Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Interface layers in In0.532Ga0.468As-InP superlattices (English)
- New search for: Rowell, N.L.
- New search for: Rowell, N.L.
- New search for: Yu, G.
- New search for: Lockwood, D.J.
- New search for: Poole, P.J.
In:
Journal of vacuum science and technology / A
;
22
, 3
; 897-901
;
2004
-
ISSN:
- Article (Journal) / Print
-
Title:Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Interface layers in In0.532Ga0.468As-InP superlattices
-
Contributors:
-
Published in:Journal of vacuum science and technology / A ; 22, 3 ; 897-901
-
Publisher:
- New search for: Inst.
-
Place of publication:New York, NY
-
Publication date:2004
-
ISSN:
-
ZDBID:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 52.78 / 33.09
- Further information on Basic classification
- New search for: 770/3422
-
Keywords:
-
Classification:
-
Source:
Table of contents – Volume 22, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 445
-
Effect of plasma on yttrium oxide and yttrium–oxynitride dielectricsNiu, D. / Ashcraft, R. W. / Hinkle, C. / Parsons, G. N. et al. | 2004
- 452
-
Forced convection magnetoelectroplating for enhanced semiconductor metallizationSaid, R. A. et al. | 2004
- 461
-
Chemical-beam deposition of GaN films on Si(111) from diethylazidogallium methylhydrazine adductSung, Myung M. / Kim, Chang G. / Kim, Yunsoo et al. | 2004
- 465
-
Effects of thermal annealing of multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodesYim, Munhyuk / Kim, Dong-Hyun / Chai, Dongkyu / Yoon, Giwan et al. | 2004
- 472
-
Cathode glow polymerization of trimethylsilaneYasuda, Hirotsugu / Yu, Qingsong et al. | 2004
- 477
-
Ionized magnetron sputter deposition of hard nanocomposite TiN/amorphous-silicon nitride filmsPhinichka, N. / Chandra, R. / Barber, Z. H. et al. | 2004
- 482
-
Thickness measurements by quartz microbalance during thin-film growth by organic-molecular-beam depositionCampione, M. / Cartotti, M. / Pinotti, E. / Sassella, A. / Borghesi, A. et al. | 2004
- 487
-
Hydrogenated-amorphous carbon nitride films formed from the dissociative excitation reaction of CH~3CN with the microwave-discharge flow of Ar: Correlation of the [N]/([N]+[C]) ratio with the relative number densities of the CH(A^2Delta) and CN(B^2Sigma^+) statesIto, H. / Miki, H. / Namiki, K.-i. C. / Ito, N. / Saitoh, H. / Suzuki, T. / Yatsui, K. et al. | 2004
- 487
-
Hydrogenated-amorphous carbon nitride films formed from the dissociative excitation reaction of with the microwave-discharge flow of Ar: Correlation of the [N]/([N]+[C]) ratio with the relative number densities of the and statesIto, Haruhiko / Miki, Hiroshi / Namiki, Kei-ichi C. / Ito, Noriko / Saitoh, Hidetoshi / Suzuki, Tsuneo / Yatsui, Kiyoshi et al. | 2004
- 487
-
Hydrogenated-amorphous carbon nitride films formed from the dissociative excitation reaction of CH3CN with the microwave-discharge flow of Ar: Correlation of the (N)-((N)+(C)) ratio with the relative number densities of the CH(A2D) and CN(B2S+) statesIto, Haruhiko et al. | 2004
- 494
-
Effect of deposition temperature on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxideCheng, Y. L. / Wang, Y. L. / Chen, H. W. / Lan, J. L. / Liu, C. P. / Wu, S. A. / Wu, Y. L. / Lo, K. Y. / Feng, M. S. et al. | 2004
- 500
-
Properties of inductively coupled plasmas. I. Studies of magnetically confined plasmas for etching ofLi, Xi / Ling, Li / Hua, Xuefeng / Oehrlein, Gottlieb S. / Wang, Yicheng / Vasenkov, Alex V. / Kushner, Mark J. et al. | 2004
- 511
-
