ARTICLES - Adhesion and reliability of copper interconnects with Ta and TaN barrier layers (English)
- New search for: Lane, Michael
- New search for: Lane, Michael
- New search for: Dauskardt, Reinhold H.
- New search for: Krishna, Nety
- New search for: Hashim, Imran
In:
Journal of materials research
;
15
, 1
; 203-211
;
2000
-
ISSN:
- Article (Journal) / Print
-
Title:ARTICLES - Adhesion and reliability of copper interconnects with Ta and TaN barrier layers
-
Contributors:
-
Published in:Journal of materials research ; 15, 1 ; 203-211
-
Publisher:
- New search for: Materials Research Society
-
Place of publication:Warrendale, Pa.
-
Publication date:2000
-
ISSN:
-
ZDBID:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 770/5000
- New search for: 51.00 / 51.00
- Further information on Basic classification
-
Keywords:
-
Classification:
-
Source:
Table of contents – Volume 15, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
-
RAPID COMMUNICATIONS - Epitaxial growth of semiconducting LaVO3 thin filmsChoi, Woong et al. | 2000
- 1
-
Epitaxial growth of semiconducting $ LaVO_{3} $ thin filmsChoi, Woong / Sands, Timothy / Kim, Kwang-Young et al. | 2000
- 4
-
Phase selection during solidification of undercooled bulk $ Bi_{95} $$ Sb_{5} $ meltsZhou, Z. / Zhao, J. / Wang, W. et al. | 2000
- 4
-
RAPID COMMUNICATIONS - Phase selection during solidification of undercooled bulk Bi95Sb5 meltsZhou, Z. et al. | 2000
- 7
-
Hydrogen-enhanced dislocation velocities in $ Ni_{3} $Al single crystalsJiang, C. B. / Patu, S. / Lei, Q. Z. / Shi, C. X. et al. | 2000
- 7
-
RAPID COMMUNICATIONS - Hydrogen-enhanced dislocation velocities in Ni3Al single crystalsJiang, C.B. et al. | 2000
- 10
-
RAPID COMMUNICATIONS - Fabrication of cellular NiTi intermetallic compoundsLi, Bing-Yun et al. | 2000
- 10
-
Fabrication of cellular NiTi intermetallic compoundsLi, Bing-Yun / Rong, Li-Jian / Li, Yi-Yi / Gjunter, V. E. et al. | 2000
- 14
-
Significant reduction in thermal expansion of a low-carbon steel sheet by depositing a Fe-Ni alloy thin filmKim, Sang Sub / Park, Yong Bum et al. | 2000
- 14
-
RAPID COMMUNICATIONS - Significant reduction in thermal expansion of a low-carbon steel sheet by depositing a Fe-Ni alloy thin filmKim, Sang Sub et al. | 2000
- 17
-
Fracture origins in $ LiNbO_{3} $ wafers due to postprocessing micro-repolarizationNagata, Hirotoshi / Ichikawa, Junichiro / Sakima, Mitsuru / Shima, Kaori / Haga, Eungi Min et al. | 2000
- 17
-
RAPID COMMUNICATIONS - Fracture origins in LiNbO3 wafers due to postprocessing micro-repolarizationNagata, Hirotoshi et al. | 2000
- 21
-
Optical and electrical properties of transparent conducting $ In_{2} $$ O_{3} $–$ ZrO_{2} $ filmsQadri, S. B. / Kim, H. / Khan, H. R. / Piqué, A. / Horwitz, J. S. / Chrisey, D. / Skelton, E. F. et al. | 2000
- 21
-
RAPID COMMUNICATIONS - Optical and electrical properties of transparent conducting In2O3-ZrO2 filmsQadri, S.B. et al. | 2000
- 21
-
Optical and electrical properties of transparent conducting In2O3-ZrO3 filmsQadri, S.B. / Kim, H. / Khan, H.R. / Pique, A. / Horwitz, J.S. / Chrisey, D. / Skelton, E.F. et al. | 2000
- 25
-
Diamond synthesis by high-velocity thermal spray: The laboratory analogue of a meteorite impactGoswami, R. / Herman, H. / Sampath, S. / Parise, J. B. et al. | 2000
- 25
-
RAPID COMMUNICATIONS - Diamond synthesis by high-velocity thermal spray: The laboratory analogue of a meteorite impactGoswami, R. et al. | 2000
- 29
-
