Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structure (English)
- New search for: Lee, J. C.
- New search for: Leu, I. C.
- New search for: Hon, M. H.
- New search for: Lee, J. C.
- New search for: Leu, I. C.
- New search for: Hon, M. H.
In:
2007 Digest of papers Microprocesses and Nanotechnology
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324-325
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2007
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ISBN:
- Conference paper / Electronic Resource
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Title:Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structure
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Contributors:
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Published in:
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Publisher:
- New search for: IEEE
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Publication date:2007-11-01
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Size:886508 byte
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ISBN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Breaker pages| 2007
- 2
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20 years of Microprocesses and Nanotechinology ConferenceIshihara, S. / Okazaki, S. / Arimoto, H. et al. | 2007
- 4
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Nanoimprint (Technology, Tools, Applications and Commercialization) And New Technologies BeyondChou, Stephen Y. et al. | 2007
- 6
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Silicon VLSI Device Technology and NanoelectronicsHiramoto, Toshiro et al. | 2007
- 8
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Resist Science and KineticsTagawa, Seiichi et al. | 2007
- 10
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Feasibility study of immersion system using high-index materialsSakai, K. / Iwasaki, Y / Mori, S. / Yamada, A. / Yamashita, K. / Nishikawara, T. et al. | 2007
- 12
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Immersion for 40nm production with 1.35NAWagner, Christian / Miyazaki, Junji et al. | 2007
- 14
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Latest results from the hyper - NA immersion scannersImai, Motokatsu et al. | 2007
- 16
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Reaction mechanism of EUV resistsToriumi, Minoru / Kaneyama, Koji / Itani, Toshiro et al. | 2007
- 18
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Three-dimensional Nanomechanical Device Fabrication by FIB-CVDMatsui, Shinji et al. | 2007
- 20
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Chemical Force AFM with CNT TipsTokumoto, Hiroshi / Ide, Koichiro / Ukita, Keiko / Azehara, Hiroaki et al. | 2007
- 22
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Emission Property and Structure of an Ultra Sharp Tungsten ProbeIkeda, Yuta / Higashi, Kodai / Nakazawa, Shotaro / Ichihashi, Toshinari / Matsui, Shinji / Fujita, Jun-ichi et al. | 2007
- 24
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Development status of Nikon EUV exposure toolsMurakami, Katsuhiko et al. | 2007
- 26
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Canon's Development Status of EUVL TechnologiesHasegawa, Takayuki / Uzawa, Shigeyuki / Kubo, Hiroyoshi / Tsuji, Toshihiko et al. | 2007
- 28
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Results from Alpha Demo and an update on the realization of EUV lithographyHarned, Noreen / Meiling, Hans / Mickan, Uwe / Zimmerman, John et al. | 2007
- 30
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Laser produced plasma light source for HVM-EUVLKomori, Hiroshi / Hoshino, Hideo / Suganuma, Takashi / Nowak, Krzysztof / Yabu, Takayuki / Asayama, Takeshi / Ueno, Yoshifumi / Moriya, Masato / Nakano, Masaki / Someya, Hiroshi et al. | 2007
- 32
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Development of a LPP EUV light source for below-32nm Node LithographyBrandt, David / Oga, Toshihiro / Farrar, Nigel / Bonafede, James et al. | 2007
- 34
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Characterization of Carrier Dynamics in Semiconductor Nanomaterials Using Near-Field Heterodyne Transient Grating MethodShen, Q. / Katayama, K. / Sawada, T. / Toyoda, T. et al. | 2007
- 36
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ZnO Nanowire Growth and Its Substrate Dependence Under Solid-Vapor ProcessMiyazaki, Hiroshi / Nakazawa, Shotaro / Higashi, Kodai / Ichihashi, Toshinari / Fujita, Jun-ichi et al. | 2007
- 38
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Horizontally-Aligned Single-Walled Carbon Nanotubes on Sapphire: Growth Mechanism and CharacterizationAgo, H. / Ishigami, N. / Imamoto, K. / Suzuki, T. / Ikeda, K. / Tsuji, M. / Ikuta, T. / Takahashi, K. et al. | 2007
- 40
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Synthesis of NIR-to-visible Upconversion Fluorescent NanoparticlesZhang, Y. / Li, Z.Q. et al. | 2007
- 42
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Silicon Nanowires as Non-Cytotoxic Scaffold for Fibroblast DevelopmentWen, H. S. / Yang, S. P. / Tang, Y. F. / Tsai, L. F. / Liu, C. W. / Lee, T. M. / Dai, B. T. et al. | 2007
- 44
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Dependence of EUV emission on xenon flow rate from a z-pinch discharge plasmaZhang, C.H. / Katsuki, S. / Kimura, A. / Akiyama, H. et al. | 2007
- 46
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Dual grating interferometric lithography for 22-nm nodeShiotani, Hideaki / Suzuki, Shota / Lee, Dong Gun / Naulleau, Patrick / Watanabe, Takeo / Fukushima, Yasuyuki / Ohnishi, Ryuji / Kinoshita, Hiroo et al. | 2007
- 48
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Damage Free Particle Removal from EUVL Mask Layers by High Energy Laser Shock Cleaning (LSC)Kim, Tae-Gon / Yoo, Young-Sam / Son, Il-Ryong / Kim, Tae-Geun / Ahn, Jinho / Lee, Jong-Myoung / Choi, Jae-Sung / Busnaina, Ahmed A. / Park, Jin-Goo et al. | 2007
- 50
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Analysis of charging phenomena of polymer films in scanning electron microscopyMorimoto, K. / Yasuda, M. / Tanaka, Y. / Watanabe, R. / Kawata, H. / Hirai, Y. et al. | 2007
- 52
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Novel Method for Measurement Condition Optimization in CD-SEMHitomi, Keiichiro / Nakayama, Yoshinori / Yamanashi, Hiromasa / Sohda, Yasunari / Kawada, Hiroki et al. | 2007
- 54
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Estimation of resist blur by overlay measurementNakao, Shuji / Maejima, Shinroku / Hagiwara, Takuya / Moniwa, Akemi / Sakai, Junjiro / Hanawa, Tetsuro / Suko, Kazuyuki et al. | 2007
- 56
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Hot-spot detection and correction using full-chip based process window analysisKim, Sang-Wook / Suh, Sung-Soo / Kim, Young-Chang / Lee, Suk-Joo / Lee, Jung-Hyeon / Kang, Chang-Jin / Moon, Joo-Tae et al. | 2007
- 58
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The Study of Graytone Mask Structure for Manufacturing Thin Film TransistorKang, H. J. / Cha, H. S. / Ahn, J. H. / Ryu, H. / Kim, S. W. / Nam, K. S. et al. | 2007
- 60
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Analysis of Electron Beam Sensitivity of Self-Assembled Monolayer Resist Depending on Terminal GroupKato, K. / Miyake, T. / Beppu, Y. / Tanii, T. / Ohdomari, I. et al. | 2007
- 62
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A miniaturized electron beam deflector and lens module with vertical interconnection using anodic bonding and Zn reflowHan, Changho / Eom, Bose / Kim, Hyeon Cheol / Chun, Kukjin et al. | 2007
- 64