Properties of inductively coupled plasmas. II. Plasma chemistry and reaction mechanism for modeling of dischargesVasenkov, Alex V. / Li, Xi / Oehrlein, Gottlieb S. / Kushner, Mark J. et al. | 2004
- 531
-
Electron-cyclotron-resonance plasma etching of the ZnO layers grown by molecular-beam epitaxyOgata, K. / Honden, T. / Tanite, T. / Komuro, T. / Koike, K. / Sasa, S. / Inoue, M. / Yano, M. et al. | 2004
- 534
-
Extraction of negative ions from pulsed electronegative inductively coupled plasmas having a radio-frequency substrate biasSubramonium, Pramod / Kushner, Mark J. et al. | 2004
- 545
-
Numerical simulation of the thermal-mechanical process of high current pulsed electron beam treatmentZou, Jianxin / Qin, Ying / Dong, Chuang / Wang, Xiaogang / Wu, Aimin / Hao, Shengzhi et al. | 2004
- 553
-
Monitoring chamber walls coating deposited during plasma processes: Application to silicon gate etch processesJoubert, O. / Cunge, G. / Pelissier, B. / Vallier, L. / Kogelschatz, M. / Pargon, E. et al. | 2004
- 564
-
Effects of germanium content on sol-gel GeO2-g-glycidoxypropyltrimethoxysilane hybrid planar waveguides prepared at low temperatureQue, Wenxiu et al. | 2004
- 564
-
Effects of germanium content on sol-gel GeO~2/gamma-glycidoxypropyltrimethoxysilane hybrid planar waveguides prepared at low temperatureQue, W. / Hu, X. et al. | 2004
- 564
-
Effects of germanium content on sol-gel -glycidoxypropyltrimethoxysilane hybrid planar waveguides prepared at low temperatureQue, Wenxiu / Hu, X. et al. | 2004
- 570
-
Composition, structural, and electrical properties of fluorinated silicon–nitride thin films grown by remote plasma-enhanced chemical-vapor deposition from mixturesFandiño, J. / Ortiz, A. / Rodrı́guez-Fernandez, L. / Alonso, J. C. et al. | 2004
- 578
-
Effects of atomic hydrogen on the selective area growth of Si and thin films on Si and surfaces: Inhibition, nucleation, and growthSchroeder, T. W. / Lam, A. M. / Ma, P. F. / Engstrom, J. R. et al. | 2004
- 594
-
In situ photoemission study of a thin film on GaAs(111)Wu, J. X. / Wang, Z. M. / Li, S. / Ma, M. S. et al. | 2004
- 598
-
Etching mechanism of a GaN/InGaN/GaN heterostructure in - and -based inductively coupled plasmasKim, H. K. / Lin, H. / Ra, Y. et al. | 2004
- 602
-
Template stripping using cold weldingBlackstock, Jason J. / Li, Zhiyong / Jung, Gun-young et al. | 2004
- 606
-
Etching of high aspect ratio structures in Si using plasmaGomez, Sergi / Jun Belen, Rodolfo / Kiehlbauch, Mark / Aydil, Eray S. et al. | 2004
- 616
-
Deposition of Hf–silicate gate dielectric on Detection of interfacial layer growthAddepalli, S. / Sivasubramani, P. / El-Bouanani, M. / Kim, M. J. / Gnade, B. E. / Wallace, R. M. et al. | 2004
- 624
-
Analysis of the chemical composition and deposition mechanism of the layer on the plasma chamber walls during silicon gate etchingKogelschatz, Martin / Cunge, Gilles / Sadeghi, Nader et al. | 2004
- 636
-
Oxygen plasma rapid thermal annealing to improve the electrical properties of gate structureKim, Ik Soo / Kim, Seong-Il / Kim, Yong Tae et al. | 2004
- 640
-
SiBCN synthesis by high-dose ion implantationCervera, M. / Hernández, M. J. / Piqueras, J. / Morant, C. / Prieto, P. / Elizalde, E. / Sanz, J. M. et al. | 2004
- 646
-
Physical and mechanical properties of sputtered Ta–Si–N films with a high (⩾40 at %) content of SiZeman, H. / Musil, J. / Zeman, P. et al. | 2004
- 646
-
Physical and mechanical properties of sputtered Ta-Si-N films with a high (>or=40 at%) content of SiZeman, H. / Musil, J. / Zeman, P. et al. | 2004
- 650
-
