Three-Dimensional Flexible Neural Opto-Electronic Array with Silk-Based Shuttle-Free Implantation (English)
- New search for: Gu, Chi
- New search for: Yang, Huiran
- New search for: Zhang, Bohan
- New search for: Zhou, Zhitao
- New search for: Sun, Liuyang
- New search for: Li, Meng
- New search for: Wei, Xiaoling
- New search for: Tao, Tiger H.
- New search for: Gu, Chi
- New search for: Yang, Huiran
- New search for: Zhang, Bohan
- New search for: Zhou, Zhitao
- New search for: Sun, Liuyang
- New search for: Li, Meng
- New search for: Wei, Xiaoling
- New search for: Tao, Tiger H.
In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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429-432
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2023
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Three-Dimensional Flexible Neural Opto-Electronic Array with Silk-Based Shuttle-Free Implantation
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Contributors:Gu, Chi ( author ) / Yang, Huiran ( author ) / Zhang, Bohan ( author ) / Zhou, Zhitao ( author ) / Sun, Liuyang ( author ) / Li, Meng ( author ) / Wei, Xiaoling ( author ) / Tao, Tiger H. ( author )
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Published in:
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Publisher:
- New search for: IEEE
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Publication date:2023-01-15
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Size:2007230 byte
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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From ETCH to EDGE AI: Opening New Horizons with Smart Sensor TechnologiesFinkbeiner, Stefan et al. | 2023
- 2
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Sub-300 Millivolt Operation in Nonvolatile 300 nm x 100 nm Phase Change Nanoelectromechanical SwitchMasud, Mohammad Ayaz / Piazza, Gianluca et al. | 2023
- 5
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- 9
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Towards Ultra-High Spatial Resolution Sensing of GHz Ultrasound Using Strain Modulation of Field Effect TransistorsSanghvi, Rohan / Kuo, Justin / Ravi, Adarsh / La, Amit et al. | 2023
- 13
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A Tactile Sensor Array with a Monolithically Integrated Neural Network for Edge ComputationLei, Tengteng / Hu, Yushen / Wong, Man et al. | 2023
- 17
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- 21
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- 25
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- 29
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A Flexible Biosensing Platform for High-Throughput Measurement of Cardiomyocyte ContractilityDou, Wenkun / Maynes, Jason / Sun, Yu et al. | 2023
- 33
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Flexible Bi-directional Brain Computer Interface for Controlling Turning Behavior of MiceYe, Yifei / Tian, Ye / Wang, Han / Cheng, Qian / Zhang, Kuikui / Wang, Xueying / Zhou, Cunkai / Xu, Chengjian / Wei, Xiaoling / Zhou, Zhitao et al. | 2023
- 37
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High Sensitivity Mems Z-Axis Accelerometer with In-Plane Differential ReadoutZega, Valentina / Gattere, Gabriele / Riani, Manuel / Rizzini, Francesco / Frangi, Attilio et al. | 2023
- 41
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- 49
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- 61
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- 65
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- 67
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- 71
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Acoustofluidics: Merging Acoustics and Fluid Mechanics for Biomedical ApplicationsHuang, Tony Jun et al. | 2023
- 72
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- 76
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- 80
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- 84
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- 88
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- 91
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- 95
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3D Spatial Focal Control by Arrayed Optofluidic PrismsLee, Cheng-Hsun / Lee, Yeonwoo / Park, Sung-Yong et al. | 2023
- 99
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- 103
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- 119
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- 123
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- 149
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Ferrite-Rod Antenna Driven Wireless Resoswitch ReceiverZheng, Kevin H. / Jin, Qiutong / Nguyen, Clark T.-C. et al. | 2023
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Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium NiobateWu, Jinbo / Zhang, Shibin / Zheng, Pengcheng / Zhang, Liping / Yao, Hulin / Fang, Xiaoli / Tian, Xuedi / Zhao, Xiaomeng / Wu, Tao / Ou, Xin et al. | 2023
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A CMOS-MEMS Ultrasensitive Thermometer Using Internal Resonance Iuduced Frequency CombsChen, Ting-Yi / Tsai, Chun-Pu / Li, Wei-Chang et al. | 2023
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Fractal Microelectrodes Integrated With the Catheter for Low-Voltage Pulsed Field AblationXu, Mengfei / Qin, Mu / Song, Ziliang / Hong, Wen / Xu, Qingda / Cao, Jiawei / Tu, Kejun / Wang, Longchun / Yang, Bin / Liu, Jingquan et al. | 2023
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Hierarchical Bonding Yield Test Structure for Flexible High Channel-Count Neural Probes Interfacing ASIC ChipsOdenthal, Marie C. / Claar, Victor / Paul, Oliver / Ruther, Patrick et al. | 2023
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Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUTWang, Yiwei / Zhang, Lejia / Cai, Junxiang / Wang, Baosheng / Gu, Yuandong Alex / Lou, Liang / Wang, Xiong / Wu, Tao et al. | 2023
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Needle-Free Drug Injection Using a Shock Wave Focusing System with the Function of Real-Time Microbubble-Based Distance SensingMa, Yibo / Huang, Wenjing / Ichikawa, Keita / Yamanishi, Yoko et al. | 2023
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New Wafer-Level Fabrication of Ultrathin Silicon Insertion Shuttles for Flexible Neural ImplantsSharma, Kirti / Boehler, Christian / Asplund, Maria / Paul, Oliver / Ruther, Patrick et al. | 2023
