Toward Rapid Prototyping of High-Aspect-Ratio Sub-$\mathbf{100}-\mu \mathbf{m}$ PMMA Microfluidic Devices: Optimization of CO2 Laser Machining and Solvent-Assisted Thermal Bonding (English)
- New search for: Mirgissa, Kaba Abdi
- New search for: Lee, Woongsub
- New search for: Kim, Dohyun
- New search for: Mirgissa, Kaba Abdi
- New search for: Lee, Woongsub
- New search for: Kim, Dohyun
In:
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
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384-386
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2019
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ISSN:
- Conference paper / Electronic Resource
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Title:Toward Rapid Prototyping of High-Aspect-Ratio Sub-$\mathbf{100}-\mu \mathbf{m}$ PMMA Microfluidic Devices: Optimization of CO2 Laser Machining and Solvent-Assisted Thermal Bonding
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Contributors:
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Published in:
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Publisher:
- New search for: IEEE
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Publication date:2019-01-01
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Size:4466248 byte
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Pumpless Solution Exchange for Repeatable Nanopore Biosensor Driven by Superabsorbent Polymer and Hydrostatic PressureYamada, Tetsuya / Kamiya, Koki / Osaki, Toshihisa / Takeuchi, Shoji et al. | 2019
- 1
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Author Index| 2019
- 1
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Cardiomyocytes as High-Power Building Blocks for Bio-Hybrid MachinesParker, Kevin Kit et al. | 2019
- 1
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Gallium Oxide Coated Flat Surface as Non-Wetting Surface for Actuation of Liquid Metal DropletsChen, Ziyu / Lee, Jeong-Bong et al. | 2019
- 1
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Copyright Page| 2019
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Committees| 2019
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Welcome| 2019
- 1
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Table of Contents| 2019
- 1
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Acknowledgment| 2019
- 2
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Design of the First Sub-Milligram Flapping Wing Aerial VehicleBhushan, Palak / Tomlin, Claire J. et al. | 2019
- 6
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A Fast-Moving Micro Crawling Robot with Direct Electromagnetic Driving MechanismLiu, Xinyi / Liu, Zhiwei / Qi, Mingjing / Zhu, Yangsheng / Huang, Dawei / Zhang, Xiaoyong / Lin, Liwei / Yan, Xiaojun et al. | 2019
- 10
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3-D Micro Swimming Drone with ManeuverabilityLiu, Fang-Wei / Cho, Sung Kwon et al. | 2019
- 14
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Side-View Raman Microendoscope with Micro Stepping Motor and its Ex-Vivo Test for Real-Time Cancer DetectionJayhooni, Sayed Mohammad Hashem / Short, Michael / Assadsangabi, Babak / Zeng, Haishan / Takahata, Kenichi et al. | 2019
- 18
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Ultra-thin Parylene-C Deposition on PDMSLiu, Yaoping / Dong, Xiao / Deng, Xinyue / Saw, Thuan Beng / Lim, Chwee Teck / Liu, Jingquan / Wang, Wei et al. | 2019
- 21
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Wireless Implantable Intraocular Pressure Sensor with Parylene-Oil-Encapsulation and Forward-Angled RF CoilShapero, Aubrey / Agarwal, Abhinav / Martinez, Juan Carlos / Emami, Azita / Humayun, Mark S. / Tai, Yu-Chong et al. | 2019
- 25
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Self-Powered Implantable Bio-Mems: From Epilepsy Diagnosis to Treatment and MonitoringZhang, Yujia / Zhou, Zhitao / Tao, Tiger H. et al. | 2019
- 28
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Low-Cost, Low-Impedance Polyimide Based Micro-Needle Array (PI-MNA): A Minimally Invasive Flexible Dry Electrode for Surface Bio-Potential MonitoringLi, Junshi / Shen, Zhengkun / Wang, Hancong / Huang, Dong / Chen, Yufeng / Mou, Qun / Zheng, Fengyi / Liu, Junhua / Li, Zhihong et al. | 2019
- 32
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Micro-/Nanofluidic Diffusiophoresis Platform for Simple Concentration and Extraction of Particles Using Ionic SolutionsHa, Dogyeong / Seo, Sang Jin / Kim, Taesung et al. | 2019
- 35
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In-Droplet Cell Manipulation based on Dielectrophoretic PolarityHan, Song-I / Huang, Can / Kim, Hyun Soo / Han, Arum et al. | 2019
- 39
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Dielectrophoretic Cell Separation using Conducting Silver PDMS Microelectrodes Featuring Non-Uniform Sidewall ProfileNie, Xiaofeng / Zhang, Zhongle / Han, Chengwu / Yu, Duli / Xing, Xiaoxing et al. | 2019
- 43
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The Collective Transport of Microparticles Under an Asymmetric Electric FieldHayakawa, Masayuki / Kishino, Yusuke / Takinoue, Masahiro et al. | 2019
- 47
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Physical cleaning technology for semiconductor chips using arrays of acoustically oscillating bubblesKim, Daegeun / Jang, Deasung / Park, Yuna / Chung, Sang Kug et al. | 2019
- 49
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Acoustic Droplet Ejection by Lamb Wave Transducer ArrayNing, Yuan / Zhang, Hongxiang / Zhang, Menglun / Liu, Buohua / Duan, Xuexin / Pang, Wei et al. | 2019
- 53
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Demonstration of the First Self-Sealing Aerosol Spray Nozzle for Medical Drug DeliveryLast, Torben Sebastian / Stemme, Goran / Roxhed, Niclas et al. | 2019
- 57
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Acoustic Tweezers for Trapping Late-Stage Zebrafish EmbryosZhao, Lurui / Kim, Eun Sok et al. | 2019
- 61
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Direct Modulation Piezoelectric Micro-Machined Ultrasonic Transducer System (DMUT)Pop, Flavius V. / Herrera, Bernard / Cassella, Cristian / Rinaldi, Matteo et al. | 2019
- 65
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Soft and Wearable Transducers: Opportunities and Challenges for Daily UseLacour, Stephanie P. et al. | 2019
- 66
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A Self-Powered Physical Sensor using Genetically Engineered Spider Silk ProteinsZhang, Yujia / Tao, Tiger H. / Zhou, Zhitao et al. | 2019
- 69
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NICO2O4@MNO2 Double Nanostructures Grown on Etched Nickel Wire for Fiber-Shaped Super-Capacitors ApplicationsZhang, Jing / Yun, Kwang-Seok et al. | 2019
- 71
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Piezoelectret Mechanocatalysts for Direct Water Splitting via UltrasonicationRamirez, Neil / Zhong, Junwen / Lin, Liwei et al. | 2019
- 75
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A Smartphone-Based Portable System for Rapid Detection of PathogensMa, Yu-Dong / Li, Kuang-Hsien / Chen, Yi-Hong / Lee, Yung-Mao / Huang, Po-Chiun / Ma, Hsi-Pin / Lee, Gwo-Bin et al. | 2019
- 79
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Entirely-3D Printed Microfluidic Platform for On-Site Detection of Drinking Waterborne PathogensSweet, Eric C. / Liu, Nathaniel / Chen, Juhong / Lin, Liwei et al. | 2019
- 83
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Point of Care Testing Chip for Multiple Virus Infection Detection Using LAMPKimura, Yusuke / Ikeuchi, Masashi / Inoue, Yoshinori / Ikuta, Koji et al. | 2019
- 87
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A Contactless Micromachined Respiratory Sensor using Positive Temperature Coefficient MaterialYeh, Chao-Chi / Xu, Ming-Xin / Yang, Yao-Joe et al. | 2019
- 91
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Maximizing Percolation Effect using Sub-100 nm Nano-Valley for High Performance Wearable Transparent Pressure SensorYoo, Jae-Young / Seo, Min-Ho / Lee, Jae-Shin / Choi, Kwang-Wook / Jo, Min-Seung / Song, Hyeon-Joo / Yoon, Jun-Bo et al. | 2019
