Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure (English)
- New search for: Tu, Cheng
- Further information on Tu, Cheng:
- https://orcid.org/0000-0002-4655-6202
- New search for: Zhang, Ting-yang
- New search for: Zhang, Zhuo
- New search for: Huang, Qin-wen
- New search for: Zhang, Xiao-sheng
- Further information on Zhang, Xiao-sheng:
- https://orcid.org/0000-0001-9719-0573
- New search for: Tu, Cheng
- Further information on Tu, Cheng:
- https://orcid.org/0000-0002-4655-6202
- New search for: Zhang, Ting-yang
- New search for: Zhang, Zhuo
- New search for: Huang, Qin-wen
- New search for: Zhang, Xiao-sheng
- Further information on Zhang, Xiao-sheng:
- https://orcid.org/0000-0001-9719-0573
In:
Journal of Micromechanics and Microengineering
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34
, 4
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2024
- Article (Journal) / Electronic Resource
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Title:Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure
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Contributors:Tu, Cheng ( author ) / Zhang, Ting-yang ( author ) / Zhang, Zhuo ( author ) / Huang, Qin-wen ( author ) / Zhang, Xiao-sheng ( author )
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Published in:
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Publisher:
- New search for: IOP Publishing
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Publication date:2024-04-01
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Size:9 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 34, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng. 34 015009)Reda, Ali / Dargent, Thomas / Arscott, Steve et al. | 2024
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Sub-miniature rolling thrust micro-bearingMichałowski, Marcin / Kusznierewicz, Zbigniew / Łuczak, Sergiusz / Chańko, Artur / Samsel, Mateusz / Pieńczuk, Paweł et al. | 2024
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Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length methodSherkat, Negin / Kattiparambil Sivaprasad, Athira / Pelz, Uwe / Woias, Peter et al. | 2024
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Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing methodCheng, E / Zhu, Yeming / Deng, Qibo / Zhang, Zhengyan / Tian, Xintao et al. | 2024
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Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structureTu, Cheng / Zhang, Ting-yang / Zhang, Zhuo / Huang, Qin-wen / Zhang, Xiao-sheng et al. | 2024
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Double-layer coated particles formed by one-step method based on microfluidic technologyHu, Jian / Chen, Xinyu / Lin, Jiayu / Xu, Zekai / Luo, Minzhuo / Tsui, Gary Chi-Pong / Deng, Yu et al. | 2024
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Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavitiesDai, Ching-Liang / Zhu, Zhang-Li / Chang, Chun-Yi / Hsu, Cheng-Chih et al. | 2024
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MEMS highly sensitive and large-area force plate for total ground reaction force measurement of running antTakahashi, Hidetoshi / Kohyama, Sumihiro / Takahata, Tomoyuki / Shimoyama, Isao et al. | 2024
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An SOI-based post-fabrication process for compliant MEMS devicesHao, Yongcun / Wang, Yanlong / Liu, Yonghao / Yuan, Weizheng / Chang, Honglong et al. | 2024
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Reflective x-ray masks for x-ray lithographyChumak, V S / Peredkov, S / Devizenko, A Yu / Kopylets, I A / Pershyn, Yu P et al. | 2024
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Study on the mechanism of glass-SiC-glass anodic bonding processCheng, Xiao / Hu, Lifang / Liu, Wei / Chou, Zhao / Jia, Weijie / Mu, Wenjin et al. | 2024
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Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powderWang, Xin / Wang, Tao / Sheng, Jie / Wang, Ziting / Yang, Weizhi / Li, Meng / Shi, Liping et al. | 2024
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Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machiningZhu, Yulan / Liu, Guodong / Li, Yong / Tong, Hao et al. | 2024
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Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devicesZhao, Xinghai / Wu, Peng / Liu, Fei et al. | 2024