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Real-Time Dynamic Lactate Detection in a Pipeline Using a Microsensing Needle for ICU Patient Monitoring ApplicationTang, Yuan-Sin / Yang, Tung-Lin / Cheng, Yu-Ting / Tsai, Hsiao-En / Chen, Yih-Shurng et al. | 2023
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Three-Dimensional Flexible Neural Opto-Electronic Array with Silk-Based Shuttle-Free ImplantationGu, Chi / Yang, Huiran / Zhang, Bohan / Zhou, Zhitao / Sun, Liuyang / Li, Meng / Wei, Xiaoling / Tao, Tiger H. et al. | 2023
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A Microfluidic Biosensor for Rapid Detection of Covid-19Muhsin, Sura A. / He, Ying / Al-Amidie, Muthana / Sergovia, Karen / Abdullah, Amjed / Wang, Yang / Alkorjia, Omar / Hulsey, Robert A. / Hunter, Gary L. / Erdal, Zeynep et al. | 2023
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A Loop-Mediated Isothermal Amplification (Lamp)-Based Point-of-Care System for Rapid on-Site Clinical Detection of Sars-Cov-2 VirusesNguyen, Trieu / Vinayaka, Aaydha Chidambara / Huynh, Van Ngoc / Linh, Quyen Than / Andreasen, Sune Zoega / Golabi, Mohsen / Bang, Dang Duong / Moller, Jens Kjolseth / Wolff, Anders et al. | 2023
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A Solar-Driven Wearable Multiplexed Bio-Sensing System For Noninvasive Healthcare Monitoring In SweatSingh, Jujhar / Ning, Bianca / Lee, Paul / Liu, Lin et al. | 2023
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High-Throughput Mass Measurement Of Single Bacterial Cells By Silicon Nitride Membrane ResonatorsSanz-Jimenez, Adrian / Malvar, Oscar / Ruz, Jose J. / Garcia-Lopez, Sergio / Kosaka, Priscila M. / Gil-Santos, Eduardo / Cano, Alvaro / Papanastasiou, Dimitris / Kounadis, Diamantis / Panagiotopoulos, Elias et al. | 2023
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Microfabricated Isothermal Eg-Fet Sensor For Lamp Mediated Crispr/Cas12a Detection Of Hepatitis C VirusHo, Hsin-Ying / Kao, Wei-Sin / Deval, Piyush / Yu, Ling-Shan / Lin, Che-Hsin et al. | 2023
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Smart Electrode Array for Cochlear ImplantsItawi, Ahmad / Ghenna, Sofiane / Tourrel, Guillaume / Grondel, Sebastien / Plesse, Cedric / Nguyen, Tran Minh Giao / Vidal, Frederic / Adagolodjo, Yinoussa / Xun, Lingxiao / Zheng, Gang et al. | 2023
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A Three-Dimensional Artificial Intestinal Tissue With A Crypt-Like Inner SurfaceTanaka, Shuma / Itai, Shun / Onoe, Hiroaki et al. | 2023
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Tissue-Engineered Pennate Muscles On A ChipIto, Motoki / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
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Weight Training Device to Promote Maturation in Skeletal Muscle TissuesMotoi, Kentaro / Jo, Byeongwook / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
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Microsystem Vibrating Mesh Atomizer With Integrated Microheater For High Viscosity Liquid Aerosol GenerationSharma, Pallavi / Vazquez, Irma Rocio / Jackson, Nathan et al. | 2023
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Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems ResonatorsSchneider, Michael / Kosl, Bernhard / Alasatri, Suresh / Magnet, Ingrid A.M. / Schmid, Ulrich et al. | 2023
- 475
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Silicon Compatible Process To Integrate Impedance Cytometry With Mechanical CharacterizationRezard, Quentin / Shaik, Faruk Azam / Gerbedoen, Jean Claude / Cleri, Fabrizio / Collard, Dominique / Lagadec, Chann / Tarhan, Mehmet C. et al. | 2023
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Sorting Of Extracellular Vesicles By Using Optically-Induced Dielectrophoresis On An Integrated Microfluidic ChipSoong, Wei-Jen / Wang, Chih-Hung / Chen, Yi-Sin / Chen, Chihchen / Lee, Gwo-Bin et al. | 2023
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A Reprogrammable Mem Switch Utilizing Controlled Contact WeldingEsatu, Tsegereda K. / Kam, Hei / Tatum, Lars P. / Hu, Xiaoer / Sikder, Urmita / Almeida, Sergio / Wu, Junqiao / Liu, Tsu-Jae King et al. | 2023
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Micromechanical RSSI Based on Force Interaction Derived Tapping Bandwidth Variation in VIBRO-IMPACT ResonatorsHuang, Yi-Hsuan / Zheng, Hong-Sen / Tsai, Chun-Pu / Li, Wei-Chang et al. | 2023
- 491
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Wake-Up IoT Wireless Sensing Node Based on a Low-G Threshold mems Inertial Switch with Reliable ContactsGhosh, Sagnik / Goh, Duan Jian / Koh, Yul / Sharma, Jaibir / Da Toh, Wei / Chen, Weiguo / Zhang, Yao / Ng, Eldwin / Lal, Amit / Lee, Joshua E.-Y. et al. | 2023
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Artificial Intelligence (AI)-Enhanced E-Skin with Artificial Synapse Sensory Output for Humanoid Robotic Finger of Multimodal PerceptionGuo, Xinge / Lee, Chengkuo et al. | 2023
- 499
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Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network ModelHaneda, Kotaro / Matsudaira, Kenei / Takahashi, Hidetoshi et al. | 2023
- 503
-
Trial-and-Error Learning for MEMS Structural Design Enabled by Deep Reinforcement LearningSui, Fanping / Yue, Wei / Zhang, Ziqi / Guo, Ruiqi / Lin, Liwei et al. | 2023
- 507
-
Fully Microelectromechanical Non-Volatile Memory CellWorsey, Elliott / Kulsreshath, Mukesh K. / Tang, Qi / Pamunuwa, Dinesh et al. | 2023
- 511
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Nonvolatile State Configuration of Nano-Watt Parametric ISING Spins Through Ferroelectric Hafnium Zirconium Oxide MEMS VaractorsCasilli, Nicolas / Kaya, Onurcan / Kaisar, Tahmid / Davaji, Benyamin / Feng, Philip X.-L. / Cassella, Cristian et al. | 2023
- 515
-
Physical Reservoir Computing Using Nonlinear MEMS Resonator Having High Memory Capacity at "Edge of Chaos"Takemura, Hiroki / Mizumoto, Takahiro / Banerjee, Amit / Hirotani, Jun / Tsuchiya, Toshiyuki et al. | 2023
- 519
-
Programmable Ferroelectric HZO NEMS Mechanical Multiplier for in-Memory ComputingJadhav, Shubham / Gund, Ved / Lal, Amit et al. | 2023
- 522
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Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time MonitoringHoffmann, Martin / Schmitt, Philip / Wittemeier, Steffen / Schaller, Falk / Shaporin, Alexey / Stockel, Chris / Geneis, Volker / Forke, Roman / Hedayat, Christian / Hilleringmann, Ulrich et al. | 2023
- 526
-
A New Finding on Nonlinear Damping and Stiffness of Flexural Mode Capacitive MEMS ResonatorsChen, Hung-Yu / Li, Ming-Huang / Li, Sheng-Shian et al. | 2023
- 530
-