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Fabrication of Nanopillars comprised of InGaN/GaN Multiple Quantum Wells by Focused Ion Beam MillingWu, Shang-En / Hsueh, Tao-Hung / Liu, Chuan-Pu et al. | 2007
- 66
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Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructuresNishikawa, H. / Furuta, Y / Uchiya, N. / Haga, J. / Oikawa, M. / Satoh, T. / Ishii, Y. / Kamiya, T. et al. | 2007
- 68
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Electron beam lithography simulation for the patterning of EUV masksTsikrikas, N. / Patsis, G. P. / Valamontes, E. / Raptis, I. / Gerardino, A. et al. | 2007
- 70
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Computer simulations for very high brightness electron gunsNakasuji, Mamoru et al. | 2007
- 72
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Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron DetectorTanimoto, S. / Pickard, D.S. / Kenney, C. / Hasi, J. / Pease, R.F.W. et al. | 2007
- 74
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Collection field dependence of charging-up of insulators in low voltage scanning electron microscopeMaekawa, Takeshi / Tanaka, Hiroyuki / Kotera, Masatoshi et al. | 2007
- 76
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Effect of Fluorine Atom on Acid Generation in Chemically Amplifiled EUV ResistYamamoto, Hiroki / Kozawa, Takahiro / Tagawa, Seiichi / Yukawa, Hiroto / Sato, Mitsuru / Onodera, Junichi et al. | 2007
- 76
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Effect of fluorine atom on acid generation in chemically amplified EUV resistYamamoto, H. / Kozawa, T. / Tagawa, S. / Yukawa, H. / Sato, M. / Onodera, J. et al. | 2007
- 78
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Study on the reaction of acid generators with epithermal electronsNatsuda, K. / Kozawa, T. / Saeki, A. / Tagawa, S. / Kai, T. / Shimokawa, T. et al. | 2007
- 80
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Double Exposure and Double Patterning Studies with Inverse LithographyKim, Sang-Kon et al. | 2007
- 82
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Resist Processes for High Resolution Mask and Direct Write Applications Using the Latest Vistec VSB Electron ColumnSailer, H. / Irmscher, M. / Hohle, C. / Keil, K. / Boettcher, M. / Hahmann, P. et al. | 2007
- 84
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Dependence of Absorption Coefficient and Acid Generation Efficiency on Acid Generator Concentration in Chemically Amplified EUV ResistHirose, Ryo / Kozawa, Takahiro / Tagawa, Seiichi / Kai, Toshiyuki / Shimokawa, Tsutomu et al. | 2007
- 86
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Depth profile of acid generator distribution in chemically amplified resistsFukuyama, Takehiro / Kozawa, Takahiro / Tagawa, Seiichi / Takasu, Ryoichi / Yukawa, Hiroto / Sato, Mitsuru / Onodera, Junichi / Hirosawa, Ichiro / Koganesawa, Tomoyuki / Horie, Kazuyuki et al. | 2007
- 88
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A Study of Molecular Orientation Effect in Photoresist FilmsKaneyama, Koji / Toriumi, Minoru / Itani, Toshiro et al. | 2007
- 90
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Anisotropic resist reflow process simulation for 32 nm node elongated contact holesPark, Joon-Min / Kim, Dai-Gyoung / Hong, Joo-Yoo / Oh, Hye-Keun et al. | 2007
- 92
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Influence of development parameters on electron resist contrastKnyazev, M.A. / Svintsov, A.A. / Zaitsev, S.I. et al. | 2007
- 94
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Photoelectron trajectory simulation in a resist for EUV lithographyKotera, Masatoshi / Yagura, Kei / Maekawa, Takeshi / Kawano, Daichi / Tanaka, Hiroyuki et al. | 2007
- 96
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Characterization of multi-domain bumps of organic resists in color filters for wide-viewing-angle liquid crystal displaysYang, Sheng-Hung / Koo, Homg-Show / Kawai, Tomoji et al. | 2007
- 98
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Study on Physical Properties of Organic Resist Spacers on Color FiltersKoo, H.S. / Kang, C.H. / Kawai, T. et al. | 2007
- 100
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RF characterization of a single wall carbon nanotube bundleKang, M. G. / Lim, J. H. / Hong, S. H / Lee, D. J. / Hwang, S. W. / Whang, D. M. / Hwang, J. S. / Ahn, D. et al. | 2007
- 102
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Characterization of a coaxial mid-gap SB CNTFET inverterEssawi, Amr A. / Fahmy, Hossam A. H. / Rafat, Nadia H. et al. | 2007
- 104
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Nanocomposite Field Effect Transistors based on Zinc oxide/polymer blendsRoy, Vellaisamy A. L. / Xu, Zong-Xiang / Stallinga, Peter / Xiang, Hai-Feng / Yan, Beiping / Che, Chi-Ming et al. | 2007
- 106
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Comparing the performances of Pentacene based TFTs use MWCNTs and Pd/Ti as source and drainChang, C. H. / Chien, C. H. / Yang, J. Y. et al. | 2007
- 108
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Electron Transport in Molecular WiresBoudjella, A. / Gougam, A.B. / Alizadeh, H. et al. | 2007
- 110
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Performance Comparison Between Asymmetric Poly-Si gate FinFETs and TiN gate FinFETsKim, Han-geon / An, Hong-sun / Kim, Young-kyu / Won, Taeyoung et al. | 2007
- 112
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Gate Work Function and Contact Engineering in Nanoscale Vertical Pillar Transistor for DRAM Cell TransistorsJeong, Min-Kyu / Park, Ki-Heung / Kim, Young Min / Lee, Jong-Ho et al. | 2007
- 114
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Preliminary Study of Suppression of Backscattering Phenomenon from Drain Region on Double Gate MOSFET's CharacteristicsTsutsumi, Toshiyuki / Tomizawa, Kazutaka et al. | 2007
- 118
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Ab-initio Calculations of Stress Effects on Indium Diffusion in Uniaxally Strained SiliconKim, Young-Kyu / Cho, Bum-Goo / Park, Soon-Yeol / Won, Taeyoung et al. | 2007
- 120
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Growth of Layered Single Crystal Whiskers for Fabricating Single Electron Tunneling (SET) DevicesOh, S.-Y. / Kim, G. -S. / Kim, S.-J. et al. | 2007
- 122
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Si single-electron memory having in-plane dot with double gatesFujiaki, Tomo / Ohkura, Kensaku / Nakajima, Anri et al. | 2007
- 124
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Memory characteristics of top-gate ZnO nanowire field-effect transistors with floating gate nodes of Au nanoparticlesYeom, Donghyuk / Kang, Jeongmin / Yoon, Changjoon / Park, Byoungjun / Keem, Kihyun / Jeong, Dong-Young / Kim, Mihyun / Koh, Eui Kwan / Kim, Sangsig et al. | 2007
- 126
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Re-trapping process of charge traps in non-volatile memory with ONA structuresCho, W.S. / Oh, J.S. / Kwak, D.W. / Oh, H.T. / Kim, W.S. / Cho, H.Y. et al. | 2007
- 128
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Memory effects of nonvolatile polymer memory devices with an active layer consisting of poly(N-vinylcarbazole) and C60 nanocompositesHam, Jung Hoon / Jung, Jae Hun / Kim, Hyuk Joo / Lee, Dea Uk / Kim, Tae Whan et al. | 2007
- 130
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Theoretical current bistability in organic memories consisting of a single active layerJung, Jae Hun / You, Joo Hyoung / Kim, Tae Whan et al. | 2007
- 132
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Electrical Characterization of Nano-Floating Gate Capacitor with Silicon Carbide Nano-ParticlesLee, Tae Hee / Lee, Dong Uk / Kim, Seon Pil / Kim, Eun Kyu et al. | 2007