Electron backscattered diffraction study of poly-Si by Ni-mediated crystallization of amorphous silicon using a nanocapChang, Y. J. / Oh, J. H. / Kim, K. H. / Jang, Jin / Kim, D. I. / Oh, K. H. et al. | 2004
- 655
-
Metal–insulator–metal capacitors using dielectric grown by pulsed-injection plasma enhanced metalorganic chemical vapor depositionDurand, C. / Vallée, C. / Loup, V. / Salicio, O. / Dubourdieu, C. / Blonkowski, S. / Bonvalot, M. / Holliger, P. / Joubert, O. et al. | 2004
- 661
-
Angular dependence of etch rates in the etching of poly-Si and fluorocarbon polymer using and plasmasMin, Jae-Ho / Lee, Gyeo-Re / Lee, Jin-Kwan / Moon, Sang Heup / Kim, Chang-Koo et al. | 2004
- 670
-
Femtosecond pulsed laser deposition of amorphous, ultrahard boride thin filmsStock, Michael / Molian, Pal et al. | 2004
- 676
-
Effects of the insertion of a thick buffer layer on the adhesion of -rich filmWong, S. F. / Ong, C. W. / Pang, G. K. H. / Baba-Kishi, K. Z. / Lau, W. M. et al. | 2004
- 683
-
Thioethanol on Cu(111) at room temperature: A near edge x-ray absorption fine structure and x-ray photoelectron spectroscopy studySyed, J. A. / Sardar, S. A. / Yagi, S. / Tanaka, K. et al. | 2004
- 689
-
Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmasJoseph, E. A. / Zhou, B. / Sant, S. P. / Overzet, L. J. / Goeckner, M. J. et al. | 2004
- 698
-
Phase transition behavior of reactive sputtering deposited Co–N thin films using transmission electron microscopyFang, Jau-Shiung / Yang, Li-Chung / Hsu, Chen-Siang / Chen, Gin-Shiang / Lin, Yen-Wei / Chen, Giin-Shan et al. | 2004
- 705
-
Outgassing properties of the spallation neutron source ring vacuum chambers coated with titanium nitrideHe, P. / Hseuh, H. C. / Mapes, M. / Todd, R. / Weiss, D. / Wilson, D. et al. | 2004
- 711
-
Spectroscopic ellipsometry characterization of films on Si(100) deposited by high-vacuum-metalorganic chemical vapor depositionSong, Z. / Rogers, B. R. / Theodore, N. D. et al. | 2004
- 719
-
Phase and structural characterization of vanadium oxide films grown on amorphous substratesYoun, Doo-Hyeb / Kim, Hyun-Tak / Chae, Byung-Gue / Hwang, Young-Joo / Lee, Ju-Wook / Maeng, Sung-Lyul / Kang, Kwang-Yong et al. | 2004
- 725
-
Optical characteristics and color of nanocomposite coatingsJedrzejowski, P. / Baloukas, B. / Klemberg-Sapieha, J. E. / Martinu, L. et al. | 2004
- 734
-
High vacuum end cap design for use with quartz tubesWeyburne, David W. / Paduano, Qing S. et al. | 2004
- 734
-
Shop Notes - High vacuum end cap design for use with quartz tubesWeyburne, David W. et al. | 2004
- 735
-
Construction of a variable aperture cell for source flux control in a molecular-beam epitaxy environmentMattord, Terry J. / Oye, Michael M. / Gotthold, David / Hansing, Chad / Holmes, Archie L. / Streetman, Ben G. et al. | 2004
- 735
-
Shop Notes - Construction of a variable aperture cell for source flux control in a molecular-beam epitaxy environmentMattord, Terry J. et al. | 2004
- 739
-
Erratum: Extremely low-outgassing material: 0.2% beryllium copper alloy [J. Vac. Sci. Technol. A 22, 181 (2004)]Watanabe, Fumio et al. | 2004
- 739
-
Errata - Erratum: Extremely low-outgassing material: 0.2% beryllium copper alloy (J. Vac. Sci. Technol. A 22, 181 (2004))Watanabe, Fumio et al. | 2004
- 742
-
Preface| 2004
- 742
-
Papers from the 11th Canadian Semiconductor Technology Conference - Preface| 2004
- 743
-
Papers from the 11th Canadian Semiconductor Technology Conference - Nanotechnology - Nano patterning on optical fiber and laser diode facet with dry resistKelkar, P.S. et al. | 2004
