A novel design and analysis of a MEMS ceramic hot-wire anemometer for high temperature applications (English)
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In:
Journal of Physics: Conference Series
;
34
, 1
;
277-282
;
2006
-
ISSN:
- Article (Journal) / Electronic Resource
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Title:A novel design and analysis of a MEMS ceramic hot-wire anemometer for high temperature applications
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Contributors:N R Nagaiah ( author ) / A K Sleiti ( author ) / S Rodriguez ( author ) / J S Kapat ( author ) / L An ( author ) / L Chow ( author )
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Published in:Journal of Physics: Conference Series ; 34, 1 ; 277-282
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Publisher:
- New search for: Institute of Physics
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Publication date:2006-04-01
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Size:6 pages
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ISSN:
-
DOI:
-
Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 34, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Microfabricated platforms for the study of neuronal and cellular networksL Berdondini / S Generelli / T Kraus / O T Guenat / S Koster / V Linder / M Koudelka-Hep / N F de Rooij et al. | 2006
- 7
-
Proteins as data storage devices: insights from computer modelsMiguel Ortiz-Lombardía / Chandra S Verma et al. | 2006
- 15
-
Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiationH O Moser / L K Jian / B D F Casse / S P Heussler / M Bahou / M Cholewa / J R Kong / B T Saw / Shahrain bin Mahmood / P Yang et al. | 2006
- 22
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Microablation of gold nanolayers by direct write lithographyPrashant D Sawant / Peter Livingston / Dan V Nicolau et al. | 2006
- 28
-
Electromagnetic modelling of GaAs membrane supported mm-wave receiversD Neculoiu / A Muller / G Konstantinidis et al. | 2006
- 34
-
Large-scale lithography for sub-500nm featuresR L Pelzer / T Steininger / Benoit Belier / Gwenaelle Julie et al. | 2006
- 39
-
A New Test Device for Characterization of Mechanical Stress Caused by Packaging ProcessesSoeren Hirsch / Steffen Doerner / Peter Hauptmann / Bertram Schmidt et al. | 2006
- 45
-
Fabrication of Micromixers Utilizing Shedding Effect Induced by Electrokinetic InstabilityLung-Ming Fu / Chang-Hsien Tai / Chine-Hsiung Tsai / Che-Hsin Lin / Chia-Yen Lee et al. | 2006
- 51
-
Design and Fabrication of 3D-Structured Contactless Capacitive-Type Detector for Capillary Electrophoresis MicrochipChia-Yen Lee / Che-Hsin Lin / Lung-Ming Fu et al. | 2006
- 57
-
A precision closed-loop driving scheme of silicon micromachined vibratory gyroscopeBo Yang / Bailing Zhou / Shourong Wang et al. | 2006
- 65
-
New Results on Plasma Activated Bonding of Imprinted Polymer Features for Bio MEMS ApplicationsP Kettner / R L Pelzer / T Glinsner / S Farrens / D Lee et al. | 2006
- 72
-
Haptic Technologies for MEMS DesignMustafa Calis / Marc P Y Desmulliez et al. | 2006
- 76
-
Silicon-based Packaging Platform with Embedded Solder Interconnections for Light Emitting DiodeChingfu Tsou / Yu-Sheng Huang / Che-Wei Lin et al. | 2006
- 82
-
A biodynamic microsystem for fluids viscosity measurementsAndrei Marius Avram / Marioara Avram / Adina Bragaru / Roxana Vasilco / Ciprian Iliescu et al. | 2006
- 89
-
Nonlinear Modeling and Simulation of Thermal Effects in Microcantilever Resonators DynamicM A Tadayon / H Sayyaadi / G Nakhaie Jazar et al. | 2006
- 95
-
Design and fabrication of Electroplating Nickel Micromachined Probe with out-of-plane predeformationChingfu Tsou / Shuen-Lung Huang / Hung-Chung Li / Teng-Hsien Lai et al. | 2006
- 101
-
