on Biodegradable Polymer Under Vacuum and its Application to Collecting BloodIzumi, H. / Isono, Y. / Aoyagi, S. / Ogawa, H. et al. | 2007
- 571
-
Tensile Testing of Single Crystal Silicon Thin Films at 800°C using IR HeatingIkeda, T. / Sugano, K. / Tsuchiya, T. / Tabata, O. et al. | 2007
- 575
-
Comparison of Improved Bulge and Microtensile Techniques for Mechanical Thin Film Characterization - Application to PolysiliconGaspar, J. / Schmidt, M. / Paul, O. et al. | 2007
- 579
-
Si3N4 thin films proprerties for RF-mems reliabilityLamhamdi, M. / Boudou, L. / Pons, P. / Guastavino, J. / Belarni, A. / Dilhan, M. / Segui, Y. / Plana, R. et al. | 2007
- 579
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Si3N4 Thin Films Proprerties for RF-MEMS Reliability InvestigationLamhamdi, M. / Boudou, L. / Pons, P. / Guastavino, J. / Belarni, A. / Dilhan, M. / Segui, Y. / Plana, R. et al. | 2007
- 583
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Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing ApplicationsRavat, C. / Woytasik, M. / Joubert, P.-Y. / Le Bihan, Y. / Marchand, C. / Dufour-Gergam, E. / Moulin, J. / Martincic, E. et al. | 2007
- 587
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Highly Flexible SU-8 MicrostructuresSpratley, J. P. F. / Ward, M. C. L. / Hall, P. S. et al. | 2007
- 591
-
Modification of Sensing Properties of Thin Polymer Films by VUV IrradiationSarantopoulou, E. / Kollia, Z. / Manoli, K. / Sanopoulou, M. / Goustouridis, D. / Chatzandroulis, S. / Raptis, I. et al. | 2007
- 595
-
Highly Oriented ZnO Thin Films Obtained with Low Temperature Annealing of Sol-Gel CoatingsSantos, Andrelina M. P. / Santos, Edval J. P. et al. | 2007
- 599
-
Contact Angle Hysteresis Characterization of Textured Super-Hydrophobic SurfacesShastry, Ashutosh / Abbasi, Shaghayegh / Epilepsia, Aziel / Bohringer, Karl F. et al. | 2007
- 603
-
Temperature Dependent Mechanical Properties of Doped Silicon MicrocantileversLee, J. / Goericke, F. T. / King, W. P. et al. | 2007
- 607
-
Thermal Calibration of Heated Silicon Atomic Force Microscope CantileversNelson, Brent A. / King, William P. et al. | 2007
- 611
-
Soft-Landing and Bounce-Back Actuation for Active Stiction ControlWang, Yuyan / Talghader, Joseph J. et al. | 2007
- 615
-
Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test StructuresRoncaglia, A. / Cozzani, E. / Mancarella, F. / Passini, M. / Cardinali, G. C. / Severi, M. et al. | 2007
- 619
-
Low Complexity Testing Micromachines Revealing Size-Dependent Mechanical Properties of Thin Al FilmsRaskin, J.-P. / Fabregue, D. / Andre, N. / Coulombier, M. / Pardoen, T. et al. | 2007
- 623
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Realization of Thin Film Specimens for Micro Tensile TestsMalhaire, Christophe / Ignat, Michel / Dogheche, Karim / Brida, Sebastiano / Josserond, Charles / Debove, Laurent et al. | 2007
- 627
-
In-Situ Raman Spectroscopic Surface Stress Measurement of Single Crystal Silicon Microstructures Subjected to Uniaxial Tensile LoadingNamazu, T. / Nagai, Y. / Naka, N. / Kashiwagi, S. / Ohtsuki, K. / Inoue, S. et al. | 2007
- 631
-
Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with Chameleon ActuatorsNishiyama, Madoka / Konishi, Hiroshi / Suzuki, Junji / Tezuka, Yasuo / Suzuki, Yoshihiko / Suzuki, Kenichiro et al. | 2007
- 635
-
Non Linear Compact Modeling of RE-MEMS Switches by Means of Model Order ReductionDel Tin, L. / Iannacci, J. / Gaddi, R. / Gnudi, A. / Rudny, E. B. / Greiner, A. / Korvink, J. G. et al. | 2007
- 639
-
Characterization of CMOS Compatible RF MEMS Switch at Cryogenic TemperaturesRantakari, P. / Vaha-Heikkila, T. et al. | 2007
- 643
-
Quality Factor and Resonance Frequency Shift Due to Air in RF MEMS Radial Disk ResonatorsVeijola, Timo et al. | 2007
- 647
-
A Plastic W-Band MEMS Phase ShifterSammoura, Firas / Lin, Liwei et al. | 2007
- 651
-
Modeling and Measurement of the Dynamic Performance of an OHMIC Contact-Type RF MEMS SwitchGuo, Z. J. / McGruer, N. E. / Adams, G. G. et al. | 2007
- 655
-
Circular Plate Electrostatic Zipping Actuator for the Application of a Tunable Electromagnetic Cavity ResonatorYang, X. / Lang, J. H. / Slocum, A. H. et al. | 2007
- 659
-
Metal-Transfer-Micromolding of Air-Lifted RF ComponentsZhao, Yanzhu / Yoon, Yong-Kyu / Wu, Xiaosong / Allen, Mark G et al. | 2007
- 663
-
Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity MeasurementKim, Jung-Mu / Kim, Namgon / Park, Jae-Hyoung / Cheon, Changyul / Kwon, Youngwoo / Kim, Yong-Kweon et al. | 2007
- 667
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Thermal Driven Metastructural Reconfigurable Millimeter Wave AntennaSakiyama, K. / Kanno, I. / Suzuki, T. / Murayama, T. / Hiramaru, D. / Kotera, H. et al. | 2007
- 671
-
Design and Fabrication of a Laterally Driven Bistable Electromagnetic MicrorelayHwang, S. J. / Lee, M. G. / Jung, P. G. / Kim, J. H. / Oh, D. J. / Go, J. S. / Shin, B. / Ko, J. S. et al. | 2007
- 675
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Highly-Mobile 2D Micro Impact Actuator for Space ApplicationsMita, Makoto / Takahashi, Kazuhiro / Ataka, Manabu / Fujita, Hiroyuki / Toshiyoshi, Hiroshi et al. | 2007
- 679
-
A Low-Loss Single-Pole-Double-Throw (SPDT) Switch CircuitTang, M. / Liu, A. Q. / Agarwa, A. et al. | 2007
- 683
-
Controlled Bio-Carriers Based on Magnetotactic BacteriaLu, Z. / Martel, S. et al. | 2007
- 687
-
High Throughput Cell Electroporation Array Fabricated by Single-Mask Inclined UV Lithography Exposure and Oxygen Plasma EtchingSuzuki, Takaaki / Yamamoto, Hideo / Ohoka, Masataka / Okonogi, Atsuhito / Kabata, Hiroyuki / Kanno, Isaku / Washizu, Masao / Kotera, Hidetoshi et al. | 2007
- 691
-
A Tailored-Contour Aperture for Cellular ElectrophysiologyChen, Chang-Yu / Liu, Kuan-Ting / Wo, Andrew M. / Jong, De-Shien et al. | 2007
- 695
-
Electrical Detection and Ejection of Beads in a One-Cell-Per-Drop MicrodispenserTornay, Raphael / Chapuis, Violaine / Haguet, Vincent / Chatelain, Francois / Renaud, Philippe et al. | 2007