Synthesis of crack-free thick diamond wafer by step-down control of deposition temperatureLee, Jae-Kap / Park, Young-Joon / Eun, Kwang Yong / Baik, Young-Joon / Park, Jong-Wan et al. | 2000
- 29
-
RAPID COMMUNICATIONS - Synthesis of crack-free thick diamond wafer by step-down control of deposition temperatureLee, Jae-Kap et al. | 2000
- 33
-
Fabrication and characterization of large Nd–Ba–Cu–O grains prepared under low oxygen pressureLo, W. / Babu, N. Hari / Cardwell, D. A. / Shi, Y. / Astill, D. M. et al. | 2000
- 33
-
ARTICLES - Fabrication and characterization of large Nd-Ba-Cu-O grains prepared under low oxygen pressureLo, W. et al. | 2000
- 40
-
Lattice parameters and thermal expansion of GaNReeber, Robert R. / Wang, Kai et al. | 2000
- 40
-
ARTICLES - Lattice parameters and thermal expansion of GaNReeber, Robert R. et al. | 2000
- 45
-
X-ray diffraction and transmission electron microscopy analysis of ordering and structure in $ Al_{1−x} $$ In_{x} $As thin filmsForrest, R. L. / Kulik, J. / Golding, T. D. / Moss, S. C. et al. | 2000
- 45
-
ARTICLES - X-ray diffraction and transmission electron microscopy analysis of ordering and structure in Al1-xInxAs thin filmsForrest, R.L. et al. | 2000
- 56
-
Icosahedral nanophases in the Al-Mn-Ce systemManaila, R. / Popescu, R. / Jianu, A. / Constantin, M. / Devenyi, A. et al. | 2000
- 56
-
ARTICLES - Icosahedral nanophases in the Al-Mn-Ce systemManaila, R. et al. | 2000
- 63
-
ARTICLES - Micropyretic synthesis of NiAl containing Ti and BDey, G.K. et al. | 2000
- 63
-
Micropyretic synthesis of NiAl containing Ti and BDey, G. K. / Arya, A. / Sekhar, J. A. et al. | 2000
- 76
-
Nondestructive evaluation of cavitation in an Al–Mg material deformed under creep conditionsTaleff, Eric M. / Leon-Salamanca, Teodoro / Ketcham, Richard A. / Reyes, Reuben / Carlson, William D. et al. | 2000
- 76
-
ARTICLES - Nondestructive evaluation of cavitation in an Al-Mg material deformed under creep conditionsTaleff, Eric M. et al. | 2000
- 85
-
Influence of dendrite arm spacing on the thermal conductivity of an aluminum-silicon casting alloyVázquez-López, C. / Calderón, A. / Rodríguez, M. E. / Velasco, E. / Cano, S. / Colás, R. / Valtierra, S. et al. | 2000
- 85
-
ARTICLES - Influence of dendrite arm spacing on the thermal conductivity of an aluminum-silicon casting alloyVázquez-Lopez, C. et al. | 2000
- 92
-
ARTICLES - Pyrocarbon anisotropy as measured by electron diffraction and polarized lightBourrat, Xavier et al. | 2000
- 92
-
Pyrocarbon anisotropy as measured by electron diffraction and polarized lightBourrat, Xavier / Trouvat, Béatrice / Limousin, Guillaume / Vignoles, Gérard / Doux, François et al. | 2000
- 102
-
ARTICLES - Influence of reduction mechanism on the morphology of cobalt nanoparticles in a silica-gel matrixBasumallick, A. et al. | 2000
- 102
-
Influence of reduction mechanism on the morphology of cobalt nanoparticles in a silica-gel matrixBasumallick, A. / Das, G. C. / Mukherjee, S. et al. | 2000
- 107
-
ARTICLES - Fracture mode of alumina-silicon carbide nanocompositesZimmermann, André et al. | 2000
- 107
-
Fracture mode of alumina/silicon carbide nanocompositesZimmermann, André / Hoffman, Mark / Rödel, Jürgen et al. | 2000
- 115
-
ARTICLES - Domain structure and electrical properties of highly textured PbZrxTi1-xO3 thin films grown on LaNiO3-electrode-buffered Si by metalorganic chemical vapor depositionLin, C.H. et al. | 2000
- 115
-