Interface Circuit Design for Frequency-Time Domain MEMS SensorsSergey Y Yurish / Nikolay V Kirianaki et al. | 2006
- 106
-
Simulation of Two-Dimensional Unsteady Non-Newtonian Nonisothermal Fluid Flow in Micro ChannelsH L Zhang / J C Chai / N S Ong et al. | 2006
- 112
-
A Comparison of Various magnetic thin films for the application of microscale magnetic componentsDavid Flynn / Marc Desmulliez et al. | 2006
- 118
-
Deformation characterization of a nanoelectromechanical switchY T Gu / L C Zhang et al. | 2006
- 124
-
Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensorJ Aebersold / K Walsh / M Crain / M Voor / M Martin / W Hnat / J Lin / D Jackson / J Naber et al. | 2006
- 130
-
A Silicon/glass-based microfluidic device for invetigation of Lagrangian velocity field in microdropletsNam-Trung Nguyen / Cheng Wang / Teck Neng Wong / Lee Ngo Low / Soon Seng Ho et al. | 2006
- 136
-
Micromixer based on Taylor dispersionYang Huiqian / Nam-Trung Nguyen / Xiaoyang Huang et al. | 2006
- 142
-
Design and performance optimization of miniature heat pipes in LTCCPeter Z Shi / K M Chua / Stephen C K Wong / Y M Tan et al. | 2006
- 148
-
Overview and Improving Fiber Optic Gyroscope Based on MEMS/NEMS FabricationBo Zhang / Prof MTE Kahn et al. | 2006
- 155
-
Evaluation of bonding between oxygen plasma treated polydimethyl siloxane and passivated siliconK C Tang / E Liao / W L Ong / J D S Wong / A Agarwal / R Nagarajan / L Yobas et al. | 2006
- 162
-
Design of microelectromechanical systems for variability via chance-constrained optimizationKan-Lin Hsiung et al. | 2006
- 168
-
Simulation of Curl Compensation in MEMS MicromirrorAdisorn Tuantranont / Karawik Hemarat / Anurat Wisitsoraat et al. | 2006
- 174
-
Some Design Considerations on the Electrostatically Actuated Fixed-Fixed End Type MEMS SwitchesHamed Sadeghian / Ghader Rezazadeh / Ebrahim Abbaspour Sani et al. | 2006
- 180
-
A novel method of microneedle array fabrication using inclined deep x-ray exposureSang Jun Moon / Chun Yan Jin / Seung S Lee et al. | 2006
- 187
-
A missing factor in chip-based patch clamp assay: gigasealWee-Liat Ong / Levent Yobas / Wei-Yi Ong et al. | 2006
- 192
-
Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database OptimizationM W Chang / T J Gwo / T M Deng / H C Chang et al. | 2006
- 198
-
Electrochemical Biochip for Drug Screening At Cellular LevelYu Chen / Hui-fang Cui / Jian-shan Ye / Ser-choong Chong / Tit-meng Lim / Fwu-shan Sheu / Wing-cheong Hui et al. | 2006
- 204
-
A Fast, Sensitive and Label Free Electrochemical DNA SensorYu Chen / Elling / Yoke-ling Lee / Ser-choong Chong et al. | 2006
- 210
-
Process Optimization for Monolithic Integration of Piezoresistive Pressure Sensor and MOSFET Amplifier with SOI ApproachV Vinoth Kumar / A Dasgupta / K N Bhat / KNatarajan et al. | 2006
- 216
-
Sensitivity enhancement of polysilicon piezo-resistive pressure sensors with phosphorous diffused resistorsK Sivakumar / N Dasgupta / K N Bhat / K Natarajan et al. | 2006
- 222
-
PCR thermal management in an integrated Lab on ChipJanak Singh / Mayang Ekaputri et al. | 2006
- 228
-
24 GHz RF-MEMS Phase Shifter with Non-Galvanic Electromagnetic Coupling Fabricated in Silicon-Bulk TechnologySebastian Voigt / Stefan Leidich / Wolfram Doetzel / Steffen Kurth / Thomas Gessner et al. | 2006
- 235
-
Reliability modelling and analysis of thermal MEMSSylvaine Muratet / Srikanth Lavu / Jean-Yves Fourniols / George Bell / Marc P Y Desmulliez et al. | 2006
- 241
-
Simulation of Biosensor using FEMB G Sheeparamatti / M S Hebbal / R B Sheeparamatti / V B Math / J S Kadadevaramath et al. | 2006
- 247
-
A Teaching - Learning Framework for MEMS EducationB G Sheeparamatti / S A Angadi / R B Sheeparamatti / J S Kadadevaramath et al. | 2006
- 253
-