- 743
-
Nano patterning on optical fiber and laser diode facet with dry resistKelkar, P. S. / Beauvais, J. / Lavallée, E. / Drouin, D. / Cloutier, M. / Turcotte, D. / Yang, Pan / Mun, Lau Kien / Legario, R. / Awad, Y. et al. | 2004
- 747
-
Cold wall chemical vapor deposition of single walled carbon nanotubesFinnie, P. / Bardwell, J. / Tsandev, I. / Tomlinson, M. / Beaulieu, M. / Fraser, J. / Lefebvre, J. et al. | 2004
- 747
-
Papers from the 11th Canadian Semiconductor Technology Conference - Nanotechnology - Cold wall chemical vapor deposition of single walled carbon nanotubesFinnie, P. et al. | 2004
- 752
-
Numerical simulations of variable range hopping conductivity in deoxyguanosine deoxyribose nucleic acid nucleoside filmsSingh, Mahi R. / Tsang, Chi-Ming et al. | 2004
- 752
-
Papers from the 11th Canadian Semiconductor Technology Conference - Nanotechnology - Numerical simulations of variable range hopping conductivity in deoxyguanosine deoxyribose nucleic acid nucleoside filmsSingh, Mahi R. et al. | 2004
- 755
-
Papers from the 11th Canadian Semiconductor Technology Conference - Organics - Variable current transport in polymer thin film transistorsMarinov, Ognian et al. | 2004
- 755
-
Variable current transport in polymer thin film transistorsMarinov, Ognian / Deen, M. Jamal / Yu, Jianfei / Vamvounis, George / Holdcroft, Steven / Woods, William et al. | 2004
- 760
-
Oligo-p-phenylevinylene organic thin-film transistors with chemically modified dielectric surfacesGorjanc, T. C. / Lévesque, I. / D’iorio, M. et al. | 2004
- 760
-
Papers from the 11th Canadian Semiconductor Technology Conference - Organics - Oligo-p-phenylevinylene organic thin-film transistors with chemically modified dielectric surfacesGorjanc, T.C. et al. | 2004
- 764
-
Microcavity organic light emitting diodes with double sided light emission of different colorsLiu, X. / Poitras, D. / Tao, Y. / Py, C. et al. | 2004
- 764
-
Papers from the 11th Canadian Semiconductor Technology Conference - Organics - Microcavity organic light emitting diodes with double sided light emission of different colorsLiu, X. et al. | 2004
- 768
-
Fabrication of short channel organic thin film transistors by Si-etching methodChen, Y. / Zhu, W. W. / Xiao, S. / Shih, I. et al. | 2004
- 768
-
Papers from the 11th Canadian Semiconductor Technology Conference - Organics - Fabrication of short channel organic thin film transistors by Si-etching methodChen, Y. et al. | 2004
- 771
-
Papers from the 11th Canadian Semiconductor Technology Conference - Epitaxy - Organometallic vapor phase epitaxy of GaAs1-xNx alloy layers on GaAs(001): Nitrogen incorporation and lattice parameter variationBeaudry, J.-N. et al. | 2004
- 771
-
Organometallic vapor phase epitaxy of alloy layers on GaAs(001): Nitrogen incorporation and lattice parameter variationBeaudry, J.-N. / Masut, R. A. / Desjardins, P. / Wei, P. / Chicoine, M. / Bentoumi, G. / Leonelli, R. / Schiettekatte, F. / Guillon, S. et al. | 2004
- 776
-
Empirical tight-binding calculations of the electronic structure of dilute III–V–N semiconductor alloysTurcotte, S. / Shtinkov, N. / Desjardins, P. / Masut, R. A. / Leonelli, R. et al. | 2004
- 776
-
Papers from the 11th Canadian Semiconductor Technology Conference - Epitaxy - Empirical tight-binding calculations of the electronic structure of dilute III-V-N semiconductor alloysTurcotte, S. et al. | 2004
- 781
-
High-speed Si resonant cavity enhanced photodetectors and arraysÜnlü, M. S. / Emsley, M. K. / Dosunmu, O. I. / Muller, P. / Leblebici, Y. et al. | 2004
- 781