- 699
-
Label-Free, Microfluidic Separation of Human Breast Carcinoma and Epithelial Cells by Adhesion DifferenceKwon, Keon Woo / Lee, Sang Ho / Kim, Byungkyu / Park, Min Cheol / Kim, Pilnam / Suh, Kahp Y. et al. | 2007
- 703
-
A Microfluidic Platform with Microacoustics and Dielectrophoresis for High Throughput Analyses of Spatiotemporal Signaling in Biological CellsRavula, Surendra K. / Lidke, Diane S. / Oliver, Janet M. / Branch, Darren W. / Kaduchak, Gregory / James, Conrad D. / Brener, Igal et al. | 2007
- 707
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Meniscus-Assisted Magnetic Bead Trapping on Ewod-Based Digital Microfluidics for Specific Protein LocalizationShah, Gaurav J. / Pierstorff, Erik / Ho, Dean / Kim, Chang-Jin et al. | 2007
- 711
-
In-Droplet Magnetic Beads Concentration and Separation for Digital MicrofluidicsWang, Yi Zhong / Zhao, Yuejun / Cho, Sung Kwon et al. | 2007
- 715
-
Diamagnetic Levitation of Beads and Cells Above Permanent MagnetsChetouani, H. / Haguet, V. / Jeandey, C. / Pigot, C. / Walther, A. / Dempsey, N. M. / Chatelain, F. / Delinchant, B. / Reyne, G. et al. | 2007
- 719
-
Fabrication and Mechanical Characterization of Microneedle Array for Cell SurgeryShibata, T. / Nakanishi, A. / Sakai, T. / Kato, N. / Kawashima, T. / Mineta, T. / Makino, E. et al. | 2007
- 723
-
Electrostatic Stretching of Hyaluronic Acid Molecule and Cutting with AFM ProbeKanezawa, M. / Mineta, T. / Makino, E. / Sugawara, T. / Toh, S. et al. | 2007
- 727
-
Microsystem for Single-Cell MetabolomicsGoedecke, N. / Toelke, R. / Heer, F. / Hierlemann, A. et al. | 2007
- 731
-
A Novel Device for Fixing Small Objects using Through-Pore Porous SiliconKato, Atsuko / Uchiumi, Atsushi / Hayase, Masanori et al. | 2007
- 735
-
Automated Fluidic System with a Chaotic Microfluidic Reaction Chamber for Rapid, Multi-Analyte ImmunosensingKai, Junhai / Zou, Zhiwei / Han, Jungyoup / Lee, Soo-Hyun / Hong, Bin / Ren, Yongjie / Kang, Kyung A. / Ahn, Chong H. et al. | 2007
- 739
-
Temperature and Trapping Characterization of an Acoustic Lateral Trap for μ TASJohansson, Linda / Evander, Mikael / Lilliehorn, Tobias / Almqvist, Monica / Nilsson, Johan / Laurell, Thomas / Johansson, Stefan et al. | 2007
- 743
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A Piezoelectrically-Actuated Valve for Modulation of Liquid at High Flow Rate Under High PressureRajgopal, Srihari / Knobloch, Aaron / Kennerly, Stacey / Mehregany, Mehran et al. | 2007
- 747
-
Liquid Handling in a Microfluidic Chip by Micro-AspirationLe Berre, M. / Crozatier, C. / Casquillas, G. Velve / Chen, Y. et al. | 2007
- 751
-
Non-Contact Detection of Free Flying Nanoliter DropletsErnst, A. / Streule, W. / Zengerle, R. / Koltay, P. et al. | 2007
- 755
-
Predictable Three-Dimensional Microfluidic Channel Fabrication in a Single-Mask ProcessGantz, Kevin / Agah, Masoud et al. | 2007
- 759
-
A Simple Opto-Fluidic Switch Detecting Liquid Filling in Polymer-Based Microfluidic SystemsBundgaard, F. / Geschke, O. / Zengerle, R. / Ducree, J. et al. | 2007
- 763
-
Microfluidic ATP-Bioluminesecence Sensor for Detection of Airborne MicrobeLee, Seung Jae / Park, Jae Sung / Im, Hee Taek / Jung, Hyo-Il et al. | 2007
- 767
-
A Perfusion-Based Micro 3-D Cell Culture PlatformHuang, S. B. / Wu, M. H. / Cui, Z. F. / Cui, Z. / Lin, J. L. / Lee, G. B. et al. | 2007
- 771
-
A 128-Pixel Digitally-Programmable Microfluidic Platform for Non-Contact Droplet Actuation using Marangoni FlowsBasu, Amar S. / Gianchandani, Yogesh B. et al. | 2007
- 775
-
An Electrical Particle Velocity Profiler for In-Channel Clogging Detection and Flow Pattern CharacterizationKim, Tae Yoon / Cho, Young-Ho et al. | 2007
- 779
-
Plug Dispersion Compensation in Moving Field Cappilary Electrophoresys ApplicationsTatar, F. / Zhang, L. / Bastemeijer, J. / Mollinger, J. / Bossche, A. et al. | 2007
- 782
-
Temperature and trapping characterization of an acoustic lateral trap for mu TASJohansson, L. / Evander, M. / Lilliehorn, T. / Almqvist, M. / Nilsson, J. / Laurell, T. / Johansson, S. et al. | 2007
- 783
-
A Microfluidic System for Automatic Cell CultureHuang, C. W. / Huang, S. B. / Lee, G. B. et al. | 2007
- 787
-
Monolithic 3-D Microfluidic Device for Cell Assay with an Integrated Combinatorial MixerLiu, Mike C. / Ho, Dean / Tai, Yu-Chong et al. | 2007
- 791
-
Silicon NANO-ESI Emitters for Mass Spectrometry: A Mixed Micromechanical and Microfluidic DesignLegrand, B. / Buchaillot, L. / Ashcroft, A. E. / Arscott, S. et al. | 2007
- 795
-
Development of a Cellular Biochip Mimicking in Vitro Organs for Chronic Toxicity AnalysisBaudoin, Regis / Griscom, Laurent / Corlu, Anne / Layrolle, Pierre / Legallais, Cecile / Leclerc, Eric et al. | 2007
- 799
-
High Throughput Cytotoxicity Screening using Photonic Crystal BiosensorsChan, Leo L. / Gosangari, Saujanya L. / Watkin, Kenneth L. / Cunningham, Brian T. et al. | 2007
- 803
-
Probing the Adhesion and Viability of Individual Cells with Field-Effect TransistorsIngebrandt, S. / Wrobel, G. / Eick, S. / Schafer, S. / Offenhausser, A. et al. | 2007
- 807
-
Fluorescent Labeling, Sensing and Differentiation of Leukocytes from Undiluted Whole Blood SamplesZheng, Siyang / Lin, Jeffrey Chun-Hui / Kasdan, Harvey L. / Tai, Yu-Chong et al. | 2007
- 811
-
A Multi-Channel SPR Biomolecule Detection System using an Integrated PDMS Nano-Scale Grating ChipJin, Young-Hyun / Cho, Young-Ho et al. | 2007
- 815
-
An Investigation on a Vibration-Based Active Protein Desorption Mechanism for Implantable MEMS-Based Biosensor ApplicationsYeh, Po-Ying / Chiao, Mu / Kizhakkedathu, Jayachandran N. et al. | 2007
- 819
-
Fabrication and Packaging of Nanoporous Membrane Chips for Label-Free Ion-Channel Transducer Based BiosensorAgache, V. / Sauter, F. / Pudda, C. / Blanc, R. / Chabrol, C. / Caillat, P. / Plenat, T. / Agasoster, A. Varnier / Ghenim, L. / Fuchs, A. et al. | 2007
- 823
-