Exploiting Parametric Instability in Bistable MEMS ActuatorsPlatz, Daniel / Fabian, Johannes / Samm, Elisabeth / Mortada, Mahdi / Schneider, Michael / Schmid, Ulrich et al. | 2023
- 534
-
First Prototype of Polymer Micromachined Flapping Wing Nano Air VehicleRashmikant / Suetsugu, Ryotaro / Onishi, Minato / Ishihara, Daisuke et al. | 2023
- 538
-
Iterative Learning Control for Quasi-Static MEMS Mirror with Switching OperationMacho, Matthias / Yoo, Han Woong / Schroedter, Richard / Schitter, Georg et al. | 2023
- 542
-
Mz Atomic Magnetometer Using A 3D Mems Glass Alkali Vapor Cell With Vertical SidewallsZhang, Jin / Zhang, Jianfeng / Li, Wenqi / Wang, Ziji / Shang, Jintang et al. | 2023
- 546
-
On-Chip Heating Noise Suppression of 3d Chip-Scale Atomic Magnetometer Using Single-Layer Shifted HeaterWang, Ziji / Wu, Junming / Zhang, Jin / Shang, Jintang et al. | 2023
- 550
-
Labor-Saving Platform for Characterization of Membrane Proteins by Automated Monitoring and Data ReportingOgishi, Kazuto / Osaki, Toshihisa / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
- 554
-
Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial SensorsMiani, Theo / Gurung, Lokesh / Sobreviela-Falces, Guillermo / Young, Douglas / Baker, Colin / Seshia, Ashwin A. et al. | 2023
- 558
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CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching TechniqueWeng, Wei-Yang / Hou, Hung-Yu / Chao, Yueh-Jung / Liaw, Shwu-Jen / Chien, Jun-Chau et al. | 2023
- 562
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Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS TechniqueLee, Ya-Chu / Chien, Tung-Lin / Fang, Chi-Te / Huang, Yuanyuan / Sung, Wei-Lun / Chu, Yen-Chang / Chen, Rongshun / Fang, Weileun et al. | 2023
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Monolithically and Vertically Integrated Environmental Sensing Hub with Novel Air-Based Humidity Sensor DesignChien, Tung-Lin / Huang, Yuanyuan / Shih, Fuchi / Fang, Weileun et al. | 2023
- 570
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A Self-Corrected, Self-Cleaned MEMS and Suitable for Advanced Foundry Multi-Project Wafer (MPW)Kumar, Sushil / Arya, Dhairya Singh / Garg, Manu / Singh, Pushpapraj et al. | 2023
- 574
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Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature DetectionLi, Yu-Hsuan / Chien, Tung-Lin / Shih, Fuchi / Huang, Yuanyuan / Fang, Weileun et al. | 2023
- 578
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Piezoresistive Pressure Sensor with Monolithically Integrated Amplifier Based on Metal-Oxide TransistorsShi, Runxiao / Lin, Dequan / Chau, Kevin / Wong, Man et al. | 2023
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A Performance Enhancement Method for Thermopile Sensors Using a Chip Probe Test SystemShi, Meng / Li, Mao / Ni, Yue / Zhang, Chenchen / Zhou, Na / Mao, Haiyang / Huang, Chengjun et al. | 2023
- 586
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Characterizing Inductively-Coupled-Plasma Etching of Single Crystalline Lithium Tantalate for Micro-Acoustic ApplicationsMajd, Yasaman / Castro, Jorge Manrique / Mansoorzare, Hakhamanesh / Abdolvand, Reza et al. | 2023
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Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMSMoll, Philipp / Pfusterschmied, Georg / Schmid, Ulrich et al. | 2023
- 594
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A 3D-Printed Functional MEMS AccelerometerPagliano, Simone / Marschner, David E. / Maillard, Damien / Ehrmann, Nils / Stemme, Goran / Braun, Stefan / Villanueva, Luis Guillermo / Niklaus, Frank et al. | 2023
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A Full 3D Printing Method for Monolithic Integration of an Accelerometer and a Force SensorLiu, Guandong / Wang, Changhai / Wang, Kexin / Jia, Zhili / Luo, Ruiqi / Ma, Wei et al. | 2023
- 602
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Characterization of Vapor HF Sacrificial Etching Through Submicron Relase Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration SealGong, Tianjiao / Suzuki, Yukio / Khan, Muhammad J. / Hiller, Karla / Tanaka, Shuji et al. | 2023
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Damage Profile Modeling and Experiment of Silicon Carbide Substrates in Micro-Nano Structure Fabricated By Helium Focused ION BeamGao, Shupeng / Chen, Xi / Chen, Qianhuang / Li, Qi / Xing, Yan et al. | 2023
- 610
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Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup ArrayKagawa, Gakuto / Takahashi, Hidetoshi et al. | 2023
- 613
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Parametric Amplification and Phononic Frequency Comb Generation in MoS2 Nanoelectromechanical ResonatorsYousuf, S M Enamul Hoque / Wang, Yunong / Lee, Jaesung / Shaw, Steven W. / Feng, Philip X.-L. et al. | 2023
- 617
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Parylene-N as a high Temperature thin Film Piezoelectric MaterialJackson, Nathan / Kunwar, Deepak et al. | 2023
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Silicon Carbide-on-Insulator Thermal-Piezoresistive Resonator for Harsh Environment ApplicationSun, Baoyun / Mo, Jiarui / Zhang, Hemin / van Zeijl, Henk W. / van Driel, Willem D. / Zhang, Guoqi et al. | 2023
- 625
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Spin Coating of Highly Aligned Agcn Microwires Epitaxially Grown on 2d MaterialsHam, Jimin / Lim, Jaemook / Lim, Joowon / Jang, Gunyoung / Lee, Sueng Yoon / Lim, Dohyun / Hong, Sukjoon / Lee, Won Chul et al. | 2023
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Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer ProcessLukas, Sebastian / Kraiem, Ines / Prechtl, Maximilian / Hartwig, Oliver / Grundmann, Annika / Kalisch, Holger / Kataria, Satender / Heuken, Michael / Vescan, Andrei / Duesberg, Georg S. et al. | 2023
- 631
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TCF-Improved SH0 Mode Acoustic Resonators Based on 30°YX-LINBO3/SIO2 MembraneWu, Shuxian / Wu, Zonglin / Qian, Hangyu / Bao, Feihong / Tang, Gongbin / Xu, Feng / Zou, Jie et al. | 2023
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Wafer Scale Multilayer Graphene Based Brain Probes by Spin-Spraying Methods for Magnetic Resonance ImagingTu, Kejun / Guo, Zhejun / Xu, Mengfei / Yang, Bin / Liu, Jingquan et al. | 2023
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3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic NanolithographyBerenschot, Erwin J.W. / Pordeli, Yasser / Kooijman, Lucas J. / Janssens, Yves L. / Tiggelaar, Roald M. / Tas, Niels R. et al. | 2023