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - High-speed Si resonant cavity enhanced photodetectors and arraysÜnlü, M.S. et al. | 2004
- 788
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - 1.5 mm to 0.87 mm optical upconversion using wafer fusion technologyLuo, H. et al. | 2004
- 788
-
1.5 mum to 0.87 mum optical upconversion using wafer fusion technologyLuo, H. / Ban, D. / Liu, H. C. / SpringThorpe, A. J. / Wasilewski, Z. R. / Buchanan, M. / Glew, R. et al. | 2004
- 788
-
1.5 μm to 0.87 μm optical upconversion using wafer fusion technologyLuo, H. / Ban, D. / Liu, H. C. / SpringThorpe, A. J. / Wasilewski, Z. R. / Buchanan, M. / Glew, R. et al. | 2004
- 792
-
Growth of InGaN self-assembled quantum dots and their application to photodiodesJi, L. W. / Su, Y. K. / Chang, S. J. / Tsai, S. T. / Hung, S. C. / Chuang, R. W. / Fang, T. H. / Tsai, T. Y. et al. | 2004
- 792
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Growth of InGaN self-assembled quantum dots and their application to photodiodesJi, L.W. et al. | 2004
- 796
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Optical switching in InGaAsP waveguides using localized index gradientsAbdalla, S. et al. | 2004
- 796
-
Optical switching in InGaAsP waveguides using localized index gradientsAbdalla, S. / Ng, S. / Celo, D. / El-Mougy, S. / Smy, T. / Syrett, B. / Barrios, P. / Delâge, A. / Golub, I. / Janz, S. et al. | 2004
- 800
-
Optical modulator in silicon-on-insulator with a low thermal signatureWaldron, P. D. / Jessop, P. E. / Yuen, A. P. / Winchiu, L. / Chyurlia, P. / Tarr, N. G. / Smy, T. J. / Golub, I. / Xu, D.-X. / Janz, S. et al. | 2004
- 800
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Optical modulator in silicon-on-insulator with a low thermal signatureWaldron, P.D. et al. | 2004
- 803
-
Influence of the electrical contact on the reliability of InP-based ridge waveguide distributed feedback semiconductor diode lasers for telecommunications applicationsZhang, S. / Boudreau, M. G. / Kuchibhatla, R. / Tao, Y. / Das, S. R. / Griswold, E. M. / Sharma, U. et al. | 2004
- 803
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Influence of the electrical contact on the reliability of InP-based ridge waveguide distributed feedback semiconductor diode lasers for telecommunications applicationsZhang, S. et al. | 2004
- 807
-
Study of AlGaInP multiquantum-well/double heterostructure light-emitting diodes with In-added GaP window layer regrown by antimony-based liquid phase epitaxyChang, L. B. / Kuei, P. Y. / Hsieh, L. Z. / Chang, L. Y. / Lin, R. M. et al. | 2004
- 807
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Study of AlGaInP multiquantum-well-double heterostructure light-emitting diodes with In-added GaP window layer regrown by antimony-based liquid phase epitaxyChang, L.B. et al. | 2004
- 811
-
Modeling of mushroom waveguide photodetectorEl-Batawy, Yasser M. / Deen, M. Jamal et al. | 2004
- 811
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Modeling of mushroom waveguide photodetectorEl-Batawy, Yasser M. et al. | 2004
- 816
-
Electrode fabrication for high-speed polarization mode converterMeng, X. / Zhang, S. / Chen, C. / Poirier, M. / Shepherd, F. R. / Das, S. R. et al. | 2004
- 816
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Electrode fabrication for high-speed polarization mode converterMeng, X. et al. | 2004
- 821
-
Papers from the 11th Canadian Semiconductor Technology Conference - Photonics - Suitability of II-VI semiconductors for photonic applications: Common-anion versus common-cation superlatticesTit, Nacir et al. | 2004