Domain structure and electrical properties of highly textured $ PbZr_{x} $$ Ti_{1−x} $$ O_{3} $ thin films grown on $ LaNiO_{3} $-electrode-buffered Si by metalorganic chemical vapor depositionLin, C. H. / Yen, B. M. / Kuo, H. C. / Chen, Haydn / Wu, T. B. / Stillman, G. E. et al. | 2000
- 125
-
Dielectric ceramics in the BaO-$ Sm_{2} $$ O_{3} $-$ TiO_{2} $-$ Ta_{2} $$ O_{5} $ quaternary systemChen, X. M. / Xu, Z. Y. / Li, J. et al. | 2000
- 125
-
ARTICLES - Dielectric ceramics in the BaO-Sm2O3-TiO2-Ta2O5 quaternary systemChen, X.M. et al. | 2000
- 130
-
ARTICLES - Orientation-dependent properties of silicon nitride with aligned reinforcing grainsPark, Dong-Soo et al. | 2000
- 130
-
Orientation-dependent properties of silicon nitride with aligned reinforcing grainsPark, Dong-Soo / Choi, Myoung-Je / Roh, Tae-Wook / Kim, Hai-Doo / Han, Byung-Dong et al. | 2000
- 136
-
Joining of silicon nitride ceramics for high-temperature applicationsXie, Rong-Jun / Mitomo, Mamoru / Huang, Li-Ping / Fu, Xi-Ren et al. | 2000
- 136
-
ARTICLES - Joining of silicon nitride ceramics for high-temperature applicationsXie, Rong-Jun et al. | 2000
- 142
-
ARTICLES - Slow crack-growth behavior of alumina ceramicsEbrahimi, M.E. et al. | 2000
- 142
-
Slow crack-growth behavior of alumina ceramicsEbrahimi, M. E. / Chevalier, J. / Fantozzi, G. et al. | 2000
- 148
-
Nanoindentation and adhesion of sol-gel-derived hard coatings on polyesterChan, C. M. / Cao, G. Z. / Fong, H. / Sarikaya, M. / Robinson, T. / Nelson, L. et al. | 2000
- 148
-
ARTICLES - Nanoindentation and adhesion of sol-gel-derived hard coatings on polyesterChan, C.M. et al. | 2000
- 155
-
ARTICLES - Water-based Si3N4 suspensions: Part I. Effect of processing routes on the surface chemistry and particle interactionsGalassi, C. et al. | 2000
- 155
-
Water-based $ Si_{3} $$ N_{4} $ suspensions: Part I. Effect of processing routes on the surface chemistry and particle interactionsGalassi, C. / Bertoni, F. / Ardizzone, S. / Bianchi, C. L. et al. | 2000
- 164
-
ARTICLES - Water-based Si3N4 suspensions: Part II. Effect of wet mixing-milling processes on the addition of the sintering aidsGalassi, C. et al. | 2000
- 164
-
Water-based $ Si_{3} $$ N_{4} $ suspensions: Part II. Effect of wet mixing/milling processes on the addition of the sintering aidsGalassi, C. / Bertoni, F. / Ardizzone, S. / Bianchi, C. L. et al. | 2000
- 170
-
Ultrafine $ MnFe_{2} $$ O_{4} $ powder preparation by combusting the coprecipitate with and without $ Mg^{2+} $ or $ Zn^{2+} $ additivesYu, Hsuan-Fu / Zhong, Wen-Bing et al. | 2000
- 170
-
ARTICLES - Ultrafine MnFe2O4 powder preparation by combusting the coprecipitate with and without Mg2+ or Zn2+ additivesYu, Hsuan-Fu et al. | 2000
- 176
-
ARTICLES - Role of organic solvents and surface-active agents in the sol-emulsion-gel synthesis of spherical alumina powdersChatterjee, M. et al. | 2000
- 176
-
Role of organic solvents and surface-active agents in the sol-emulsion-gel synthesis of spherical alumina powdersChatterjee, M. / Naskar, M. K. / Siladitya, B. / Ganguli, D. et al. | 2000
- 186
-
Calculation of metastable immiscibility region in the $ Al_{2} $$ O_{3} $–$ SiO_{2} $ system using molecular dynamics simulationTakei, Takahiro / Kameshima, Yoshikazu / Yasumori, Atsuo / Okada, Kiyoshi et al. | 2000
- 186
-
ARTICLES - Calculation of metastable immiscibility region in the Al2O3-SiO(sub2) system using molecular dynamics simulationTakei, Takahiro et al. | 2000
- 194
-
ARTICLES - Optimization of TA-Si-N thin films for use as oxidation-resistant diffusion barriersCabral Jr, C. et al. | 2000