- 95
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Underwater Pitot Tube for Swimming AnimalsHagiwara, T. / Takahashi, H. / Nguyen, T.-V. / Takahata, T. / Shimoyama, I. et al. | 2019
- 99
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Polycrystalline Sense Layer for Magnetic Tunnel Junction (MTJ) as Ultrasensitive Sensing Element for MEMS Pressure SensorsRamesh, Akhil K / Rana, Vaibhav / Das, Pintu / Singh, Pushparaj et al. | 2019
- 103
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Novel Method for Simultaneously Implememting “Wired Face-Up and Face-Down Chips” on a Film Substrate by using Simple Screen-Offset PrintingTakei, Yusuke / Nomura, Ken-Ichi / Horii, Yoshinori / Zymelka, Daniel / Ushijima, Hirobumi / Kobayashi, Takeshi et al. | 2019
- 105
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Self-Assembled Nanochamber Arrays for in-situ TEM Observation of Liquid-Phase SamplesLim, Kitaek / Bae, Yuna / Kim, Kihwan / Jeon, Sungho / Kim, Byung Hyo / Park, Jungwon / Lee, Won Chul et al. | 2019
- 107
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Artificial Cell on a Chip Integrated with Protein DegradationTonooka, Taishi / Niederholtmeyer, Henrike / Tsimring, Lev / Hasty, Jeff et al. | 2019
- 110
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Reconfigurable Microfluidics in a Rubik's CubeLai, Xiaochen / Zhang, Penghao / Zhang, Xingguo / Wu, Hao / Pu, Zhihua / Yu, Haixia / Li, Dachao et al. | 2019
- 114
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Direct Chemical Detection in a Microchannel with a Nanoneedle-Based Biological Nanopore ProbeShoji, Kan / Kawano, Ryuji / White, Ryan J. et al. | 2019
- 118
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Thin Layered Heterogeneous Vascularized 3D Tissue Models Constructed with Separated-Layer Collagen MicrotubeItai, Shun / Onoe, Hiroaki et al. | 2019
- 120
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MEMS Sensors for RobotsShimoyama, Isao et al. | 2019
- 121
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Towards Digitally Addressable Delay Synthesis: GHZ Low-Loss Acoustic Delay Elements from 20 NS to 900 NSLu, Ruochen / Manzaneque, Tomas / Yang, Yansong / Li, Ming-Huang / Gong, Songbin et al. | 2019
- 125
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Wi-Fi-Band Micro Acoustic Resonant CirculatorYu, Yao / Rinaldi, Matteo et al. | 2019
- 129
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NEMS Electrostatic Resonant Near-Zero Power Resistive Contact RF Wake-Up Switch with PT FIB ContactRuyack, Alexander / Davaji, Benyamin / Pancoast, Leanna / Shalabi, Nabil / Molnar, Alyosha / Lal, Amit et al. | 2019
- 133
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Chip-Scale MEMS-CMOS Multispectral Infrared Chemical SensorKang, Sungho / Qian, Zhenyun / Rajaram, Vageeswar / Calisgan, Sila Deniz / Rinaldi, Matteo et al. | 2019
- 137
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Statistics-Based Gas SensorKhan, Shakir-ul Haque / Banerjee, Aishwaryadev / Broadbent, Samuel / Bulbul, Ashrafuzzaman / Simmons, Michelle Camilla / Kim, Kyeong Heon / Mastrangelo, Carlos H. / Looper, Ryan / Kim, Hanseup et al. | 2019
- 141
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Surface-Enhanced Infrared Absorption-Based CO2 Sensor using Photonic Crystal SlabChang, Yuhua / Hasan, Dihan / Dong, Bowei / Wei, Jingxuan / Ma, Yiming / Zhou, Guangya / Ang, Kah Wee / Lee, Chengkuo et al. | 2019
- 145
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Crumpled and Stretchable Graphene Gas Sensor with Enhanced Sensitivity to HydrogenShao, Zhichun / Hayasaka, Takeshi / Liu, Huiliang / Liang, Jiaming / Wu, Yichuan / Lin, Liwei et al. | 2019
- 149
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ALD-RuO2 Functionalized Graphene FET with Distinctive Gas Sensing PatternsHayasaka, Takeshi / Copa, Vernalyn C. / Lopez, Lorenzo P. / Loberternos, Regine A. / Ballesteros, Laureen Ida M. / Lin, Albert / Kubota, Yoshihiro / Liu, Huiliang / Salvador, Arnel A. / Lin, Liwei et al. | 2019
- 153
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Widely Tunable 20-NM-Gap Ruthenium Metal Square-Plate ResonatorOzgurluk, Alper / Peleaux, Kieran / Nguyen, Clark T.-C. et al. | 2019
- 157
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Thermal Piezoresistive Back Action Enhancement Using an Innovative Design of Silicon NanobeamJanioud, Pierre / Koumela, Alexandra / Poulain, Christophe / Louwers, Stephan / Ladner, Carine / Morfouli, Panagiota / Jourdan, Guillaume et al. | 2019
- 161
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A Temperature-Insensitive CMOS-MEMS Resonator Utilizing Electrical Stiffness CompensationLiu, Jia-Ren / Li, Wei-Chang et al. | 2019
- 165
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A Self-Sustained Frequency Comb Oscillator via Tapping Mode Comb-Drive Resonator Integrated with a Feedback ASICWei, Ran / Lee, Jaesung / Mei, Tengda / Xie, Yong / Islam, Mohammad S. / Mandal, Soumyajit / Feng, Philip X.-L. et al. | 2019
- 169
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Dielectrowetting Driven Bubble Elimination Incorporated with Acoustic Excitation for Heat Transfer EnhancementHyun, Youngbin / Lee, Kang Yong / Ko, Seunghwan / Chung, Sang Kug et al. | 2019
- 172
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Hybrid Electrodes Efficient for Both Electrowetting and DielectrowettingGeng, Hongyao / Cho, Sung Kwon et al. | 2019
- 176
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Aluminium Nanoparticle-Enhanced Optoelectrowetting Device for Effective Light-Driven Droplet ManipulationThio, Si Kuan / Park, Sung-Yong et al. | 2019
- 180
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Electrodewetting on Transparent Substrate: Device Fabrication and DemonstrationLi, Jia / Kim, Chang-Jin CJ et al. | 2019
- 182
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A Monolithic Fingerprint-Like Tactile Sensor Array Realizaing High Resolution Imaging of Spatially Distributed Tactile InformationWatatani, Kazuki / Terao, Kyohei / Shimokawa, Fusao / Takao, Hidekuni et al. | 2019
- 186
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Design and Fabrication of a Coupled Dual-Coil for Fingerprint Sensor ApplicationLin, Shihwei / Hsieh, Mingyu / Huang, Yuanyuan / Shih, Fuchi / Hu, Zihsong / Tsou, Chingfu et al. | 2019
- 190
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Multilayered Electret/Triboelectric Generator for Selfpowered Instantaneous Tactile ImagingYi, Haiping / Tao, Kai / Gao, Yuxuan / Wu, Jin / Chang, Honglong et al. | 2019
- 194
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A Textile-Based Resistive Tactile Sensor with High Sensitivity in a Wide Pressure RangeLee, Jaeyong / Pyo, Soonjae / Jo, Eunhwan / Kim, Jongbaeg et al. | 2019
- 198
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A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair FollicleHamamoto, Koki / Terao, Kyohei / Shimokawa, Fusao / Takao, Hidekuni et al. | 2019
- 202
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High-Overtone Bulk Diffraction Wave GyroscopePinrod, Visarute / Davaji, Benyamin / Lal, Amit et al. | 2019
- 206
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Highly Sensitive Angular Accelerometer Utilizing Piezoresistive Cantilever and Spiral Liquid ChannelJo, Byeongwook / Takahashi, Hidetoshi / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
- 210
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1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)Cho, Jae Yoong / Woo, J.-K. / He, Guohong / Yang, Donguk / Boyd, Christopher / Singh, Sajal / Darvishian, Ali / Shiari, Behrouz / Najafi, Khalil et al. | 2019
- 214
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A Novel Micromechanical Mode-Localized Resonator Utilizing Anti-Resonating StructuresLiu, Jia-Ren / Lo, Yu-Cheng / Li, Wei-Chang et al. | 2019
- 218
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Realization and Optimization of a Nepenthes-Inspired Microstructure Employing PR Sacrificial Layer TechnologySun, Wenxi / Tang, Longjun / Hong, Wen / Yang, Bin / Liu, Jingquan et al. | 2019