Piezoelectric Micromembranes for the Fabrication of a Diagnostic Chip Based on the Real-Time Monitoring of Antigen-Antibody InteractionsAyela, C. / Nicu, L. et al. | 2007
- 827
-
Electrochemical Impedance Spectroscopy of the Cardiomyocyte Adhesion to Extracellular Matrix on Micro-Fabricated BiosensorsQiu, Yiling / Liao, Ronglih / Zhang, Xin et al. | 2007
- 831
-
Biomolecular Sensing using Surface Micromachined Silicon PlatesZapata, A. M. / Carlen, E. T. / Kim, E. S. / Hsiao, J. / Traviglia, D. / Weinberg, M. S. et al. | 2007
- 835
-
A Delta-Sigma Approach for Ion Channel Based Biosensor ArraysBennati, M. / Lodesani, F. / Crescentini, M. / Mariani, A. / Tartagni, M. et al. | 2007
- 839
-
A Bio-Thermochemical Microbolometer with Immobilized Intact Liposome on Sensor Solid SurfaceNoda, M. / Shimanouchi, T. / Okuyama, M. / Kuboi, R. et al. | 2007
- 843
-
Cell-Based Microfluidic Biochip for Electrochemical Real-Time Monitoring of Glucose and OxygenRodrigues, N. Pereira / Kimura, H. / Sakai, Y. / Fujii, T. et al. | 2007
- 847
-
Optimization of Gene Transfection Condition using Taguchi Method for an Electroporation MicrochipHuang, Keng-Shiang / Yang, Sheng-Chung / Chen, Hung-Yi / Lin, Yu-Cheng et al. | 2007
- 851
-
Single Living Cell Refractometry using FBG-Based Resonant CavityChin, L. K. / Lim, C. S. / Yap, P. H. / Ng, J. H. / Hao, J. Z. / Takahashi, S. / Liu, A. Q. et al. | 2007
- 855
-
High Performance Blood Glucose Sensor using Charge Transfer TechniqueLee, Seung-Ro / Hizawa, Takeshi / Sawada, Kazuaki / Takao, Hidekuni / Ishida, Makoto et al. | 2007
- 859
-
Application of Vertical Micororeactor Stack with Polystylene Microbeads to Immuno AssayUkita, Yoshiaki / Negoro, Seiji / Utsumil, Yuichi et al. | 2007
- 863
-
Electromechanical Modeling of Micro Electret Generator for Energy HarvestingTsutsumino, Takumi / Suzuki, Yuji / Kasagi, Nobuhide et al. | 2007
- 867
-
Design, Simulation, and Fabrication of a Novel Vibration-Based Magnetic Energy Harvesting DeviceChung, Tien-Kan / Lee, Dong-Gun / Ujihara, Motoki / Carman, Gregory P. et al. | 2007
- 871
-
Novel Micro Vibration Energy Harvesting Device using Frequency Up ConversionLee, D.-G. / Carman, G. P. / Murphy, D. / Schulenburg, C. et al. | 2007
- 875
-
A Low Cost Generator Concept for Energy Harvesting ApplicationsWischke, M. / Goldschmidtboeing, F. / Woias, P. et al. | 2007
- 879
-
Fabrication and Test of Integrated Micro-Scale Vibration Based Electromagnetic GeneratorKulkarni, Santosh / Koukharenko, Elena / Tudor, John / Beeby, Steve / O'Donnell, Terence / Roy, Saibal et al. | 2007
- 883
-
Autonomous, Low Voltage, High Efficiency, CMOS Rectifier for Three-Phase Micro GeneratorsRaisigel, H. / Crebier, J.-C. / Lembeye, Y. / Delamare, J. / Cugat, O. et al. | 2007
- 887
-
Integrated Power Harvesting System Including a MEMS Generator and a Power Management CircuitMarzencki, M. / Ammar, Y. / Basrour, S. et al. | 2007
- 891
-
Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and MeasurementsRenaud, M. / Sterken, T. / Schmitz, A. / Fiorini, P. / Van Hoof, C. / Puers, R. et al. | 2007
- 895
-
Innovative Structure for Mechanical Energy ScavengingDespesse, G. / Chaillout, J.J. / Jager, T. / Cardot, F. / Hoogerwerf, A. et al. | 2007
- 899
-
Ultraminiaturized Milliwatt-Scale Permanent Magnet GeneratorsHerrault, F. / Ji, C.-H. / Shafer, R.H. / Kim, S.-H. / Allen, M.G. et al. | 2007
- 903
-
Bio-Actuated Power Generator using Heart Muscle Cells on a PDMS MembraneIshisaka, T. / Sato, H. / Akiyama, Y. / Furukawa, Y. / Morishima, K. et al. | 2007
- 907
-
A Novel RF Induced DC Power Supply System for Integrated Ubiquitous Micro Sensor DevicesSudou, Minoru / Takao, Hidekuni / Sawada, Kazuaki / Ishida, Makoto et al. | 2007
- 911
-
Micromachined Thermopiles for Energy Scavenging on Human BodyWang, Z. / Leonov, V. / Fiorini, P. / Van Hoof, C. et al. | 2007
- 915
-
Performance and Design Issues of a Silicon Microfabricated Fuel CellTorres, N. / Esquivel, J. P. / Sabate, N. / Santander, J. / Cane, C. et al. | 2007
- 919
-
Nanoimprint Fuel Cell for On-Chip Power ApplicationZhang, Y. / Lu, J. / Zhou, H. S. / Maeda, R. et al. | 2007
- 923
-
Monolithically Integrated Planar Micro Fuel Cell ArraysXiao, Zhiyong / Feng, Chunhua / Chan, Philip C. H. / Hsing, I-Ming et al. | 2007
- 927
-
Microfludic Centrifuge of Nano Particles using Rotating Flow in a MicrochamberHa, J. B. / Bahk, Y. K. / Yoon, S. H. / Lee, J. H. / Jeong, E. H. / Yoon, S. Y. / Arakawa, T. / Ko, J. S. / Shin, B. S. / Kim, K. C. et al. | 2007
- 931
-
On Chip Synthesis Approach for Biochips -From GemkeyTM DNA Chip to Future Glyco ChipYamasaki, S. / Hara, Y. / Sasaki, K. / Obara, D. / Gosho, Y. / Ishikawa, N. / Akiyama, J. / Horiguchi, Y. / Kuroiwa, T. / Escude, M. et al. | 2007
- 935
-
Novel Optoelectronic Platform using an Amorphous/Nanocrystalline Silicon Biosensor for the Specific Identification of Unamplified Nucleic Acid Sequences Based on Gold Nanoparticle ProbesSilva, L. B. / Baptista, P. / Raniero, L. / Doria, G. / Franco, R. / Martins, R. / Fortunato, E. et al. | 2007
- 939
-
High-Throughput Single-Cell Electroporation Microchip with Three Dimensional Si Microelectrodes for Gene TransfectionCho, Y. H. / Lee, S. W. / Le Pioufle, B. / Takama, N. / Takeuchi, S. / Fujii, T. / Kim, B. J. et al. | 2007
- 943
-
Integrated Microfluidic Chip for Fast Diagnosis of Piscine NodavirusLee, S.H. / Ou, M.C. / Chen, T.Y. / Lee, G.B. et al. | 2007
- 947
-
Label-Free CMOS DNA Quantification with On-Chip Noise Reduction SchemesKim, Seong-Jin / Shenoi, Mithun / Yoo, Kyutae / Shim, Jeoyoung / Chung, Wonseok / Ko, Christopher / Kim, Lee-Sup / Yoon, Euisik et al. | 2007
- 951
-
Biosensor for the Detection of Specific DNA Sequences by Impedance SpectroscopyBerdat, Daniel / Sauvage, V. / Bernau, L. / Killis, D. / Gijs, M.A.M. et al. | 2007
- 955
-
A Robust Fluorescence Multiplex Immunoassay Biosensor Designed for Field ApplicationsSchultz, E. / Perraut, F. / Flahaut, T. / Planat-Chretien, A. / Galland, R. / Lesbre, F. / Hoang, A. / Boutal, H. / Volland, H. et al. | 2007