- 134
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Fabrication of Nonvolatile Nano-Floating Gate Memory with Self-Assembled Metal-Oxide Nano-Particles Embedded in PolyimideKim, Seon Pil / Lee, Tae Hee / Lee, Dong Uk / Kim, Eun Kyu / Koo, Hyun-Mo / Cho, Won-Ju / Kim, Young-Ho et al. | 2007
- 136
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Solving the ternary QCA logic gate problem by means of adiabatic switchingPecar, P. / Mraz, M. / Zimic, N. / Janez, M. / Bajec, I. Lebar et al. | 2007
- 138
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Artificial intelligence techniques applied to design of logic circuits based on ternary quantum-dot cellular automataJanez, M. / Bajec, I. Lebar / Pecar, P. / Zimic, N. / Mraz, M. et al. | 2007
- 140
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High magnetoresistance of InSb with an embedded Au coreSuh, Jooyoung / Kim, Won Young / Chang, Joonyeon / Kim, Eun Kyu et al. | 2007
- 142
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Finite difference time domain analysis of 3-D sub-wavelength structured arraysTing, C. J. / Tsai, H. Y. / Hsu, C. J. / Chou, C. P. et al. | 2007
- 144
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Fabrication of antireflection structures on flat and curved substrates by interference lithography and nanoimprint techniqueLee, Chao-Te / Chen, Yung-Pin / Chang, Jer-Haur / Wang, Lon A. et al. | 2007
- 146
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System Design in Removal of ITO Thin-Film Nanostructure From TFT-LCD Color FiltersPa, P.S. et al. | 2007
- 148
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Atomic structure analysis of ErSi2 nanowires formed on Si(100) substratesKatayama, Yusuke / Watanabe, Ryouki / Yokoyama, Satoshi / Kobayashi, Tomohiro / Meguro, Takashi / Zhao, Xinwei et al. | 2007
- 150
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Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal sourceYo, T. / Tanaka, H. / Koreyama, K. / Nagata, T. / Sakuma, Y. / Nakajima, K. / Chikyow, T. / Yanagisawa, J. / Sakai, A. et al. | 2007
- 152
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Guided formation of sub-10 nm silicide dot array and their morphology change by electron beam irradiationWi, J.-S. / Kim, H.-M. / Lee, H.-S. / Nam, S.-W. / Kim, K.-B. et al. | 2007
- 154
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Effects of substrate heating and film thickness on the properties of silver based ZnO multilayer thin filmsRim, Y. S. / Kim, S. M. / Choi, H. W. / Kim, K. H. et al. | 2007
- 156
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Fabrication of GaInAsP/InP Arbitrary Shaped Low Dimensional Quantum StructuresPlumwongrot, Dhanorm / Tamura, Yosuke / Maruyama, Takeo / Nishiyama, Nobuhiko / Arai, Shigehisa et al. | 2007
- 156
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Fabrication of GalnAsP/InP arbitrary shaped low dimensional quantum structuresPlumwongrot, D. / Tamura, Y. / Maruyama, T. et al. | 2007
- 158
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Self-assembled Zn/ZnO dots on silicon by RF magnetron sputterLiang, Yu-Han / Liu, Chuan-Pu et al. | 2007
- 160
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Fabrication and in-plane electrical resistivity of Ge/SiGe quantum dot superlatticesHayashi, K. / Abiko, S. / Motegi, N. / Kajitani, T. et al. | 2007
- 162
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Etching Processes of Carbon Nanowalls Using Dual-frequency Parallel-plate Capacitively Coupled PlasmaKondo, Shingo / Noda, Akio / Yamakawa, Koji / Den, Shoji / Hiramatsu, Mineo / Hori, Masaru et al. | 2007
- 164
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Low temperature carbon nanowires growth at the microgap by corona discharge assisted thermal CVDKim, P. / Kim, M. / Kwon, I. / Lim, G. et al. | 2007
- 166
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Surface modification of a diamond-like carbon thin film using hyperthermal fluorine beamsYamada, N. / Kanda, K. / Yokota, K. / Tagawa, M. / Niibe, M. / Haruyama, Y. / Matsui, S. et al. | 2007
- 168
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Effect of Annealing and Electron Irradiation on Young's Modulus of Amorphous Carbon Pillars Grown by FIB-CVDUeki, Ryuichi / Fujita, Jun-ichi / Ichihashi, Toshinari / Kaito, Takashi / Matsui, Shinji et al. | 2007
- 170
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The in-situ Annealing of Electroless Deposited Copper Films Using NITD Method for ULSIChou, Y. H. / Liu, Y. M. / Sung, Y. / Ger, M. D. / Wang, C. A. et al. | 2007
- 172
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Materials Property Evaluation of SiO2 Film Coated on Magnetite NanoparticlesBian, Pei / Ju, Dong-Ying / Qing, Ge-Letu / Okabe, Yoshio et al. | 2007
- 174
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Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasmaShimizu, Yoshiki / Koga, Kenji / Sasaki, Takeshi / Mariotti, Davide / Terashima, Kazuo / Koshizaki, Naoto et al. | 2007
- 176
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TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)-metal precursorsTakeguchi, M. / Shimojo, M. / Tanaka, M. / Mitsuishi, K. / Furuya, K. et al. | 2007
- 178
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Eduction's Position Control of the Incorporated Gallium in the Diamond-like Carbon Deposited by Focused-Ion-Beam Chemical-Vapor-DepositionKometani, Reo / Kanda, Kazuhiro / Haruyama, Yuichi / Kaito, Takashi / Matsui, Shinji et al. | 2007
- 180
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Study of aluminum film deposition on the surface of micro-trench by dual ion beam sputteringTsai, Hung-Yin / Kuo, Kei-Lin / Wu, Chih-Wei et al. | 2007
- 182
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Feasibility and study on rapid fabrication of 2D photonic crystal slab waveguides by combining near-field phase-shifting contact lithography and interference lithographyChen, Yung-Pin / Yan, Cai-Xia / Wang, Lon A. et al. | 2007
- 184
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Nano-holes fabricated by Ion Beam Induced DepositionChen, Ping / Wu, Mengyue / Alkemade, Paul F.A. / Salemink, Huub W.M. et al. | 2007
- 186
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Shallow n+/p Junction Formation using PH3 Plasma Doping TechniqueKim, Jeong Eun / Jung, Ho / Do, Seung Woo / Oh, Jae Geun / Hwang, Sun Hwan / Lee, Jin Ku / Ku, Ja Choon / Lee, Jong-Ho / Lee, Yong Hyun / Kong, Seong Ho et al. | 2007
- 188
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Nanopatterning of Si wafer surface using microphase-separated structure of block copolymer as wet etching maskWatanabe, R. / Kamata, K. / Iyoda, T. et al. | 2007
- 190
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Fabrication of nanostencil using size reduction of micro-aperture by additional depositionLee, J.S. / Park, W.B. / Park, C.W. / Kim, G.M. et al. | 2007
- 192
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Nano-pore arrays of anodic aluminum oxide fabricated using a Cr maskJeong, G. H. / Lim, S. K. / Park, J. K. / Lee, D. / Lee, B. K. / Suh, S. J. et al. | 2007
- 194
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Double Wall Carbon Nanotubes as Electrochemical Biosensors of NADH and GlucosePumera, Martin et al. | 2007
- 196
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Preparation of highly concentrated and stable suspensions of silver nanoparticles by an organic base catalyzed reduction reactionWu, Rong-Tamg / Hsu, Steve Lien-Chung et al. | 2007
- 198
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Structural and sensing characteristics of Pr2O3 sensing membrane for pH-ISFETPan, Tung-Ming / Liao, Kao-Ming / Cheng, Chih-Hung / Lin, Jian-Chyi et al. | 2007
