Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards (English)
Paper
- New search for: H Nouira
- New search for: J-A Salgado
- New search for: N El-Hayek
- New search for: S Ducourtieux
- New search for: A Delvallée
- New search for: N Anwer
- New search for: H Nouira
- New search for: J-A Salgado
- New search for: N El-Hayek
- New search for: S Ducourtieux
- New search for: A Delvallée
- New search for: N Anwer
In:
Measurement Science and Technology
;
25
, 4
;
044016
;
2014
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
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Subtitle:Paper
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Additional title:Setup of a high-precision profilometer and comparison of tactile and optical measurements of standards
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Contributors:H Nouira ( author ) / J-A Salgado ( author ) / N El-Hayek ( author ) / S Ducourtieux ( author ) / A Delvallée ( author ) / N Anwer ( author )
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Published in:Measurement Science and Technology ; 25, 4 ; 044016
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Publisher:
- New search for: Institute of Physics
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Publication date:2014-04-01
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Size:12 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 25, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 040301
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Nanoscale 2013Ludger Koenders / Sebastien Ducourtieux et al. | 2014
- 044001
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An approach towards 3D sensitive AFM cantileversRichard Koops / Vincent Fokkema et al. | 2014
- 044002
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Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFMGaoliang Dai / Kai Hahm / Frank Scholze / Mark-Alexander Henn / Hermann Gross / Jens Fluegge / Harald Bosse et al. | 2014
- 044003
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Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errorsMark-Alexander Henn / Hermann Gross / Sebastian Heidenreich / Frank Scholze / Clemens Elster / Markus Bär et al. | 2014
- 044004
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Investigations of the influence of common approximations in scatterometry for dimensional nanometrologyJ Endres / A Diener / M Wurm / B Bodermann et al. | 2014
- 044005
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Dynamic speed control in atomic force microscopy to improve imaging time and qualityAndrzej Sikora / Lukasz Bednarz et al. | 2014
- 044006
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Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machineN Vorbringer-Dorozhovets / B Goj / T Machleidt / K-H Franke / M Hoffmann / E Manske et al. | 2014
- 044007
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A novel pitch evaluation of one-dimensional gratings based on a cross-correlation filterXiaomei Chen / Ludger Koenders et al. | 2014
- 044008
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Novel method for dimensional measurements of nanorelief elements based on electron probe defocusing in a scanning electron microscopeM N Filippov / V P Gavrilenko / V B Mityukhlyaev / A V Rakov / P A Todua et al. | 2014
- 044009
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Independent analysis of mechanical data from atomic force microscopyP Klapetek / D Nečas et al. | 2014
- 044010
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Towards quantitative modelling of surface deformation of polymer micro-structures under tactile scanning measurementZhi Li / Uwe Brand / Thomas Ahbe et al. | 2014
- 044011
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Characterization of the main error sources of chromatic confocal probes for dimensional measurementH Nouira / N El-Hayek / X Yuan / N Anwer et al. | 2014
- 044012
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Evaluation of roundness error using a new method based on a small displacement screwHichem Nouira / Pierre Bourdet et al. | 2014
- 044013
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Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern EuropeJeremias Seppä / Virpi Korpelainen / Sten Bergstrand / Helge Karlsson / Lauri Lillepea / Antti Lassila et al. | 2014
- 044014
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In-situ nondestructive characterization of the normal spring constant of AFM cantileversSai Gao / Uwe Brand et al. | 2014
- 044015
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The determination of the spring constant of T-shaped cantilevers using calibration structuresAndrzej Sikora / Lukasz Bednarz / Grzegorz Ekwiński / Magdalena Ekwińska et al. | 2014
- 044016
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Setup of a high-precision profilometer and comparison of tactile and optical measurements of standardsH Nouira / J-A Salgado / N El-Hayek / S Ducourtieux / A Delvallée / N Anwer et al. | 2014
- 044017
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Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stagesPetr Křen et al. | 2014
- 044018
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Piezoresistive cantilever working in a shear force mode for in situ characterization of exposed micro- and nanostructuresAndrzej Sierakowski / Daniel Kopiec / Paweł Janus / Magdalena Ekwińska / Mariusz Płuska / Piotr Grabiec / Teodor Gotszalk et al. | 2014
- 044019
-
Scatterometer for characterization of diffractive optical elementsH Husu / T Saastamoinen / J Laukkanen / S Siitonen / J Turunen / A Lassila et al. | 2014
- 044020
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Characterization of carrier concentration in CIGS solar cells by scanning capacitance microscopyKoji Matsumura / Takaya Fujita / Hiroshi Itoh / Daisuke Fujita et al. | 2014
- 044021
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Analytical procedure for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopyTakaya Fujita / Koji Matsumura / Hiroshi Itoh / Daisuke Fujita et al. | 2014
- 044022
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Thermal conductivity analysis of delaminated thin films by scanning thermal microscopyJ Martinek / M Valtr / R Cimrman / P Klapetek et al. | 2014