- 959
-
On-Chip Control of DNA Immobilization and Hybridization with Nanosecond Electric Field PulsesCabeca, R. / Prazeres, D.M.F. / Chu, V. / Conde, J.P. et al. | 2007
- 963
-
Novel Bacterial DNA Sample Preparation Method from Whole Blood using Surface-Modified Silicon MicrostructuresHwang, Kyu-Youn / Kim, Joon-Ho / Jung, Seong-Young / Han, Jung-Im / Huh, Nam / Ko, Christopher et al. | 2007
- 964
-
Monolithically integrated planar micro fuel cellXiao, Zhiyong / Feng, Chunhua / Chan, P.C.H. / Hsing, I-Ming et al. | 2007
- 967
-
Fabrication of Replicated DNA Microarray using Polyacrylamide GelLim, G.S. / Yun, K.S. / Shim, B.C. / Cho, S.M. / Hong, H.K. et al. | 2007
- 971
-
Microfabricated Electrochemical Sensor for Chemical Warfare Agents: Smaller is BetterOh, Ilwhan / Monty, Chelsea / Shannon, Mark A. / Masel, Rich I. et al. | 2007
- 975
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Nasicon-Based Planar-Type CO2 Sensor Attached with Solid Reference Electrode Stable Under High Humid ConditionsKida, T. / Kishi, S. / Yuasa, M. / Shimanoe, K. / Yamazoe, N. et al. | 2007
- 979
-
Solid State Gas Sensor for Fast Carbon Dioxide DetectionHerran, J. / Mandayo, G. G / Castano, E. et al. | 2007
- 983
-
Planar, Impedance-Metric NOX Sensor with NiO Sensing Electrode for High Temperature ApplicationsStranzenbach, M. / Saruhan, B. et al. | 2007
- 987
-
Density Functional Theory Study of ZnO Nanostructures for NO and NO2 SensingSpencer, M.J.S. / Yarovsky, I. / Wlodarski, W. / Kalantar-zadeh, K. et al. | 2007
- 991
-
Selective Gas Sensor System for CO and H2 Distinction at High Temperatures Based on a Langasite Resonator ArrayRichter, D. / Schneider, T. / Doerner, S. / Fritze, H. / Hauptmann, P. et al. | 2007
- 995
-
A Simple Optical Gas Sensor Based on Micromachined Silicon Plasma Igniters and Image ProcessingPhommahaxay, Alain / Lissorgues, Gaelle / Rousseau, Lionel / Perrais, Vincent / Francais, Olivier / Bourouina, Tarik / Nicole, Pierre et al. | 2007
- 999
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Four-Cantilever Trace Explosive Sensors with Dual SAMs Functionalized for Specific-Sensing Improvement and Nonspecific-Adsorption DepressionLi, Xinxin / Zuo, Guomin / Li, Peng / Zhang, Zhixiang / Wang, Yuelin / Cheng, Zhenxing / Liu, Min et al. | 2007
- 1003
-
Work Place Monitoring using a High Sensitive Surface Acoustic Wave Based Sensor SystemBarie, N. / Skrypnik, A. / Voigt, A. / Rapp, M. / Marcoll, J. et al. | 2007
- 1007
-
In-Situ Soil Gas Analysis with a Robust Sawsensor System Integrated in Percussion Driven Penetration ConesSkrypnik, Aleksandr / Voigt, Achim / Rapp, Michael et al. | 2007
- 1011
-
Towards an All Polymeric Electronic Nose: Device Fabrication and Characterization, Electronic Control, Data AnalysisDe Girolamo Del Mauro, A. / Burrasca, G. / De Vito, S. / Massera, E. / Loffredo, F. / Quercia, L. / Di Francia, G. / Sala, D. Della et al. | 2007
- 1015
-
Single Carbon Nanotube Pirani Gauge By Local SynthesisKawano, T. / Suter, M. / Cho, C. Y. / Chiamori, H. / Lin, L. et al. | 2007
- 1019
-
Fabrication and Evaluation of Carbon Nanotube-Parylene Functional Composite-FilmsChen, C.-L. / Lopez, E. / Makaram, P. / Selvarasah, S. / Busnaina, A. / Jung, Y.-J. / Muftu, S. / Dokmeci, M.R. et al. | 2007
- 1023
-
A Three Dimensional Thermal Sensor Based on Single-Walled Carbon NanotubesSelvarasah, S. / Chen, C.-L. / Chao, S.-H. / Makaram, P. / Busnaina, A. / Dokmeci, M. R. et al. | 2007
- 1027
-
Chemical Sensitivity of Porphyrin NanotubesMartinelli, E. / Dini, F. / Iannaccone, I. / Monti, D. / Pomarico, G. / Generosi, R. / Luce, M. / D'Amico, A. / Paolesse, R. / Di Natale, C. et al. | 2007
- 1031
-
Site Controlled Nanotube Shell Etching for Interlayer Motion Based NEMSSubramanian, A. / Choi, T.-Y. / Dong, L. X. / Shou, K. Y. / Tharian, J. / Sennhauser, U. / Poulikakos, D. / Nelson, B. J. et al. | 2007
- 1035
-
Multi-Walled Carbon Nanotube Networks As Gas Sensors for NO2 DetectionSayago, I. / Santos, H. / Horrillo, M.C. / Aleixandre, M. / Fernandez, M.J. / Terrado, E. / Maser, W.K. / Benito, A.M. / Martinez, M.T. / Gutierrez, J. et al. | 2007
- 1039
-
New TiO2 and Carbon Nanotube Hybrid Microsensors for Detecting Traces of O2 in Beverage Grade CO2Sotter, E. / Llobet, E. / Espinosa, E. H. / Ionescu, R. / Vilanova, X. / Bittencourt, C. / Felten, A. / Pireaux, J. J. / Correig, X. et al. | 2007
- 1043
-
Nanotube Micro-Opto-Mechanical Systems (N-MOMS)Lu, S. / Shao, N. / Liu, Y. / Panchapakesan, B. et al. | 2007
- 1047
-
Electrical and Electromechanical Characteristics of Nanoassembled Carbon Nanotube Thin Film Resistors on Flexible SubstratesXue, Wei / Cui, Tianhong et al. | 2007
- 1051
-
Silicon Nanowire Array Bio-Sensor using Top-Down CMOS TechnologyAgarwal, Ajay / Lao, I. K / Buddharaju, K. / Singh, N. / Balasubramanian, N. / Kwong, D. L. et al. | 2007
- 1055
-
Using Dried Rhodamine B Fluorescence for Temperature Characterization of Sub-Micron Scale DevicesLow, Peter / Takama, Nobuyuki / Kim, Beomjoon / Bergaud, Christian et al. | 2007
- 1059
-
Development of Micro-Fluidic Nitrate-Selective Sensor Based on Polypyrrole NanowiresAravamudhan, Shyam / Bhansali, Shekhar et al. | 2007
- 1063
-
Dielectrophoretic Characterization of SnO2 NanobeltsKumar, Surajit / Shin, Heungjoo / Peng, Zhengchun / Carson, Cantwell G. / Wang, Zhong Lin / Gerhardt, Rosario A. / Hesketh, Peter J. et al. | 2007
- 1067
-
Fabrication of an Ion Source using Carbon Nanoparticle Field Emitters for a Micro Time-of-Flight Mass SpectrometerYoon, H. J. / Song, S. H. / Cho, J. B. / Jung, K. W. / Lee, S. / Koh, K. H. / Yang, S. S. et al. | 2007
- 1071
-
Electro-Mechanical Measurement of Nano Wires -Evaluation of Lambda DNA Wire Coated with Palladium Nano ParticlesHosogi, M. / Hashiguchi, G. / Ayano, K. / Takahashi, H. / Haga, M. / Yonezawa, T. / Fujita, H. et al. | 2007
- 1075
-
A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/LensWu, L. / Xie, H. et al. | 2007
- 1079
-