- 200
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Effect of magnetic annealing on FeCo nanowiresNg, W.B. / Okita, H. / Ishida, T. / Okada, K. et al. | 2007
- 202
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Preparation of Conducting Polyaniline/TiO2 Composite Nanorods by the Radiolysis Polymerization MethodKarim, Mohammad Rezaul / Lee, Mu Sang / Lim, Kwon Taek et al. | 2007
- 204
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Surface properties for hydrogen, carbon, and oxygen adsorption on the Ga-terminated (0001) GaN surface system with nitrogen vacancyLee, Sung-Ho / Chung, Yong-Chae et al. | 2007
- 206
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Electronic structures of nitrogen doped single walled carbon nanotubes with uniaxial strain: Ab initio method approachPark, Hong-Lae / Chung, Yong-Chae et al. | 2007
- 208
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Growth of CNTs on the Ni/TiO2 Surface by Catalytic CVD MethodAoki, Yuki / Yasui, Takanari et al. | 2007
- 210
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Preparation and characterization of Au-dot-decorated magnetic polymer microspheresHsiao, S.C. / Chen, Y.C. / Ou, J.L. / Ger, M.D. et al. | 2007
- 212
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The mechanism of shear thickening fluid with nanoparticles applied to liquid armorLin, Hung-Wen / Hwu, Wen-Hwa / Ger, Ming-Der et al. | 2007
- 214
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Electrical and optical properties of p-type InMnP:Zn for nano-spintronicsKim, Jin Soak / Ha, L. / Lee, Y.-I. / Kim, Eun Kyu / Shon, Yoon et al. | 2007
- 216
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Optical annealing of ink-jet printable Ag and Ag-Cu nanoparticlesYun, Jeonggwon / Cho, Kyoungah / Kim, Sangsig et al. | 2007
- 218
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Electronic structures and atomic surface diffusion in Cr/Fe(001) and Fe/Cr(001) systems: First-principles studyChoi, Heechae / Chung, Yong-Chae et al. | 2007
- 220
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Growth control of carbon nanotubes by adjusting residual reaction gasYamaguchi, Masao / Pan, Lujun / Akita, Seiji / Nakayama, Yoshikazu et al. | 2007
- 222
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A new method for nano-tube imogolite synthesisAbidin, Zaenal / Matsue, Naoto / Henmi, Teruo et al. | 2007
- 224
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Effect of C60 concentrations on the flat-band voltage shift of nonvolatile memory devices with a hybrid poly-4-vinyl-phenol and C60 active layerKim, Hyuk Joo / Jung, Jae Hun / Ham, Jung Hun / Kim, Tae Whan et al. | 2007
- 226
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Optical properties of ZnO nanocrystals embedded in a polyimide layerLi, Fushan / Son, Dong-Ick / Leem, Jae-Hyeon / Jung, Jae-Hun / Kim, Tae Whan / Kim, Young-Ho et al. | 2007
- 228
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A Study on the Properties of Semiconductive Shield Materials for Power Cables in accordance with Content of Carbon NanotubesYang, Hoon / Yang, Jong-Seok / Park, Dae-Hee et al. | 2007
- 230
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Optical properties of ZnO nanoparticles grown on p-type Si and Al2O3 substrates by using a spin-coating techniqueKim, Su-Youn / Leem, Jae-Hyeon / Son, Dong-Ick / No, Young-Soo / Kim, Tae-Whan et al. | 2007
- 232
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Bacteria-Assisted Photothermal Therapy in Cancers CellsKuo, Wen-Shuo / Wu, Ching-Ming / Yeh, Chen-Sheng et al. | 2007
- 234
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An Investigation of Optical Properties of Erbium Doped Zinc Sulfide NanoparticlesAhmadi, M. / Javadpour, S. / Khosravi, A.A. / Gharavi, A.R. et al. | 2007
- 236
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Separation of a mixture of rare earth fluorescent powders by two-liquid flotation using polar and non-polar organic solvents for recyclingOtsuki, A. / Dodbiba, G. / Fujita, T. et al. | 2007
- 238
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Study of electronic parameters of mesoporous silicon under adsorption of viruses of plantsVashpanov, Yu. / Son, Jung-Young et al. | 2007
- 240
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The fabrication and property of Ag/Ni Nanocomposite fluidChang, H. / Yeh, Yu-Hsuan et al. | 2007
- 242
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Fabrication of TiO2 Nanotubes for Photocatalyst ApplicationsShaislamov, U. A. / Kim, R. K. / Kim, S. I. / Komilkohn, G. / Yang, J. M. / Yangi, B. et al. | 2007
- 244
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Current-Voltage Characteristics of Organic Molecular Wires by Conducting Atomic Force MicroscopyLee, N.J. / Kim, S.B. / Koo, S.H. / Choi, Y.J. / Kim, J.W. / Kim, Y.S. / Kang, C.J. et al. | 2007
- 246
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Charging properties of Si nanocrystals with respect to the varied temperatureYang, H. / Sung, S.Y. / Choi, Y.J. / Kim, J.W. / Kim, Y.S. / Kang, C.J. et al. | 2007
- 248
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Dry Etching of CaF2 by Solid Source H2O (ice) PlasmaMatsutani, Akihiro / Ohtsuki, Hideo / Koyama, Fumio et al. | 2007
- 250
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An approach to cleaning of dry etching residues with supercritical carbon dioxideJung, Jae Mok / Bae, Jae Hyun / Yuvaraj, Haldorai / Lim, Kwon Taek et al. | 2007
- 252
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Environmental-Friendship Etching Process of Low-k SiOCH Films Employing an Alternative Fluorocarbon GasShibata, E. / Okamoto, H. / Hori, M. et al. | 2007
- 254
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Focused electron beam induced etching and in-situ monitoring: Fabrication of sub-beam sized nanoholesMiyazoe, H. / Utke, I. / Michler, J. / Terashima, K. et al. | 2007
- 256
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Control of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor DepositionNonaka, K. / Tamaru, K. / Nagase, M. / Yamaguchi, H. / Warisawa, S. / Ishihara, S. et al. | 2007
- 258
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Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structuresKim, Sang-Jae / Iwasaki, Koji et al. | 2007
- 260
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The complex mechanisms of Ion Beam Induced DepositionChen, Ping / Alkemade, Paul F.A. / Salemink, Huub W.M. et al. | 2007
- 262
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Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVDMinari, C. / Kometani, R. / Nakamatsu, K. / Kanda, K. / Haruyama, Y. / Kaito, T. / Matsui, S. et al. | 2007
- 264
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Field emission current uniformity and stability of the well-aligned carbon nanotubes synthesized in methanolKikuchi, M. / Gamo, H. / Shibasaki, T. / Ando, T. / Tomokage, H. / Gamo, M. N. et al. | 2007
- 266
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Growth-direction dependence of mechanical properties of carbon nanofiber probes fabricated by ion irradiation methodKitazawa, M. / Ohta, R. / Sugita, Y. / Tanemura, M. et al. | 2007
- 268
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First-Principle Study on Piezoresistance Effect in Silicon NanowiresNakamura, Koichi / Isono, Yoshitada / Toriyama, Toshiyuki et al. | 2007
- 270
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Magnetoresistance of Patterned Films Deposited by Powder Jet using Fe3O4 NanoparticlesKikuchi, M. / Miura, M. / Yamaki, R. / Suzuki, K. / Shibuya, T. / Yoshihara, N. / Kuriyagawa, T. et al. | 2007