Modeling of a new 2D Acceleration Sensor Array using SystemC-AMSErik Markert / Marco Dienel / Goeran Herrmann / Dietmar Mueller / Ulrich Heinkel et al. | 2006
- 258
-
Electro-magnetically Actuated Minute Polymer Pump Fabricated using Packaging TechnologyG Balaji / A Singh / G K Ananthasuresh et al. | 2006
- 264
-
Coupled electrostatic-elastic analysis for topology optimization using material interpolationA Alwan / G K Ananthasuresh et al. | 2006
- 271
-
Plasma Etching of Tapered Features in Silicon for MEMS and Wafer Level Packaging ApplicationsHa-Duong Ngo / Andre Hiess / Volker Seidemann / Daniel Studzinski / Martin Lange / Jürgen Leib / Dzafir Shariff / Huma Ashraf / Mike Steel / Lilian Atabo et al. | 2006
- 277
-
A novel design and analysis of a MEMS ceramic hot-wire anemometer for high temperature applicationsN R Nagaiah / A K Sleiti / S Rodriguez / J S Kapat / L An / L Chow et al. | 2006
- 283
-
Study of electroosmosis-driven two-liquid displacement flow in a microcapillaryHiong Yap Gan / Chun Yang / Stephen Yee Ming Wan / Gnian Cher Lim / Yee Cheong Lam et al. | 2006
- 291
-
Numerical study of micro-scale gas flow using finite volume methodA Chaudhuri / C Guha / T K Dutta et al. | 2006
- 297
-
Parts synthesis approach for 3D integration of MEMS and microsystems leading to system-on-packageS K Bhatnagar et al. | 2006
- 304
-
PZT Actuated Seesaw SPDT RF MEMS SwitchDae-Sung Lee / Suk-Won Jung / Nam-Kyu Cho / Won-Hyo Kim / Woo-Kyeong Seong / Hyo-Derk Park et al. | 2006
- 310
-
Numerical and experimental investigations of micro air bearings for micro systemsQide Zhang / X C Shan et al. | 2006
- 316
-
Design, fabrication and characterization of an air-driven micro turbine deviceX C Shan / Qide Zhang / Yaofeng Sun / Zhenfeng Wang et al. | 2006
- 322
-
Electrochemical Characterization of Self-Assembled Monolayers on Semiconducting Substrates for MEMS ApplicationsSneha A Kulkarni / Imtiaz S Mulla / Kunjukrishna Vijayamohanan et al. | 2006
- 330
-
A novel and simple fabrication method of embedded SU-8 micro channels by direct UV lithographyC Fu / C Hung / H Huang et al. | 2006
- 336
-
Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental resultsD H B Wicaksono / L-J Zhang / G Pandraud / P J French / J F V Vincent et al. | 2006
- 342
-
Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filtersP J Stephanou / G Piazza / C D White / M B J Wijesundara / A P Pisano et al. | 2006
- 350
-
Simulation and experimental studies of an uncooled MEMS capacitive infrared detector for thermal imagingWeidong Wang / Vandana Upadhyay / John Bumgarner / Oliver Edwards et al. | 2006
- 356
-
Microfluidic transport by AC electroosmosisNazmul Islam and Jie Wu et al. | 2006
- 362
-
Self-actuating biosensor using a piezoelectric cantilever and its optimizationIl-Han Hwang / Jong-Hyun Lee et al. | 2006
- 368
-
Micro- and nano- patterning using imprinting techniqueHaijing Lu / X C Shan / Yaofeng Sun / Sum Huan Ng / Albert C W Lu et al. | 2006
- 373
-
Realization of a microelectrofluidic platformS H Ng / Z F Wang / Z F Shi / R T Tjeung / B K Lok et al. | 2006
- 379
-
Design optimization by numerical characterization of fluid flow through the valveless diffuser micropumpsM T Ahmadian / Amin Mehrabian et al. | 2006
- 385
-
Electrokinetic Flow in Microchannels with Finite Reservoir Size EffectsDeguang Yan / Chun Yang / Nam-Trung Nguyen / Xiaoyang Huang et al. | 2006
- 393
-
Fabrication of capacitive absolute pressure sensor using Si-Au eutectic bonding in SOI waferKang Ryeol Lee / Kunnyun Kim / Hyo-Derk Park / Yong Kook Kim / Seung-Woo Choi / Woo-Beom Choi et al. | 2006
- 399
-
A silicon-based flexible tactile sensor for ubiquitous robot companion applicationsKunnyun Kim / Kang Ryeol Lee / Dae Sung Lee / Nam-Kyu Cho / Won Hyo Kim / Kwang-Bum Park / Hyo-Derk Park / Yong Kook Kim / Yon-Kyu Park / Jong-Ho Kim et al. | 2006
- 404
-