- 222
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A 3D Printed Cyanobacterial Leaf for Carbon Dioxide ReductionLiu, Lin / Choi, Seokheun et al. | 2019
- 226
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Decellularized Plant Leaves for 3D Cell CulturingVarhama, Ken / Oda, Haruka / Shima, Ai / Takeuchi, Shoji et al. | 2019
- 229
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Facile and High-Efficiency Microbead Array Based on Biomimetic Nepenthes Peristome SurfacesPeng, Zhiting / Wu, Tianzhun / Shu, Weiliang / Wang, Yunlong et al. | 2019
- 233
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Water-Electrokinetic Power Generation Device using Flexible Woody Carbon FilmMaeda, Seren / Kuwae, Hiroyuki / Sakamoto, Kosuke / Shoji, Shuichi / Mizuno, Jun et al. | 2019
- 237
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Rapid Multi-Material Direct Laser WritingLamont, Andrew C. / Restaino, Michael A. / Sochol, Ryan D. et al. | 2019
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Kirigami-Liquid Structure for Electroluminescent Array Attachable onto Three-Dimensional SurfacesTakei, Atsushi / Tsukamoto, Shiho / Komazaki, Yusuke / Yoshida, Manabu et al. | 2019
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Manufacturing of Sub-20 NM Wide Single Nanowire Devices using Conventional Stepper LithographyEnrico, Alessandro / Dubois, Valentin / Niklaus, Frank / Stemme, Goran et al. | 2019
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Solenoid Fluxgate Current Sensor Micromachined by Wafer-Level Melt-Metal Casting TechniqueGu, Jiebin / Hou, Xiaowei / Xia, Xiaoyuan / Li, Xinxin et al. | 2019
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Sensor as a Solution: Recent Progress in Intelligent Sensors DevelopmentLee, Chaedeok et al. | 2019
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Wafer-Scale Transfer of Graphene by Adhesive Wafer BondingQuellmalz, Arne / Wang, Xiaojing / Wagner, Stefan / Lemme, Max / Gylfason, Kristinn B. / Roxhed, Niclas / Stemme, Goran / Niklaus, Frank et al. | 2019
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A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS SensorsRomijn, Joost / Vollebregt, Sten / van Zeijl, Henk W. / Sarro, Pasqualina M. et al. | 2019
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Facile Identification of Graphene's Crystal Orientations by Optical Microscopy of Self-Aligned MicrowiresHam, Jimin / Lee, Yangjin / Kim, Jonghyeok / Lim, Kitaek / Lee, Sol / Jeon, Sungho / Kim, Kwanpyo / Lee, Won Chul et al. | 2019
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MEMS-Based Battery-Less RFID Infrared Sensor Tag with Memory FunctionRajaram, Vageeswar / Qian, Zhenyun / Kang, Sungho / Calisgan, Sila Deniz / Rinaldi, Matteo et al. | 2019
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A Wafer Level Packaged Fully Integrated Hyperspectral Fabry-Perot Filter with Extended Optical RangeLevin, Peleg / Ashkenazy, Eli / Raz, Ariel / Hershcovitz, Miriam / Bouwstra, Siebe / Mendlovic, David / Krylov, Slava et al. | 2019
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Radially Arranged Dihedral Corner Reflector Array for Wide Viewing Angle of Seamless Floating ImageYushimizu, Yuta / Iwase, Eiji et al. | 2019
- 278
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High Resolution 3D Surface Imaging Using Variable Structured Illumination via Lissajous Scanning MEMS Mirror ModuleSeo, Yeong-Hyeon / Yang, Sung-Pyo / Kim, Hyunwoo / Lee, Won-Kyung / Hwang, Kyungmin / Jeong, Ki-Hun et al. | 2019
- 282
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Resonant Torsional Micro-Actuators Using Thin-Film Lithium NiobateEmad, Ahmed / Lu, Ruochen / Li, Ming-Huang / Yang, Yansong / Wu, Tao / Gong, Songbin et al. | 2019
- 286
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Coupled Piezoresistive Graphene Nano-ResonatorsKumar, Madhav / Bhaskaran, Harish / Choubey, Bhaskar et al. | 2019
- 290
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Tuneable Microparticle FiltersIseri, Emre / Kaya, Kerem / di Dio, Giacomo / Yasuga, Hiroki / Miki, Norihisa / van der Wijngaart, Wouter et al. | 2019
- 292
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A 10nm-Thick Hafnium Zirconium Oxide Piezoelectric Transducer for Extreme Miniaturization of Integrated Sensors and ActuatorsGhatge, Mayur / Walters, Glen / Nishida, Toshikazu / Tabrizian, Roozbeh et al. | 2019
- 296
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Stretchable Liquid Metal Wiring with Three-Dimentional Helical StructureMatsubara, Ken / Ota, Hiroki et al. | 2019
- 299
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Study and Application of In-Situ Phosphorus Doped Thick Polysilicon Films at Low Temperature for Post CMOS-MEMS IntegrationChaung, Ian / Michael, Aron / Kwok, Chee Yee et al. | 2019
- 303
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Stretchable fabric heater based on silver nanowire, carbon nanotube compositesAhn, Junseong / Gu, Jimin / Jeong, Yongrok / Kim, Kyuyoung / Jeong, Junho / Park, Inkyu et al. | 2019
- 307
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Bio Oriented Nanoporous Materials for Perm-Selective Ion TransportationPark, Sungmin / Hong, Seongjun / Kim, Junsuk / Lee, Hyomin / Kim, Sung Jae et al. | 2019
- 311
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Highly Sensitive, Foldable, and Twistable Gas Sensor Based on Tungsten Disulfide-Functionalized Carbon Nanotubes on Cellulose PaperLee, Woo Sung / Choi, Jungwook et al. | 2019
- 315
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Facile Fabrication of a Shrink-Induced Ultrasensitive Microelectrode Arrays Modified with Graphene /BI Nanoparticles Film for Trace Lead Ions DetectionWu, Zonghao / Cui, Tianhong et al. | 2019
- 319
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High-Frequency Hexagonal Boron Nitride (h-BN) Phononic WaveguidesWang, Yanan / Lee, Jaesung / Xie, Yong / Zheng, Xu-Qian / Feng, Philip X.-L. et al. | 2019
- 327
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Ethylene glycol assisted hydrothermal synthesis of molybdenum disulfide for MEMS humidity sensorLeng, Xiaohui / Wang, Yiming / Wang, Fei et al. | 2019
- 331
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Tough and Stretchable Strain Sensor Based on Carbon Nanotube-Molybdenum Disulfide Reinforced Silicone Rubber NanocompositesSeo, Youngno / Kumar, Vineet / Lee, Dong-Joo / Choi, Jungwook et al. | 2019
- 335
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High Gauge Factor Strain Sensors Based on Vanadium Doped Molybedenum Disulfide 2D FilmsZhu, Minjie / Inomata, Naoki / Toda, Masaya / Ono, Takahito et al. | 2019
- 339
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Fabrication of Implantable Flexible Electrodes Based on Patternable Platium Nanowire and Poly Dopamine LayerHuang, Zhaoling / Zeng, Qi / Xia, Kai / Qin, Shuijie / Wu, Tianzhun / Zhang, Yi et al. | 2019
- 343
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Low-Cost, Efficient, Photolithography-Free Fabrication of Stretchable Electronics Systems on a Vinyl CutterXu, Renxiao / Huang, Yuanyuan / Lee, Pinghsun / Yeh, Pochen / Ren, Liangjie / Togelang, Aaron / Liang, Jiaming / Wu, Yichuan / Irie, Lauren / Rodgers, Adam et al. | 2019
- 347
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A Simple Micro Check Valve Using Patterned Hydrogel Valve CoreWang, Yingzhe / Uesugi, Kaoru / Morishima, Keisuke et al. | 2019
- 350
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Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D StructureNakamura, Katsuo / Kimoto, Yuichi / Hirai, Yoshikazu / Tsuchiya, Toshiyuki / Tabata, Osamu et al. | 2019
- 354
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H-Line Transparency Analysis of Microlithography for Millimeter Scale High-Aspect Ratio SU-8 StructuresKim, Jungkwun JK / al Thuwaini, Hassan / Almuslem, Mohammad et al. | 2019
- 358
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Water Lithography: From Programmable Printing to Functional PatterningLiu, Zhen / Zhou, Zhitao / Liu, Keyin / Tao, Tiger H. et al. | 2019