- 272
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Nanoshell Magnetic Resonance Imaging Contrast AgentsSu, Chia-Hao / Sheu, Hwo-Shuenn / Lin, Chia-Yun / Huang, Chih-Chia / Lo, Yi-Wei / Pu, Ying-Chih / Weng, Jun-Cheng / Shieh, Dar-Bin / Chen, Jyh-Horng / Yeh, Chen-Sheng et al. | 2007
- 274
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Quantitative observation of membrane-attached bio-molecules on a cell surface using gold nano-particle and atomic force microscopyKim, Hyonchol / Oikawa, Koudai / Yasuda, Kenji et al. | 2007
- 276
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Development of the AFM tweezers systemAyano, K. / Suzuki, M. / Yasutake, M. / Umemoto, T. / Hashiguchi, G. et al. | 2007
- 278
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A finite element mesh tailored to full NIL process modelling: hot embossing, cool-down and stamp releaseMendels, D.-A. / Fernandez-Cuesta, I. / Borrise, X. / Retolaza, A. / Merino, S. / Hansen, O. / Kristensen, A. / Perez-Murano, F. et al. | 2007
- 280
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Imprinted 50 nm features by UV step and stamp imprint lithography methodHaatainen, T. / Majander, P. / Makela, T. / Ahopelto, J. et al. | 2007
- 282
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Evaluation of ultrathin films of polymeric resists for nanoimprint lithographyRymuza, Zygmunt / Koszewski, Adam / Ekwinska, Magdalena / Nowek, Andrzej et al. | 2007
- 284
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Thin NIL films viscosity and rheological nano-probeSvintsov, A.A. / Trofimov, O.V. / Zaitsev, S.I. et al. | 2007
- 286
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Sub-50nm featured polymer stamp fabrication for UV nanoimprint lithographyHong, Sung-Hoon / Hwang, Jae-Yeon / Lee, Heon et al. | 2007
- 288
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Electroplating of Metal Micro-structure using a Resist Micro-machined by Proton Beam WritingUchiya, N. / Furuta, Y. / Nishikawa, H. / Watanabe, T. / Haga, J. / Satoh, T. / Oikawa, M. / Ohkubo, T. / Ishii, Y. / Kamiya, T. et al. | 2007
- 290
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Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O2 Dry Etching MaskYasui, M. / Sugiyama, Y. / Takahashi, M. / Kaneko, S. / Uegaki, J. / Hirabayashi, Y. / Maeda, R. et al. | 2007
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Fundamental investigation on transparent replicated mold using an organic-inorganic hybrid materialWashiya, R. / Ando, T. / Ohkubo, H. / Kitano, N. / Shiota, T. / Miyauchi, A. et al. | 2007
- 294
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Fabrication of nano-patterns composed by metal nanoparticles with photo-nanoimprintKuwahara, Y. / Morita, M. / Yoshimori, K. / Kumamaru, K. / Endoh, H. / Iwanaga, T. / Nagami, T. / Sawada, T. / Sasaki, M. / Goto, M. et al. | 2007
- 296
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Imprinting of polyimide without residual layersPai, I-Ting / Leu, Ing-Chi / Hon, Min Hsiung et al. | 2007
- 298
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Investigation on Laser Assisted Direct Imprinting Parameters for Fabricating Micro- and Nano- StructuresHsiao, Fei-Bin / Lee, Yung-Chun / Chuang, Cheng-Hsin / Ruan, Jun-Yi et al. | 2007
- 300
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Ultrasonic nanoimprint on engineering plastics at room temperatureMekaru, H. / Takahashi, M. et al. | 2007
- 302
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Effect of UV Irradiation on Organic-SOG Patterns Replicated by Room-Temperature NanoimprintingNakamatsu, K. / Takeuchi, Y. / Taneichi, N. / Matsui, S et al. | 2007
- 304
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Tuning of Wetting Behavior on Patterned ZnO Coatings by NanoimprintingKuan, C. Y. / Chou, J. M. / Leu, I. C. / Hon, M. H. et al. | 2007
- 306
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Dependence of Mold Conditions on Demolding Force - Effects of Water Contact Angle and Pattern Shape around Top SurfaceKayama, M. / Ishihara, J. / Kawata, H. / Yasuda, M. / Hirai, Y. et al. | 2007
- 308
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Effect of a photo-crosslinkable chemisorbed monolayer on thermal nanoimprinting of a poly(styrene) thin film on a gold substrateOda, Hirokazu / Ohtake, Tomoyuki / Takaoka, Toshiaki / Nakagawa, Masaru et al. | 2007
- 310
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Grain Size Effect on Nano-Pattern Formability in Direct ImprintYao, C. H. / Wu, C. L. / Sung, C. K. et al. | 2007
- 312
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High density patterns fabricated in low-viscosity thermal-curable epoxy system for thermal-nanoimprint lithographyWu, Chun-Chang / Hsu, Steve Lien-Chung et al. | 2007
- 314
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Microstructuring of dual damascene opening by using hot-embossing combined with etch-back processYoun, Sung-Won / Ueno, Akihisa / Takahashi, Masaharu / Maeda, Ryutaro et al. | 2007
- 316
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Fabrication of photonic crystal-patterned light emitting diodes using nanoimprint lithographyByeon, Kyeong-Jae / Hwang, Seon-Yong / Lee, Heon et al. | 2007
- 318
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Impact of mold geometries and imprinted resist thickness on velocity fields for nanoimprint lithographyLin, Chien-Hung / Chen, Rongshun et al. | 2007
- 320
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Study of process time on polymer characteristics in thermal NILShibata, M. / Tanabe, T. / Kawata, H. / Hirai, Y. et al. | 2007
- 322
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Molecular Dynamics Study of Nanoimprint Lithography for Glass MaterialTada, K. / Kimoto, Y. / Yasuda, M. / Horimoto, S. / Kawata, H. / Hirai, Y. et al. | 2007
- 324
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Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structureLee, J. C. / Leu, I. C. / Hon, M. H. et al. | 2007
- 324
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Fabrication of ZnO sol-gel/PMMA bilayer structureLee, J.C. / Leu, I.C. / Hon, M.H. et al. | 2007
- 326
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Rapid real-time PCR-based nucleotide sequence measurement method using 1480nm infrared laser heatingTerazono, H / hattori, A / Takei, H / Takeda, K / Yasuda, K et al. | 2007
- 328
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Electrokinetic diluting and sorting of droplets in a microfluidic platformCarreras, P. / Mohr, S. / Fielden, P. / Goddard, N. et al. | 2007
- 330
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Trap probability analysis of DNA trap using electric and hydrodrag force fields in taper shaped microchannelTomizawa, Yuichi / Tamiya, Eiichi / Takamura, Yuzuru et al. | 2007
- 332
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Proposal of a Novel Liquid Flow Actuator for Lab-on-chips Operated by Surface Acoustic WaveSaiki, T. / Okada, K. / Utsumi, Y. et al. | 2007
- 334
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Fabrication of Stainless Steel Mold using Electro Chemical Fabrication (ECF) method for Microfluidic BiochipCho, Min-Soo / Lim, Hyun-Woo / Lee, Carodine Sunyong / Cho, Byung-Ki / Cho, Young-sik / Park, Jin-Goo et al. | 2007
- 336
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Micro-Contact Printing of different biomolecules in one step using deformable Poly(dimethylsiloxane)-based stampsChalmeau, J. / Thibault, C. / Carcenac, F / Vieu, C. et al. | 2007
- 338
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DNA analysis microfluidic chip using continuous-flow PCR and CE-ECDJoung, Seung-Ryong / Seo, Il / Lee, Hyun Ho / Kang, C. J. / Kim, Yong-Sang et al. | 2007