Integration of indium phosphide thin film structures on silicon substrates by direct wafer bondingJ Arokiaraj / S Vicknesh / A Ramam et al. | 2006
- 410
-
Development of scanning micromirror with discrete steering anglesZ F Wang / W Noell / M Zickar / N F de Rooij / S P Lim et al. | 2006
- 417
-
A numerical model for etching through a circular holeP Rath / J C Chai / H Zheng / Y C Lam / V M Murukeshan et al. | 2006
- 423
-
Self-Assembly Carbon Nanotubes on Cantilever Biosensor for Sensitivity EnhancementJohnny H He / Shao-qing Sun / Jian-Shan Ye / Tit Meng Lim et al. | 2006
- 429
-
High sensitivity piezoresistive cantilever sensor for biomolecular detectionJohnny H HE / Yong Feng LI et al. | 2006
- 436
-
Modelling & Simulation of Novel Three Arm MEMS Actuators & Its ApplicationJagadeesh Pandiyan / M Umapathy / S Balachandar / M Arumugam / S Ramasamy / Nilesh C Gajjar et al. | 2006
- 442
-
Design of Industrial Vibration Transmitter Using MEMS AccelerometerJagadeesh Pandiyan / M Umapathy / S Balachandar / M Arumugam / S Ramasamy / Nilesh C Gajjar et al. | 2006
- 448
-
Flow of Cells in MicrochannelsY F YAP / D Li / J C CHAI et al. | 2006
- 454
-
An Improved Chemical Resistance and Mechanical Durability of Hydrophobic FDTS CoatingsB Kobrin / T Zhang / M T Grimes / K Chong / M Wanebo / J Chinn / R Nowak et al. | 2006
- 458
-
Novel polymer derived ceramic-high temperature heat flux sensor for gas turbine environmentN R Nagaiah / J S Kapat / L An / L Chow et al. | 2006
- 464
-
Design and Simulation of a New Decoupled Micromachined GyroscopeAbdelhameed Sharaf / Sherif Sedky / S E-D Habib et al. | 2006
- 470
-
Theoretical investigation of two-fluid electroosmotic flow in microchannelsY Gao / T N Wong / C Yang / N T Nguyen / K T Ooi / C Wang et al. | 2006
- 475
-
A new device with PZT ultrasonic transducers in MEMS technologySoeren Hirsch / Steffen Doerner / Stefan Schimpf / Ralf Lucklum / Peter Hauptmann / Bertram Schmidt et al. | 2006
- 481
-
High Productivity DRIE solutions for 3D-SiP and MEMS Volume ManufacturingM Puech / JM Thevenoud / N Launay / N Arnal / P Godinat / B Andrieu / JM Gruffat et al. | 2006
- 487
-
An adjustable synthetic jet by a novel PZT-driven actuator with a slide blockZhen-bing Luo / Zhi-xun Xia / Bing Liu et al. | 2006
- 493
-
Modified Model for Sacrificial Layer EtchingChang-ju Wu / Hui-lian Ma / Yue-lin Wang / Zhong-he Jin et al. | 2006
- 500
-
A Comparison Simulation of Fixed-fixed Type MEMS SwitchesG Rezazadeh / H Sadeghian / E Malekpour et al. | 2006
- 506
-
UV curing imprint lithography for micro-structure in MEMS manufacturingYucheng Ding / Hongzhong Liu / Bingheng Lu / Zhihui Qiu et al. | 2006
- 511
-
The ICP etching technology of 3C-SiC filmsNing Jin / Gong Quancheng / Sun Guosheng / Liu Zhongli et al. | 2006
- 516
-
Measurement of material properties of individual layers for composite films by a pull-in methodMeng Nie / Qing-An Huang / Weihua Li et al. | 2006
- 522
-
Simulations for Surface Evolvement and Footing Effect in ICP DRIE FabricationsJian Zhang / Qing-An Huang / Wei-Hua Li et al. | 2006
- 527
-
Continuous Electrodeless Dielectrophoretic Separation in a Circular ChannelL Zhang / F Tatar / P Turmezei / J Bastemeijer / J R Mollinger / O Piciu / A Bossche et al. | 2006
- 533
-
3D Ceramic Microfluidic Device ManufacturingGovindarajan Natarajan / James N Humenik et al. | 2006
- 540
-
Influence of The Sticking Effect on The Contact Resistance of a MEMS DC-Contact SwitchJian-Qiu Huang / Qing-An Huang et al. | 2006
- 546
-
A Novel Micromachined Microwave Power Sensor Using GaAs MMIC ProcessLei Han / Qing-An Huang / Xiaoping Liao et al. | 2006
- 552
-
A new micro-rotating structureZu-Tao Liu / Qing-An Huang / Wei-Hua Li et al. | 2006
- 558
-
A Nodal Analysis Method for Laterally-Driven Electrothermal MicroacutatorsRen-Gang Li / Qing-An Huang / Weihua Li et al. | 2006