Polymer Microoptoelectromechanical Systems: Variable Optical Attenuators and AccelerometersLlobera, A. / Villanueva, G. / Cadarso, V. J. / Seidemann, V. / Buttgenbach, S. / Plaza, J. A. et al. | 2007
- 1083
-
Novel Monocrystalline Silicon Micromirrors for Maskless LithographyBring, M. / Enoksson, P. et al. | 2007
- 1087
-
A PDMS-on-Silicon Deformable Grating for Spectral Differentiation of Mixed Wavelength SignalsTruxal, S. C. / Tung, Y.-C. / Kurabayashi, K. et al. | 2007
- 1091
-
Microlens Array Film with Full Fill Factor for Enhancing Outcoupling Efficiency from OLED LightingKwon, Hyouk / Yee, Youngjoo / Jeong, Chi-Hwan / Nam, Hyo-Jin / Park, Ki-Won / Lee, Gun-Woo / Bu, Jong-Uk et al. | 2007
- 1095
-
Chitosan-Mediated BioMEMS Platform for Optical SensingBadilita, V. / Shamim, I. / Yi, H. / Koev, S.T. / Gerasopoulos, K. / Ghodssi, R. et al. | 2007
- 1099
-
Micromachined Oblique Incidence Refleciometry (OIR) Probe for Skin Cancer DetectionGarcia-Uribe, A. / Hong, J.-M. / Zou, J. / Wang, L. V. et al. | 2007
- 1103
-
Flip Chipped INGaAs Photodiode Arrays for Gated Imaging with Eye-Safe LasersBentell, J. / Nies, P. / Cloots, J. / Vermeiren, J. / Grietens, B. / David, O. / Shurkun, A. / Schneider, R. et al. | 2007
- 1107
-
A Light-Addressable Potentiometric Sensor System for Fast, Simultaneous and Spatial Detection of the Metabolic Activity of Biological CellsWagner, T. / Molina, R. / Biselli, M. / Canzoneri, M. / Schnitzler, T. / Yoshinobu, T. / Schoning, M.J. et al. | 2007
- 1111
-
A Dual Layer Scintillation Microdevice for Gamma and Beta Particle Energy SpectroscopyPellegrin, Scott / Olivier, John / Wilson, Chester G. et al. | 2007
- 1115
-
Quantitative Chemical Analysis using DVDs and Conventional Computer Optical Disk DrivesPotyrailo, R. A. / Morris, W. G. / Leach, A. M. / Sivavec, T. M. / Hassib, L. / Krishnan, K. / Surman, C. / Wroczynski, R. / Boyette, S. / Xiao, C. et al. | 2007
- 1119
-
A MEMS Based Optical Moire Approach for in Situ Cardiac Myocyte Force ProbingZheng, Xiaoyu / Zhang, Xin et al. | 2007
- 1123
-
A Rotary Micromotor Supported on Microball BearingsGhalichechian, N. / Modafe, A. / Beyaz, M.I. / Ghodssi, R. et al. | 2007
- 1127
-
Micro Mass Flow Controller for a Mini-HCCI-Motor Driven Power GeneratorSchiffer, M. / Stefanini, C. / Tunestal, P. / Obermeier, E. et al. | 2007
- 1131
-
MEMS Rotary Actuator using an Integrated Ball Bearing and Air TurbineWaits, C.M. / Jankowski, N.R. / Geil, B. / Ghodssi, R. et al. | 2007
- 1135
-
Homopolar Micromotor with Liquid Metal RotorMaleki, Teimour / Ziaie, Babak et al. | 2007
- 1139
-
Design and Fabrication of an Electrostatic Micromotor with a Low Operating VoltageBasha, Mohamed A. / Safavi-Naeini, Safieddin / Chaudhuri, Sujeet K. et al. | 2007
- 1143
-
Differential Electrode Design for Electrostatic Actuator in Conducting MediaMukundan, Vikram / Pruitt, Beth et al. | 2007
- 1147
-
Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion SystemTakagi, S. / Sasaki, H. / Shikida, M. / Sato, K. et al. | 2007
- 1151
-
A DC-Powered High-Voltage Generator using a Bulk Pt-Rh Oscillating Micro-RelayUdeshi, Kabir / Gianchandani, Yogesh B. et al. | 2007
- 1155
-
Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving VoltageMita, Makoto / Ataka, Manabu / Ishida, Tadashi / Fujita, Hiroyuki / Toshiyoshi, Hiroshi et al. | 2007
- 1159
-
Microswitch with Mixed Piezoelectric and Electrostatic ActuationChapuis, F. / Defay, E. / Casset, F. / Manceau, J.F. / Bastien, F. / Aid, M. et al. | 2007
- 1163
-
Stability Improvement of Surface Acoustic Wave Motor using Chemically Reduced Lithium NiobateShigematsu, Takashi / Kurosawa, Minoru Kuribayashi et al. | 2007
- 1167
-
Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable ElectronicsOh, Chang-Hoon / Kim, Seong-Hyok / Choi, Jung-Hoon / Nam, Hyo-Jjin / Bu, Jong-Uk et al. | 2007
- 1171
-
Post-Processing Micromachined Pull-In AccelerometerPakula, L.S. / French, P.J. et al. | 2007
- 1175
-
In-Situ Pressure Measurements of Encapsulted GyroscopesSimon, I. / Billat, S. / Link, T. / Nommensen, P. / Auber, J. / Manoli, Y. et al. | 2007
- 1179
-
Low-Power, Continuous-Time Sigma-Delta Interface for Micromachined Gyroscopes Employing a Sub-Nyquist-Sampling TechniqueDienger, M. / Buhmann, A. / Northemann, T. / Link, T. / Manoli, Y. et al. | 2007
- 1183
-
Investigation on the Pressure-Dependent Performance of a Surface Micromachined GyroscopeKulygin, A. / Schmid, U. / Seidel, H. et al. | 2007
- 1187
-
Impact of Si DRIE on Vibratory MEMS Gyroscope PerformanceMerz, P. / Pilz, W. / Senger, F. / Reimer, K. / Grouchko, M. / Pandhumsoporn, T. / Bosch, W. / Cofer, A. / Lassig, S. et al. | 2007
- 1191
-
Sub-μg Ultra-Low-Noise MEMS Accelerometers Based on CMOS-Compatible Piezoelectric AlN Thin FilmsGerfers, F. / Kohlstadt, M. / Bar, H. / He, M.-Y. / Manoli, Y. / Wang, L.-P. et al. | 2007
- 1195
-
In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection SystemKrishnamoorthy, U. / Carr, D.W. / Bogart, G.R. / Baker, M.S. / Olsson, R.H. et al. | 2007
- 1199
-
Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense ModeSchofield, Adam R. / Trusov, Alexander A. / Acar, Cenk / Shkel, Andrei M. et al. | 2007
- 1203
-
Diamagnetically Levitated MEMS AccelerometersGarmire, D. / Choo, H. / Kant, R. / Govindjee, S. / Sequin, C. H. / Muller, R. S. / Demmel, J. et al. | 2007
- 1207
-
Vibrating Beam Accelerometer with Hard Suspension BeamsMaenaka, Kazusuke / Miki, Yoshihiko / Okada, Hiroki / Fujita, Takayuki et al. | 2007
- 1211
-
A Fully Integrated MEMS-Based Convective 3-DOF GyroscopeDao, Dzung Viet / Van Thanh Dau, / Dinh, Thien Xuan / Sugiyama, Susumu et al. | 2007
- 1215
-
A Novel Two-Dimensional Micromachined Accelerometer Based on Thermocapillary Heat TransferLiao, Ke-Min / Chen, Rongshun et al. | 2007
- 1219
-
Surface Micromachinable Accelerometer using Fringe Electrical Field of Penetrating Ferroelectric Substrate and its CharacterizationIsono, Y. / Aoyagi, S. et al. | 2007
- 1223
-