- 340
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Fabrication of high-aspect-ratio pillars by Proton Beam Writing and Application to DEP-devicesFuruta, Y. / Uchiya, N. / Nishikawa, H. / Haga, J. / Oikawa, M. / Satoh, T. / Ishii, Y. / Kamiya, T. / Nakao, R. / Uchida, S. et al. | 2007
- 342
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Scale-effects on oscillation characteristics of externally driven micropumpKanda, K. / Ishikawa, S. / Ogawa, J. / Suzuki, T. / Kanno, I. / Kotera, H. et al. | 2007
- 344
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Separation type multiplex PCR chip for detecting male infertilityHa, Seung-Mo / Ju, Jin-Kyoung / Ahn, Yoomin / Hwang, Seung-Young et al. | 2007
- 346
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Fabrication of a Micro-Fluidic Filter/Channel using MEMS TechnologyEun, Duk-Soo / Kong, Dae-Young / Yu, In-Sik / Yoo, Hyun-Jun / Hong, Young-Myong / Jang, Jong-Min / Choi, Pyung / Kong, Seong Ho / Shin, Jang-Kyoo / Lee, Jong-Hyun et al. | 2007
- 348
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Impedance Analysis of HL-60 Cells Uptake of Au Nanoparticles by Using DEP Chip with Multi-layer Electrodes and SU-8 MicrostructuresChuang, C. H. / Wei, C. H. / Hsu, Y. M. / Lu, J. T. / Yeh, C. C. et al. | 2007
- 350
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Fabrication of a New Micro Bio Chip and Flow Cell Cytometry System using MEMS TechnologyInsooByun, / Park, Sekwang et al. | 2007
- 352
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Integration of Ag/AgCl reference electrode with MOSFET-type biosensorChoi, Ho-Jin / Shin, Jang-Kyoo / Choi, Pyung / Lyu, Hong-Kun / Sawada, Kazuaki / Ishida, Makoto et al. | 2007
- 352
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Integration of Ag/AgCI reference electrode with MOSFET-type biosensorChoi, Ho-Jin / Shin, Jang-Kyoo / Choi, Pyung / Lyu, Hong-Kun / Sawada, K. / Ishida, M. et al. | 2007
- 354
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Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrateLi, Tung-Lin / Hsu, Steve Lien-Chung et al. | 2007
- 356
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Various Fatigue Testing of Polysilicon Microcantilever Beam in BendingHocheng, Hong / Hung, Jeng-Nan et al. | 2007
- 358
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Deformation induced by residual stress during deposition process of lateral motion micro electrothermal actuatorsLin, Meng-Ju / Hwan, Chung-Li / Lo, Chih-Ching / Liao, Jung-Nan et al. | 2007
- 360
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Mechanical characteristics of multilayer MEMS componentsPustan, M. / Rymuza, Z. / Schneider, A. / Serra, S.G. / Huq, S.E. et al. | 2007
- 362
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Geometrical study of MOSFET for improved stress sensitivityAhn, Jaewan / Lee, Sang H. / Moon, Wonkyu et al. | 2007
- 364
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Fabrication of High Precision X-ray Mask Using Silicon Dry EtchingNoda, Daiji / Tsujii, Hiroshi / Yashiro, Wataru / Shimada, Kazuma / Hattori, Tadashi et al. | 2007
- 366
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Vacuum Annealing of Gold Electrodes for Surface Cleaning in MEMS Device FabricationSakata, Tomomi / Kuwabara, Kei / Sato, Norio / Ono, Kazuyoshi / Shimoyama, Nobuhiro / Machida, Katsuyuki / Ishii, Hiromu et al. | 2007
- 368
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The Fabrication of Megasonic Agitated Module(MAM) for the Developed Characteristics of Wet EtchingPark, Tae-Gyu / Kim, J.J. / Jung, S.H. / Song, H.J. / Chang, J.K. / Han, D.C. / Yang, S.S. et al. | 2007
- 370
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A Novel Projection Exposure System Using a Gradient-Index Lens ArrayKobayashi, Hiroshi / Horiuchi, Toshiyuki et al. | 2007
- 372
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Helical Patterning onto Fine Pipes and Fabrication of Long-span Micro-coilsKatayama, Masahiro / Horiuchi, Toshiyuki et al. | 2007
- 374
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Evaluation of quality of mechanical components of MEMS pressure sensorsEkwinski, Grzegorz / Trieu, Khiem / Rymuza, Zygmunt et al. | 2007
- 376
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Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature EffectMohd-Yasin, F. / Nagel, D.J. / Ong, D.S. / Korman, C.E. / Chuah, H.T. et al. | 2007
- 378
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Optimum Design and Vibration Suppression of a Piezoelectric Amplified Microactuator Using FEM AnalysisMahboobi, S. H. / Shahidi, A. / Pirouzpanah, S. / Esteki, H. / Sarkar, S. et al. | 2007
- 380
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Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuatorsKanamori, Y. / Kobayashi, T. / Hane, K. et al. | 2007
- 382
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Spot size converter with vertically tapered waveguide core fabricated by sputter etchingKitano, N. / Komano, H. / Ishikawa, H. / Maru, K. / Tanaka, K. / Kashimura, S. / Mimura, H. et al. | 2007
- 384
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Droplet Ejection Behavior in Electrostatic Inkjet DrivingIshida, Yuji / Sogabe, Keigo / Kai, Shintaro / Asano, Tanemasa et al. | 2007
- 386
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Improved Architecture of a Piezoelectric-Technology-Based MicromanipulatorGotze, Holger / Pagel, Lienhard et al. | 2007
- 388
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Novel forming for fabrication of micro V-cut grooves using the optical-elementHuang, Ying-Jui / Chang, Tien-Li / Chou, Hwai-Pwu / Chang, Fuh-Yu / Lin, Cheng-Hsuan et al. | 2007
- 390
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Fabrication of Bistable Prestressed Curved-BeamPane, Ivransa Z. / Asano, Tanemasa et al. | 2007
- 392
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Morphology and growth behavior of P-type Si macropores in submicronmeter prepatternLai, G. L. / Leu, I. C. / Hon, M. H. et al. | 2007
- 394
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Sub-resolution Assist Features in Photolithography Process SimulationLi, Jianliang / Melvin, Lawrence S. et al. | 2007
- 396
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An Examination of Shrink Processes and Double Patterning for Achieving 32 and 22 nm Technologies in Contact/Via HolesNishimura, E. / Kushibiki, M. / Kawasaki, T. / Shimura, S. / Iwao, F. / Carcasi, M. / Scheer, S. / Yaegashi, H. et al. | 2007
- 398
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EUV lithography using the small field exposure tool: recent statusTawarayama, Kazuo / Magoshi, Shunko / Tanaka, Yuusuke / Shirai, Seiichiro / Tanaka, Hiroyuki et al. | 2007
- 400
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Resolution enhancement of EUV microscope using an EUV beam splitterOsugi, Masafumi / Tanaka, Kazuumi / Sakaya, Noriyuki / Hamamoto, Kazuhiro / Watanabe, Takeo / Kinoshita, Hiroo et al. | 2007
- 402
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Emerging Nanopatterning MethodsAhopelto, Jouni et al. | 2007
- 404
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The IMPRINT software: quantitative predictions of the residual resist thickness in nanoimprintKehagias, Nikolaos / Reboud, Vincent / Torres, Clivia M. Sotomayor / Sirotkin, Vadim / Svintsov, Alexander / Zaitsev, Sergey et al. | 2007
- 406
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Optimal resist dispensing in step and flash NILSirotkin, Vadim / Svintsov, Alexander / Zaitsev, Sergey et al. | 2007
- 408
