Low pressure deposition of LixZnyO thin films by means of RF plasma jet system (English)
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In:
Thin solid films
;
447
; 656-662
;
2004
-
ISSN:
- Article (Journal) / Print
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Title:Low pressure deposition of LixZnyO thin films by means of RF plasma jet system
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Contributors:Hubicka, Z. ( author ) / Cada, M. / Pot°ucek, Z. / Ptácek, P. / Síchová, H. / Málková, Z. / Jastrabík, L. / Trunda, B.
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Published in:Thin solid films ; 447 ; 656-662
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Place of publication:Amsterdam [u.a.] Elsevier
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Publication date:2004
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 33.68
- Further information on Basic classification
- New search for: 535/3485
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Keywords:
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Classification:
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Source:
Table of contents – Volume 447
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Demonstration of the Stierwalt effect caused by scatter from induced coating defects in multilayer dielectric filtersBarrie, J.D. / Fuqua, P.D. / Jones, B.L. / Presser, N. et al. | 2003
- 7
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Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering techniqueHovsepian, P.Eh. / Kok, Y.N. / Ehiasarian, A.P. / Erdemir, A. / Wen, J.-G. / Petrov, I. et al. | 2003
- 14
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Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc systemZhao, Z.W. / Tay, B.K. / Yu, G.Q. / Chua, D.H.C. / Lau, S.P. / Cheah, L.K. et al. | 2003
- 20
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Improved mechanical properties of optical coatings via an enhanced sputtering processWest, G.T. / Kelly, P.J. et al. | 2003
- 26
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Mechanical modelling of multilayer optical coatingsG-Berasategui, E. / Bull, S.J. / Page, T.F. et al. | 2003
- 33
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The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targetsZhou, Y. / Kelly, P.J. / Postill, A. / Abu-Zeid, O. / Alnajjar, A.A. et al. | 2003
- 40
-
Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometryAmassian, A / Desjardins, P / Martinu, L et al. | 2003
- 46
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Determination of pore size distribution in thin organized mesoporous silica films by spectroscopic ellipsometry in the visible and infrared rangeBourgeois, A. / Brunet Bruneau, A. / Fisson, S. / Demarets, B. / Grosso, D. / Cagnol, F. / Sanchez, C. / Rivory, J. et al. | 2003
- 51
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Reactivity of 3D hexagonal mesoporous silica films to environment studied by infrared ellipsometryBrunet-Bruneau, A. / Besson, S. / Gacoin, T. / Boilot, J.P. / Rivory, J. et al. | 2003
- 56
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Improving the conductance of ZnO thin films by doping with TiLu, Yang-Ming / Chang, Chen-Min / Tsai, Shu-I / Wey, Tzuu-Shaang et al. | 2003