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A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression BondingJuarez, Dolores Manrique / Mathieu, Fabrice / Libaude, Guillaume / Bourrier, David / Charlot, Samuel / Mazenq, Laurent / Conedera, Veronique / Salvagnac, Ludovic / Dufour, Isabelle / Nicu, Liviu et al. | 2023
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Electromechanically Stable Interconnection between LIG and Thick Dam-Shaped Metallic Electrode via Stored AG Microparticle SolutionPark, Saeyoung / Shin, Yoo-Kyum / Seo, Min-Ho et al. | 2023
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Free-Standing Membranes with Self-Assembled Nanopore Arrays for Tem Observation of Liquid SamplesLim, Joowon / Ham, Jimin / Jeon, Sungho / Bae, Yuna / Kang, Minho / Lee, Sueng Yoon / Park, Jungwon / Lee, Won Chul et al. | 2023
- 653
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Nonplanar Nanofabrication Via Interface EngineeringSpector, Sarah O. / Satterthwaite, Peter F. / Niroui, Farnaz et al. | 2023
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Wafer-Level Fabrication of Conformal Sub 10-NM NanogapsTope, Sayali / Noh, Seungbeom / Kim, Hanseup et al. | 2023
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Mems Resonator Vacuum-Sealed by Silicon Migration and Hydrogen OutdiffusionKhan, Muhammad Jehanzeb / Suzuki, Yukio / Gong, Tianjiao / Tsukamoto, Takashiro / Tanaka, Shuji et al. | 2023
- 665
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MEMS Thin-Film Vacuum Package Utilizing Glow Discharge GetterMaharshi, Vikram / Kumar, Manjeet / Agarwal, Ajay / Mitra, Bhaskar et al. | 2023
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LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional ActuationLu, Yaoqing / Liu, Kangfu / Wang, Yuxi / Nie, Ran / Wu, Tao et al. | 2023
- 673
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A Piezoelectric MEMS Speaker with Stretchable Film SealingXu, Linbing / Sun, Mingchao / Zhang, Menglun / Liu, Chengze / Yang, Xiaopeng / Pang, Wei et al. | 2023
- 677
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Broadband MEMS Speaker by Single-Way Multi-Resonance Array with Acoustic Damping Tuning: A Proof of ConceptSun, Mingchao / Zhang, Menglun / Liu, Chengze / Pang, Wei et al. | 2023
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Ionic Liquid Electrospray Thruster with Two-Stage Electrodes On Glass SubstrateNishimura, Akane / Tsuchiya, Toshiyuki / Takao, Yoshinori et al. | 2023
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Monolithic Integration of PZT Actuation Units of Various Activated Resonances for Full-Range Mems Speaker ArrayCheng, Hsu-Hsiang / Lo, Sung-Cheng / Chen, Yu-Chen / Cheng, Ming-Ching / Wei, Ting-Chou / Wu, Mingching / Fang, Weileun et al. | 2023
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Pull-in Voltage Reduction in Electrostatic Airgap Actuator Using 12 NM-Ultrathin Internal Dielectric TransductionVerma, Satish K. / Mitra, Bhaskar et al. | 2023
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A Reverse Electrowetting-On-Dielectric (Rewod) Energy Harvester Using Nonwetting Gallium Coated Electrode And Ultrathin Gallium Oxide Shell As Dielectric LayerJeong, Jinwon / Suh, Bokyung / Lee, Jeong Bong JB et al. | 2023
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Asymmetric Quad Leg Orthoplanar Spring for Wideband Piezoelectric Micro Energy HarvestingMohammadi, Ali / Sadrafshari, Shamin / Shokrani, Alborz / Bowen, Chris R. et al. | 2023
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Evaluation of Thermoelectric Properties of Monolithically-Integrated Core-Shell Si Nanowire BridgesUesugi, Akio / Nishiyori, Shusuke / Sugano, Koji / Isono, Yoshitada et al. | 2023
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Glaze Tile-Inspired Liquid-Solid Power Generator for Continuous Water Flow Energy HarvestingNie, Dezhi / Lyu, Boming / Hu, Yongbo / Zhang, Jian / Fu, Yongqing / Chang, Honglong / Tao, Kai et al. | 2023
- 709
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MEMS Cantilevered Energy Harvester with Tapered Thickness for Stress ControlYokota, Takahito / Kanda, Kensuke / Fujita, Takayuki / Maenaka, Kazusuke et al. | 2023
- 712
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Tapered Helmholtz Resonator Wind Energy Harvester Driven by AeroacousticsHua, Chen / Zhen, Liyun / Liu, Jingquan / Yang, Bin et al. | 2023
- 716
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Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted MicromirrorsMartini, Irene / Alessandri, Anna / Carminati, Marta / Carminati, Roberto / Ferrarini, Paolo / Gatti, Daniela A. L. / Gianola, Riccardo / Lazarova, Borka / Lazzari, Carla M. / Nomellini, Andrea et al. | 2023
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Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-MirrorChen, Si-Han / Liu, Shih-Chi / Cheng, Hao-Chien / Lin, Hung-Yu / Liang, Kai-Chih / Wu, Mingching / Fang, Weileun et al. | 2023
- 724
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Fully-Flexible Micro-Scale Actuator Array with the Liquid-Gas Phase Change MaterialsSim, Sangjun / Bae, Kyubin / Kim, Jongbaeg et al. | 2023
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A Novel Comb Design for Enhanced Power and Bandwidth in Electrostatic Mems Energy ConvertersLi, Jinglun / Ouro-Koura, Habilou / Arnow, Hannah / Nowbahari, Arian / Galarza, Matthew / Obispo, Meg / Tong, Xing / Azadmehr, Mehdi / Hella, Mona M. / Tichy, John A. et al. | 2023
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A Hybrid Nanogenerator-Driven Self-Powered Wearable Perspiration Monitoring SystemZahed, Md Abu / Rana, S M Sohel / Sharifuzzaman, Md / Jeong, Seonghoon / Pradhan, Gagan Bahadur / Song, Hye Su / Park, Jae Yeong et al. | 2023
- 736
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A Monolithic Integrated and Transparent Microsystem Constructed by Using Amorphous InGaZnO FilmJia, Bin / Zhang, Chao / Huang, Xiaodong et al. | 2023
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Flowing Water Enables Steerable Charge Distribution on Electret SurfaceLyu, Boming / Zhang, Jian / Li, Yunjia / Fu, Yongqing / Chang, Honglong / Yuan, Weizheng / Tao, Kai et al. | 2023
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Self-Powered Flexible Piezoelectret Array for Wearable ApplicationsYang, Hao / Pinto, Rui M. R. / Gonzalez, Pedro / Ainla, Alar / Faraji, Mohammadmahdi / Vinayakumar, K. B. et al. | 2023
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A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying TrenchesLin, Dequan / Wong, Man / Chau, Kevin et al. | 2023