- 361
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Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire SubtrateZhang, Jie / Xing, Yan / Gosalvez, Miguel A. / Qiu, Xiaoli / Lin, Xiaohui / Zhang, Chibin et al. | 2019
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Feedback-Free Electromigrated Tunneling Junctions from Crack-Defined Gold NanowiresPagliano, Simone / Gota, Fabrizio / Raja, Shyamprasad N. / Dubois, Valentin / Stemme, Goran / Niklaus, Frank et al. | 2019
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Fabrication of 3D Micro Ice Structures Based on Inkjet PrintingZheng, Fengyi / Huang, Jiasheng / Li, Zhihong et al. | 2019
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Room-Temperature Printing of Micron-Scale-Wide Metal Lines for Microsystems via Atmospheric MicrosputteringKornbluth, Yosef / Mathews, Richard / Parameswaran, Lalitha / Racz, Livia / Velasquez-Garcia, Luis Fernando et al. | 2019
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Process Development of Low Resistive Ag-Based Through Silicon Vias using Inkjet Printing Technique for 3D Microsystem IntegrationYang, Jia-Han / Tsou, Kun-Lin / Fu, Yu-Min / Cheng, Yu-Ting / Song, Yen-Fang et al. | 2019
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Self-Assembly of Shape Memory Polymer Printed by Fused Deposition ModelingNojiri, Akihiro / Iwase, Eiji / Hashimoto, Michinao et al. | 2019
- 384
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Toward Rapid Prototyping of High-Aspect-Ratio Sub-$\mathbf{100}-\mu \mathbf{m}$ PMMA Microfluidic Devices: Optimization of CO2 Laser Machining and Solvent-Assisted Thermal BondingMirgissa, Kaba Abdi / Lee, Woongsub / Kim, Dohyun et al. | 2019
- 388
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Stacking 2D Droplet Arrays for 3D Configurable Droplet NetworkYasuga, Hiroki / Osaki, Toshihisa / Kamiya, Koki / Iseri, Emre / van der Wijngaart, Wouter / Takeuchi, Shoji / Miki, Norihisa et al. | 2019
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A Maskless Process for Fabrication of Patterned Surfaces with Microscale Superhydrophobic Borders for High Throughput Droplet Microarray PrintingKhuushi / Srinivasan, Sanjay Kumar / Modak, Chandantaru Dey / Kumar, Arvind / Tripathy, Abinash / Sen, Prosenjit et al. | 2019
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A Novel SESC Microstructure to Realize Various Spontaneously Liquid Spreading PropertiesHong, Wen / Tang, Longjun / Ji, Bowen / Sun, Wenxi / Yang, Bin / Wang, Xiaolin / Liu, Jingquan et al. | 2019
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Generation of Monodisperse Droplets from Tens of $\mu\mathrm{L}$ Sample Volume using Centrifuge-Based Microfluidic DeviceShin, Dong-Chel / Morimoto, Yuya / Takeuchi, Shoji et al. | 2019
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A Pumpless Mixer for Efficient Capturing of Small Particles Utilizing Vibration-Induced FlowKaneko, K. / Okano, T. / Hayakawa, T. / Hasegawa, Y. / Suzuki, H. et al. | 2019
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Reversible On-Demand Magnetic Liquid Metal Marble Manipulation by Magnetowetting: Split and Merge, Deformation and RecoveryJeong, Jinwon / Seo, Jeonghwa / Chung, Sang Kug / Lee, Jeong-Bong / Kim, Daeyoung et al. | 2019
- 412
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A Microfluidic Chip for CTC Whole Genome SequencingRen, Li / Fei, Jia / Zhang, WK / Fang, ZG / Hu, ZY / Wei, ZW et al. | 2019
- 418
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On-Chip Dynamic Mechanical MeasurementKirimoto, Atsushi / Ito, Hiroaki / Horade, Mitsuhiro / Takayama, Toshio / Chimura, Misato / Ohtani, Tomohito / Sakata, Yasushi / Kaneko, Makoto et al. | 2019
- 422
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A Microfluidic Chip for Screening High-Producing Hybridomas at the Single-Cell LevelZhang, Wei K. / Li, Ren / Fang, Zhi G. / Hu, Zhi Y. / Wei, Ze W. / Li, Qin et al. | 2019
- 426
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A Blood Hematocrit Test StripHauser, Janosch / Stemme, Goran / Roxhed, Niclas et al. | 2019
- 429
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Differential Sodion-Based Self-Calibrated Epidermal Microfluidic System for Continuous Glucose MonitoringPu, Zhihua / Su, Xiao / Yu, Haixia / Li, Dachao et al. | 2019
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How to Measure Cellular Shear Modulus Inside a Chip: Detailed Correspondence to the Fluid-Structure Coupling AnalysisIto, Hiroaki / Takeishi, Naoki / Kirimoto, Atsushi / Chimura, Misato / Ohtani, Tomohito / Sakata, Yasushi / Horade, Mitsuhiro / Takayama, Toshio / Wada, Shigeo / Kaneko, Makoto et al. | 2019
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Stick-to-Analyze Zeta Potential Measurement Chip with Integrated Electroosmotic Micropump and Liquid Flow SensorOkamoto, Yuki / Fujimoto, Koji / Ryoson, Hiroyuki / Ohba, Takayuki / Mita, Yoshio et al. | 2019
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Integration of Discrete Sensors and Microelectrode Arrays Into Open Microfluidic Hanging-Drop NetworksBounik, Raziyeh / Gusmaroli, Massimiliano / Misun, Patrick M. / Viswam, Vijay / Hierlemann, Andreas / Modena, Mario M. et al. | 2019
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Ultra-Thin Magnetic Micropump for On-Demand Drug DeliveryWang, Cong / Park, Jungyul et al. | 2019
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A MEMS Reactor for Observing Morphology-Evolution in Tem and Simultaneously Detecting Involved Molecule-Number Change During Nano-Constructing ReactionLi, Wei / Yu, Haitao / Yao, Fanglan / Wang, Xueqing / Xu, Pengcheng / Li, Ming / Li, Xinxin et al. | 2019
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Current Detection Type SPR Sensor using AU Grating and Backside IlluminationSaito, Yoshiki / Yamamoto, Yosuke / Kan, Tetsuo / Tsukagoshi, Takuya / Noda, Kentaro / Shimoyama, Isao et al. | 2019
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ZNO Nanostructures Functionalized Piezoresistive Silicon Microcantilever Platform for Portable Gas SensingXu, Jiushuai / Bertke, Maik / Setiono, Andi / Schmidt, Angelika / Peiner, Erwin et al. | 2019
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Molecular Length Based Target Identification using a Nano-Gap SensorKhan, Shakir-ul Haque / Banerjee, Aishwaryadev / Broadbent, Samuel / Kairy, Prattay Deepta / Kim, Kyeong Heon / Mastrangelo, Carlos H. / Looper, Ryan / Kim, Hanseup et al. | 2019
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Modelling and Evaluation of Bubble ChromatographyBulbul, Ashrafuzzaman / Kim, Kyeongheon / Kim, Hanseup et al. | 2019
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WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room TemperatureBaek, Dae-Hyun / Choi, Gyujun / Kwak, Yeunjun / Cho, Byeong-Hwa / Kim, Jongbaeg et al. | 2019
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Improved Peformance of Micro-Preconcentrator using Mesoporous Silica with High Specific Surface Area as a Surface TemplateZhao, Bin / Feng, Fei / Luo, Fan / Yang, Xuelei / Zhou, Haimei / Li, Xinxin et al. | 2019
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A Quasi-Static Electrical Measurement Scheme for Probing Gas Reactions on Graphene SurfaceLiu, Huiliang / Chu, Yao / Liu, Yumeng / Hayasaka, Takeshi / Lopez, Lorenzo P. / Copa, Vernalyn C. / Wang, Xiaohao / You, Zheng / Lin, Liwei et al. | 2019
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The Exploration of Silicon Nanowires as a Stationary Phase Support for Micro Gas Chromatographic ColumnsFeng, Fei / Zhao, Bin / Luo, Fan / Yang, Xuelei / Zhou, Haimei / Li, Xinxin et al. | 2019
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Regioselective Construction of Metal-Organic Framework (MoF) Sensing Film on Parylene-Patterned Resonant Microcantilever for Highly Toxic Molecules DetectionCai, Shengran / Yu, Haitao / Xu, Pengcheng / Li, Xinxin et al. | 2019