- 61
-
Electro-optical and structural properties of thin ZnO films, prepared by filtered vacuum arc depositionDavid, T. / Goldsmith, S. / Boxman, R.L. et al. | 2003
- 68
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Growth behavior and optical properties of metal-nanoparticle dispersed dielectric thin films formed by alternating sputteringCho, S.H. / Lee, S. / Ku, D.Y. / Lee, T.S. / Cheong, B. / Kim, W.M. / Lee, K.S. et al. | 2003
- 74
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Amorphous carbon nitride thin films as electron injection layer in organic LEDsCremona, M. / Reyes, R. / Achete, C.A. / Távora Britto, R. / Camargo, S.S. Jr. et al. | 2003
- 80
-
Photovoltaic effect in nanocrystalline Pb1−xFexS–single crystal silicon heterojunctionsJoshi, Rakesh K. / Mohan, Satish / Agarwal, S.K. / Sehgal, H.K. et al. | 2003
- 85
-
The characteristics of thin film electroluminescent displays produced using sol–gel produced tantalum pentoxide and zinc sulfideKavanagh, Y. / Alam, M.J. / Cameron, D.C. et al. | 2003
- 90
-
Inductively-coupled-plasma reactive ion etching of ZnO using BCl3-based plasmas and effect of the plasma treatment on Ti/Au ohmic contacts to ZnOKim, Han-Ki / Bae, J.W. / Kim, K.-K. / Park, S.-J. / Seong, Tae-Yeon / Adesida, I. et al. | 2003
- 95
-
Ion beam-induced erosion and humidity effect of MgO protective layer prepared by vacuum arc depositionKim, Jong-Kuk / Lee, Eun-Sung / Kim, Dong-Ho / Kim, Do-Geun et al. | 2003
- 100
-
High rate etching of 6H–SiC in SF6-based magnetically-enhanced inductively coupled plasmasKim, D.W. / Lee, H.Y. / Park, B.J. / Kim, H.S. / Sung, Y.J. / Chae, S.H. / Ko, Y.W. / Yeom, G.Y. et al. | 2003
- 105
-
Influence of target-to-substrate distance on the properties of AZO films grown by RF magnetron sputteringJeong, S.H. / Boo, J.H. et al. | 2003
- 111
-
n-ZnO/p-Si UV photodetectors employing AlOx films for antireflectionJeong, I.-S. / Kim, J.H. / Park, Hyung-Ho / Im, Seongil et al. | 2003
- 115
-
Characteristics of indium tin oxide thin films prepared using electron beam evaporationYamaguchi, Mika / Ide-Ektessabi, Ari / Nomura, Hiroshi / Yasui, Nobuto et al. | 2003
- 119
-
Influence of the film structure on the properties of electrochromic CeO2 thin films deposited by e-beam PVDPorqueras, I / Person, C / Bertran, E et al. | 2003
- 125
-
The role of ion energy on the growth mechanism of cubic boron nitride filmsEyhusen, S. / Hofsäss, H. / Ronning, C. et al. | 2003
- 131
-
Stress measurement and stress relaxation during magnetron sputter deposition of cubic boron nitride thin filmsAbendroth, B. / Gago, R. / Kolitsch, A. / Möller, W. et al. | 2003
- 136
-
Effect of diamond films as bufferlayer on formation of cubic boron nitride films by chemical vapor depositionYang, Tien-Syh / Cheng, Yung-Ping / Cheng, Chia-Liang / Wong, Ming-Show et al. | 2003
- 142
-
DLC based coatings prepared by reactive d.c. magnetron sputteringBewilogua, K. / Wittorf, R. / Thomsen, H. / Weber, M. et al. | 2003
- 148
-
Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasingSze, J.Y. / Tay, B.K. / Sheeja, D. / Lau, S.P. / Fu, Y.Q. / Chua, Daniel H.C. / Milne, W.I. et al. | 2003
- 153
-
