Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography (English)
Paper
- New search for: Zhengjun Liu
- New search for: Ali Shah
- New search for: Tapani Alasaarela
- New search for: Nikolai Chekurov
- New search for: Hele Savin
- New search for: Ilkka Tittonen
- New search for: Zhengjun Liu
- New search for: Ali Shah
- New search for: Tapani Alasaarela
- New search for: Nikolai Chekurov
- New search for: Hele Savin
- New search for: Ilkka Tittonen
In:
Nanotechnology
;
28
, 8
;
085303
;
2017
-
ISSN:
- Article (Journal) / Electronic Resource
-
Title:Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography
-
Subtitle:Paper
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Additional title:Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography
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Contributors:Zhengjun Liu ( author ) / Ali Shah ( author ) / Tapani Alasaarela ( author ) / Nikolai Chekurov ( author ) / Hele Savin ( author ) / Ilkka Tittonen ( author )
-
Published in:Nanotechnology ; 28, 8 ; 085303
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Publisher:
- New search for: Institute of Physics
-
Publication date:2017-02-24
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Size:7 pages
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ISSN:
-
DOI:
-
Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 28, Issue 8
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 08LT01
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Nanoscale magnetic ratchets based on shape anisotropyJizhai Cui / Scott M Keller / Cheng-Yen Liang / Gregory P Carman / Christopher S Lynch et al. | 2017
- 08LT02
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Magnetic skyrmion-based synaptic devicesYangqi Huang / Wang Kang / Xichao Zhang / Yan Zhou / Weisheng Zhao et al. | 2017
- 082001
-
Molecular assembly on two-dimensional materialsAvijit Kumar / Kaustuv Banerjee / Peter Liljeroth et al. | 2017
- 084001
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Controllable growth of monolayer MoS2 by chemical vapor deposition via close MoO2 precursor for electrical and optical applicationsYong Xie / Zhan Wang / Yongjie Zhan / Peng Zhang / Ruixue Wu / Teng Jiang / Shiwei Wu / Hong Wang / Ying Zhao / Tang Nan et al. | 2017
- 084002
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Electron-transfer dependent photocatalytic hydrogen generation over cross-linked CdSe/TiO2 type-II heterostructureYubin Chen / Chi-Hung Chuang / Zhixiao Qin / Shaohua Shen / Tennyson Doane / Clemens Burda et al. | 2017
- 084003
-
Fabrication of graphene–silicon layered heterostructures by carbon penetration of silicon filmLei Meng / Yeliang Wang / Linfei Li / H-J Gao et al. | 2017
- 084004
-
Water flow in carbon-based nanoporous membranes impacted by interactions between hydrated ions and aromatic ringsJian Liu / Guosheng Shi / Haiping Fang et al. | 2017
- 085101
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Stacking sequence dependent photo-electrocatalytic performance of CVD grown MoS2/graphene van der Waals solidsRavi K Biroju / Shubhadeep Pal / Rahul Sharma / P K Giri / Tharangattu N Narayanan et al. | 2017
- 085102
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Counterintuitive cooperative endocytosis of like-charged nanoparticles in cellular internalization: computer simulation and experimentYe Li / Bing Yuan / Kai Yang / Xianren Zhang / Bing Yan / Dapeng Cao et al. | 2017
- 085201
-
Air-stable few-layer black phosphorus phototransistor for near-infrared detectionJunhong Na / Kichul Park / Jin Tae Kim / Won Kook Choi / Yong-Won Song et al. | 2017
- 085202
-
Nb/InAs nanowire proximity junctions from Josephson to quantum dot regimesKaveh Gharavi / Gregory W Holloway / Ray R LaPierre / Jonathan Baugh et al. | 2017
- 085203
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Plasmonic reflection color filters with metallic random nanostructuresQ J Wu / H Jia / X L Hu / L B Sun / L S Wang / S M Yang / R Z Tai / H J Fecht / L Q Wang / D X Zhang et al. | 2017
- 085204
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Room temperature sputter deposited catalyst-free nanowires with wurtzite/zinc blende ZnO superstructure and their application in electromechanical nanogenerators on polymer and paper substratesM A Borysiewicz / M Gryglas-Borysiewicz / M Masłyk / T Wojciechowski / M Wzorek / J Kaczmarski / T Wojtowicz / E Kamińska et al. | 2017