Bio-Microelectronic Information Processing Device Consisting of Natural Neurons on a CMOS MicrosystemHafizovic, S. / Heer, F. / Frey, U. / Ugniwenko, T. / Blau, A. / Ziegler, C. / Hierlemann, A. et al. | 2007
- 1227
-
Evaluation of SIROF Microelectrodes for Single Neuron Stimulation in Biohybrid Circuitsvan Ooyen, A. / Wessling, B. / Slavcheva, E. / Schnakenberg, U. et al. | 2007
- 1231
-
A Novel Method of Fabricating Convoluted Shaped Electrode Arrays for Neural and Retinal ProsthesisBhandari, R. / Negi, S. / Rieth, L. / Normann, R. A. / Solzbacher, F. et al. | 2007
- 1235
-
A Polynorbornene-Based Microelectrode Array for Neural InterfacingHess, Allison E. / Dunning, Jeremy L. / Tyler, Dustin J. / Zorman, Christian A. et al. | 2007
- 1239
-
Nano-Grating Force Sensor for Measurement of Neuron Membrane Characteristics Under Growth and Cellular DifferentiationGopal, Ashwini / Luo, Zhiquan / Kumar, Karthik / Lee, Jae Young / Hoshino, Kazunori / Li, Bin / Schmidt, Christine / Ho, Paul S. / Zhang, Xiaojing et al. | 2007
- 1243
-
Design and Function Principle of a Large Scale Sensor Array for the Bi-Directional Coupling to Electrogenic CellsSchindler, M. / Ingebrandt, S. / Meyburg, S. / Offenhausser, A. et al. | 2007
- 1247
-
Improved Neuronal Adhesion to the Surface of Electronic Device by Engulfment of Protruding Micro-Nails Fabricated on the Chip SurfaceSpira, Micha E. / Kamber, Dotan / Dormann, Ada / Cohen, Ariel / Bartic, Carmen / Borghs, Gustaf / Langedijk, J.P.M. / Yitzchaik, Shlomo / Shabthai, Keren / Shappir, Josef. et al. | 2007
- 1251
-
Three-Dimensional Metal Transfer Micromolded Microelectrode Arrays (MEAS) for In-Vitro Brain Slice RecordingsRajaraman, Swaminathan / McClain, Maxine A. / Choi, Seong-O / Ross, James D. / DeWeerth, Stephen P. / LaPlaca, Michelle C. / Allen, Mark G. et al. | 2007
- 1255
-
Design and Performance of Aluminum Nitride Piezoelectric MicrophonesFazzio, R. Shane / Lamers, Tina / Buccafusca, Osvaldo / Goel, Atul / Dauksher, Walter et al. | 2007
- 1259
-
Ultra Low Tensile Stress Electroplated Nickel Layers: A New Application as Membrane Material for Acoustic DevicesJunge, Stefan / Jakobs, Frank / Benecke, Wolfgang / Lang, Walter et al. | 2007
- 1263
-
Automated Extraction of Multi-Energy Domain Reduced-Order Models Demonstrated on Capacitive MEMS MicrophonesBedyk, W. / Niessner, M. / Schrag, G. / Wachutka, G. / Margesin, B. / Faes, A. et al. | 2007
- 1267
-
Adaptation for Frequency Focusing and Increased Sensitivity in Biomimetic Flow Sensors using Electrostatic Spring SofteningFloris, J. / Izadi, N. / Jaganatharaja, R.K. / Wiegerink, R.J. / Lammerink, T.S.J. / Krijnen, G.J.M. et al. | 2007
- 1271
-
Ultrasonic Position Measurement using Phased Array Microsensors with Resonant Frequency VariationYamashita, K. / Iwahashi, K. / Ohmura, Y. / Okuyama, M. et al. | 2007
- 1275
-
Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial Γ-AL2O3/SI Substrates for Smart DevicesIto, M. / Takabe, M. / Otonari, M. / Akai, D. / Okada, N. / Sawada, K. / Ishida, M. et al. | 2007
- 1275
-
Miniature high sensitivity ultrasonic transducers using epitaxial PZT thin films grown on epitaxial Gamma-Al2O3/Si substrates for smart devicesIto, M. / Takabe, M. / Otonari, M. / Akai, D. / Okada, N. / Sawada, K. / Ishida, M. et al. | 2007
- 1279
-
High Frequency Surface Acoustic Wave AtomizerJu, J. / Yamagata, Y. / Higuchi, T. / Inoue, K. / Ohmori, H. et al. | 2007
- 1283
-
Harmonic Operation of Acoustic Transducer for Droplet Ejection ApplicationLee, Chuang-Yuan / Yu, Hongyu / Kim, Eun Sok et al. | 2007
- 1287
-
A Lateral Field Excited Acoustic Wave SensorFrench, Lester A. / McCann, Donald F. / Wark, Mitchell / Winters, Shane / Vetelino, John F. et al. | 2007
- 1291
-
Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic DeviceZhu, Yi-Ping / Ren, Tian-Ling / Wang, Chao / Wang, Zhe-Yao / Liu, Li-Tian / Li, Zhi-Jian et al. | 2007
- 1295
-
Silicon Cochlear Michrophone "Fishbone" with Complex Filtering and Hilbert Transform Capability for Instantaneous Signal Detection and AnalysisAndo, Shigeru / Koyama, Shoichi / Ono, Nobutaka / Ikeuchi, Naoki et al. | 2007
- 1299
-
Modeling and Simulation of a Condenser MicrophoneChen, Jen-Yi / Hsu, Yu-Chun / Mukherjee, Tamal / Fedder, Gary K. et al. | 2007
- 1303
-
Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial ResolutionLee, Haksue / Kang, Daesil / Moon, Wonkyu et al. | 2007
- 1307
-
A High-Stability MEMS Frequency ReferenceHopcroft, M.A. / Lee, H.K. / Kim, B. / Melamud, R. / Chandorkar, S. / Agarwal, M. / Jha, C.M. / Salvia, J. / Bahl, G. / Mehta, H. et al. | 2007
- 1311
-
32 x 32 pH image sensors for real time observation of biochemical phenomenaHizawa, T. / Matsuo, J. / Ishida, T. / Takao, H. / Abe, H. / Sawada, K. / Ishida, M. et al. | 2007
- 1311
-
32 × 32 pH Image Sensors for Real Time Observation of Biochemical PhenomenaHizawa, T. / Matsuo, J. / Ishida, T. / Takao, H. / Abe, H. / Sawada, K. / Ishida, M. et al. | 2007
- 1313
-
A Standing Micro Coil for a High Resolution MRIDohi, T. / Kuwana, K. / Matsumoto, K. / Shimoyama, I. et al. | 2007
- 1317
-
Thin Electrowetting Controlled Optical System with Pan/Tilt and Variable Focus FunctionsTakei, A. / Iwase, E. / Matsumoto, K. / Shimoyama, I. et al. | 2007
- 1319
-
Exceptional Wear Resistance of MEMS Devices Coated with Carbon-Doped Alumina FilmsCarraro, C. / Chinn, J. / Kobrin, B. et al. | 2007
- 1321
-
A Micromachined X-Ray Collector for Space AstronomyEzoe, Y. / Koshiishi, M. / Mita, M. / Maeda, Y. / Mitsuda, K. / Osawa, T. / Suzuki, M. / Hoshino, A. / Ishisaki, Y. / Takano, T. et al. | 2007
- 1325
-
Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical ResonatorsFeng, X.L. / He, R.R. / Yang, P.D. / Roukes, M.L. et al. | 2007
- 1327
-
Nickel-Tin Transient Liquid Phase (TLP) Wafer Bonding for MEMS Vacuum PackagingWelch, W.C. / Najafi, K. et al. | 2007
- 1329
-
SOI-CMOS Platform for Monolithically Integrating High-Voltage Driver Circuits with Bulk-Micromachined ActuatorsTakahashi, K. / Mita, M. / Fujita, H. / Toshiyoshi, H. / Suzuki, K. / Funaki, H. / Itaya, K. et al. | 2007