Fabrication of silicon carbide thin films by plasma immersion ion implantation with self-ignited glow dischargeAn, Zhenghua / Fu, Ricky K.Y. / Chen, Peng / Liu, Weili / Chu, Paul K. / Lin, Chenglu et al. | 2003
- 158
-
Fast and slow decay of ion beam induced electron emission in boron doped hydrogenated CVD diamond filmsRichter, V / Avigal, Y et al. | 2003
- 163
-
An intermediate hybridization in diamond: edge-shared tetrahedraBadzian, Andrzej / Badzian, Teresa et al. | 2003
- 169
-
Nanoscale manipulation of tetrahedral amorphous carbon filmsLee, Churl Seung / Kim, Tae-Young / Lee, Kwang Ryeol / Yoon, Ki Hyun et al. | 2003
- 174
-
Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon filmsChowdhury, S. / Laugier, M.T. / Rahman, I.Z. et al. | 2003
- 181
-
Functionalisation of the carbon nanofibres by plasma treatmentBrandl, W. / Marginean, G. et al. | 2003
- 187
-
Thermally activated electron emission from nano-tips of amorphous diamond and carbon nano-tubesKan, Ming-Chi / Huang, Jow-Lay / Sung, James / Chen, Kuei-Hsien et al. | 2003
- 192
-
Characterization of ternary boron carbon nitride films synthesized by RF magnetron sputteringKim, Dong Ho / Byon, Eungsun / Lee, Sunghun / Kim, Jong-Kuk / Ruh, Hyun et al. | 2003
- 197
-
Corrosion behavior of boron-carbon-nitride films grown by magnetron sputteringByon, Eungsun / Son, Myungsook / Hara, Nobuyoshi / Sugimoto, Katsuhisa et al. | 2003
- 201
-
Mechanical and optical properties of hard SiCN coatings prepared by PECVDJedrzejowski, P. / Cizek, J. / Amassian, A. / Klemberg-Sapieha, J.E. / Vlcek, J. / Martinu, L. et al. | 2003
- 208
-
Synthesis of thick DLC film for micromachine componentsTakeuchi, Sadao / Tanji, Akira / Miyazawa, Hajime / Murakawa, Masao et al. | 2003
- 212
-
Electron-emission from nano- and micro-crystalline diamond films: the effects of nitrogen and oxygen additivesSeo, Soo-Hyung / Lee, Tae-Hoon / Kim, Young-Do / Park, Chang-Kyun / Park, Jin-Seok et al. | 2003
- 217
-
Effect of silicon doping on the mechanical and optical properties of carbon nitride thin filmsSarangi, D. / Sanjinés, R. / Karimi, A. et al. | 2003
- 223
-
Interaction of oxygen with a-C:H, a-C films and other carbon materialsKulikovsky, V / Vorlı́ček, V / Bohác, P / Kurdyumov, A / Jastrabı́k, L et al. | 2003
- 231
-
Growth of highly-oriented diamond films on 6H–SiC (0001) and Si (111) substrates and the effect of carburizationLee, Tae-Hoon / Seo, Soo-Hyung / Kang, Seung-Min / Park, Jin-Seok et al. | 2003
- 239
-
A new technique to determine the elastoplastic properties of thin metallic films using sharp indentersBucaille, Jean-Luc / Stauss, Sven / Schwaller, Patrick / Michler, Johann et al. | 2003
- 246
-
Nanoindentation with spherical indenters: finite element studies of deformation in the elastic–plastic transition regimePark, Y.J. / Pharr, G.M. et al. | 2003
- 251
-
Factors limiting the measurement of residual stresses in thin films by nanoindentationLepienski, C.M. / Pharr, G.M. / Park, Y.J. / Watkins, T.R. / Misra, A. / Zhang, X. et al. | 2003
- 258
-
Mechanical strength improvement of electrical discharge machined cemented carbides through PVD (TiN, TiAlN) coatingsCasas, B. / Lousa, A. / Calderón, J. / Anglada, M. / Esteve, J. / Llanes, L. et al. | 2003