- 752
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A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance EnhancementJiao, Rui / Yang, Gai / Wang, Ruoqin / Tang, Yue / Liu, Zhongyi / Xie, Huikai / Yu, Hongyu / Wang, Xiaoyi et al. | 2023
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A Thermal Airflow Sensor Based on Mn-Co-Ni-O Thin FilmWang, Jie / Liu, Yunfei / Zhu, Zhezheng / Gao, Chengchen / Yang, Zhenchuan / Hao, Yilong et al. | 2023
- 760
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Highly Sensitive Wave Height Sensor with MEMS Piezoresistive Cantilever and Waterproof MembraneHirayama, Takuto / Takahashi, Hidetoshi et al. | 2023
- 763
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MEMS Capacitance Diaphragm Gauge With Two Sealed Reference CavitiesHan, Xiaodong / Li, Jingzhen / Li, Gang / Feng, Yongjian et al. | 2023
- 767
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Towards a Gas Independent Thermal Flow MeterKenari, Shirin Azadi / Wiegerink, Remco J. / Sanders, Remco G.P. / Lotters, Joost C. et al. | 2023
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An Integrated Mems Device for in-Situ Four-Probe Electro-Mechanical Characterization of PT NanobeamHuang, Yuheng / Nie, Meng / Li, Binghui / Yin, Kuibo / Sun, Litao et al. | 2023
- 775
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Fingerlike Tactile Texture Integrated Sensor with Cold and Warm Sensations of Sub-MM Spatial ResolutionMise, Nachi / Kozasa, Mitsuki / Terao, Kyohei / Shimokawa, Fusao / Takao, Hidekuni et al. | 2023
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Modified Beam Structures for Improved Resonant SensingGhaderi, Erfan / Bahreyni, Behraad et al. | 2023
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Occlusal Paper-Based Flexible Pressure Sensor for in Situ Measuring Oral Occlusal ForceWang, Wenduo / Zhang, Xin / Zhao, Ning / Liu, Jingquan / Yang, Bin et al. | 2023
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Suction Cup Array Working Also as Tactile Sensor to Detect Cups Deformation Using KCF and CNNShiratori, Toshihiro / Sakamoto, Jinya / Kumokita, Yuki / Suzuki, Masato / Takahashi, Tomokazu / Aoyagi, Seiji et al. | 2023
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Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity ImprovementHuang, Yuanyuan / Chen, Yen-Lin / Lin, Shihwei / Shih, Fuchi / Hu, Zihsong / Fang, Weileun et al. | 2023
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1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator via Dip-Cast for VOCS SensingPerello-Roig, Rafel / Verd, Jaume / Bota, Sebastia / Soberats, Bartomeu / Costa, Antonio / Segura, Jaume et al. | 2023
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Application of Deep Learning Network for Humidity Compensation of Semiconductor Metal Oxide Gas SensorsKang, Mingu / Cho, Incheol / Park, Nkyu et al. | 2023
- 803
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Development of Monolithic Micro-Led Gas Sensor Based E-Nose System for Real-Time, Selective Gas PredictionLee, Kichul / Kang, Mingu / Park, Inkyu et al. | 2023
- 807
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Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing CapabilitiesYue, Xiawei / Wei, Shuai / Zhang, Pingping / Zhou, Zhitao / Tao, Tiger H. / Qin, Nan et al. | 2023
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Enhancement of Sensitivity in Photonic Crystal Based Chemical Sensor Using Chemo-Mechanical Bilayer EffectLee, Seyeon / Banavathi, Naik T. / Kang, Dongwon / Kang, Sookyung / Cho, Kyungsuk / Kim, Jungwook / Park, Jungyul et al. | 2023
- 814
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Metal Ion Recognition Sensor Based on Resistive Switching EffectKang, Tian / Chen, Yusa / Lin, Guanzhou / Jin, Shengxiao / Li, Liye / Sun, Hongshun / Hu, Senyong / Wu, Wengang et al. | 2023
- 818
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Multi-Hotspot MID-IR Nanoantennas with Matched Loss and High-Intensity Near-Field for Sub-ppm-Level Gas DetectionZhou, Hong / Ren, Zhihao / Xu, Cheng / Xu, Liangge / Guo, Xinge / Lee, Chengkuo et al. | 2023
- 822
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Palladium Based Mems Hydrogen SensorsHoffmann, Max / Wienecke, Marion / Lengert, Maren / Weidner, Michael H. / Heeg, Jan et al. | 2023
- 826
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Selective Discrimination of Ppb-level Vocs Using Mos Gas Sensor in Pulse-Heating Mode with the Modified Hill's ModelNiu, Gaoqiang / Zhuang, Yi / Hu, Yushen / Liu, Zong / Wang, Fei et al. | 2023
- 830
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Thermal Conductivity Detector (TCD)-Type Gas Sensor Based on the Suspended 1D Nanoheater for IoT ApplicationsCho, Wootaek / Kwak, Jong-Hyun / Kim, Taejung / Shin, Heungjoo et al. | 2023
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120 ppm Quality Factor Thermal Stability from -40 ℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic ControlCui, Jian / Zhao, Qiancheng et al. | 2023
- 837
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A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and DriftGao, Le / Li, Fangzheng / Zhang, Jian / Cai, Bingyang / Wu, Wenjie / Tu, Liangcheng et al. | 2023
- 841
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A MEMS-Based Gravimeter for Simultaneous Vertical and Horizontal Earth Tides MeasurementsYang, Lujia / Xu, Xiaochao / Wang, Qian / Tian, Ji'Ao / Fang, Yanyan / Zhao, Chun / Wu, Wenjie / Hu, Fangjing / Tu, Liangcheng et al. | 2023
- 845
-
A Novel Multiple-Folded Beam Disk Resonator for Maximizing the Thermoelastic Quality FactorSun, Xiaopeng / Zhou, Xin / Yu, Lei / He, Kaixuan / Wu, Xuezhong / Xiao, Dingbang et al. | 2023
- 849
-
A Time-Series Configuration Method of Mode Reversal in MEMS Gyroscopes Under Different Temperature-Varying ConditionsChen, Liangqian / Miao, Tongqiao / Li, Qingsong / Wang, Peng / Li, Junjian / Wu, Xuezhong / Xiao, Dingbang / Xi, Xiang et al. | 2023
- 853
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Acoustically Isolated MEMS Baw GyroscopesSerrano, Diego Emilio / Rahafrooz, Amir / Younkin, Duane / Nunan, Kieran / Dalal, Mitul / Pal, Sagnik / Jafri, Ijaz / Hiraoka, S. et al. | 2023
- 857
-
Active Quality Factor Stabilization of MEMS Resonator Utilizing Electrical Dissipation RegulationZhao, Yang / Shi, Qin / Xia, Guoming / Qiu, Anping et al. | 2023
- 861
-
