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Sub-boiling distillation from pure quartz or Teflon (Du Pont) stills has been investigated for the production of high-purity inorganic acids and water. Nitric, hydrochloric, hydrofluoric, perchloric and sulfuric acids produced by this method contained significantly lower cationic impurities than high-purity acids from commercial sources. A complete system, including the Class 100 environment, production and storage of these high-purity reagents is described. A method based on spark source mass spectrographic isotope dilution analysis has been developed for the simultaneous determination of 17 elements in these materials. Results of the analyses are reported. No element in any of the purified acids exceeded 10 ppb and most were well below the 1-ppb level. (Author)