- 1333
-
Three Dimensional Perfusion Culture of Encapsulated Embryonic Stem Cells in Microfluidic ChipKim, C. / Lee, K. S. / Lee, I. H. / Shin, K. S. / Kang, Ed. / Lee, K. J. / Kang, J. Y. et al. | 2007
- 1335
-
A Novel Fluid Suction Tool for Capsular EndoscopeKoo, Kyo-In / Park, Sunkil / Ban, Jae-won / Cho, Dongil "Dan" et al. | 2007
- 1337
-
Artificial Capillary Network Chip for in Vitro 3D Tissue CultureIkeuchi, M. / Ikuta, K. et al. | 2007
- 1341
-
Simultaneous Dielectrophoretic Separation and Impedimetric Detection of Microbeads using Interdigitated Electrodes ArrayZou, Zhiwei / Lee, Soo-Hyun / Ahn, Chong H. et al. | 2007
- 1345
-
Accumulation of Uniform Aqueous Plugs in a Microchannel with Porous Sidewalls for Generating Arrayed Nanomembranes of Amphiphilic MoleculesBaba, Takahiro / Hatsuzawa, Takeshi / Nisisako, Takasi et al. | 2007
- 1349
-
AC Electroosmotic Generated In-Plane Microvortices for Stationary or Continuous Fluid MixingHuang, Shih-Hao / Wang, Shou-Kai / Khoo, Hwa Seng / Tseng, Fan-Gang et al. | 2007
- 1353
-
Micro-Structured Surface Ratchets for Droplet TransportShastry, Ashutosh / Taylor, Dane / Bohringer, Karl F. et al. | 2007
- 1357
-
MEMS-Based Uncooled Infrared Focal Plane ArraysKimata, Masafumi et al. | 2007
- 1361
-
A 16-Cell 80dB Dynamic-Range Auto-Ranging Read-Out Array for Uncooled IR Micro-BolometersViarani, N. / Liberatore, N. / Syed, A. J. / Gottardi, M. / Massari, N. / Corsi, C. / Baschirotto, A. et al. | 2007
- 1365
-
A New Single Photon Avalanche Diode in CMOS High-Voltage TechnologyXiao, Z. / Pantic, D. / Popovic, R. S. et al. | 2007
- 1369
-
MEMS Temperature Characterization by CdSe Quantum DotsLi, Sha / Zhang, Kai / Yang, Jui-Ming / Lin, Liwei / Yang, Haw et al. | 2007
- 1373
-
Micro Multi-Probes Electrode Array for the Recording Retinal Neuron SignalYao, D.J. / Chen, C.H. / Chiao, C.C. / Lu, S.W. et al. | 2007
- 1377
-
The Effect of Biodegradable Drug Release Coatings on the Electrical Characteristics of Neural ElectrodesMercanzini, Andre / Reddy, Sai / Boers, Marc / Velluto, Diana / Bertsch, Arnaud / Hubbell, Jeffrey / Renaud, Philippe et al. | 2007
- 1381
-
Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETsTakei, Kuniharu / Kawashima, Takahiro / Takao, Hidekuni / Sawada, Kazuaki / Ishida, Makoto et al. | 2007
- 1385
-
High-Density Flexible Parylene-Based Multielectrode Arrays for Retinal and Spinal Cord StimulationRodger, D.C. / Fong, A.J. / Li, W. / Ameri, H. / Lavrov, I. / Zhong, H. / Saati, S. / Menon, P. / Meng, E. / Burdick, J.W. et al. | 2007
- 1389
-
Industrialisation of gas sensors for comfort, security and wellnessFleischer, M. et al. | 2007
- 1389
-
A Fully Functional, Packaged Active Microscaffold System with Fluid Perfusion and Electrical Stimulation/Recording Functionalities for 3-D Neuronal Culture StudiesRowe, L. / Choi, Y. / Ross, J. / Lee, K. / Fogleman, N. / Brewer, G.J. / Vukasinovic, J. / Glezer, A. / DeWeerth, S.P. / Frazier, A.B. et al. | 2007
- 1393
-
A Depletion Layer ActuatorRansley, James H. T. / Durkan, Colm / Seshia, Ashwin A. et al. | 2007
- 1397
-
Design and Testing of a Field-Chopping Electric Field Sensor using Thermal Actuators with Mechanically Amplified ResponseBahreyni, B. / Wijeweera, G. / Shafai, C. / Rajapakse, A. et al. | 2007
- 1401
-
Mechanically Bi-Stable In-Plane Switch with Dual-Stiffness ActuatorsSterner, M. / Roxhed, N. / Stemme, G. / Oberhammer, J. et al. | 2007
- 1405
-
Cardiomyocytes Self-Powered Polymer MicrorobotKim, Jinseok / Yang, Sungwook / Baek, Jeongeun / Park, Sewan / Kim, Hyeon Cheol / Yoon, Eui-Sung / Chun, Kukjin et al. | 2007
- 1409
-
A Portable Pneumatically-Actuated Refreshable Braille CellWu, Xiaosong / Zhu, Haihong / Kim, Seong-Hyok / Allen, Mark G. et al. | 2007
- 1413
-
A Nanowire Sensor for Aromatic Nitro Compounds using Charge Transfer InteractionMasunaga, Kumi / Sato, Motohiro / Hayashi, Kenshi / Toko, Kiyoshi et al. | 2007
- 1417
-
MEMS-Based Air Quality SensorMescheder, U. / Bauersfeld, M.-L. / Kovacs, A. / Kritwattanakhron, J. / Muller, B. / Peter, A. / Ament, Ch. / Rademacher, S. / Wollenstein, J. et al. | 2007
- 1421
-
Whole-Cell Conductometric Biosensor for Determination Heavy-Metals in WaterBerezhetskyy, A.L. / Durrieu, C. / Chovelon, J.-M. / Dzyadevych, S.V. / Tran-Minh, C. et al. | 2007
- 1425
-
Analysis of Heavy Metal Ions in Real Samples using a Concentrator Device with a Super-Hydrophobic SurfaceYanagimachi, Isao / Nashida, Norihiro / Iwasa, Koichiro / Suzuki, Hiroaki et al. | 2007
- 1429
-
Cellulose-Based Optical Sensor for the Selective and Quantitative Detection of Mercury Ions in Aqueous MediaDiez-Gil, C. / Caballero, A. / Martinez, R. / Ratera, I. / Tarraga, A. / Molina, P. / Veciana, J. et al. | 2007
- 1433
-
MEMS Tunable Dual-Wavelength Laser with Large Tuning RangeCai, H. / Zhang, X. M. / Wu, J. / Tang, D. Y. / Zhang, Q. X. / Liu, A. Q. et al. | 2007
- 1437
-
Real Pivot Mechanism of Rotary Comb-Drive Actuators for MEMS Continuously Tunable LasersZhang, X. M. / Liu, A. Q. / Tamil, J. / Yu, A. B. / Cai, H. / Tang, D. Y. / Lu, C. et al. | 2007
- 1441
-
MEMS Tunable Coupled-Cavity LaserCai, H. / Zhang, X. M. / Zhang, Q. X. / Liu, A. Q. et al. | 2007
- 1445
-
Low Loss Tunable Optical Filter using Silicon Photonic Band Gap MirrorsLipson, Ariel / Yeatman, Eric M. et al. | 2007
- 1449
-
An Integrated Photonic MEMS Switch System with Fast Switching Speed and Low Power DemandKhoo, E. H. / Li, J. / Cai, H. / Pinjala, D. / Liu, A. Q. et al. | 2007
- 1453
-
Glove Type of Wearable Tactile Sensor Produced by Artificial Hollow FiberHasegawa, Y. / Shikida, M. / Ogura, D. / Sato, K. et al. | 2007
- 1457
-
3-Axes Tactile Sensor with Tunable Sensing RangeWen, Chih-Chieh / Lin, Chia-Min / Fang, Weileun et al. | 2007
- 1461
-
Fabrication and Characterization of Silicon-Polymer Beam Structures for Cantilever-Type Tactile SensorsSohgawa, M. / Huang, Y.-M. / Yamashita, K. / Kanashima, T. / Noda, M. / Okuyama, M. / Noma, H. et al. | 2007