Demonstration of Gyro-Less North Finding Using a T-Shaped MEMS Differential Resonant AccelerometerMasunishi, Kei / Ogawa, Etsuji / Ono, Daiki / Miyazaki, Fumito / Hiraga, Hiroki / Uchida, Kengo / Ogawa, Jumpei / Murase, Hideaki / Tomizawa, Yasushi et al. | 2023
- 865
-
Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance ActuationChen, Jianlin / Zhang, Hemin / Tsukamoto, Takashiro / Kraft, Michael / Tanaka, Shuji et al. | 2023
- 869
-
Modeling Stress Effects on Frequencies of a Mems Ring GyroscopeHosseini-Pishrobat, Mehran / Uzunoglu, Baha Erim / Tatar, Erdinc et al. | 2023
- 873
-
Rate Integrating Gyroscope Tuned by Focus Ion Beam Trimming and Independent CW/CCW Modes ControlChen, Jianlin / Tsukamoto, Takashiro / Langfelder, Giacomo / Tanaka, Shuji et al. | 2023
- 877
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Temperature Dependence of Quality Factors at High Frequencies in MEMS GyroscopesSchiwietz, Daniel / Weig, Eva M. / Degenfeld-Schonburg, Peter et al. | 2023
- 881
-
0.5MM×0.5MM 150KPA-Measure-Range High-Temperature Pressure Sensor with High-Performance and Low Fabrication-CostLi, Peng / Li, Wei / Chen, Changnan / Sun, Ke / Liu, Min / Wu, Sheng / Pan, Pichao / Wang, Jiachou / Li, Xinxin et al. | 2023
- 885
-
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image RecognitionLiu, Yuxian / Zhao, Qiancheng / Zhang, Dacheng / Cui, Jian et al. | 2023
- 889
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Micromachining Fused Silica Micro Shell Resonator with Quartz Glass Mold by Thermal ReflowSu, Zhaoxi / Luo, Bin / Tang, Qiankai / Zhu, Linqian / Shang, Jintang et al. | 2023
- 893
-
Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas SensorsLi, Mingjie / Luo, Wenxin / Liu, Xiaojiang / Niu, Gaoqiang / Wang, Fei et al. | 2023
- 897
-
Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical ResonatorsLiu, Yuncong / Enamul Hoque Yousuf, S M / Qamar, Afzaal / Rais-Zadeh, Mina / Feng, Philip X.-L. et al. | 2023
- 901
-
A Novel Piezoresistive Pressure Sensor Based on Cr-doped V2O3 Thin FilmGidts, Michiel / Hsu, Wei-Fan / Payo, Maria Recaman / Kushwaha, Shashwat / Wang, Chen / Ceyssens, Frederik / Reynaerts, Dominiek / Locquet, Jean-Pierre / Kraft, Michael et al. | 2023
- 905
-
A Novel Feedthrough Cancellation Technique for Piezoelectric MEMS Resonant Sensors in Ionic Liquid MediumWu, Cheng-Yen / Lin, Zhong-Wei / Li, Sheng-Shian et al. | 2023
- 909
-
Characterization of Packaging Stress with a Capacitive Stress Sensor ArrayVeske, Tolga / Erkan, Derin / Tatar, Erdinc et al. | 2023
- 913
-
Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas SensorsZhuang, Yi / Niu, Gaoqiang / Wu, Lang / Wang, Fei et al. | 2023
- 917
-
Multiple Parameter Decoupling Using a Single Resonant MEMS Sensor via Blue Sideband ExcitationXi, Jingqian / Xu, Lei / Wang, Yuan / Hu, Fangjing / Li, Chengxin / Wang, Linlin / Liu, Huafeng / Wang, Chen / Kraft, Michael / Zhao, Chun et al. | 2023
- 921
-
Diamond Nanowires Array Prepared by Annealing Nano-Crystalline Diamond in Air and Its Application in Field EmissionWang, Yang / Lin, Chen / Zhang, Jinwen et al. | 2023
- 925
-
Quantified Stress Relaxation in Carbon Nanotube ResonatorsVollmann, Morten / Roman, Cosmin / Haluska, Miroslav / Hierold, Christofer et al. | 2023
- 929
-
Self-Referenced Temperature Sensors Based on Cascaded Silicon Ring ResonatorZhu, Xiantao / You, Minmin / Lin, Zude / Yang, Bin / Liu, Jingquan et al. | 2023
- 933
-
A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos ArrayLedesma, Eyglis / Zamora, Ivan / Torres, Francesc / Uranga, Arantxa / Barniol, Nuria et al. | 2023
- 937
-
An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and CompressibilityLedesma, Eyglis / Zamora, Ivan / Yanez, Jesus / Uranga, Arantxa / Barniol, Nuria et al. | 2023
- 941
-
Auto-Positioning and Haptic Stimulations via A 35 mm Square Pmut ArrayYue, Wei / Peng, Yande / Liu, Hanxiao / Xia, Fan / Sui, Fanping / Umezawa, Seiji / Ikeuchi, Shinsuke / Aida, Yasuhiro / Lin, Liwei et al. | 2023
- 945
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Body Force Based Droplet Ejection by GHz Acoustic Micro-TransducerZhang, Haitao / Zhou, Yangchao / Zhang, Menglun / Guo, Wenlan / Sun, Chen / Duan, Xuexin / Pang, Wei et al. | 2023
- 949
-
Bone Conduction Pickup Based on Piezoelectric Micromachined Ultrasonic TransducersLiu, Chongbin / Wang, Xiangyang / Xie, Yong / Wu, Guoqiang et al. | 2023
- 953
-
Breaking the Dead Zone Limitation of Pmuts Based on a Phase Shift of Driving Waveform with Window FunctionLiu, Chun-You / Chang, Chin-Yu / Li, Sheng-Shian et al. | 2023
- 957
-
Drone-Mounted Low-Frequency pMUTS for > 6-Meter Rangefinder in AirLiu, Hanxiao / Peng, Yande / Yue, Wei / Umezawa, Seiji / Ikeuchi, Shinsuke / Aida, Yasuhiro / Chen, Chunming / Tsao, Peggy / Lin, Liwei et al. | 2023
- 961
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Mass Produced Micromachined Ultrasonic Time-Of-Flight Sensors Operating in Different Frequency BandsPrzybyla, Richard J. / Shelton, Stefon E. / Lee, Cathy / Eovino, Benjamin E. / Chau, Quy / Kline, Mitchell H. / Izyumin, Oleg I. / Horsley, David A. et al. | 2023
- 965
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MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable RotatingLi, Jiaqi / Sun, Zhenhuan / Jia, Yuyu / Li, Teng / Lu, Haojian / Zhao, Lurui / Liu, Hai / Liu, Song et al. | 2023
- 969
-
Non-Invasive Carotid Artery Monitoring by Using Aluminum Nitride Pmut Close-Packed ArraysWu, Sheng / Liu, Kangfu / Shao, Shuai / Li, Wei / Chen, Ying / Wu, Tao / Li, Xinxin et al. | 2023
- 973
-
Non-Linear Behavioral Modeling of Capacitive MEMS MicrophonesAnzinger, Sebastian / Wasisto, Hutomo Suryo / Basavanna, Abhiraj / Fueldner, Marc / Dehe, Alfons et al. | 2023
- 977
-
Vortex-Beam Acoustic Transducer for Underwater PropulsionLee, Jaehoon / Esfahani, Kianoush Sadeghian / Kim, Eun S. et al. | 2023
- 981
-
Wideband and Highly Sensitive Micromachined PZT Film-Based Ultrasonic Microphone with Parylene Film and Flexible Helmholtz Resonator EnhancementHuang, Chung-Hao / Feng, Guo-Hua et al. | 2023
- 985
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Halbach-Array Magnetic Coil Arrangement on CMOS Chip for Sensitivity Enhancement of Inductive Tactile SensorChou, Tien / Hu, Zih-Song / Fang, Weileun et al. | 2023
- 989
-
ON-MEMS-CHIP Compact Temperature Sensor for Large-Volume, Low-Cost Sensor CalibrationFrigerio, Paolo / Fagnani, Andrea / Zega, Valentina / Gattere, Gabriele / Frangi, Attilio / Langfelder, Giacomo et al. | 2023
- 993
-
Particulate Matter Sensor Based on Two-Stage Cascade Virtual Impactors and Thermophoretic MicroheatersChoi, Kwang-Wook / Kim, Ilhwan / Chung, Seokwhan / Sung, Gi-Bong / Yook, Se-Jin et al. | 2023