- 564
-
PDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic SystemsW Mamanee / A Tuantranont / N V Afzulpurkar / N Porntheerapat / S Rahong / A Wisitsoraat et al. | 2006
- 570
-
A Cell Library Methodology for Co-Design of MEMS Package-DeviceJing Song / Jie-Ying Tang / Qing-An Huang et al. | 2006
- 577
-
Effect of SF6 flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching processPradeep Dixit / Jianmin Miao et al. | 2006
- 583
-
Dynamic Behavior Analysis of Compliant MicromechanismsMehdi Rezaei / Mohsen Tayefeh / Mohsen Bahrami et al. | 2006
- 589
-
Particle Line Assembly/Patterning by Microfluidic AC ElectroosmosisMeng Lian / Nazmul Islam / Jie Wu et al. | 2006
- 595
-
Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)S A Anbalagan / G Uma / M Umapathy et al. | 2006
- 601
-
Design and Simulation of MEMS Devices using Interval AnalysisM Shanmugavalli / G Uma / B Vasuki / M Umapathy et al. | 2006
- 606
-
Dynamic modeling of geometrically nonlinear electrostatically actuated microbeams (Corotational Finite Element formulation and analysis)H Borhan / M T Ahmadian et al. | 2006
- 614
-
Postbuckling analysis of a thermally driven microbeam under realistic conditionsMohsen Tayefeh / Mohsen Bahrami et al. | 2006
- 620
-
Design and Modelling of a Microfluidic Electro-Lysis Device with Controlling PlatesA Jenkins / C P Chen / S Spearing / L A Monaco / A Steele / and G Flores et al. | 2006
- 626
-
Microfluidic design for bio-sample delivery to silicon nanowire biosensor - a simulation studyS J Tan / I K Lao / H M Ji / A Agarwal / N Balasubramanian / D L Kwong et al. | 2006
- 631
-
Magnetically actuated microvalve for active flow controlDucloux Olivier / Talbi Abdelkrim / Deblock Yves / Gimeno Leticia / Tiercelin Nicolas / Pernod Philippe / Preobrazhensky Vladimir / Merlen Alain et al. | 2006
- 637
-
Vibrotactile using micromachined electromagnetic actuators arrayA Talbi / O Ducloux / N Tiercelin / Y Deblock / P Pernod / V Preobrazhensky et al. | 2006
- 643
-
Design and Simulation of Electro-fabricated MEMS Microhotplate for Gas Sensor ApplicationsA Wisitsoraat / A Tuantranont / T Lomas et al. | 2006
- 650
-
The Movement of Micro Droplet with the Effects of Dielectric Layer and Hydrophobic Surface Treatment with R.F. Atmospheric Plasma in EWOD StructureNah-Young Kim / Sung-Min Hong / Soon-Sup Park / Young-Pyo Hong et al. | 2006
- 656
-
Hydrophilic Surface Modification of PDMS Using Atmospheric RF PlasmaSung M Hong / Seong H Kim / and Jeong H Kim / Hak I Hwang et al. | 2006
- 662
-
Initial Test Results from a 3-axis Vibrating Ring GyroscopeB J Gallacher / J A Neasham / J S Burdess / A J Harris et al. | 2006
- 668
-
Solidly mounted resonators aging under harsh environmental conditionsB Ivira / R Y Fillit / F Ndagijimana / Ph Benech / J Boussey / G Parat / P Ancey et al. | 2006
- 674
-
A 3-D Simulator for Silicon Anisotropic Wet Chemical Etching Process Based on Cellular AutomataZai-Fa Zhou / Qing-An Huang / Wei-Hua Li / Chi Zhu et al. | 2006
- 680
-
A novel integrated spatial filtering detector chip with variable multi-valued weighting functionsH M Go / S Ohyama et al. | 2006
- 686
-
Designing H-shaped micromechanical filtersO P Arhaug / O Soeraasen et al. | 2006
- 692
-
Stochastic estimation of microactuator bucklingMohsen Bahrami / Mohsen Tayefeh et al. | 2006
- 698
-
Recent advances in automated system model extraction (SME)Nithin Narayanan / John Bloomsburgh / Yie He / Jianhua Mao / Mahesh B Patil / Sandeep Akkaraju et al. | 2006
- 704
-
Electro Hydrodynamic Pumping of Liquids in MicrochannelsNithin Narayanan / Sandeep Akkaraju / John Bloomsburgh / Lei Zhou et al. | 2006
- 709
-
Parallel Plate Particle Trapping with Application to CantileversJie (Jayne) Wu et al. | 2006
- 715
-
