Monitoring a deposition process using an extended adaptive Kalman filter (English)
- New search for: Atkinson, P.
- New search for: Nixon, M.
- New search for: Atkinson, P.
- New search for: Nixon, M.
In:
IEE Proceedings D (Control Theory and Applications)
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131
, 1
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1-7
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1984
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ISSN:
- Article (Journal) / Print
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Title:Monitoring a deposition process using an extended adaptive Kalman filter
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Contributors:Atkinson, P. ( author ) / Nixon, M. ( author )
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Published in:IEE Proceedings D (Control Theory and Applications) ; 131, 1 ; 1-7
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Publisher:
- New search for: IET Digital Library Archive
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Publication date:1984-01-01
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Size:7 pages
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:rate of deposition , thickness measurement , reflected energy curve , monitor substrate , Kalman filters , process control , extended adaptive Kalman filter , thickness of deposit , vacuum deposition , repeating interference fringe , infrared filters , adaptive optics , monochromatic infrared beam , optical filters , vacuum deposited coatings
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Source:
Table of contents – Volume 131, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Monitoring a deposition process using an extended adaptive Kalman filterAtkinson, P. / Nixon, M. et al. | 1984
- 8
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Computer-aided design of nonlinear controllers for torque controlled robot armsSahba, M. / Mayne, D.Q. et al. | 1984
- 15
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On the selection of states to be retained in a reduced-order modelLastman, G.J. / Sinha, N.K. / Rózsa, P. et al. | 1984
- 23
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Algebra-geometric approach for the model reduction of large-scale multivariable systemsShieh, L.S. / Tsay, Y.T. et al. | 1984
- 37
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Analysis of singular systems using orthogonal functionsParaskevopoulos, P.N. et al. | 1984
- 39
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Singular perturbation method for Kalman filter in discrete systemsKailasa Rao, A. / Naidu, D.S. et al. | 1984
- 47
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Controller synthesis of optimal sensitivity: multivariable caseBor-Sen Chen et al. | 1984
- 52
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Simplified analytic stability test for systems with commensurate time delaysHertz, D. / Jury, E.I. / Zeheb, E. et al. | 1984