- 997
-
A Microfluidic Oxygen Gradient Generator for the Study of Aerotropism in Hyphae of OomycetesTayagui, Ayelen / Sun, Yiling / Garrill, Ashley / Nock, Volker et al. | 2023
- 1001
-
A Paper-Based Dual Aptamer Assay on an Integrated Microfluidic System for Detection of HNP 1 as a Biomarker for Periprosthetic Joint InfectionsGandotra, Rishabh / Kuo, Feng-Chih / Lee, Mel S. / Lee, Gwo-Bin et al. | 2023
- 1005
-
An Integrated Microfluidic Platform for Tumor Cell Separation and Fluorescence in Situ Hybridization at Single Cell LevelQiu, Shihui / Li, Na / Wu, Zhenhua / Zhao, Jianlong / Mao, Hongju et al. | 2023
- 1009
-
Characterization of Oocyte Hardening Using a Microfluidic Aspiration-Assisted Electrical Impedance Spectroscopy SystemCao, Yuan / Floehr, Julia / Schnakenberg, Uwe et al. | 2023
- 1013
-
Double Pulse Irradiation of FS Laser for Enhancing the Performance of Precise Laser Sorting MethodKiya, Ryota / Rintaro, Yoshinaga / Tanaka, Yo / Yalikun, Yaxiaer / Hsokawa, Yoichiroh et al. | 2023
- 1017
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Droplet Based High Throughput Single-Sperm Cryopreservation PlatformLi, Na / Qiu, Shihui / Wu, Zhenhua / Mao, Hongju et al. | 2023
- 1021
-
Dual Ion-Selective Membrane Deposited Ion-Sensitive Field-Effect Transistor (DISM-ISFET) Integrating Whole Blood Processing Microchamber for In Situ Blood Ion TestingChen, Xiao-Wen / Huang, Syuan-Rong / Huang, Nien-Tsu et al. | 2023
- 1025
-
Strong Microstreaming from a Pinned Oscillating Membrane and Application to Gas ExchangeMercader, Anthony L. / Kwon Cho, Sung et al. | 2023
- 1029
-
Tunable Nanopore-Integrated Micro-/Nanofluidic Platform for Ion Transport Control in the Presence of Concentration and Temperature GradientsSeo, Dongwoo / Kim, Dongjun / Lee, Jongwan / Wang, Cong / Park, Jungyul / Kim, Taesung et al. | 2023
- 1033
-
Quantitative Assessment of Captured Magnetic Nanoparticles Using Self-Powered Magnetoelectric Platform for Biological ApplicationsPathak, Pankaj / Yadav, Vinit K. / Das, Samaresh / Mallick, Dhiman et al. | 2023
- 1037
-
Real-Time Operation of Microcantilever-Based in-Plane Resonators Partially Immersed in a Microfluidic SamplerXu, Jiushuai / Cao, Entian / Fahrbach, Michael / Agluschewitsch, Vladislav / Waag, Andreas / Peiner, Erwin et al. | 2023
- 1041
-
Suspended Nanochannel Resonators Made by Nanoimprint and Gas Phase DepositionMuller, Manuel / Teuber, Jeremy / Nasri, Rukan / Canals, Francesc Torres / Barniol, Nuria / Sixto, Jordi Llobet / Borrise, Xavier / Perez-Murano, Francesc / Fernandez-Cuesta, Irene et al. | 2023
- 1045
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Developing an Extremely High Flow Rate Pneumatic Peristaltic Micropump for Blood Plasma Separation with Inertial Particle Focusing Technique from Fingertip Blood with LancetsVo, Tuan N.A. / Chen, Pin-Chuan / Chen, Pai-Shan et al. | 2023
- 1049
-
Direct Patterning on Porous Surface Using Drop Impact PrintingReddy, Bheema Sankar / Dey Modak, Chandantaru / Lathia, Rutvik / Agarwal, Bhawana / R, Ebinesh Abraham / Sen, Prosenjit et al. | 2023
- 1052
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Manufacturing 3d-Printed Paper Microfluidics Integrated With Ionization Mass-Spectrometry for Illicit Drugs Analysis and On-Chip ChromatographyZaki, Muhammad Faizul / Chen, Pin-Chuan / Wu, Yi-Xin / Chen, Pai-Shan et al. | 2023
- 1056
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Detection Limits in Nanomechanical Mass Flow Sensing for Nanofluidics With Nanowire Open ChannelsEscobar, Javier E. / Molina, Juan / Gil-Santos, Eduardo / Ruz, Jose J. / Malvar, Oscar / Kosaka, Priscila M. / Tamayo, Javier / Paulo, Alvaro San / Calleja, Montserrat et al. | 2023
- 1060
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Controlling Particle Aggregation and Separation in Liquid on Membrane ResonatorsZhang, Haoran / Jia, Hao / Li, Xinxin et al. | 2023
- 1064
-
Development of Boat Model Powered by Electro-Hydrodynamic Propulsion SystemMai, Luan Ngoc / Nguyen, Tuan-Khoa / Vu, Trung Hieu / Xuan Dinh, Thien / Tran, Canh-Dung / Phan, Hoang-Phuong / Dinh, Toan / Nguyen, Thanh / Nguyen, Nam-Trung / Dao, Dzung Viet et al. | 2023
- 1068
-
Hemodynamic Analysis of Cardiomems: Adverse Hemodynamic EffectsLiu, Zhenhao / Han, Jiangli / Chen, Xing et al. | 2023
- 1072
-
Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and LiquidsGesing, Andre L. / Tran, Thomas / Platz, Daniel / Schmid, Ulrich et al. | 2023
- 1076
-
Classifying Cell Cycle By Electrical Properties Using Machine LearningWei, Jian / Xing, Xiaoxing et al. | 2023
- 1080
-
High-Throughput Spherical Supraparticle Self-Assembly by Enhanced Evaporation of Colloidal Water Droplets Through Thin Film of Water-Soluble OilLee, Wonhyung / Rhee, Joowon / Kim, Joonwon et al. | 2023
- 1084
-
In-Ice Polymerization for Functional Hydrogel Microbead with Flash Freezing Centrifugal Microfluidic DeviceMurayama, Tomomi / Yoshida, Koki / Kurashina, Yuta / Onoe, Hiroaki et al. | 2023
- 1088
-
Temperature-Responsive Microcapsules Manufactured by Promoting Controlled Cloaking with the Help of Micro/NanoparticlesLathia, Rutvik / Reddy, Bheema Sankar / Dey Modak, Chandantaru / Nagpal, Satchit / Sen, Prosenjit et al. | 2023
- 1091
-
Water Vitrification in a Microchannel at Low Cooling RateSato, Ayane / Hayashi, Tomohiro / Ishida, Tadashi et al. | 2023
- 1095
-
A Highly Sensitive 3-Axis Micro Search-Coil Magnetometer enabled by High-Density Through-Silicon-Via ProcessTavakkoli, Hadi / Duan, Mingzheng / Qi, Longheng / Izhar / Zhao, Xu / Lee, Yi-Kuen et al. | 2023
- 1099
-
Fully Integrated Back-Biased 3d Hall Sensor with Wafer-Level Integrated Permanent MicromagnetsGojdka, Bjorn / Cichon, Daniel / Stahl-Offergeld, Markus / Schroder, Dominik / Clausen, Niels / Hedayat, Christian / Hohe, Hans-Peter / Lisec, Thomas et al. | 2023
- 1103
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A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic GlassOu, Chuan-Hui / Toan, Nguyen V. / Ono, Takahito et al. | 2023
- 1107
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Arbitrary Shaped Backside Reinforcement for Two Dimensional Resonant MicromirrorsSasaki, Takashi / Piot, Adrien / Lagosh, Anton / Fleury, Clement / Bainschab, Markus / Zhai, Yanfen / Baumgart, Marcus / Guerreiro, Sara / Holzmann, Dominik / Travnik, Ales et al. | 2023
- 1111
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High Transmittance Metasurface Holograms Using Silicon NitrideYamaguchi, Masakazu / Saito, Hiroki / Ikezawa, Satoshi / Iwami, Kentaro et al. | 2023
- 1115