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Label-Free AC Sensing by a Graphene Transistor for 100-ppb Formaldehyde in AirLiu, Huiliang / Chu, Yao / Liu, Yumeng / Hayasaka, Takeshi / Shao, Zhichun / Joshi, Nirav / Wang, Xiaohao / You, Zheng / Lin, Liwei et al. | 2019
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Optimized Detection to Organophosphorous Pesticide by Selecting the Most Appropriate Nano-Size of Sensing Nano-MaterialXu, Pengcheng / Yu, Haitao / Li, Xinxin et al. | 2019
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Palladium Hydrogen Sensor with Perfectly Aligned and Highly Uniform Nanogap ArraysLee, Jae-Shin / Chung, Myung-Kun / Choi, Kwang-Wook / Yoo, Jae-Young / Yoon, Jun-Bo et al. | 2019
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A Saw Hydrogen Sensor Based on the Composite of Graphene Oxide and Palladium NanoparticlesLi, Dongsheng / Le, Xianhao / Pang, Jintao / Xie, Jin et al. | 2019
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A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of InterestYoo, Seong Jae / Kwon, Hong-Beom / Kang, Dong-Hyun / Hong, Ui-Seon / Kim, Kyongtae / Kim, Yong-Jun et al. | 2019
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Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL2O3 Nanochannelsvan Toan, Nguyen / Hasnan, Megat Muhammad Ikhsan Megat / Udagawa, Daiki / Inomata, Naoki / Toda, Masaya / Said, Suhana Mohd / Sabri, Mohd Faizul Mohd / Ono, Takahito et al. | 2019
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Development of Gas Permeable Parylene HT as a Substrate for Cell-Culture-on-a-Chip ApplicationsScianmarello, Nicholas / Cook, Colin / Shang, Kuang-Ming / Tai, Y.C. et al. | 2019
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One-Step Generation of Drug-Releasing Microarray for High-Throughput Screening of Sequential Drug CombinationsSong, Seo Woo / Kim, Su Deok / Kim, Jiyun / Kwon, Sunghoon et al. | 2019
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Transient Multi-Mode Silk Memory DevicesSun, Long / Zhou, Zhitao / Qin, Nan / Tao, Tiger H. et al. | 2019
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Fabrication of 3D Silk Microstructures by Direct Two-Photon PolymerizationLiu, Keyin / Jiang, Jianjuan / Tao, Tiger H. et al. | 2019
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Highly Conductive, Transparent, and Antireflective PEDOT:PSS/ITO/Ag/ITO on Parylene-C with Tunable Peak TransmittanceYang, Weiyang / Wu, Jiajia / Fan, Qi Hua / Li, Wen et al. | 2019
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Tracing and Resolving Microparticle Aquatic Mass Motion and Distribution on Multimode Silicon Carbide Microdisk ResonatorsJia, Hao / Feng, Philip X.-L. et al. | 2019
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All-Metal Plasmonic Metamaterials for Structure Color and as Colorimetric BiosensorsZhu, Jia / Lin, Guanzhou / Huang, Yun / Chen, Zhuojie / Chen, Xiaoyu / Liu, Peimin / Wu, Wengang et al. | 2019
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Laser-Induced Graphene Stamp for High Performacne Elecrochemical Sensing ApplicationsYoon, Hyosang / Nah, Joongsan / Kim, Jiyoung / Xuan, Xing / Park, Jaeyeong et al. | 2019
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Wearable Optical Device for Real-Time Monitoring of Newborn JaundiceInamori, Go / Isoda, Yutaka / Song, Zihao / Uozumi, Azusa / Ito, Shuichi / Ota, Hiroki et al. | 2019
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High-Sensitivity Parylene Microfluidic Chip Calorimeters for Measurements of Cellular Metabolic HeatKim, Jihye / Nam, Sung Min / Kim, Jonghyun / Seo, Sumin / Lee, Wonhee et al. | 2019
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Bio-Inspired Barbed Microneedle for Skin Adhesion with Interlocking MechanicsTran, Le-Giang / Nguyen, Thanh-Qua / Park, Woo-Tae et al. | 2019
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3D Electron Printing in Genetically Engineered Spider Silk Proteins at ∼ 50 nm ResolutionQin, Nan / Tao, Tiger H. et al. | 2019
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Multicolor Diffractive Optical Elements as a Designable Bioactive PlatformCai, Xiaoqing / Gao, Zihan / Zhou, Zhitao / Qin, Nan / Tao, Tiger H. et al. | 2019
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Characterisation of Microneedle-Based ECG Electrodes Fabricated Using an Industrial Injection-Moulding ProcessO'Mahony, Conor / Bocchino, Andrea / Haslinger, Michael J. / Fechtig, Daniel / Schossleitner, Klaudia / Galvin, Paul / Brandstatter, Stefan et al. | 2019
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Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic SubstrateJi, Bowen / Wang, Minghao / Guo, Zhejun / Hong, Wen / Wang, Longchun / Wang, Xiaolin / Yang, Bin / Wang, Wei / Liu, Jingquan et al. | 2019
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A Super-Flexible and High-Sensitive Epidermal sEMG Electrode Patch for Silent Speech RecognitionDong, Wei / Zhang, Hongmiao / Liu, Huicong / Chen, Tao / Sun, Lining et al. | 2019
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Microfluidic Neural Probes with Buried Channels Fabricated Using Continuous Flow XeF2 Etching of SiliconSharma, Kirti / Kumar, Sahana Dholipet Nagendra / Paul, Oliver / Ruther, Patrick et al. | 2019
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Micro-Assembly Using Optically Patterned Molecular-Motor-Powered Artificial MusclesWang, Yingzhe / Hiratsuka, Yuichi / Nitta, Takahiro / Uesugi, Kaoru / Morishima, Keisuke et al. | 2019
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Extracellular Vesicles Fractionated in Drying DropletJeong, Hwapyeong / Yi, Johan / Gianchandani, Yogesh B. / Park, Jaesung et al. | 2019
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Gold Nanostructure Decorated 3D Porous Carbon Architectures as a Non-Enzymatic Glucose SensorSharma, Deepti / Lee, Jongmin / Shin, Heungjoo et al. | 2019
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In Situ Glugose Monitoring in 3D-Cultured Skeletal Muscle TissuesMorimoto, Yuya / Sawayama, Jun / Takeuchi, Shoji et al. | 2019
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Continuous Glucose Monitoring of 3D Tissue Using a Perfusable DeviceSawayama, Jun / Ozawa, Fumisato / Takeuchi, Shoji et al. | 2019
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Droplet-Based Digital Ratiometric Fluorescence Coding for Multiplex Nucleic Acid Amplification TestingZhang, Ye / Zhang, Pengfei / Wang, Tza-Huei et al. | 2019
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Vascularized Spheroid Array in a Microfluidic ChannelNishimura, Keigo / Nie, Minghao / Takeuchi, Shoji et al. | 2019
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Morphological Control of Endothelial Tube Formation by Three-Dimensional Lane-Shaped PatternsIkezawa, Yuki / Onoe, Hiroaki et al. | 2019
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3D Hepatic Tissue Formed by iPSC-Derived Hepatocytes Using a Cell Fiber TechnologyNagata, Shogo / Ozawa, Fumisato / Tekeuchi, Shoji et al. | 2019
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Cell-Laden Microfiber as Growth Factor SupplierShima, Ai / Takeuchi, Shoji et al. | 2019
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Hierarchical Hydrogel Drug Delivery System Enables Controlled Release of Adeno-Associated Viruses for Gene TherapyMiyahara, Hideo / Kurashina, Yuta / Ogawa, Yuki / Kurihara, Ayumu / Yoshida, Tomohiko / Okano, Hirotaka James / Fujioka, Masato / Onoe, Hiroaki et al. | 2019
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Tough Hydrogel Tube for Long-Term Cellular GraftOda, Haruka / Nagata, Shogo / Takeuchi, Shoji et al. | 2019
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96-Color Microcontact Printing Device for Screening of Tumor-Imaging Probes on Clinical SamplesOsaki, T. / Sakamoto, K. / Onoyama, H. / Kuriki, Y. / Kamiya, M. / Kamiya, K. / Seto, Y. / Urano, Y. / Takeuchi, S. et al. | 2019
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Monitoring Vital Signs of Respiration and Heart Beat Simultaneously via a Single Flexible Piezoelectret SensorChu, Yao / Liu, Huiliang / Zhong, Junwen / Dong, Ying / Wang, Xiaohao / Lin, Liwei et al. | 2019
