Material surface modifications with an inductive plasma (English)
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In:
Journal of Physics: Conference Series
;
100
, 6
;
062023
;
2008
- Article (Journal) / Electronic Resource
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Title:Material surface modifications with an inductive plasma
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Contributors:F Croccolo ( author ) / R Barni ( author ) / S Zanini ( author ) / A Palvarini ( author ) / C Riccardi ( author )
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Published in:Journal of Physics: Conference Series ; 100, 6 ; 062023
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Publication date:2008-03-01
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 100, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 062001
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Plasma operation with high-Z environmentR Neu / R Dux / A Kallenbach / ASDEX Upgrade team et al. | 2008
- 062002
-
Vacuum technology for ITERD Murdoch / A Antipenkov / C Caldwell-Nichols / C Day / M Dremel / H Haas / V Hauer / H Jensen et al. | 2008
- 062003
-
Plasma-wall interaction: a complex combination of surface processes critical for thermo-nuclear fusionJ Roth / E Tsitrone / A Loarte et al. | 2008
- 062004
-
Pulsed-DC selfsputtering of copperA Wiatrowski / W M Posadowski / Z J Radzimski et al. | 2008
- 062005
-
Deposition of silicon-like hybrid films by PECVD on carbon-fiber-reinforced polymers for high-precision engineering applicationsA Cremona / E Vassallo / A Merlo / A S Phani / L Laguardia et al. | 2008
- 062006
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Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k filmsS Iwashita / M Morita / K Koga / M Shiratani et al. | 2008
- 062007
-
Optical emission spectroscopic study on H-assisted plasma for anisotropic deposition of Cu filmsJ Umetsu / K Inoue / K Koga / M Shiratani et al. | 2008
- 062008
-
UHV plasma jet system for deposition of magnetic nitride nanocomposite films with GHz applicationsF Fendrych / P Řepa / L Peksa / T Gronych / J P Vejpravová / A Lančok / P Hedbávný / R Schäfer / K M Seemann et al. | 2008
- 062009
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An influence of ion and sputtered atom flows inhomogeneity on time evolution of the target surface relief in glow dischargeG G Bondarenko / V I Kristya et al. | 2008
- 062010
-
3D particle simulations of plasma-solid interaction: magnetized plasma and a cylindrical cavityZ Pekárek / Š Roučka / R Hrach et al. | 2008
- 062011
-
Boronization during the first plasma operation on EASTEAST vacuum group et al. | 2008
- 062012
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Chemical sputtering of a-C:H films by simultaneous exposure to energetic Ar+ ions and water vaporC Hopf / M Schlüter / W Jacob et al. | 2008
- 062013
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Ion-nitriding of Maraging steel (250 Grade) for Aeronautical applicationK Shetty / S Kumar / P R Rao et al. | 2008
- 062014
-
NOx removal enhancement by a Jerks – and – Jumps type electrode in a dielectric barrier dischargeA Mercado-Cabrera / E L del Villar / R Valencia-Alvarado / R López-Callejas / S R Barocio / R Pen̄a-Eguiluz / A Mun̄oz-Castro / B Jaramillo-Sierra / A de la Piedad-Beneitez et al. | 2008
- 062015
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Fundamental studies on effect of ozone injection to the internal-combustion engine - FTIR spectrum of hydrocarbon compound reformulated by ozoneY Yagyu / N Hayashi / H Kawasaki / T Ohshima / Y Suda / S Baba et al. | 2008
- 062016
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Acoustic signal analysis in the creeping dischargeT Nakamiya / K Ebihara / T Ikegami / Y Sonoda / R Tsuda et al. | 2008
- 062017
-
Protein film removal by means of low-pressure microwave plasma – an imaging ellipsometry studyO Kylián / H Rauscher / L Sirghi / F Rossi et al. | 2008
- 062018
-
Plasma parameters in a planar dc magnetron sputtering discharge of argon and kryptonP Sigurjonsson / J T Gudmundsson et al. | 2008
- 062019
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V-I curves and plasma parameters in a high density DC glow discharge generated by a current-sourceE E Granda-Gutiérrez / R López-Callejas / R Pen̄a-Eguiluz / R Valencia A / A Mercado-Cabrera / S R Barocio / A de la Piedad-Beneitez / J S Benítez-Read / J O Pacheco-Sotelo et al. | 2008
- 062020
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Time evolution of the space-charge sheath in an rf hollow cathodeD Söderström / H Baránková / L Bárdoš et al. | 2008
- 062021
-
Direct measurement of sidewall roughness on Si, poly-Si and poly-SiGe by AFMV Gudmundsson / P-E Hellström / S-L Zhang / M Östling et al. | 2008
- 062022
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Characterization of H2O- inductively coupled plasma for dry etchingA Matsutani / H Ohtsuki / F Koyama et al. | 2008
- 062023
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Material surface modifications with an inductive plasmaF Croccolo / R Barni / S Zanini / A Palvarini / C Riccardi et al. | 2008
- 062024
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Deuterium retention in different carbon materials exposed in TEXTORA Kreter / S Brezinsek / M Rubel / B Emmoth / M Freisinger / P Pelicon / V Philipps / O Schmitz / P Sundelin / G Sergienko et al. | 2008
- 062025
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Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic gettersF L Tabarés / J A Ferreira / D Tafalla / I Tanarro / V J Herrero / I Méndez / C Gómez-Aleixandre / J M Albella et al. | 2008
- 062026
-
Studies of the removal of hydrogenated carbon films by nitrogen glow dischargesJ A Ferreira / F L Tabarés et al. | 2008
- 062027
-
A test of nitrogen-assisted plasma discharges for fuel removal from plasma-facing components in tokamaksP Sundelin / M J Rubel / B Emmoth / V Philipps / G Sergienko et al. | 2008
- 062028
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Beryllium plasma-facing components for the ITER-like wall project at JETM J Rubel / V Bailescu / J P Coad / T Hirai / J Likonen / J Linke / C P Lungu / G F Matthews / L Pedrick / V Riccardo et al. | 2008
- 062029
-
Measurement of hydrogen isotopes by a nuclear microprobeP Petersson / J Jensen / A Hallén / G Possnert et al. | 2008
- 062030
-
Metal impurity fluxes and plasma-surface interactions in EXTRAP T2RH Bergsåker / S Menmuir / E Rachlew / P R Brunsell / L Frassinetti / J R Drake et al. | 2008
- 062031
-
Development of an inspection robot under iter relevant vacuum and temperature conditionsJ-C Hatchressian / V Bruno / L Gargiulo / D Keller / Y Perrot / P Bayetti / J-J Cordier / J-P Friconneau / J D Palmer / F Samaille et al. | 2008
- 062032
-
Apparatus for friction tests of support elements in fusion devicesTh Gradt / K Aßmus / H Börner / Th Schneider et al. | 2008
- 062033
-
Thermal induced structural changes of a-C and a-C:Ti films analyzed by NEXAFS and XPSC Adelhelm / M Balden / F Kost / A Herrmann / S Lindig et al. | 2008
- 062034
-
DC glow discharge conditioning of remote areas in fusion devicesD Douai / D Garnier / S Brémond / C Grisolia / J Bucalossi / P Shigin / L Begrambekov et al. | 2008