Modeling and simulation of multiport RF switchJ Vijay / Ivan Saha / G Uma / M Umapathy et al. | 2006
- 722
-
Design steps for bulk micro machined single axis silicon capacitive accelerometer with optimised device dimensionsVivek Agarwal / Tarun K Bhattacharayya / Subhadeep Banik et al. | 2006
- 728
-
Robust sliding-mode control of a MEMS optical switchBehrouz Ebrahimi / Mohsen Bahrami et al. | 2006
- 734
-
A Low Temperature Co-Fired Ceramic Mesofluidic SeparatorJijun Zhu / Jia Cheng / Simon S Ang et al. | 2006
- 740
-
Design, Fabrication and Characterization of an In Silico Cell Physiology lab for Bio Sensing ApplicationsA ul Haque / M Rokkam / A R De Carlo / S T Wereley / H W Wells / W T McLamb / S J Roux / P P Irazoqui / D M Porterfield et al. | 2006
- 747
-
Three-dimensional (3D) extra-cellular matrix coating of a microfluidic deviceK C Chaw / M Manimaran / Francis E H Tay / S Swaminathan et al. | 2006
- 752
-
Construction of Physics-Based Atlas and its application in Brain Deformation AnalysisA Roy / W L Nowinski / F E H Tay et al. | 2006
- 757
-
Design, modelling and simulation of vibratory micromachined gyroscopesSuhas Mohite / Nishad Patil / Rudra Pratap et al. | 2006
- 764
-
A new fabrication method for low stress PECVD - SiNx layersPoh Lam Ong / Jiashen Wei / Francis E H Tay / Ciprian Iliescu et al. | 2006
- 770
-
A new passive telemetry LC pressure and temperature sensor optimized for TPMSM Nabipoor / B Y Majlis et al. | 2006
- 776
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Adhesive bonding with SU-8 at wafer level for microfluidic devicesLiming Yu / Francis E H Tay / Guolin Xu / Bangtao Chen / Marioara Avram / Ciprian Iliescu et al. | 2006
- 782
-
The signal detection for the levitated rotor micro gyroscopeHuang Xiaogang / Chen Wenyuan / Liu Wu / Zhang Weiping / Wu Xiaosheng et al. | 2006
- 788
-
Variable RF capacitor based on a-Si:H (P-doped) multi-length cantileversY Q Fu / S B Milne / J K Luo / A J Flewitt / L Wang / J M Miao / W I Milne et al. | 2006
- 794
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Development of thermal actuators with multi-locking positionsJ K Luo / Y Zhu / Y Q Fu / A J Flewitt / S M Spearing / J M Miao / W I Milne et al. | 2006
- 800
-
Design and fabrication of a micro zinc/air batteryL Fu / J K Luo / J E Huber / T J Lu et al. | 2006
- 806
-
Quantification of human immunoglobulin G immobilized on gold-coated silicon chip for biosensing applicationsS K Vashist / R Raiteri / R Tewari / R P Bajpai / L M Bharadwaj et al. | 2006
- 812
-
Process Analysis and Optimization on PECVD Amorphous Silicon on Glass SubstrateYan Ying Ong / Bang Tao Chen / Francis E H Tay / Ciprian Iliescu et al. | 2006
- 818
-
Characterization of stiction effects of an electrostatic micro positioner for probe storageMihai Patrascu / Stefano Stramigioli / Senior Member, IEEE et al. | 2006
- 824
-
Carbon nanotube as NEMS sensor - effect of chirality and stone-wales defect intendV Gayathri / R Geetha et al. | 2006
- 829
-
Computational studies of the EDL effect in 3-D developing flow in microchannelS T Tan / E Y K Ng et al. | 2006
- 834
-
Predicting the effects of dimensional and material stiffness variations on a compliant bistable microrelay performanceAli Ghanbari / Mohsen Bahrami et al. | 2006
- 840
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A two-stage topological optimum design for monolithic compliant microgripper integrated with flexure hingesC J Shih / C F Lin et al. | 2006
- 847
-
Enhanced analytical model for micromachined microphonesChee Wee Tan / Jianmin Miao et al. | 2006
- 853
-
Development of an Integrated Polymer Microfluidic StackProyag Datta / Jens Hammacher / Mark Pease / Sitanshu Gurung / Jost Goettert et al. | 2006
- 859
-
