Micromachined acoustic-wave liquid ejector (English)
- New search for: Huang, D.
- New search for: Kim, E.S.
- New search for: Huang, D.
- New search for: Kim, E.S.
In:
Journal of Microelectromechanical Systems
;
10
, 3
;
442-449
;
2001
- Article (Journal) / Electronic Resource
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Title:Micromachined acoustic-wave liquid ejector
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Contributors:
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Published in:Journal of Microelectromechanical Systems ; 10, 3 ; 442-449
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Publisher:
- New search for: IEEE
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Publication date:2001-09-01
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Size:229652 byte
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 10, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 317
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Effect of specimen size on Young's modulus and fracture strength of polysiliconSharpe, W.N. / Jackson, K.M. / Hemker, K.J. / Xie, Z. et al. | 2001
- 327
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Comparison of capacitive and feedback-interferometric measurements on MEMSAnnovazzi-Lodi, V. / Merlo, S. / Norgia, M. et al. | 2001
- 336
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Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMSJensen, B.D. / de Boer, M.P. / Masters, N.D. / Bitsie, F. / LaVan, D.A. et al. | 2001
- 347
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Mechanical property evaluation and failure analysis of cantilevered LIGA nickel micropostsStephens, L.S. / Kelly, K.W. / Simhadri, S. / McCandless, A.B. / Meletis, E.I. et al. | 2001
- 360
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Thermal conductivity of doped polysilicon layersMcConnell, A.D. / Uma, S. / Goodson, K.E. et al. | 2001
- 370
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Design and batch fabrication of probes for sub-100 nm scanning thermal microscopyShi, L. / Kwon, O. / Miner, A.C. / Majumdar, A. et al. | 2001
- 379
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An integrated simulator for coupled domain problems in MEMSKirby, R.M. / Karniadakis, G.E. / Mikulchenko, O. / Mayaram, K. et al. | 2001
- 392
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A hermetic glass-silicon package formed using localized aluminum/silicon-glass bondingCheng, Y.-T. / Lin, L. / Najafi, K. et al. | 2001
- 400
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Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applicationsBhusari, D. / Reed, H.A. / Wedlake, M. / Padovani, A.M. / Allen, S.A.B. / Kohl, P.A. et al. | 2001
- 409
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Curvature compensation in micromirrors with high-reflectivity optical coatingsCao, K. / Liu, W. / Talghader, J.J. et al. | 2001
- 418
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A durable, shock-resistant electromagnetic optical scanner with polyimide-based hingesMiyajima, H. / Asaoka, N. / Arima, M. / Minamoto, Y. / Murakami, K. / Tokuda, K. / Matsumoto, K. et al. | 2001
- 425
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A high-precision, wide-bandwidth micromachined tunneling accelerometerCheng-Hsien Liu, / Kenny, T.W. et al. | 2001
- 434
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A high-stiffness axial resonant probe for atomic force microscopyHarley, J.A. / Kenny, T.W. et al. | 2001
- 442
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Micromachined acoustic-wave liquid ejectorHuang, D. / Kim, E.S. et al. | 2001
- 450
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Microfabricated silicon solid immersion lensFletcher, D.A. / Crozier, K.B. / Guarini, K.W. / Minne, S.C. / Kino, G.S. / Quate, C.F. / Goodson, K.E. et al. | 2001
- 460
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Optimal shape design of a rotary microactuatorSunghwan Jung, / Jong Up Jeon, et al. | 2001
- 469
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Self-supporting uncooled infrared microbolometers with low-thermal massAlmasri, M. / Butler, D.P. / Celik-Butler, Z. et al. | 2001
- 477
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MEMS in the Big Apple: MEMS Symposia at the 2001 IMECE| 2001
- 478
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MEMS 2002: IEEE 15th Annual MEMS Conference| 2001
- 479
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Call for Papers -- 2001 IEEE International Electron Devices Meeting| 2001