- 194
-
Optimization of Ta–Si–N thin films for use as oxidation-resistant diffusion barriersCabral, C. / Saenger, K. L. / Kotecki, D. E. / Harper, J. M. E. et al. | 2000
- 199
-
Microstructural and electrical property studies of Pb($ Zr_{0.52} $$ Ti_{0.48} $)$ O_{3} $ films grown on p-InP (100) substrates by a radio-frequency magnetron-sputtering technique at low temperatureKim, T. W. / Yoon, Y. S. et al. | 2000
- 199
-
ARTICLES - Microstructural and electrical property studies of Pb(Zr0.52Ti0.48)O3 films grown on p-InP (100) substrates by a radio-frequency magnetron-sputtering technique at low temperatureKim, T.W. et al. | 2000
- 203
-
ARTICLES - Adhesion and reliability of copper interconnects with Ta and TaN barrier layersLane, Michael et al. | 2000
- 203
-
Adhesion and reliability of copper interconnects with Ta and TaN barrier layersLane, Michael / Dauskardt, Reinhold H. / Krishna, Nety / Hashim, Imran et al. | 2000
- 212
-
ARTICLES - Electron field emission from polycrystalline diamond filmsZhang, Qing et al. | 2000
- 212
-
Electron field emission from polycrystalline diamond filmsZhang, Qing / Yoon, S. F. / Ahn, J. / Gan, Bo et al. | 2000
- 218
-
Structural and physical properties of $ Fe_{2} $$ O_{3} $-doped lead vanadate glassMandal, S. / Hazra, S. et al. | 2000
- 218
-
ARTICLES - Structural and physical properties of Fe2O3-doped lead vanadate glassMandal, S. et al. | 2000
- 222
-
Effect of crystallization on microwave dielectric properties of stoichiometric cordierite glasses containing $ B_{2} $$ O_{3} $ and $ P_{2} $$ O_{5} $Wu, Jenn-Ming / Huang, Hong-Lin et al. | 2000
- 222
-
ARTICLES - Effect of crystallization on microwave dielectric properties of stoichiometric cordierite glasses containing B2O3 and P2O5Wu, Jenn-Ming et al. | 2000
- 228
-
Effects of plasma power on the properties of low-k polymerlike organic thin films deposited by plasma-enhanced chemical vapor deposition using the toluene precursorJoo, Jongryang / Quan, Yong Chun / Jung, Donggeun et al. | 2000
- 228
-
ARTICLES - Effects of plasma power on the properties of low-k polymerlike organic thin films deposited by plasma-enhanced chemical vapor deposition using the toluene precursorJoo, Jongryang et al. | 2000
- 231
-
Mechanical properties of biocompatible protein polymer thin filmsBuchko, Christopher J. / Slattery, Margaret J. / Kozloff, Kenneth M. / Martin, David C. et al. | 2000
- 231
-
ARTICLES - Mechanical properties of biocompatible protein polymer thin filmsBuchko, Christopher J. et al. | 2000
- 243
-
Effect of recrystallization on the oxidative stability of poly(butylene terephthalate)Motori, Antonio / Montanari, Gian Carlo / Saccani, Andrea / Giannoni, Steve et al. | 2000
- 243
-
ARTICLES - Effect of recrystallization on the oxidative stability of poly(butylene terephthalate)Motori, Antonio et al. | 2000
- 248
-
The effect of NbC porosity on reaction-layer microstructure in NbC|Si diffusion couplesWoodford, J. / Yang, C Y. / Chang, Y. A. et al. | 2000
- 248
-
ARTICLES - The effect of NbC porosity on reaction-layer microstructure in NbCISI diffusion couplesWoodford, J. et al. | 2000
- 253
-
Deformation of catalytically grown carbon nanotubes induced by annealing under high pressureZhang, Ming / Xu, C. L. / Cao, L. M. / Wu, D. H. / Wang, W. K. et al. | 2000
- 253
-
ARTICLES - Deformation of catalytically grown carbon nanotubes induced by annealing under high pressureZhang, Ming et al. | 2000