Fabrication of a Si stencil mask for the X-ray lithography using a dry etching techniqueHarutaka Mekaru / Takayuki Takano / Koichi Awazu / Ryutaro Maeda et al. | 2006
- 865
-
Activities of LIGA and Nano LIGA Technologies at BSRFF Yi / J Zhang / C Xie / D Wang / D Chen et al. | 2006
- 870
-
Fabrication of LIGA mold insert using Ni-PTFE composite micro-electroformingYuhua Guo / Gang Liu / Ying Xiong / Xuelin Zhu / Wang Jun / Yangchao Tian et al. | 2006
- 875
-
Fabrication of PMMA Microchip of Capillary Electrophoresis by Optimized UV-LIGA ProcessXuelin Zhu / Gang Liu / Ying Xiong / Yuhua Guo / Yangchao Tian et al. | 2006
- 880
-
Fabrication of the three-dimensional solenoid type micro magnetic sensorYiming Wang / Gang Liu / Yin Xiong / Jianzhong Yang / Yangchao Tian et al. | 2006
- 885
-
Fabrication of 2D and 3D Electromagnetic Metamaterials for the Terahertz Range.B D F Casse / H O Moser / L K Jian / M Bahou / O Wilhelmi / B T Saw / P D Gu et al. | 2006
- 891
-
Industrial applications of micro/nanofabrication at Singapore Synchrotron Light SourceL K Jian / B D F Casse / S P Heussler / J R Kong / B T Saw / Shahrain bin Mahmood / H O Moser et al. | 2006
- 897
-
Fabrication of Nanoimprint stamps for photonic crystalsKouba J / Kubenz M / Mai A / Ropers G / Eberhardt W / Loechel B et al. | 2006
- 904
-
Fabrication of 3D micro and nanostructures for MEMS and MOEMS: an approach based on combined lithographies.F Romanato / L Businaro / M Tormen / F Perennes / M Matteucci / B Marmiroli / S Balslev / E Di Fabrizio et al. | 2006
- 912
-
LiGA Research and Service at CAMDJost Goettert / Proyag Datta / Yohannes Desta / Yoonyoung Jin / Zhong-geng Ling / Varshni Singh et al. | 2006
- 919
-
Analysis of Quality Design Techniques for Electrostatic ActuatorsH Sadeghian / A Doniavi et al. | 2006
- 925
-
Joule heating and its effects on electroosmotic flow in microfluidic channelsG Y Tang / D G Yan / C Yang / H Q Gong / C J Chai / Y C Lam et al. | 2006
- 931
-
Forced response of electrostatic harmonic drive to torque fluctuationLizhong Xu Cuirong Zhu / Lei Qin et al. | 2006
- 937
-
Spray Coating of Photoresist for 3D Microstructures with Different GeometriesLiming Yu / Yong Yeow Lee / Francis E H Tay / Ciprian Iliescu et al. | 2006
- 943
-
Wafer Bonding Techniques for Microsystem PackagingJ Wei et al. | 2006
- 949
-
Characterisation and Modelling of MEMS Ultrasonic TransducersM F Teng / A J Hariz et al. | 2006
- 955
-
Development of A MEMS Based Manometric Catheter for Diagnosis of Functional Swallowing Disorders.H Y Hsu / A J Hariz / T Omari / M F Teng / D Sii / S Chan / L Lau / S Tan / G Lin / M Haskard et al. | 2006
- 961
-
Nonlinear Dynamics of MicroResonatorsM A Tadayon / M Rajaei / H Sayyaadi / G Nakhaie Jazar / A Alasty et al. | 2006
- 967
-
Sample transport with thermocapillary force for microfluidicsNam-Trung Nguyen / Wai Wah Pang / Xiaoyang Huang et al. | 2006
- 973
-
Research on low-temperature anodic bonding using induction heatingMingxiang Chen / Xinjian Yi / Liulin Yuan / Sheng Liu et al. | 2006
- 979
-
Microfabrication of PZT force sensors for minimally invasive surgical toolsS Ezhilvalavan / Zaoli Zhang / Jeremy Loh / Jackie Y Ying et al. | 2006
- 985
-
Modelling of the human brain with detailed anatomy for numerical simulation of surgical interventionsChunping Gao / Francis Eng Hock Tay / Wieslaw L Nowinski et al. | 2006
- 990
-
Optimized Design of High Sensitivity Micromechanical Photon DetectorsZhang Liuqiang / Den Daiwei / Wang Qiang et al. | 2006
- 996
-
A novel optical fibers MEMS pressure sensorNi xiao-qi / Wang Ming / Chen Xu-xing / Ge yi-xian / Rong Hua et al. | 2006
- 1002
-
High Performance Microaccelerometer with Wafer-level Hermetic Packaged Sensing Element and Continuous-time BiCMOS Interface CircuitHyoungho Ko / Sangjun Park / Seung-Joon Paik / Byoung-doo Choi / Yonghwa Park / Sangmin Lee / Sungwook Kim / Sang Chul Lee / Ahra Lee / Kwangho Yoo et al. | 2006
