Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures (English)
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- New search for: Rebolledo Uscanga, Fernando Antonio
- Further information on Rebolledo Uscanga, Fernando Antonio:
- https://orcid.org/0000-0001-5277-0662
- New search for: Pierce, Mark C
- Further information on Pierce, Mark C:
- https://orcid.org/0000-0003-4377-9547
- New search for: Zahn, Jeffrey D
- Further information on Zahn, Jeffrey D:
- https://orcid.org/0000-0001-8712-752X
- New search for: Rebolledo Uscanga, Fernando Antonio
- Further information on Rebolledo Uscanga, Fernando Antonio:
- https://orcid.org/0000-0001-5277-0662
- New search for: Pierce, Mark C
- Further information on Pierce, Mark C:
- https://orcid.org/0000-0003-4377-9547
- New search for: Zahn, Jeffrey D
- Further information on Zahn, Jeffrey D:
- https://orcid.org/0000-0001-8712-752X
In:
Journal of Micromechanics and Microengineering
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33
, 9
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2023
- Article (Journal) / Electronic Resource
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Title:Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures
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Contributors:Rebolledo Uscanga, Fernando Antonio ( author ) / Pierce, Mark C ( author ) / Zahn, Jeffrey D ( author )
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Published in:
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Publisher:
- New search for: IOP Publishing
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Publication date:2023-09-01
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Size:12 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Licence:
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Source:
Table of contents – Volume 33, Issue 9
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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PEDOT:PSS stabilized paper-based piezoresistive sensor for wearable electronicsPan, Xiaoying / Zhao, Cong / Sun, Qingyin / Qin, Chu / Wu, Jiaxin / Wang, Min et al. | 2023
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Characterization of thin film Parylene C device curvature and the formation of helices via thermoformingThielen, Brianna / Meng, Ellis et al. | 2023
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Fabrication of n-shaped micro copper structures through localized electrochemical depositionWang, Fuliang / Tian, Qiang / Pan, Chengpeng et al. | 2023
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Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)Arscott, Steve et al. | 2023
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A simple way to predict the flip–chip gapHuang, Yue / Gan, Zhi-Kai / Lin, Chun et al. | 2023
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Novel four-port RF phase change switches based on GeTe thin filmFu, Shuaishuai / Gao, Libin / Peng, Yu / Qu, Sheng / Wang, Jiamei / Chen, Hongwei / Liu, Ningchuan / Zhang, Jihua et al. | 2023
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Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readoutWang, Xuetong / Zheng, Xudong / Shen, Yaojie / Xia, Chenhao / Tong, Wenyuan / Jin, Zhonghe / Ma, Zhipeng et al. | 2023
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Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layoutChen, Yunzhuang / Lai, Leijie / Fang, Yu / Zhu, Limin et al. | 2023
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Micromechanical vibro-impact systems: a reviewTsai, Chun-Pu / Li, Wei-Chang et al. | 2023
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First multiplexed electrochemical wax-on-plastic chip: PNA/GO interface integration for DNA detectionDas, Prabhangshu Kumer / Adil, Omair / Shamsi, Mohtashim Hassan et al. | 2023
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Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR applicationGhazinouri, Behrad / He, Siyuan et al. | 2023
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Room temperature operated flexible La-ZnO/MWCNTs sensor for ppb level carbon monoxide detectionVerma, Gulshan / Pandey, Vikas / Islam, Monsur / Kumar, Mahesh / Gupta, Ankur et al. | 2023
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The effect of tool wear on the damaged layer thickness and tool wear rate in ultra-precision turning of quartz glassLiu, Yujie / Tong, Hao / Li, Yong / Chen, Jialong et al. | 2023
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Experimental and numerical investigations of heat transfer and flow characteristics during flow boiling in straight and diverging PDMS microchannelAlugoju, Uday Kumar / Dubey, Satish Kumar / Javed, Arshad et al. | 2023
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Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architecturesRebolledo Uscanga, Fernando Antonio / Pierce, Mark C / Zahn, Jeffrey D et al. | 2023