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Multifunctional Optical Metasurface for Anomalous Reflection, Structural Color, and Surface Lattice ResonanceLi, Liye / Sun, Hongshun / Ouyang, Yifan / Jin, Shengxiao / Kang, Tian / Qi, Zhimei / Wu, Wengang et al. | 2023
- 1119
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Novel Wavefront-Splitting Interferometer for Ultra-Compact Broadband FT-IR Spectroscopy Extending to Visible RangeMortada, Bassem / Sabry, Yasser M. / Saadany, Bassam / Bourouina, Tarik / Khalil, Diaa et al. | 2023
- 1123
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Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation MechanismSasaki, Takashi / Piot, Adrien / Pribosek, Jaka / Lagosh, Anton / Fleury, Clement / Bainschab, Markus / Zhai, Yanfen / Baumgart, Marcus / Guerreiro, Sara / Holzmann, Dominik et al. | 2023
- 1127
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Resonant d33 Mode PZT Mems Mirror Excited with Directional Interdigitated ElectrodesThakkar, Pooja / Lagosh, Anton / Sasaki, Takashi / Bainschab, Markus / Pribosek, Jaka et al. | 2023
- 1131
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Resonant Piezoelectric Varifocal Mirror with on-Chip Integrated Diffractive Optics for Increased Frequency ResponsePribosek, Jaka / Lagosh, Anton / Thakkar, Pooja / Sasaki, Takashi / Bainschab, Markus et al. | 2023
- 1135
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Unique Dispersion Relation for Plasmonic Photodetectors with Submicron GratingKaneda, Yuki / Oshita, Masaaki / Yamaoka, Utana / Saito, Shiro / Kan, Tetsuo et al. | 2023
- 1139
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Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR DetectionRisquez, Sarah / Redolfi, Sebastian / Fleury, Clement / Wulf, Matthias / Roshanghias, Ali / Piot, Adrien / Streque, Jeremy / Schmoltner, Kerstin / Dao, Thang Duy / Puff, Markus et al. | 2023
- 1143
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Periodic Cavities on the IR-Absorber for Responsivity Enhancement of CMOS-MEMS Thermoelectric IR SensorLi, Yung-Chen / Chou, Tien / Lin, Pen-Sheng / Huang, Yu -Cheng / Shih, Fuchi / Lin, You -An / Yen, Da-Jen / Lai, Mei-Feng / Fang, Weileun et al. | 2023
- 1147
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Ultra-Large Pixel Array Photothermal Transducer and its Thermal Performance Prediction StrategyLi, Defang / Zhang, Jinying / Xu, Jiushuai / Peiner, Erwin / Li, Zhuo / Wang, Xin / Yang, Suhui / Gao, Yanze et al. | 2023
- 1151
-
A CMOS-MEMS Beam Resonator with Q > 10,000Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
- 1155
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Generic Temperature Compensation Scheme for CMOS-MEMS Resonators Based on ARC-Beam Derived Electrical Stiffness Frequency PullingHsieh, I-Chieh / Zheng, Hong-Sen / Tsai, Chun-Pu / Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
- 1159
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High-Q and Low-Motional Impedance Piezoelectric mems Resonator through Mechanical Mode CouplingHuang, Linhai / Feng, Zhihong / Xiao, Yuhao / Sun, Fengpei / Xu, Jinghui et al. | 2023
- 1163
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Crosstalk-Free Large Aperture 2D Gimbal MicromirrorGhazinouri, Behrad / He, Siyuan et al. | 2023
- 1167
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Inverse Interference Effect-Enhanced Ultrasensitive Sensing Via Mid-IR NanoantennasZhou, Hong / Li, Dongxiao / Guo, Xinge / Ren, Zhihao / Lee, Chengkuo et al. | 2023
- 1171
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Twisted and Contacted Au Micro-Rods 3d Chiral Metamaterials with Circular Dichroism Via an Absorptive Route in Long-Wavelength InfraredFurusawa, Gaku / Kanda, Natsuki / Matsunaga, Ryusuke / Kan, Tetsuo et al. | 2023
- 1175
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3D Hybrid Acoustic Resonator with Coupled Frequency Responses of Surface Acoustic Wave and Bulk Acoustic WaveZhang, Liping / Zhang, Shibin / Wu, Jinbo / Zheng, Pengcheng / Yao, Hulin / Chen, Yang / Huang, Kai / Zhao, Xiaomeng / Zhou, Min / Ou, Xin et al. | 2023
- 1179
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A C/Ku Dual-Band Reconfigurable Baw Filter Using Polarization Tuning in Layered ScalnMo, Dicheng / Dabas, Shaurya / Rassay, Sushant / Tabrizian, Roozbeh et al. | 2023
- 1183
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Acoustoelectric-Driven Frequency Mixing in Micromachined Lithium Niobate on Silicon WaveguidesMansoorzare, Hakhamanesh / Abdolvand, Reza et al. | 2023
- 1186
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Effect of Scandium Composition on the Phonon Scattering Lifetime of Aluminum Scandium Nitride Acoustic Wave ResonatorsZheng, Yue / Park, Mingyo / Yuan, Chao / Ansari, Azadeh et al. | 2023
- 1190
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Lithium Niobate Thin Film Based A1 Mode Resonators with Frequency up to 16 Ghz and Electromechanical Coupling Factor Near 35%Su, Rongxuan / Yu, Zhenyi / Fu, Sulei / Xu, Huiping / Zhang, Shuai / Liu, Peisen / Guo, Yu / Song, Cheng / Zeng, Fei / Pan, Feng et al. | 2023
- 1194
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Sub-3 DB Insertion Loss Broadband Acoustic Delay Lines and High Fom Resonators in LiNbO3/SiO2/Si Functional SubstrateYeh, Chun-Chen / Tsai, Chia-Hsien / Wu, Guan-Lin / Hsu, Tzu-Hsuan / Li, Ming-Huang et al. | 2023
- 1198
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Suppression of Spurious Modes in Aluminum Nitride S1 Lamb Wave Resonators Using A Mechanical Soft-Contact SchemeTung, Shao-Siang / Hsu, Tzu-Hsuan / Ho, Yens / Chen, Yung-Hsiang / Pradeep, Yelehanka R. / Chand, Rakesh / Li, Ming-Huang et al. | 2023
- 1202
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Terahertz Reflective Metalens For Arbitrary Off-Axis Focusing With Large Depth of FocusMiao, Jiahao / Liu, Yi / Lin, Cong / Zhou, Zhanxuan / Yu, Xiaomei et al. | 2023
- 1206
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Towards a Better CMOS-MEMS Resoswitch Using Electroless Plating for Contact EngineeringLiou, Ting-Jui / Tsai, Chun-Pu / Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
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Copyright Page| 2023
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Welcome| 2023
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Author Index| 2023
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Benefactors| 2023
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Table of Contents| 2023
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Conference Officials| 2023