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3D nanofabrication by reverse contact UV nanoimprint lithographyKehagias, N. / Reboud, V. / Chansin, G. / Zelsmann, M. / Jeppesen, C. / Schuster, C. / Reuther, F. / Gruetzner, G. / Torres, C. M. Sotomayor et al. | 2007
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3D fabrication methods for producing tissue engineering scaffoldsGadegaard, N. / Seunarine, K. / Meredith, DO / Khan, M.A. / Tormen, M. / Wilkinson, CDW / Riehle, MO et al. | 2007
- 412
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Nanoimprinted photonic component for light extraction applicationsReboud, V. / Kehagias, N. / Zelsmann, M. / Striccoli, M. / Tamborra, M. / Curri, M. L. / Agostiano, A. / Reuther, F. / Gruetzner, G. / Alducin, J. A. et al. | 2007
- 414
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High-Speed Scanning Electron Microscopy using Distributed-axis Electron OpticsPease, R. Fabian / Pickard, Daniel S. / Tanimoto, Sayaka et al. | 2007
- 416
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Succeeding Optical Lithography with Multiple E-Beam Direct WriteLin, Burn J. et al. | 2007
- 418
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Electron beam projection nanopatterning using crystal lattice images obtained from high resolution transmission electron microscopyLee, H.-S. / Kim, B.-S. / Kim, H.-M. / Wi, J.-S. / Nam, S.-W. / Kim, K.-B. / Arai, Y. et al. | 2007
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Realization and simulation of high aspect ratio micro/nano structures by proton beam writingChatzichristidi, M. / Valamontes, E. / Raptis, I. / van Kan, J.A. / Watt, F. et al. | 2007
- 422
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Ultraviolet Nanoimprint Lithography Applicable to Thin-Film Transistor Liquid-Crystal DisplayLee, Eung-sug / Jeong, Jun-ho / Kim, Ki-don / Choi, Dae-geun / Choi, Jun-hyuk / Lee, Dong-Il / Altun, Ali Ozhan / Lee, Soon-won et al. | 2007
- 424
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Reversal Nanoimprint for Three Dimensional Fluidic BiosystemsPang, S. W. et al. | 2007
- 426
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Continuous 2-Sided Roll to Roll Nanopatterning of a Polymer FilmMakela, T. / Lambertini, V. / Haatainen, T. / Majander, P. / Ahopelto, J. et al. | 2007
- 428
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Photoresist challenges and potential solutions for the 32 nm half-pitch node and beyondWurm, Stefan / Byers, Jeffrey / Zimmerman, Paul / Wallow, Tom / Dean, Kim et al. | 2007
- 430
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Optimization of photo acid generator in the PAG-bonded resistFukkushima, Yasuyuki / Ohnishi, Ryuji / Watanabe, Takeo / Shiotani, Hideaki / Suzuki, Shouta / Hayakawa, Masamichi / Endo, Yusuke / Yamanaka, Tomotaka / Yusa, Shinichi / Kinoshita, Hiroo et al. | 2007
- 432
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Negative-Tone Molecular Resist with High-Sensitivity for EUV and EB LithographyKojima, K. / Mori, S. / Hada, H. / Shiono, D. / Onodera, J. / Oizumi, H. / Nishiyama, I. et al. | 2007
- 434
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Two-dimensional Arrangement of Vertically Oriented Cylindrical Domains of Diblock Copolymers using Graphoepitaxy with Artificial Guiding Pattern LayoutYamaguchi, Toru / Edamoto, Masato / Warisawa, Shin'ichi / Ishihara, Sunao / Yamaguchi, Hiroshi et al. | 2007
- 436
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Outgas Quantification Analysis of EUV ResistsSantillan, Julius Joseph / Kobayashi, Shinji / Itani, Toshiro et al. | 2007
- 438
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Effects of rate constant for deprotection reaction on latent image formation in chemically amplified EUV resistsKozawa, Takahiro / Tagawa, Seiichi / Santillan, Julius Joseph / Toriumi, Minoru / Itani, Toshiro et al. | 2007
- 440
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Investigation of Dual-Focal-Points Optical System with Bright-Field Illumination and Image Processing for UV Nanoimprint AlignmentSuehira, Nobuhito / Terasaki, Atsunori / Okushima, Shingo / Seki, Junichi / Ono, Haruhito et al. | 2007
- 442
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Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal NanoimprintOnishi, Y. / Takagi, H. / Hirai, Y. / Takahashi, M / Maeda, R. / Tanabe, T. / Iriye, Y. et al. | 2007
- 444
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A Novel Contact Imprinting Lithography for Nano-Patterning and Nano-FabricationLee, Y.-C. / Chiu, C.-Y. et al. | 2007
- 446
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Quick Cavity Filling in UV-Nanoimprint Using PentafluoropropaneHiroshima, Hiroshi et al. | 2007
- 448
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Novel fabrication of micro-nano mixed 3D-structure by advanced hybrid nanoimprint lithographyOkuda, K. / Morihara, D. / Kawata, H. / Hirai, Y. et al. | 2007
- 450
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Evaluation of deteriorated anti-stiction layer in NILIshihara, J. / Koszewski, A. / Kayama, M. / Kawata, H. / Rymuza, Z. / Hirai, Y. et al. | 2007
- 452
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Fabrication of ultra smooth mirrors by UV-nanoimprintIto, W. / Kurashima, Y. / Miyamoto, I. / Ishii, H. / Itatani, T. / Hiroshima, H. et al. | 2007
- 454
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Examination of FIB Repair Resolution for UV-Nanoimprint MoldOkada, M. / Nakamatsu, K. / Kometani, R. / Kanda, K. / Haruyama, Y. / Kaito, K. / Matsui, S. et al. | 2007
- 456
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Directional Control of Single-Walled Carbon Nanotubes on Surface-Engineered SapphireImamoto, K. / Ago, H. / Ishigami, N. / Ikeda, K. / Tsuji, M. / Ikuta, T. / Takahashi, K. et al. | 2007
- 458
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Gray-level patterning of gold nanoparticles with scanning probe lithography of self-assembly monolayerSheu, Jeng-Tzong / Wu, Chia-Hao / Liu, Hao-Heng / Chao, Tieng-Sheng et al. | 2007
- 460
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Roll-to-Roll Processable PEO-LC Block Copolymer Template Films with Normally Oriented Nanocylinder Array StructuresIyoda, T. / Kamata, K. / Watanabe, R. / Komura, M. / Ochiai, H. et al. | 2007
- 462
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Molecular engineering for future device structures: self-assembled monolayers as diffusion barriers for Cu metallizationWhelan, C.M. / Caro, A. Maestre / Clemente, F. / Beyer, G. / Tokei, Z. / Sutcliffe, V. et al. | 2007
- 464
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Nanoprocessing of carbon nanotubesNakayama, Yoshikazu et al. | 2007
- 466
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In-situ visualization of local fields at a sharp tungsten emitter using low-voltage scanning transmission electron microscopeFujita, Jun-ichi / Ikeda, Yuta / Ichihasi, Toshinari / Matsui, Shinji et al. | 2007
- 468
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Resonant vibration of cantilevered carbon nanocoilSato, Shun / Pan, Lujun / Nakayama, Yoshikazu / Akita, Seiji et al. | 2007
- 470
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Low-energy electron emission using a Si/SiO2/Si cathode for nano-decompositionNishiguchi, K. / Nagase, M. / Yamaguchi, T. / Fujiwara, A. / Yamaguchi, H. et al. | 2007
- 472
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Novel Neutral Beam Etching Processes for Future Nanoscale DevicesSamukawa, Seiji et al. | 2007
- 474
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Using FIB SEM to control the critical dimensions of nano-structured materialsWilhelmi, O. / Reyntjens, S. / Stokes, D.J. / Roussel, L. / Hubert, D.H.W. et al. | 2007