- 085205
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Novel hybrid C/BN two-dimensional heterostructuresDmitry G Kvashnin / Olga P Kvashnina / Pavel V Avramov / Pavel B Sorokin / Alexander G Kvashnin et al. | 2017
- 085206
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Simultaneous enhancement of photo- and electroluminescence in white organic light-emitting devices by localized surface plasmons of silver nanoclustersJingting Yu / Wenqing Zhu / Guanjie Shi / Guangsheng Zhai / Bingjie Qian / Jun Li et al. | 2017
- 085301
-
XPS investigation of titanium contact formation to ZnO nanowiresChris J Barnett / Ambroise Castaing / Daniel R Jones / Aled R Lewis / Lewys J Jenkins / Richard J Cobley / Thierry G G Maffeis et al. | 2017
- 085302
-
Magnetic transition from dot to antidot regime in large area Co/Pd nanopatterned arrays with perpendicular magnetizationM Krupinski / D Mitin / A Zarzycki / A Szkudlarek / M Giersig / M Albrecht / M Marszałek et al. | 2017
- 085303
-
Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithographyZhengjun Liu / Ali Shah / Tapani Alasaarela / Nikolai Chekurov / Hele Savin / Ilkka Tittonen et al. | 2017
- 085304
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Solid-state nanopore localization by controlled breakdown of selectively thinned membranesAutumn T Carlsen / Kyle Briggs / Adam R Hall / Vincent Tabard-Cossa et al. | 2017
- 085305
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Freestanding carbon nanodots/poly (vinyl alcohol) films with high photoluminescent quantum yield realized by inverted-pyramid structureLinna Pang / Lixiang Ba / Wei Pan / Wenzhong Shen et al. | 2017
- 085401
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Designing 3D interconnected continuous nanoporous Co/CoO core–shell nanostructure electrodes for a high-performance pseudocapacitorChen Qing / Qin Zhou / Gan Qu / Xinqi Chen / Hai Wang / Daming Sun / Bixiao Wang / Lifeng Xu / Yiwen Tang et al. | 2017
- 085402
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Application of metal nanowire networks on hydrogenated amorphous silicon thin film solar cellsShouyi Xie / Guofu Hou / Peizhuan Chen / Baohua Jia / Min Gu et al. | 2017
- 085601
-
Fabrication of Bi2Te3−xSex nanowires with tunable chemical compositions and enhanced thermoelectric propertiesShuai Liu / Nan Peng / Chongjian Zhou / Yu Bai / Shuang Tang / Dayan Ma / Fei Ma / Kewei Xu et al. | 2017
- 085602
-
Fast synthesis of ultrathin ZnO nanowires by oxidation of Cu/Zn stacks in low-pressure afterglowA Altaweel / A Imam / J Ghanbaja / D Mangin / P Miska / T Gries / T Belmonte et al. | 2017
- 085603
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Preparation of multilocation reduction-sensitive core crosslinked folate-PEG-coated micelles for rapid release of doxorubicin and tariquidar to overcome drug resistanceXiaoqing Yi / Dan Zhao / Quan Zhang / Jiaqi Xu / Gongdao Yuan / Renxi Zhuo / Feng Li et al. | 2017
- 085701
-
Geometric constraints on phase coexistence in vanadium dioxide single crystalsChristina McGahan / Sampath Gamage / Jiran Liang / Brendan Cross / Robert E Marvel / Richard F Haglund / Yohannes Abate et al. | 2017
- 085702
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Electric- and magnetic-field dependence of the electronic and optical properties of phosphorene quantum dotsL L Li / D Moldovan / W Xu / F M Peeters et al. | 2017
- 085703
-
Carbon nanoparticle-modified multi-wall carbon nanotubes with fast adsorption kinetics for water treatmentGuan Wang / Wei Ren / Hui Ru Tan / Ye Liu et al. | 2017
- 085704
-
Subsurface contrast due to friction in heterodyne force microscopyG J Verbiest / T H Oosterkamp / M J Rost et al. | 2017
- 085705
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Synthesis of magnetic cytosine-imprinted chitosan nanoparticlesMei-Hwa Lee / Arti Ahluwalia / Jian-Zhou Chen / Neng-Lang Shih / Hung-Yin Lin et al. | 2017
- 085706
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Subsurface imaging of two-dimensional materials at the nanoscaleFranco Dinelli / Pasqualantonio Pingue / Nicholas D Kay / Oleg V Kolosov et al. | 2017