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Highly Sensitive Pulse Wave Sensor with a Piezoresistive Cantilever Inside an Air ChamberMizuki, Yuya / Nguyen, Thanh-Vinh / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
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A MEMS-Based Flexible High-Density Brain Electrode for Multi-Modal Neural Encoding/DecodingXiao, Ting / Zhang, Shan / Zhou, Yu / Tao, Tiger H. et al. | 2019
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Intracochlear Electric and Acoustic Stimulator Prototype: An Implantable Solution to the Hybrid Cochlear ImplantXu, Yuchen / Luo, Chuan / You, Zheng et al. | 2019
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Sewing BioprobeYamashita, Koji / Sawahata, Hirohito / Yamagiwa, Shota / Morikawa, Yusuke / Numano, Rika / Koida, Kowa / Kawano, Takeshi et al. | 2019
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A Silk-Enabled Conformal Brain Electrode for Recording and Disease TreatmentZheng, Faming / Zhang, Shan / Zhou, Yu / Tao, Tiger H. et al. | 2019
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A Human Respiratory Monitoring Sensor Based on an AlN Resonant Microcantilever Coated with Graphene OxideGuan, Yangyang / Le, Xianhao / Xie, Jin et al. | 2019
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Flexible $\mu\text{LED}$-Based Optogenetic Tool with Integrated $\mu$-Lens Array and Conical Concentrators Providing Light Extraction Improvements above 80%Klein, Eric / Kaku, Yumi / Paul, Oliver / Ruther, Patrick et al. | 2019
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Sidewall Transfer Patterning-Based Nano-Crystalline MoS2 Sensing Element for Stress and Optical MEMS SensorRana, Vaibhav / Singh, Anurag / Ramesh, Akhil / Dhyani, Veerendra / Das, Samaresh / Singh, Pushparaj et al. | 2019
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ALD Titania Sidewalls on a CMOS-MEMS Resonator Oscillator and Effects on Resonant Frequency DriftLin, Yi-Chung / Guney, Metin G. / Fedder, Gary K. et al. | 2019
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GaN/AlN Heterostrucutre Micromechanical Self-Sustained Oscillator for Middle Ultraviolet (MUV) Light DetectionChen, Hailong / Jia, Hao / Shuvra, Pranoy Deb / Lin, Ji-Tzuoh / Alphenaar, Bruce W. / Feng, Philip X.-L. et al. | 2019
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High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel TechnologyVeltkamp, Henk-Willem / Zhao, Yiyuan / de Boer, Meint J. / Sanders, Remco G.P. / Wiegerink, Remco J. / Lotters, Joost C. et al. | 2019
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Common Flexible Channel Structure for Integration of Three-Axis Force Sensor and Soft Micro ActuatorOtake, Shohei / Mori, Fuminari / Konishi, Satoshi et al. | 2019
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Stiffness-Mass Decoupled Honeycomb-like Disk Resonator GyroscopeXu, Yi / Li, Qingsong / Zhou, Xin / Gao, Kai / Wang, Peng / Zhang, Yongmeng / Hou, Zhanqiang / Wu, Xuezhong / Xiao, Dingbang et al. | 2019
- 660
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A MEMS accelerometer based on synchronizing DETF oscillatorsWang, Shudong / Pu, Dong / Huan, Ronghua / Jiang, Zhuangde / Shen, Yajing / Wei, Xueyong et al. | 2019
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An Ultra-High Resolution Resonant MEMS AccelerometerPandit, Milind / Mustafazade, Arif / Zhao, Chun / Sobreviela, Guillermo / Zou, Xudong / Steinmann, Philipp / Seshia, Ashwin et al. | 2019
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High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS GyroscopesSingh, Sajal / Darvishian, Ali / Cho, Jae Yoong / Shiari, Behrouz / Najafi, Khalil et al. | 2019
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Study on Point-to-Ring Corona Based GyroscopeVan, Ngoc Tran / Bui, Tung Thanh / Tran, Canh-Dung / Dinh, Thien Xuan / Thanh, Hoa Phan / Van, Dong Pham / Duc, Trinh Chu / Dau, Van Thanh et al. | 2019
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A Transfer Function Approach to Shock Duration Compensation for Laboratory Evaluation of Ultra-High-G Vacuum-Packaged MEMS AccelerometersXu, Kaisi / Zhu, Ningli / Jiang, Fushuai / Zhang, Wei / Hao, Yilong et al. | 2019
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In-Plane Gyroscope Using a Piezoresistive Beams with Sidewall DopingAbe, Kosuke / Takahashi, Hidetoshi / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
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A 3-D Parallel-Plate MEMS Accelerometer with a Gold Proof MassYamane, Daisuke / Otobe, Shota / Atsumi, Ken / Koga, Tatsuya / Konishi, Toshifumi / Safu, Teruaki / Iida, Shinichi / Ito, Hiroyuki / Ishihara, Noboru / Machida, Katsuyuki et al. | 2019
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A Piezoresistive Vibration Sensor with Liquid on Corrugated MembraneSuzuki, Ryosuke / Nguyen, Thanh-Vinh / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
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Out-of-Plane Comb-Fingers for a Low-Noise, 0.12-MM2 Z-Axis Accelerometer Fabricated with a 3D MEMS ProcessMaspero, F. / Delachanal, S. / Berthelot, A. / Joet, L. / Langfelder, G. / Hentz, S. et al. | 2019
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An 8PPM/°C Temperature Sensitivity of the Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation MethodCui, Jian / Zhao, Qiancheng / Bai, Zesen / Yan, Guizhen et al. | 2019
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Self-Clocking Electro-Mechanical Sigma-Delta Modulator Quadrature Error Cancellation for MEMS GyroscopeChen, Fang / Gu, Jiebin / Salimi, Pejwaak / Kraft, Michael / Li, Xinxin et al. | 2019
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Sinusoidal Modulation of FM Accelerometers with Integrated Oscillator and Frequency DigitizationBestetti, Marco / Marra, Cristiano R. / Leoncini, Mauro / Tocchio, Alessandro / Rizzini, Francesco / Langfelder, Giacomo et al. | 2019
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Enhancing Vibration Robustness and Noise in Automotive Gyroscope with Large Drive Motion and Levered Sense ModePagani, Leonardo Gaffuri / Dellea, Stefano / Bursi, Giulio / Brunetto, Matteo / Falorni, Luca / Langfelder, Giacomo et al. | 2019
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Thermal Characterization of Liquid Analytes via Photothermal Modulation of Microfluidic ResonatorsYoon, Yeowon / Khan, Faheem / Thundat, Thomas / Lee, Jungchul et al. | 2019
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Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35\boldsymbol{\mu}\mathbf{m}$ CMOS MEMS TechnologyXu, Wei / Wang, Ruijie / Wang, Xiaoyi / Mousa, Basant / Lee, Yi-Kuen et al. | 2019
- 720
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Graphene-Based Wireless Inline Pressure Sensor for in Vivo Blood Pressure MonitoringInoue, Nagisa / Onoe, Hiroaki et al. | 2019
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The Measurement of the Vibration of Human iPS Cell-Derived Cardiomyocytes' ContractionIshii, Yasuaki / Tsukagoshi, Takuya / Nguyen, Thanh-Vinh / Hirayama-Shoji, Kayoko / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
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Improving Structural Strength and Stability of Parylene-Based Capacitive Micro Pressure Sensor Using Corrugated SidewallHur, Tae-Bong / Clark, William W. / Chun, Youngjae / Go, Catherine / Tillman, Bryan / Cho, Sung Kwon et al. | 2019
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A Continuous, Drift-Compensated Impedimetric Thermal Flow Sensor for in Vivo ApplicationsHudson, Trevor / Baldwin, Alex / Meng, Ellis et al. | 2019
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Sensing Fluid Properties of Super High Viscous Liquids Using Non-Conventional Vibration Modes in Piezoelectrically Excited MEMS ResonatorsPfusterschmied, Georg / Weinmann, Christoph / Hospodka, Markus / Hofko, Bernhard / Schneider, Michael / Schmid, Ulrich et al. | 2019