- 264
-
A nanoindentation based determination of internal stress alterations in PVD films and their cemented carbides substrates induced by recoating procedures and their effect on the cutting performanceBouzakis, K.-D. / Skordaris, G. / Hadjiyiannis, S. / Asimakopoulos, A. / Mirisidis, J. / Michailidis, N. / Erkens, G. / Cremer, R. / Klocke, F. / Kleinjans, M. et al. | 2003
- 272
-
A multi-technique approach of tribofilm characterisationMinfray, C. / Martin, J.M. / Esnouf, C. / Le Mogne, T. / Kersting, R. / Hagenhoff, B. et al. | 2003
- 278
-
Depth profiling by GDOES: application of hydrogen and d.c. bias voltage corrections to the analysis of thin oxide filmsMichler, J. / Aeberhard, M. / Velten, D. / Winter, S. / Payling, R. / Breme, J. et al. | 2003
- 284
-
Phase transition studies of sol–gel deposited barium zirconate titanate thin filmsDixit, A. / Majumder, S.B. / Dobal, P.S. / Katiyar, R.S. / Bhalla, A.S. et al. | 2003
- 289
-
Can oxygen stabilize chromium nitride?—Characterization of high temperature cycled chromium oxynitrideWilhartitz, Peter / Dreer, Sabine / Ramminger, Peter et al. | 2003
- 296
-
Effects of lattice mismatches in ZnO/substrate structures on the orientations of ZnO films and characteristics of SAW devicesLee, Jin-Bock / Lee, Myung-Ho / Park, Chang-Kyun / Park, Jin-Seok et al. | 2003
- 302
-
The growth of high-quality SiGe films with an intermediate Si layerLee, S.W. / Chen, P.S. / Tsai, M.-J. / Chia, C.T. / Liu, C.W. / Chen, L.J. et al. | 2003
- 306
-
Study of the a-Si/a-SiO2 interface deposited by r.f. magnetron sputteringTomozeiu, N. / van Faassen, E.E. / Palmero, A. / Arnoldbik, W.M. / Vredenberg, A.M. / Habraken, F.H.P.M. et al. | 2003
- 311
-
Thermal stability and crystallization studies of amorphous TM–C filmsBauer-Grosse, E et al. | 2003
- 316
-
Optical and electronic properties of magnetron sputtered ZrNx thin filmsLamni, R. / Martinez, E. / Springer, S.G. / Sanjinés, R. / Schmid, P.E. / Lévy, F. et al. | 2003
- 322
-
Structural and electrical properties of metal-ferroelectric-insulator-semiconductor field-effect transistors using a Pt/Bi3.25La0.75Ti3O12/CeO2/Si structureLee, Jung-Mi / Kim, Kyoung-Tae / Kim, Chang-Il et al. | 2003
- 327
-
Active soft solder deposition by magnetron-sputter-ion-plating (MSIP)-PVD-processLugscheider, E. / Bobzin, K. / Erdle, A. et al. | 2003
- 332
-
Electrical, optical and mechanical properties of sputtered CrNy and Cr1−xSixN1.02 thin filmsMartinez, E. / Sanjinés, R. / Banakh, O. / Lévy, F. et al. | 2003
- 337
-
Electrical properties of Bi4−xEuxTi3O12 (BET) thin films after etching in inductively coupled CF4/Ar plasmaLim, Kyu-Tae / Kim, Kyoung-Tae / Kim, Dong-Pyo / Kim, Chang-Il et al. | 2003
- 343
-
Etching mechanism of Bi4−xLaxTi3O12 films in Ar/Cl2 inductively coupled plasmaKim, Dong-Pyo / Kim, Kyoung-Tae / Kim, Chang-Il / Efremov, A.M. et al. | 2003
- 349
-
Effects of ion-implantation on the formation of light-emitting FeSi2 in Fe thin films on (001)SiLu, H.T. / Chen, L.J. / Chueh, Y.L. / Chou, L.J. et al. | 2003
- 354
-
Atmospheric RF plasma effects on the film adhesion propertyChung, Yun M. / Jung, Min J. / Han, Jeon G. / Lee, Min W. / Kim, Yong M. et al. | 2003
- 359
-
