A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives (English)
- New search for: Sun, Yu
- New search for: Sun, Yu
- New search for: Nelson, Bradley J.
- New search for: Potasek, David P.
- New search for: Enikov, Eniko
In:
Journal of micromechanics and microengineering
;
12
, 6
; 832-840
;
2002
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ISSN:
- Article (Journal) / Print
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Title:A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives
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Contributors:
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Published in:Journal of micromechanics and microengineering ; 12, 6 ; 832-840
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Publisher:
- New search for: IOP Publ.
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Place of publication:Bristol
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Publication date:2002
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 275/5400/xxxx
- New search for: 50.94 / 33.61
- Further information on Basic classification
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Keywords:
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Classification:
Local classification TIB: 275/5400/xxxx BKL: 50.94 Mikrosystemtechnik, Nanotechnologie / 33.61 Festkörperphysik -
Source:
Table of contents – Volume 12, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 723
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Determination of the material properties of multilayered thin films using the elastic wave propagation approachY G Xu / G R Liu et al. | 2002
- 730
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Synthesis of the modeling and control systems of a tunneling accelerometer using the MatLab simulationJing Wang / Yongjun Zhao / Tianhong Cui / Kody Varahramyan et al. | 2002
- 736
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Study of scratch drive actuator force characteristicsLijie Li / J Gordon Brown / Deepak Uttamchandani et al. | 2002
- 742
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Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depressionJian Dong / Xinxin Li / Yuelin Wang / Deren Lu / Shawkret Ahat et al. | 2002
- 747
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Fabrication of two-dimensional arrays of microlenses and their applications in photolithographyMing-Hsien Wu / George M Whitesides et al. | 2002
- 759
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Characterization of the mechanical behavior of an electrically actuated microbeamEihab M Abdel-Rahman / Mohammad I Younis / Ali H Nayfeh et al. | 2002
- 767
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A silicon micromachined microphone for fluid mechanics researchChunchieh Huang / Ahmed Naguib / Elias Soupos / Khalil Najafi et al. | 2002
- 775
-
Femtosecond laser ablation of thin films for the fabrication of binary photomasksK Venkatakrishnan / P Stanley / L E N Lim et al. | 2002
- 780
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Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensingY Su / A G R Evans / A Brunnschweiler / G Ensell et al. | 2002
- 786
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Double-sided bulk micromachining of silicon-on-insulator films using room-temperature oxygen plasma assisted bondingAnke Sanz-Velasco / Henrik Rödjegård / Gert I Andersson et al. | 2002
- 795
-
Development of micromachine tool prototypes for microfactoriesE Kussul / T Baidyk / L Ruiz-Huerta / A Caballero-Ruiz / G Velasco / L Kasatkina et al. | 2002
- 795
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Development of micromachine tool prototype for microfactoriesKussul, E. / Baidyk, T. / Ruiz-Huerta, L. / Caballero-Ruiz, A. / Velasco, G. / Kasatkina, L. et al. | 2002
- 813
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Precise temperature control and rapid thermal cycling in a micromachined DNA polymerase chain reaction chipDae Sung Yoon / You-Seop Lee / Youngsun Lee / Hye Jung Cho / Su Whan Sung / Kwang W Oh / Junhoe Cha / Geunbae Lim et al. | 2002
- 824
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Development of endovascular microtoolsJun Keun Chang / Seok Chung / Yongku Lee / Junha Park / Seung-Ki Lee / Sang Sik Yang / Shin-Yong Moon / Johanes Tschepe / Youngjoon Chee / Dong-Chul Han et al. | 2002
- 832
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A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drivesYu Sun / Bradley J Nelson / David P Potasek / Eniko Enikov et al. | 2002
- 841
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Electrical and thermal recording techniques using a heater integrated microprobeDong Weon Lee / Takahito Ono / Masayoshi Esashi et al. | 2002
- 849
-
A thermal microactuator made by partial impregnation of polyimide with paraffinL Klintberg / G Thornell et al. | 2002
- 855
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Theoretical limits on the freestanding length of cantilevers produced by surface micromachining technologyRobert W Johnstone / M Parameswaran et al. | 2002
- 862
-
PIV measurements in a microfluidic 3D-sheathing structure with three-dimensional flow behaviourH Klank / G Goranović / J P Kutter / H Gjelstrup / J Michelsen / C H Westergaard et al. | 2002
- 862
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PIV measurements in a microfluidic 3D-sheating structure with three-dimensional flow behaviourKlank, H. / Goranovic, G. / Kutter, J.P. / Gjelstrup, H. / Michelsen, J. / Westergaard, C.H. et al. | 2002
- 870
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Electrokinetic flow control for composition modulation in a microchannelZhongliang Tang / Seungbae Hong / Djordje Djukic / Vijay Modi / Alan C West / James Yardley / Richard M Osgood et al. | 2002
- 878
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Global optimization and design for microelectromechanical systems devices based on simulated annealingAndojo Ongkodjojo / Francis E H Tay et al. | 2002
- 898
-
Photo-injection based sample design and electroosmotic transport in microchannelsDavid Sinton / David Erickson / Dongqing Li et al. | 2002
- 905
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Fabrication of symmetrical section microfeatures using the electro-discharge machining block electrode methodNachiappan Ravi / Han Huang et al. | 2002
- 911
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Reduction of surface roughness and aperture size effect for etching of Si with XeF2K Sugano / O Tabata et al. | 2002
- 917
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Modification of curvature-based thin-film residual stress measurement for MEMS applicationsK-S Chen / K-S Ou et al. | 2002
- 925
-
Coupled micromechanical drumhead resonators with practical application as electromechanical bandpass filtersDennis S Greywall / Paul A Busch et al. | 2002
- 939
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Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuatorJeong Sam Han / Jong Soo Ko / Youn Tae Kim / Byung Man Kwak et al. | 2002
- 948
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Efficient design of micromechanical gyroscopesVladislav A Apostolyuk / V J Logeeswaran / Francis E H Tay et al. | 2002
- 955
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Numerical simulation of electrokinetic focusing in microfluidic chipsJ-Y Lin / L-M Fu / R-J Yang et al. | 2002
- 962
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Thermal effects on electro-osmotic pumping of liquids in microchannelsT S Zhao / Q Liao et al. | 2002
- 971
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Thermal optimization of micro-hotplates that have a silicon islandDanick Briand / Stephan Heimgartner / Marc-Alexis Grétillat / Bart van der Schoot / Nicolaas F de Rooij et al. | 2002
- 979
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Author Index with titles| 2002