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A 2000-Atmosphere Bulk-Type Pressure Sensor Realized on (001) Substrate with Selective Stress-Filtering TrenchesLin, Dequan / Chan, Elena / Tang, Zili / Lu, Lei / Wong, Man / Chau, Kevin et al. | 2019
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A High Accuracy Transit-Time Airflow Volumetric Flowmeter Based on pMUTs ArraysChen, Xuying / Liu, Chengwei / Xu, Jinghui / Chen, Hong / Wang, Yong / Hu, Liang / Xie, Jin et al. | 2019
- 747
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Sensitivity Improvement of MEMS Thermal Wind Senor Using Vertical Stacking ThermistorsWang, Zhenjun / Yi, Zhenxiang / Ye, Yizhou / Qin, Ming / Huang, Qing-an et al. | 2019
- 751
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A Novel Thermopile-Based Gas Flow Sensor Fabricated with a Single-Wafer-Based Front-Sided Bulk-Micromachining TechniqueXue, Dan / Ni, Zao / Li, Wei / Wang, Jiachou / Li, Xinxin et al. | 2019
- 755
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Design and Characterization of a CMOS MEMS Capacitive Squeeze-Film Pressure SensorChiu, Jason / Lu, Michael S.-C. et al. | 2019
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Transmitting Sensitivity Enhancement of pMUTs via Releasing Residual Stress by V-Shaped SpringsChen, Xuying / Chen, Dongyang / Pang, Jintao / Yang, Dengfei / Huang, Manjuan / Liu, Huicong / Xie, Jin et al. | 2019
- 763
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Acoustic Tweezers Based on Linear Fresnel Lens with Air Cavities for Large Volume Particle TrappingTang, Yongkui / Kim, Eun Sok et al. | 2019
- 767
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Piezoelectric Mems Microspeaker with Suspension Springs and Dual Electrode to Enhance Sound Pressure LevelCheng, Hsu-Hsiang / Huang, Zi-Rong / Lo, Sung-Cheng / Wang, Yi-Jia / Wu, Mingching / Fang, Weileun et al. | 2019
- 771
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Concentric PMUT Arrays for Focused Ultrasound and High Intensity ApplicationsEovino, Benjamin E. / Liang, Yue / Lin, Liwei et al. | 2019
- 775
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Implementation of Two-Poly Differential MEMS Microphones for SNR and Sensing Range EnhancementLo, Sung-Cheng / Chan, Chun-Kai / Lee, Ya-chu / Wu, Mingching / Fang, Weileun et al. | 2019
- 779
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Piezoelectric Micromachined Ultrasonic Transducer with a Universal Bottom-Up Fabrication Approach Implemented on a Foil as Doppler Radar for Gesture RecognitionFeng, Guo-Hua / Liu, Hua-Jin / Lai, Gui-Rong et al. | 2019
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Monitoring Volcanic Activity with High Sensitive Infrasound Sensor Using a Piezoresistive CantileverShimatani, Jumpei / Takahashi, Hidetoshi / Ichihara, Mie / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2019
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High-Pressure Output 40 kHz Air-Coupled Piezoelectric Micromachined Ultrasonic TransducersLuo, Guo-Lun / Kusano, Yuri / Roberto, Matthew N. / Horsley, David A. et al. | 2019
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Pinned Boundary Piezoelectric Micromachined Ultrasonic TransducersLiang, Yue / Eovino, Benjamin E. / Lin, Liwei et al. | 2019
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Wideband Ultrasonic Transducer Using Modified Space-Filling CurvesPurcell, W. / Islam, S. / Rhee, S. / Nguyen, A. / Song, S. H. / Ahmad, F. / Kim, A. et al. | 2019
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Broadband and Fast Response Thermophone Using Graphene NanofilmHuang, Wei / Li, Peng / Le, Xianhao / Zhang, Xiaodong / Gao, Chao / Xu, Zhen / Xie, Jin et al. | 2019
- 803
-
An MRI-Compatible Force Sensor with Enclosed Air Using Pressure TransmissionAkutagawa, Daiki / Izumizaki, Tomohiko / Hori, Masataka / Takahashi, Hidetoshi / Shimoyama, Isao / Dohi, Tetsuji et al. | 2019
- 807
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PDMS Cantilever Integrated with Metal Wrinkles to Measure Contractile Behaviours of Matured Cardiac CellsOyunbaatar, Nomin-Erdene / Lee, Dong-Weon et al. | 2019
- 811
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Development of a Highly Stretchable Strain Sensor Based on Patterned and Rolled Carbon NanotubesLee, Jaeyong / Pyo, Soonjae / Jo, Eunhwan / Kim, Jongbaeg et al. | 2019
- 815
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A Paper-Based Disposable Strain Sensor by Direct Laser PrintingLong, Yu / Zang, Xining / Zhong, Junwen / Xu, Renxiao / Hayasaka, Takeshi / Lin, Liwei et al. | 2019
- 819
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive MeasurementsSchwab, Lucien / Allain, Pierre-Etienne / Banniard, Louise / Mauran, Nicolas / Lagrange, Denis / Fafin, Alexandre / Gely, Marc / Hermouet, Maxime / Jourdan, Guillaume / Hentz, Sebastien et al. | 2019
- 823
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Evaluation of Ground Slipperiness During Collision Using MEMS Local Slip SensorOkatani, Taiyu / Shimoyama, Isao et al. | 2019
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Monolithic/Vertical Integration of Piezo-Resistive Tactile Sensor and Inductive Proximity Sensor Using CMOS-MEMS TechnologyLee, Jia-Horng / Yeh, Sheng-Kai / Fang, Weileun et al. | 2019
- 830
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Flexible Pressure Sensor Based on Porous Dielectric Elastomer Containing Conductive FillerChoi, Jungrak / Kim, Kyuyoung / Oh, Yongsuk / Park, Inkyu et al. | 2019
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Flip-Chip Integration of Inductive CMOS Tactile Sensor with Si Cavity for Polymer-Filler/Metal-Ball Sensing InterfaceYeh, Sheng-Kai / Fang, Weileun et al. | 2019
- 837
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Energy Transfer Control of Mode Cooling Induced by Capacitive Nonlinear Coupling in MEMS ResonatorMiao, Tongqiao / Zhou, Xin / Ou, Fenlan / Lu, Kuo / Zhang, Yongmeng / Wu, Xuezhong / Xiao, Dingbang et al. | 2019
- 841
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Low-Cost Micro Predictive Mean Vote (PMV) Sensor and its Application for Smart Personal Ventilation SystemsIzhar / Xu, Wei / Wang, Xiaoyi / Wang, Ruijie / Lee, Yi-Kuen et al. | 2019
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Measurement of Friction Force Between Directly Integrated Carbon Nanotube Bundles in Tip-to-Tip Contact Using MEMS Tribometer PlatformKim, Wondo / Jo, Eunhwan / Lee, Jae-Ik / Kim, Jongbaeg et al. | 2019
- 849
-
A Micro Resonant DC Electric Field Sensor Based on Mode Localization PhenomenonYan, Zimu / Liang, Jiaju / Hao, Yongcun / Chang, Honglong et al. | 2019
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Wearable Soft Microfluidic Pressure Sensor Using 3D-Printed Mold for Health MonitoringKim, Kyuyoung / Choi, Jungrak / Jeong, Yongrok / Kim, Minseong / Park, Jaeho / Oh, Yongsuk / Park, Inkyu et al. | 2019
- 856
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A Micro Aerosol Sensor for PM1 Concentration Detection Based on 3D Printed Virtual Impactor and SAW SensorWang, Yong / Wang, Yinshen / Liu, Weixin / Chen, Dongyang / Guan, Yangyang / Wu, Changju / Xie, Jin et al. | 2019
- 860
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NIR and MIR Absorption of Ultra-Black Silicon (UBS). Application to High Emissivity, All-Silicon, Light SourceSarkar, Sreyash / Elsayed, Ahmed A. / Nefzaoui, Elyes / Drevillon, Jeremie / Basset, Philippe / Marty, Frederic / Anwar, Momen / Yu, Yiting / Zhao, Jiancun / Yuan, Xichen et al. | 2019
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Fabrication of a Tunable Capacitor with a Non-Planar Plate by Using Titanium and Polyimide as Sacrificial LayersLiu, Huiliang / Guo, Xin / You, Zheng / Liu, Zewen et al. | 2019
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X-Cut Lithium Niobate Series-Parallel Resonator Configuration Boosts Passive Voltage Amplification for Wake-Up Receivers to 46 V/VColombo, Luca / Kochhar, Abhay / Vidal-Alvarez, Gabriel / Piazza, Gianluca et al. | 2019
- 871
-
Highly Linear Magnetic-free Isolator Based on a Time-Modulated Differential RF MEMS Lattice FilterKulik, Piotr / Yu, Yao / Chen, Guofeng / Rinaldi, Matteo et al. | 2019