Physical and mechanical properties of polyimide/titania hybrid filmsChiang, Pei-Chun / Whang, Wha-Tzong / Tsai, Mei-Hui / Wu, Sheng-Chang et al. | 2003
- 365
-
Effects of Si content and free Si on oxidation behavior of Ti–Si–N coating layersChoi, Jun Bo / Cho, Kurn / Lee, Mi-Hye / Kim, Kwang Ho et al. | 2003
- 371
-
Effects of bias voltage and temperature on mechanical properties of Ti–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniquesChoi, Sung Ryong / Park, In-Wook / Kim, Sang Ho / Kim, Kwang Ho et al. | 2003
- 377
-
Characteristics of ion beam modified magnesium oxide filmsYasui, Nobuto / Nomura, Hiroshi / Ide-Ektessabi, Ari et al. | 2003
- 383
-
Ion beam processing of MgO thin filmsIde-Ektessabi, Ari / Nomura, Hiroshi / Yasui, Nobuto / Tsukuda, Yuji et al. | 2003
- 388
-
Dry processing of thin film capacitors arrays using ion beam assisted depositionIde-Ektessabi, Ari / Uehara, Hiroki / Kamitani, Susumu et al. | 2003
- 392
-
The tribological properties of co-deposited aluminium–titanium alloy coatingsHampshire, J. / Kelly, P.J. / Teer, D.G. et al. | 2003
- 399
-
Finite element analysis of substrate effects on indentation behaviour of thin filmsXu, Zhi-Hui / Rowcliffe, David et al. | 2003
- 406
-
On the behaviour of indentation fracture in TiAlSiN hard thin filmsNakonechna, O. / Cselle, T. / Morstein, M. / Karimi, A. et al. | 2003
- 413
-
Effect of Bi4Ti3O12 seeding layer on the structural and ferroelectric properties of Bi3.25La0.75Ti3O12 thin films fabricated by a metalorganic decomposition methodKim, Kyoung-Tae / Kim, Chang-Il et al. | 2003
- 418
-
The structure of co-deposited aluminium–titanium alloy coatingsHampshire, J. / Kelly, P.J. / Teer, D.G. et al. | 2003
- 425
-
Effects of MEVVA-implanted chromium on the structure and properties of CrN filmHan, Sheng / Chen, Hong-Ying / Chang, Ku-Ling / Weng, Ko-Wei / Wang, Da-Yung / Lu, Fu-Hsing / Shih, Han C. et al. | 2003
- 430
-
Deposition of TiOx thin film using the grid-assisting magnetron sputteringJung, Min J / Kim, Yong M / Chung, Yun M / Han, Jeon G / Bang, K.Yoon et al. | 2003
- 436
-
Effect of substrate bias voltage on amorphous Si–C–N films produced by PVD techniquesCunha, L / Moura, C / Leme, J / Andrês, G / Pischow, K et al. | 2003
- 443
-
Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating systemPark, In-Wook / Choi, Sung Ryong / Suh, Ju Hyung / Park, Chan-Gyung / Kim, Kwang Ho et al. | 2003
- 449
-
Structural, optical and mechanical properties of coloured TiNxOy thin filmsVaz, F / Cerqueira, P / Rebouta, L / Nascimento, S.M.C / Alves, E / Goudeau, Ph / Rivière, J.P / Pischow, K / de Rijk, J et al. | 2003
- 455
-
Performance and characterisation of CVD diamond coated, sintered diamond and WC–Co cutting tools for dental and micromachining applicationsSein, Htet / Ahmed, Waqar / Jackson, Mark / Woodwards, Robert / Polini, Riccardo et al. | 2003
- 462
-
Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin filmsZhang, Sam / Sun, Deen / Fu, Yongqing / Du, Hejun et al. | 2003
- 468
-
The role of subsurface oxygen in the local oxidation of zirconium and zirconium nitride thin filmsFarkas, N. / Zhang, G. / Donnelly, K.M. / Evans, E.A. / Ramsier, R.D. / Dagata, J.A. et al. | 2003
- 474
-