- 1465
-
A Robust and Sensitive Silicon-MEMS Tactile-Imager with Scratch Resistant Surface and Over-Range ProtectionTakao, Hidekuni / Yawata, Masaki / Sawada, Kazuaki / Ishida, Makoto et al. | 2007
- 1469
-
Cantilever-Based Tactile Sensor with Improved Sensitivity for Dimensional Metrology of Deep Narrow DrillingsRuther, P. / Spinner, S. / Cornils, M. / Paul, O. et al. | 2007
- 1473
-
Benefits of MEMS Based Seismic Accelerometers for Oil ExplorationLaine, Jerome / Mougenot, Denis et al. | 2007
- 1479
-
A Novel Elastomer-Based Magnetoresistive AccelerometerPhan, K.L. / Mauritz, A. / Homburg, F.G.A. et al. | 2007
- 1483
-
A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb ElectrodesHamaguchi, H. / Sugano, K. / Tsuchiya, T. / Tabata, O. et al. | 2007
- 1487
-
A Novel Out-of-Plane Accelerometer with Fully-Differential Sensing Circuit and Sub-Micron GapTsai, Ming-Han / Wang, Chuanwei / Sun, Chih-Ming / Fang, Weileun et al. | 2007
- 1491
-
An Integrated Micro-Analytical System for Complex Vapor MixturesZellers, Edward T. / Reidy, Shaelah / Veeneman, Rebecca A. / Gordenker, Robert / Steinecker, William H. / Lambertus, Gordon R. / Kim, Hanseup / Potkay, Joseph A. / Rowe, Michael P. / Zhong, Qiongyan et al. | 2007
- 1497
-
A Fully-Integrated MEMS Preconcentrator for Rapid Gas SamplingBae, Byunghoon / Yeom, Junghoon / Radadia, Adarsh D. / Masel, Richard I. / Shannon, Mark A. et al. | 2007
- 1501
-
A Miniaturized Ion Mobility Spectrometer for Detection of Hazardous Compounds in AirZimmermann, S. / Barth, S. et al. | 2007
- 1505
-
A Micropump-Driven High-Speed MEMS Gas Chromatography SystemKim, Hanseup / Steinecker, William H. / Reidy, Shaelah / Lambertus, Gordon R. / Astle, Aaron A. / Najafi, Khalil / Zellers, Edward T. / Bernal, Luis P. / Washabaugh, Peter D. / Wise, Kensall D. et al. | 2007
- 1509
-
A Novel Tilting Micromirror with a Triangular Waveform Resonance Response and an Adjustable Resonance Frequency for Raster Scanning ApplicationsElata, D. / Leus, V. / Hirshberg, A. / Salomon, O. / Naftali, M. et al. | 2007
- 1513
-
High Reflectivity Broadband Photonic Crystal Mirror MEMS ScannerJung, Il Woong / Kim, Sora / Solgaard, Olav et al. | 2007
- 1517
-
NiFe Plated Biaxial Magnetostatic MEMS ScannerYalcinkaya, Arda D. / Urey, Hakan / Holmstrom, Sven et al. | 2007
- 1521
-
Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror ArrayYamashita, S. / Mita, M. / Fujita, H. / Yamamoto, T. / Kawai, M. / Yano, M. et al. | 2007
- 1525
-
A Thermo-Pneumatically Actuated Tip-Tilt-Piston MirrorWerber, Armin / Zappe, Hans et al. | 2007
- 1529
-
Proposition of Atomic Force Probes Based on Silicon Ring-ResonatorsFaucher, Marc / Walter, Benjamin / Rollier, Anne-Sophie / Seguini, Karim / Legrand, Bernard / Couturier, Gerard / Aime, Jean-Pierre / Bernard, Charlotte / Boisgard, Rodolphe / Buchaillot, Lionel et al. | 2007
- 1533
-
Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning ForkHida, H. / Shikida, M. / Fukuzawa, K. / Ono, A. / Sato, K. / Asaumi, K. / Iriye, Y. / Muramatsu, T. / Horikawa, Y. et al. | 2007
- 1537
-
Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force MicroscopyMouaziz, S. / Dysli, A. / Brugger, J. / Boero, G. et al. | 2007
- 1541
-
Nanotopography Imaging using a Heated Microcantilever in Tapping ModePark, K. / Lee, J. / Zhang, Z. M. / King, W. P. et al. | 2007
- 1545
-
Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic AmplificationZeyen, B. / Turner, K.L. et al. | 2007
- 1549
-
"CNT-Polymer" Composite-Film as a Material for MicroactuatorsChu, Huai-Yuan / Chen, Ting-Hsien / Hsu, Wen-Kuang / Fang, Weileun et al. | 2007
- 1553
-
Carbon Nanotube Micro-Electrode ArrayGabay, T. / Ben-David, M. / Kalifa, I. / Abrams, Z. R. / Sorkin, R. / Ben-Jacob, E. / Hanein, Y. et al. | 2007
- 1557
-
Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS ActuatorsKiuchi, Mario / Isono, Yoshitada / Matsui, Shinji / Nakamatsu, Kenichiro et al. | 2007
- 1561
-
Nanoscale Straining of Individual Carbon Nanotubes by Micromachined TransducersJungen, A. / Durrer, L. / Stampfer, C. / Hierold, C. et al. | 2007
- 1565
-
Piezoresistance of Single-Walled Carbon NanotubesStampfer, C. / Helbling, T. / Jungen, A. / Hierold, C. et al. | 2007
- 1569
-
Optofluidic Maskless Lithography SystemChung, Su E. / Park, Wook / Park, Hyunsung / Yu, Kyoungsik / Park, Namkyoo / Kwon, Sunghoon et al. | 2007
- 1573
-
Continuous Production of Spherical Microcapsules with Nano-Pores and Use as a Potential EncapsulantYoon, D. H. / Won, D. G. / Park, S. Y. / Jeong, E. H. / Abraham, S. / Arakawa, T. / Kim, I. / Shoji, S. / Kim, K. C. / Go, J. S. et al. | 2007
- 1577
-
Surface Wettability in Terms of Prominence and Depression of Diverse Microstructure and Their SizesLee, S. M. / Ha, S. W. / Jung, I. D. / Go, J. S. / Shin, B. / Ko, J. S. et al. | 2007
- 1581
-
Micro Proximity Electron Source with Apertured Electron Window for Nanolithography in AtmosphereCho, Wonje / Ono, Takahito / Esashi, Masayoshi et al. | 2007
- 1585
-
A Method to Form Bonded Micromagnets Embedded in SiliconBowers, B. J. / Agashe, J. S. / Arnold, D. P. et al. | 2007
- 1589
-
Sensor Networks for Integration into Textile-Reinforced CompositesRoscher, K.-U. / Fischer, W.-J. / Landgraf, J. / Pfeifer, G. / Starke, E. et al. | 2007
- 1593
-
Nanoscale Al-Al and Cu-Cu ContactsLiu, Qingquan / McCormick, Daniel T. / Roberts, Robert C. / Tien, Norman C. et al. | 2007
- 1597
-
A Biaxially Stretchable Interconnect with Liquid Alloy Joints on Flexible SubstrateKim, Hyun-Joong / Zhang, Meng / Zizie, Babak et al. | 2007
- 1601
-
Double-Cantilever Infrared Detector: Fabrication, Curvature Control and Demonstration of Thermal DetectionHuang, Shusen / Tao, Hu / Lin, I-Kuan / Zhang, Xin et al. | 2007
- 1605
-
Fabrication and Characterization of High Aspect Ratio Silicon Plate Springs with High Out-of-Plane Stiffnessvan Zeijl, H. W. / Paalvast, S. L. / Su, J. / van Eijk, J. / Sarro, P. M. et al. | 2007