- 476
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Improvement of electron wavefunction symmetry in InAs/GaAs quantum dots embedded in an InGaAs strain-reducing layerMukai, Kohki / Nakashima, Kenta et al. | 2007
- 478
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A Novel Method Produces Pd nanoparticles for Ink-Jet Printing TechnologyTseng, C.C. / Kuo, J. L. / Chang, C.P. / Hwu, W. H. / Ger, M.D. et al. | 2007
- 480
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Application Oriented Micro-Nano Electro Mechanical SystemsEsashi, Masayoshi / Ono, Takahito et al. | 2007
- 482
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A MEMS Probe Card with High Aspect Ratio Electroplated PostsKim, Bong-Hwan / Park, Bum-Jin / Kum, Byung-Hoon / Kim, Jong-Bok et al. | 2007
- 484
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Electrostatic Inkjet Printing of Carbon Nanotube for Cold Cathode ApplicationShigematsu, Satoshi / Ishida, Yuji / Nakashima, Naotoshi / Asano, Tanemasa et al. | 2007
- 486
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Carbon Nanotube Bio SensorMatsumoto, Kazuhiko et al. | 2007
- 488
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Fabrication Process of Carbon Nanotube FETs Using ALD Passivation for BiosensorsNakashima, Y. / Ohno, Y. / Kishimoto, S. / Okochi, M. / Honda, H. / Mizutani, T. et al. | 2007
- 490
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Fabrication of bottom-up gas sensors based on individual SnO2 nanowires and suspended microhotplatesRomano-Rodriguez, A. / Hernandez-Ramirez, F. / Prades, J.D. / Jimenez-Diaz, R. / Casals, O. / Tarancon, A. / Juli, M. A. / Morante, J. R. / Barth, S. / Mathur, S. et al. | 2007
- 492
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Direct In-junction Characterization of Molecular Switching Devices Based on Self-Assembled Monolayer Embedded in Nanowire JunctionMaitani, Masato / Yoon, Heayoung / Cai, Lintao / Cabarcos, Orlando M. / Mayer, Theresa S. / Allara, David L. et al. | 2007
- 494
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Study on Nonlinear Electrical Characteristics in GaAs-based Three-branch Nanowire Junctions Controlled by Schottky Wrap GatesKasai, S. / Nakamura, T. / Fadzli, S. F. Abd / Shiratori, Y. et al. | 2007
- 496
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Mechanical reliability of micro/nano-structures in MEMS devicesTsuchiya, Toshiyuki et al. | 2007
- 498
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Tuning the Mechanical Properties of SiO2 Thin Film Using Plasma Treatments for MEMS ApplicationsSu, Wang Shen / Huang, Hsin Yu / Fang, Weileun et al. | 2007
- 500
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Silicon Fishbone-Shaped Resonant-Frequency-Tunable MEMS ResonatorMakita, Sho / Tanigawa, Hiroshi / Suzuki, Kenichiro et al. | 2007
- 502
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Analysis of Flow Rate through Channel in New Design of Active Fountain Pen NanolithographyShin, C. / Hwang, K. / Kim, Y. / Kim, H. et al. | 2007
- 504
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Cantilever Fabrication by Force Free Release Transfer ProcessKawata, H. / Ryugou, K. / Ohta, S. / Yasuda, M. / Hirai, Y. et al. | 2007
- 506
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Development of High Performance MEMS-based Fuel Cell for On-Chip Power ApplicationZhang, Y. / Lu, J. / Ichiki, M. / Zhou, H. S. / Maeda, R. et al. | 2007
- 508
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Live cells-based cytotoxic sensor chip fabricated in a microfluidic systemTaniguchi, Akiyoshi et al. | 2007
- 510
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Collagen micro flow channel for in vitro Blood-Brain Barrier modelShibata, K. / Terazono, H. / Hattori, A. / Yasuda, K. et al. | 2007
- 512
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Brain Interface Device for Long-Term Observation of Mouse Brain Using Two-Photon Uncaging MicroscopyTakehara, H. / Mohri, S. / Terakado, R. / Akagi, T. / Noguchi, J. / Kasai, H. / Ichiki, T. et al. | 2007
- 514
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Drug transport measurement for transporter variants using oocyte-based field effect transistorSakata, Toshiya / Miyahara, Yuji et al. | 2007
- 516
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An electrochemical localized surface plasmon resonance biochip based on core-shell structure nanoparticles substrate for sensing of pore forming toxinsHiep, Ha Minh / Chikae, Miyuki / Yamamura, Shohei / Takamura, Yuzuru / Tamiya, Eiichi et al. | 2007
- 518
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Micro patterning of pH gradients by light-addressed electrolysisSuzurikawa, J. / Nakao, M. / Kanzaki, R. / Takahashi, H. et al. | 2007
- 520
-
Fabrication of the functional 3-D micromesh structures coated with TiO2 particles and biocatalystKeino, Satoshi / Matsumura, Hirokazu / Ishioka, Masao / Sato, Hironobu / Shoji, Shuichi et al. | 2007
- 522
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CMOS integrated nanomechanical mass sensors: determination of evaporation rate of femtoliter dropletsArcamone, J. / Ondarcuhu, T. / Dujardin, E. / Rius, G. / Perez-Murano, F. et al. | 2007
- 524
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Design of Low-Driving-Voltage Integrated MEMS Switch with Sticking SuppressionMaeda, Kazuya / Suzuki, Kenichiro et al. | 2007
- 526
-
Fabrication of volcano-structured double-gate FEAs by etch-back techniqueSoda, T. / Nagao, M. / Yasumuro, C. / Kanemaru, S. / Sakai, T. / Saito, N. / Neo, Y. / Aoki, T. / Mimura, H. et al. | 2007
- 528
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Evaluation method of Optical Index of Ta and Ta-based absorber for EUV mask Using Extreme Ultraviolet ReflectometerHosoya, Morio / sakaya, Noriyuki / Nozawa, Osamu / Hamamoto, Kazuo / Nagarekawa, Osamu / Watanabe, Takeo / Kinoshita, Hiroo et al. | 2007
- 530
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Chemically Amplified Molecular Resists for E-Beam LithographyManyam, J. / Gibbons, F.P. / Diegoli, S. / Manickam, M. / Preece, J.A. / Palmer, R.E. / Robinson, A.P.G. et al. | 2007
- 532
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Spatially Controlled Functionalization and Chemical Manipulation to Fabricate 2D Arrays of Gold Nanoparticles onto ITOKhatri, O.P. / Murase, K. / Sugimura, H. et al. | 2007
- 534
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Fabrication of gold-nanoparticle-infiltrated inverse opal structures with both photonic bandgap and surface plasmon resonance characteristicsChen, H. L. / Lin, Y. H. / Chuang, S. Y. / Wan, D. H. / Lin, C. H. et al. | 2007
- 536
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Observation of Size Dependent Structural Defects in Silicon NanowiresAkhtar, Saeed / Usami, K. / Tsuchiya, Y. / Mizuta, H. / Oda, S. et al. | 2007
- 538
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Index| 2007
- C1
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Covers| 2007
- i
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2007 International Microprocesses and Nanotechnology Conference| 2007
- ii
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Copyright page| 2007
- iii
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Preface| 2007
- nil2
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advert| 2007
- v
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2007 International Microprocesses and Nanotechnology Conference Committee Members| 2007
- vii
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MNC 2006 Award| 2007
- xiii
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Table of Contents| 2007