Electrically conducting polyaniline microtube blendsHopkins, A.R. / Lipeles, R.A. / Kao, W.H. et al. | 2003
- 481
-
Design and performance of an electrothermal MEMS microengine capable of bi-directional motionKolesar, Edward S / Odom, William E / Jayachandran, Joseph A / Ruff, Matthew D / Ko, Simon Y / Howard, Jeffery T / Allen, Peter B / Wilken, Josh M / Boydston, Noah C / Bosch, Jorge E et al. | 2003
- 489
-
Passivation of type II InAs/GaSb superlattice photodiodesGin, Aaron / Wei, Yajun / Bae, Junjik / Hood, Andrew / Nah, Jongbum / Razeghi, Manijeh et al. | 2003
- 493
-
Ferromagnetism in GaN and SiC doped with transition metalsPearton, S.J. / Park, Y.D. / Abernathy, C.R. / Overberg, M.E. / Thaler, G.T. / Kim, J. / Ren, F. / Zavada, J.M. / Wilson, R.G. et al. | 2003
- 502
-
Influence of pH on structural and electrical properties of sol–gel derived (Ba, Sr)TiO3 thin films under humid conditionsAgarwal, Seema / Samanta, S.B / Sharma, G.L et al. | 2003
- 509
-
High quality r.f. sputtered metal oxides (Ta2O5, HfO2) and their properties after annealingGrüger, H. / Kunath, Ch. / Kurth, E. / Sorge, S. / Pufe, W. / Pechstein, T. et al. | 2003
- 516
-
Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applicationsChang, T.C. / Yan, S.T. / Liu, P.T. / Lin, Z.W. / Aoki, H. / Sze, S.M. et al. | 2003
- 524
-
CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applicationsChang, T.C / Tsai, T.M / Liu, P.T / Chen, C.W / Yan, S.T / Aoki, H / Chang, Y.C / Tseng, T.Y et al. | 2003
- 531
-
Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnectChen, K.W. / Wang, Y.L. / Liu, C.P. / Yang, Kevin / Chang, L. / Lo, K.Y. / Liu, C.W. et al. | 2003
- 537
-
Structural and dielectric properties of heterostructured BST thin films by sol–gel techniqueJain, M. / Majumder, S.B. / Katiyar, R.S. / Bhalla, A.S. et al. | 2003
- 542
-
Copper surface protection with a completely enclosed copper structure for a damascene processWang, T.C. / Hsieh, T.E. / Wang, Y.L. / Wu, Y.L. / Lo, K.Y. / Liu, C.W. / Chen, K.W. et al. | 2003
- 549
-
Hybrid organo-ceramic corrosion protection coatings with encapsulated organic corrosion inhibitorsKhramov, A.N. / Voevodin, N.N. / Balbyshev, V.N. / Donley, M.S. et al. | 2003
- 558
-
Investigation of quaternary Al-based quasicrystal thin films for corrosion protectionBalbyshev, V.N. / King, D.J. / Khramov, A.N. / Kasten, L.S. / Donley, M.S. et al. | 2003
- 564
-
Comparative study of Mg doped ZnO and multilayer ZnO/MgO thin filmsBhattacharya, P. / Das, Rasmi R. / Katiyar, Ram S. et al. | 2003
- 568
-
The evaporative deposition of aluminum coatings and shapes with grain size controlJankowski, Alan / Hayes, Jeffrey et al. | 2003
- 575
-
Investigation of the bonding states of the SiO2 aerogel film/metal interfaceJung, Sang-Bae / Park, Hyung-Ho / Kim, Haecheon et al. | 2003
- 580
-
Application of SiO2 aerogel film for interlayer dielectric on GaAs with a barrier of Si3N4Jung, Sang-Bae / Park, Sung-Woo / Yang, Jun-Kyu / Park, Hyung-Ho / Kim, Haecheon et al. | 2003
- 586
-
Effect of additive gases on the selective etching of tungsten films using inductively coupled halogen-based plasmasPark, S.D. / Lee, Y.J. / Cho, N.G. / Kim, S.G. / Choe, H.H. / Hong, M.P. / Yeom, G.Y. et al. | 2003
- 592
-
Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD methodKim, M.-C. / Cho, S.-H. / Lee, S.-B. / Kim, Y. / Boo, J.-H. et al. | 2003
- 599
-
Study on precipitations of fluorine-doped silicon oxideWu, Jun / Wang, Ying-Lang / Liu, Chuan-Pu / Chang, Shih-Chieh / Kuo, Cheng-Tzu / Ay, Chyung et al. | 2003
- 605
-
Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN bufferJung, Jun-Phil / Lee, Jin-Bock / Kim, Jung-Sun / Park, Jin-Seok et al. | 2003
- 610
-
Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARsLee, Jin-Bock / Jung, Jun-Phil / Lee, Myung-Ho / Park, Jin-Seok et al. | 2003
- 615
-
Improvement of the surface characteristics of sputtered metal layer for a MEMS micro-mirror switchLee, M.-W. / Jo, S.-B. / Lee, K.-C. / Kim, C.-W. / Park, S.-G. / Lee, S.-G. / Lee, E.-H. / O., Beom-Hoan. et al. | 2003
- 619
-
Characteristics of rapid-thermal-annealed LiNi1−xCoxO2 cathode films for all-solid-state rechargeable thin film microbatteriesKim, Han-Ki / Seong, Tae-Yeon / Yoon, Young Soo et al. | 2003
- 626
-
Improved performance of GaAs MESFETs through sulfidation of Pt/GaAs interfaceYang, Jun-Kyu / Park, Hyung-Ho / Kim, Haecheon / Jang, Ho Won / Lee, Jong-Lam / Im, Seongil et al. | 2003
- 632
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Investigation of the electrical properties and reliability of amorphous SiCNChen, C.W. / Chang, T.C. / Liu, P.T. / Tsai, T.M. / Huang, H.C. / Chen, J.M. / Tseng, C.H. / Liu, C.C. / Tseng, T.Y. et al. | 2003
- 638
-
Fabrication of colloidal self-assembled monolayer (SAM) using monodisperse silica and its use as a lithographic maskKo, Hwa-young / Lee, Hae-Weon / Moon, Jooho et al. | 2003
- 645
-
Monitor and eliminate the circular defects in HDP–STI deposition through oxynitride/oxide composite linerLan, Jin-Kun / Wang, Ying-Lang / Liu, Chuan-Pu / Lee, Wen His / Ay, Chyung / Cheng, Yi-Lung / Chang, Shih-Chieh et al. | 2003
- 651
-
Dielectric properties of highly (100) oriented (Pb0.5, Sr0.5)TiO3 thin films grown on LaNiO3 electrodesKim, Kyoung-Tae / Kim, Chang-Il et al. | 2003
- 656
-
Low pressure deposition of LixZnyO thin films by means of RF plasma jet systemHubička, Z. / Čada, M. / Potůček, Z. / Ptáček, P. / Šı́chová, H. / Málková, Z. / Jastrabı́k, L. / Trunda, B. et al. | 2003
- 663
-
Studies on microstructure bilayer film of ultrasonic dipped cadmium sulfide and d.c. sputtered indium tin oxideCui, H.-N. / Teixeira, V. / Meng, L.J. / Zhang, H.-J. et al. | 2003
- 669
-
Electrical properties of PZT thin films by photochemical depositionPark, Hyeong-Ho / Yoon, Sook / Park, Hyung-Ho / Hill, Ross H. et al. | 2003
- 674
-
Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor depositionJangJean, Shiuh-Ko / Liu, Chuan-Pu / Wang, Ying-Lang / Hwang, Weng-Sing / Tseng, Wei-Tsu / Chen, Sheng-Wen / Lo, Kuang-Yao et al. | 2003
- 681
-
Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant materialCheng, Y.L. / Wang, Y.L. / Wu, Y.L. / Liu, C.P. / Liu, C.W. / Lan, J.K. / O'Neil, M.L. / Ay, Chyung / Feng, M.S. et al. | 2003
- 688
-
(Pb,Sr)TiO3 thin films etching characteristics using inductively coupled plasmaKim, Gwan-Ha / Kim, Kyoung-Tae / Kim, Dong-Pyo / Kim, Chang-Il et al. | 2003
- 693
-
Author Index| 2004
- 695
-
Subject Index| 2004
- iii
-
Ed. Board| 2004