- 875
-
A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112Yang, Yansong / Lu, Ruochen / Gong, Songbin et al. | 2019
- 879
-
AlN Piezoelectric Nanoelectromechanical Isolator via Parametric Frequency Conversion and AmplificationLee, Jaesung / Matheny, Matthew H. / Roukes, Michael L. / Feng, Philip X.-L. et al. | 2019
- 883
-
Boosting Qs of AlN Resonators by Redefining Acoustic BoundariesGao, Anming / Winterkorn, Martin / Yang, Yansong / Lu, Ruochen / Provine, J / Gong, Songbin et al. | 2019
- 887
-
A Chip-Scale RF MEMS Gyrator via Hybridizing Lorentz-Force and Piezoelectric TransductionsWu, Tao / Lu, Ruochen / Gao, Anming / Tu, Cheng / Manzaneque, Tomas / Gong, Songbin et al. | 2019
- 891
-
RF MEMS Thermistor Power Sensor Based on Wheatstone Full-Bridge StructureChu, Chenlei / Liao, Xiaoping / Yan, Hao / Yi, Zhenxiang et al. | 2019
- 895
-
A Monolithic FBAR Oscillator Based on Heterogeneous System-on-Chip IntegrationGao, Chuanhai / Zhang, Menglun / Jiang, Yuan / Liu, Buohua / Pang, Wei et al. | 2019
- 899
-
Interface Circuit Design to Enable Miniaturization of Thermal-Piezoresistive Oscillators for Mass Sensing ApplicationsSung, Chiao-An / Liu, Ting-Yuan / Zope, Anurag A. / Li, Ming-Huang / Li, Sheng-Shian et al. | 2019
- 903
-
A Fully-Differential CMOS-MEMS DETF Resonator Design with Extended Mass and Electrodes to Enable High Power HandlingGuo, Jhe-Ru / Zope, Anurag A. / Chen, Chao-Yu / Li, Ming-Huang / Lai, Mei-Feng / Li, Sheng-Shian et al. | 2019
- 907
-
Active Boost in the Quality Factor of an AlN MEMS Resonator up to 165,000Xu, Changting / Piazza, Gianluca et al. | 2019
- 911
-
Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature CompensationLi, Ming-Huang / Chen, Chao-Yu / Lu, Ruochen / Yang, Yansong / Wu, Tao / Gong, Songbin et al. | 2019
- 915
-
A Reflection-Type Vapor Cell for Micro Atomic ClockNishino, Hitoshi / Toda, Masaya / Kanamori, Yoshiaki / Yano, Yuichiro / Kajita, Masatoshi / Ido, Tetsuya / Hara, Motoaki / Ono, Takahito et al. | 2019
- 919
-
Low-Loss MEMS Phase Shifter for Large Scale Reconfigurable Silicon PhotonicsEdinger, Pierre / Errando-Herranz, Carlos / Gylfason, Kristinn B. et al. | 2019
- 922
-
Dual Mode Mid-Infrared Chemical Sensor Using Bragg Wavelength in Subwavelength Grating Incorporated Broadband Directional CouplerDong, Bowei / Hu, Ting / Chang, Yuhua / Kwong, Dim-Lee / Lee, Chengkuo et al. | 2019
- 926
-
A Compact MEMS-Based Infrared Spectrometer for Multi-Gases MeasurementZhang, Shaoda / Bin, Wu / Zheng, Xingyu / San, Haisheng / Hofmann, Werner et al. | 2019
- 930
-
Engineering and Tuning of Slow Light in Mid-Infrared Silicon-on-Insulator Photonic Crystal WaveguidesMa, Yiming / Dong, Bowei / Li, Bo / Lee, Chengkuo et al. | 2019
- 934
-
Diversified and Precise Plasmonic Color Tuning by Three-Dimensional Air-Gap NanocavitiesHuang, Yun / Zhu, Jia / Chen, Zhuojie / Chen, Xiaoyu / Kang, Tian / Lin, Guanzhou / Zhu, Rui / Wu, Wengang / Lu, Peimin et al. | 2019
- 938
-
Ultra-Fast and Compact Varifocal LensWapler, Matthias C / Wallrabe, Ulrike et al. | 2019
- 942
-
Ultrathin Compound Eye Camera for Super-Resolution Far-Field Imaging Using Light Absorbing Multiple LayersKim, Kisoo / Jang, Kyung-Won / Jeong, Ki-Hun et al. | 2019
- 946
-
A Novel Strategy for Lithium-Ion Battery Anode with Enhanced Cycling Performance: Silicon Particles Enclosed in Shell-Like Mxenes/CNTs NanostructureHu, Bingmeng / Kuang, Xuanlin / Xu, Sixing / Wang, Xiaohong et al. | 2019
- 950
-
Stamp-Assisted Gravure Printing of Micro-Supercapacitors with General Flexible SubstratesWang, Haobin / Song, Yu / Miao, Liming / Wan, Ji / Chen, Xuexian / Cheng, Xiaoliang / Guo, Hang / Zhang, Haixia et al. | 2019
- 954
-
3D Printed Flexible Triboelectric Energy Harvesters via Conformal Coating of Parylene AF4Karakurt, Ilbey / Zhong, Junwen / Lin, Liwei et al. | 2019
- 958
-
Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended LifetimeJo, Eunhwan / Lee, Yong-Bok / Lee, Jaeyong / Kim, Su-Bon / Kim, Wondo / Seo, Min-Ho / Yoon, Jun-Bo / Kim, Jongbaeg et al. | 2019
- 962
-
High Work Density Gete Mechanical Phase Change ActuatorBest, James / Piazza, Gianluca et al. | 2019
- 966
-
Flexible and Scalable Biochemical Energy Harvesting: A Yarn-Based BiobatteryGao, Yang / Liu, Lin / Cho, Jonghyun / Choi, Seokheun et al. | 2019
- 970
-
Multi Kilovolt Lithium Niobate Pyroelectric Cantilever Switched Power SupplyNi, Di / Vinayakumar, K. B. / Pinrod, Visarute / Lal, Amit et al. | 2019
- 974
-
Frequency Agile PMUT-Based Ultrasonic Communication LinksHerrera, Bernard / Pop, Flavius / Cassella, Cristian / Rinaldi, Matteo et al. | 2019
- 978
-
Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-StateZhang, Xiaojing / Shi, Jianhao / Zhu, Xi / Wang, Yipin / Chen, Jiaming / Ding, Guifu / Yang, Zhuoqing et al. | 2019
- 982
-
A Closed-Loop Controlled Cmos Mems Biaxial Scanning Mirror for Projection DisplayTsai, Cho-Chuan / Lu, Michael S.-C. et al. | 2019
- 986
-
A Restoring Force Boosting Structure with Flexible Stiction Recovery Electrode for MEMS Relays/SwitchesBian, Wei / Zhao, Jiahao / You, Zheng / Sun, Xiangzheng et al. | 2019
- 990
-
Low Voltage Haptic Slider Built Using Sol-Gel Thin-Film PZT Actuators Reported on GlassCasset, Fabrice / le Rhun, Gwenael / Neff, Baptiste / Desloges, Brigitte / Dieppedale, Christel / Fanget, Stephane et al. | 2019
- 994
-
A Novel Approach to Swimmer Actuation via Leaky Surface Acoustic WaveKong, Deqing / Nishio, Kazuki / Kurosawa, Minoru Kuribayashi et al. | 2019
- 998
-
A Geometrically Predetermined Eighth Order Nonlinear Flexure for Extending the Stable Travel Range of the Electrostatic ActuatorXiang, Xiaojian / Dai, Xuhan / Kang, Kai / Sun, Shi / Ding, Guifu et al. | 2019
- 1002
-
All Solid-State Flexible Micro-Supercapacitor Based on Hybrid Electrodes for Power ApplicationPatil, Swati J. / Park, Jong Sung / Lee, Dong Weon et al. | 2019
- 1006
-
The Methodology to Make Smart Contact Lens Become a Semi-Passive SystemChiou, Jin-Chern / Shieh, Cheng-En / Yeh, Kuan-Ting / Hsu, Shun-Hsi et al. | 2019
- 1010
-
High Performance Flexible Thermoelectric Device Included Rigid MaterialKashiwagi, Makoto / Koshi, Tomoya / Iwase, Eiji et al. | 2019
- 1013
-
Electret Based Vibration Energy Harvester with Self-Healable Surface ChargeZhang, Yulong / Hu, Yushen / Wang, Meihua / Wang, Fei et al. | 2019
- 1017
-
A Double-Deck Structured MEMS Electrostatic Vibrational Energy Harvester for Minimal FootprintHonma, Hiroaki / Toshiyoshi, Hiroshi et al. | 2019
- 1021
-
Bipolar Micro Electret Power GeneratorTao, Kai / Wang, Binqiao / Chen, Yixin / Tang, Lihua / Wu, Jin / Chang, Honglong et al. | 2019
- 1025
-
A MEMS Vibratory Energy Harvester Charged by an Off-Chip ElectretYamane, Daisuke / Honma, Hiroaki / Toshiyoshi, Hiroshi et al. | 2019
- 1029
-
Tranforming Lateral Limbs Movement to Vertical Frequency-up-Conversion (FUC) Resonance for Wearable Energy HarvestersHan, Ruofeng / Li, Keli / Wang, Nianying / He, Qisheng / Xu, Dacheng / Li, Xinxin et al. | 2019
- 1033
-
Thermomagnetic Micro-Tracks-Guided Magnetic Bead Manipulation: A Demonstration of Moving Bead Across Different Tracks Enabled by Novel Embedded on-Chip Micro Heating WiresFang, Lin-Huei / Duan, Hao / Chen, Chin-Chung / Cheng, Chin-Cheng / Chung, Tien-Kan et al. | 2019
- 1037
-
Chaotic Signal Generation in the MHz Range with a Monolithic CMOS-MEMS Microbeam ResonatorBarcelo, Joan / de Paul, Ivan / Bota, Sebastia / Segura, Jaume / Verd, Jaume et al. | 2019
- 1041
-
Manipulating the Moving Trajectory of Insect-Scale Piezoelectric Soft Robots by FrequencyLiang, Jiaming / Wu, Yichuan / Shao, Zhichun / Yim, Justin K. / Xu, Renxiao / Song, Yi / Qi, Mingjing / Zhong, Junwen / Zhang, Min / Wang, Xiaohao et al. | 2019
- 1045
-
Sealed Cavity Pressure Evaluation from 1 Pa to Over 10 KPA Using Thin Diaphragm for MEMS Vacuum Packagingal Farisi, Muhammad Salman / Hirano, Hideki / Tanaka, Shuji et al. | 2019
- 1049
-
Ultrathin Radiation Coating Enabling High Accuracy and High Resolution Real-Time Infrared Imaging of Thermal MEMS DevicesWang, Yipin / Liu, Qi / Sun, Yunna / Zhang, Xiaojing / Chen, Jiaming / Yang, Zhuoqing / Ding, Guifu et al. | 2019