- 1008
-
A 3-D Microelectrode System for Dielectrophoretic Manipulation of MicroparticlesD F Chen / H Du / H Q Gong / W H Li et al. | 2006
- 1014
-
A continuous-time capacitance to voltage converter for microcapacitive pressure sensorsShao Lichun / Moorthi Palaniapan / Tan Woei Wan et al. | 2006
- 1020
-
Modeling and Simulation of the Microgyroscope Driving Loop using SPICEAhra Lee / Hyoungho Ko / Yonghwa Park / Kwangho Yoo / Sung Wook Kim / Sang Chul Lee / Jae-sang Lim / Taedong Ahn / Deog-Kyoon Jeong / Hyun-Su Jang et al. | 2006
- 1026
-
Development of electrothermal actuation based planar variable optical attenuators (VOAs)Chengkuo Lee / J Andrew Yeh et al. | 2006
- 1032
-
Stepper Motor Actuated MicrovalveImran Fazal / Marcus Louwerse / Henri Jansen / Miko Elwenspoek et al. | 2006
- 1038
-
Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic propertiesQ D Nguyen / M Elwenspoek et al. | 2006
- 1044
-
Optimized design of a micromachined G-switch based on contactless configuration for health care applicationsAndojo Ongkodjojo / Francis E H Tay et al. | 2006
- 1053
-
Behavioural modelling and system-level simulation of micromechanical beam resonatorsLynn Khine / Moorthi Palaniapan et al. | 2006
- 1059
-
Garment-based detection of falls and activities of daily living using 3-axis MEMS accelerometerM N Nyan / Francis E H Tay / M Manimaran / K H W Seah et al. | 2006
- 1068
-
MEMSWear - Biomonitoring - Incorporating sensors into smart shirt for wireless sentinel medical detection and alarmSamuel Ng Choon Po / Guo Dagang / Mohammad Dzulkifli Bin Mohyi Hapipi / Francis Tay Eng Hock et al. | 2006
- 1073
-
Design and Optimization of Dual Optical Fiber MEMS Pressure Sensor For Biomedical ApplicationsGuo Dagang / Samuel Ng Choon Po / Francis Tay Eng Hock / Lin Rongming et al. | 2006
- 1079
-
Overview of MEMSWear II - Incorporating MEMS Technology into smart shirt for Geriatric careSamuel Ng Choon Po / Guo Dagang / Mohammad Dzulkifli Bin Mohyi Hapipi / Nyan Myo Naing / Wei Jia Shen / Andojo Ongkodjojo / Francis Tay Eng Hock et al. | 2006
- 1086
-
Design and fabrication of miniature combination lockGao Yang / Su Wei et al. | 2006
- 1092
-
Multibeam Electron Source using MEMS Electron Optical ComponentsB van Someren / M J van Bruggen / Y Zhang / C W Hagen / P Kruit et al. | 2006
- 1098
-
A Signal Processing Module for the Analysis of Heart Sounds and Heart MurmursFaizan Javed / P A Venkatachalam / Ahmad Fadzil M H et al. | 2006
- 1106
-
Design and Fabrication a Microfluidic Device for Fetal Cells Dielectrophoretic Properties CharacterizationGuolin Xu / M B Chan / Charles Yang / P Sukumar / M Choolani / Jackie Y Ying et al. | 2006
- 1112
-
Design and Fabrication of a Flow Delivery Microdevice with Asymmetric Microelectrodes PairsHong Kiat Tay / Daniel Lee / Guolin Xu / Chun Yang et al. | 2006
- 1117
-
The Influence of Stress Gradient on the Pull-in Phenomena of Microelectromechanical SwitchesH Sadeghian / Gh Rezazadeh et al. | 2006
- 1123
-
Pull-In Phenomenon Investigation of Nanoelectromechanical SystemsH Sadeghian / Gh Rezazadeh / Ehsan Malekpour et al. | 2006
- 1127
-
Microfabricated Silicon Microneedle Array for Transdermal Drug DeliveryJing Ji / Francis Eh Tay / Jianmin Miao / Ciprian Iliescu et al. | 2006
- 1132
-
Microfabricated hollow microneedle array using ICP etcherJing Ji / Francis E H Tay / Jianmin Miao et al. | 2006
- 1137
-
Characterization of silicon isotropic etch by inductively coupled plasma etcher for microneedle array fabricationJing Ji / Francis E H Tay / Jianmin Miao / Jianbo Sun et al. | 2006
- 1143
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Cell Deformation in Cancer Metastasis: a BioMEMS Based ApproachM Manimaran / Francis E H Tay / K C Chaw et al. | 2006