The Research on MEMS S&A Device with Metal-Silicon Composite Structure (English)
- New search for: Hu, Tengjiang
- Further information on Hu, Tengjiang:
- https://orcid.org/0000-0003-0516-9537
- New search for: Fang, Kuang
- New search for: Zhang, Zhiming
- New search for: Jiang, Xiaohua
- New search for: Zhao, Yulong
- New search for: Hu, Tengjiang
- Further information on Hu, Tengjiang:
- https://orcid.org/0000-0003-0516-9537
- New search for: Fang, Kuang
- New search for: Zhang, Zhiming
- New search for: Jiang, Xiaohua
- New search for: Zhao, Yulong
In:
Journal of Microelectromechanical Systems
;
28
, 6
;
1088-1099
;
2019
- Article (Journal) / Electronic Resource
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Title:The Research on MEMS S&A Device with Metal-Silicon Composite Structure
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Contributors:Hu, Tengjiang ( author ) / Fang, Kuang ( author ) / Zhang, Zhiming ( author ) / Jiang, Xiaohua ( author ) / Zhao, Yulong ( author )
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Published in:Journal of Microelectromechanical Systems ; 28, 6 ; 1088-1099
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Publisher:
- New search for: IEEE
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Publication date:2019-12-01
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Size:9980600 byte
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 28, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 933
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Highly-Linear Magnet-Free Microelectromechanical CirculatorsYu, Yao / Michetti, Giuseppe / Kord, Ahmed / Pirro, Michele / Sounas, Dimitrios L. / Xiao, Zhicheng / Cassella, Cristian / Alu, Andrea / Rinaldi, Matteo et al. | 2019
- 941
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Very High-Frequency Silicon Carbide Microdisk Resonators With Multimode Responses in Water for Particle SensingJia, Hao / Feng, Philip X.-L. et al. | 2019
- 954
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Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and GyroscopesAsadian, Mohammad H. / Wang, Yusheng / Shkel, Andrei M. et al. | 2019
- 965
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Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM ResonatorsMiller, James M. L. / Bousse, Nicholas E. / Heinz, David B. / Kim, Hyo Jin K. / Kwon, Hyun-Keun / Vukasin, Gabrielle D. / Kenny, Thomas W. et al. | 2019
- 977
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A Heterogeneous Integrated MEMS Inertial Switch With Compliant Cantilevers Fixed Electrode and Electrostatic Locking to Realize Stable On-StateZhang, Xiaojing / Xiang, Xiaojian / Wang, Yipin / Ding, Guifu / Xu, Xiaoxue / Yang, Zhuoqing et al. | 2019
- 987
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Feasibility Studies on Nafion Membrane Actuated Micropump Integrated With Hollow Microneedles for Insulin Delivery DeviceMishra, Richa / Maiti, Tapas K. / Bhattacharyya, Tarun Kanti et al. | 2019
- 997
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Suspended AlGaN/GaN HEMT NO2 Gas Sensor Integrated With Micro-heaterSun, Jianwen / Sokolovskij, Robert / Iervolino, Elina / Liu, Zewen / Sarro, Pasqualina M. / Zhang, Guoqi et al. | 2019
- 1005
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Real-Time Monitoring for Knee Extensor Muscle Training With Flexible SensorsChuang, Wan-Chun / Chen, Wei-Long et al. | 2019
- 1013
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A Passive Wireless Switching Array Based on MEMS SwitchesWang, Lifeng / Wang, Jinquan / Jin, Yue et al. | 2019
- 1019
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MEMS-Based AlScN Resonating Energy Harvester With Solidified Powder MagnetYarar, Erdem / Meyners, Dirk / Quandt, Eckhard / Fichtner, Simon / Hayes, Patrick / Piorra, Andre / Reimer, Tim / Lisec, Thomas / Frank, Peter / Wagner, Bernhard et al. | 2019
- 1032
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Anodic Aluminum Oxide-Based IR Emitter for High-Speed Infrared Scene ProjectorShin, Young Bong / Kim, Woo Young / Lee, Hee Chul et al. | 2019
- 1039
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A Technique for Estimation of Residual Stress and Young’s Modulus of Compressively Stressed Thin Films Using Microfabricated BeamsBehera, Amruta Ranjan / Shaik, Habibuddin / Rao, G. Mohan / Pratap, Rudra et al. | 2019
- 1055
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A Super Anisotropic Wetting Microstructure Based on Combination of Sharp Edge and Sharp CornerHong, Wen / Tang, Longjun / Sun, Wenxi / Ji, Bowen / Yang, Bin / Liu, Jingquan et al. | 2019
- 1060
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Fluid Temperature Measurement in Aqueous Solution via Electrochemical ImpedanceBaldwin, Alex / Yoon, Eugene / Hudson, Trevor / Meng, Ellis et al. | 2019
- 1068
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A Solid-State Gas Generator Actuated Deorbiter for CubeSatsRoddy, Morgan A. / Huang, Po-Hao Adam et al. | 2019
- 1080
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Ceramic Film Packaging for 2-D Thermal Wind Sensor Using LTCC TechnologyWang, Zhenjun / Ye, Yizhou / Yi, Zhenxiang / Qin, Ming / Long, Kevin / Huang, Qing-An et al. | 2019
- 1088
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The Research on MEMS S&A Device with Metal-Silicon Composite StructureHu, Tengjiang / Fang, Kuang / Zhang, Zhiming / Jiang, Xiaohua / Zhao, Yulong et al. | 2019
- 1100
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T-Shaped Piezoelectric Structure for High-Performance MEMS Vibration Energy HarvestingNabavi, Seyedfakhreddin / Zhang, Lihong et al. | 2019
- 1113
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2019 Index Journal of Microelectromechanical Systems Vol. 28| 2019
- C1
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Table of contents| 2019
- C2
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Journal of Microelectromechanical Systems| 2019
- C3
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Transducers 2019| 2019