- 821
-
Suitability of II–VI semiconductors for photonic applications: Common-anion versus common-cation superlatticesTit, Nacir et al. | 2004
- 826
-
Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switchingLiu, Xueyuan / Kubby, Joel / Chen, Jingkuang / Diehl, James / Feinberg, Kathleen / German, Kristine / Gulvin, Peter / Herko, Larry / Jia, Nancy / Lin, Pinyen et al. | 2004
- 826
-
Papers from the 11th Canadian Semiconductor Technology Conference - MEMS - Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switchingLiu, Xueyuan et al. | 2004
- 831
-
Papers from the 11th Canadian Semiconductor Technology Conference - MEMS - Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arraysEllerington, Neil et al. | 2004
- 831
-
Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arraysEllerington, Neil / Hubbard, Ted / Kujath, Marek et al. | 2004
- 837
-
Papers from the 11th Canadian Semiconductor Technology Conference - MEMS - Dry release of polymer structures with anti-sticking layerCheng, M.C. et al. | 2004
- 837
-
Dry release of polymer structures with anti-sticking layerCheng, M. C. / Gadre, A. P. / Garra, J. A. / Nijdam, A. J. / Luo, C. / Schneider, T. W. / White, R. C. / Currie, J. F. / Paranjape, M. et al. | 2004
- 842
-
Papers from the 11th Canadian Semiconductor Technology Conference - MEMS - Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometerAhmed, A.H.Z. et al. | 2004
- 842
-
Fabrication of a self-absorbing, self-supported complementary metal-oxide-semiconductor compatible micromachined bolometerAhmed, A. H. Z. / Tait, R. N. et al. | 2004
- 847
-
Copper coplanar waveguides in Si substrates for 10 GHz applicationsAmaya, R. E. / Levenets, V. / Tarr, N. G. / Plett, C. et al. | 2004
- 847
-
Papers from the 11th Canadian Semiconductor Technology Conference - Electronics - Copper coplanar waveguides in Si substrates for 10 GHz applicationsAmaya, R.E. et al. | 2004
- 851
-
High-k titanium silicate thin films grown by reactive magnetron sputtering for complementary metal–oxide–semiconductor applicationsBrassard, D. / Sarkar, D. K. / El Khakani, M. A. / Ouellet, L. et al. | 2004
- 851
-
Papers from the 11th Canadian Semiconductor Technology Conference - Electronics - High-k titanium silicate thin films grown by reactive magnetron sputtering for complementary metal-oxide-semiconductor applicationsBrassard, D. et al. | 2004
- 856
-
Low-temperature stress-assisted germanium-induced crystallization of silicon–germanium alloys on flexible polyethylene terephtalate substratesHekmatshoar, B. / Shahrjerdi, D. / Mohajerzadeh, S. / Khakifirooz, A. / Robertson, M. / Tonita, A. / Bennett, J. C. et al. | 2004
- 856
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Low-temperature stress-assisted germanium-induced crystallization of silicon-germanium alloys on flexible polyethylene terephtalate substratesHekmatshoar, B. et al. | 2004
- 859
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Optical switching of vanadium dioxide thin films deposited by reactive pulsed laser depositionSoltani, M. et al. | 2004
- 859
-
Optical switching of vanadium dioxide thin films deposited by reactive pulsed laser depositionSoltani, M. / Chaker, M. / Haddad, E. / Kruzelecky, R. V. / Nikanpour, D. et al. | 2004
- 865
-
Facet coatings for nonhermetically packaged lasersCaballero, J. A. / He, C. / Djavani-Tabrizi, S. / Yin, T. / Mallard, R. / Das, S. R. et al. | 2004
- 865
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Facet coatings for nonhermetically packaged lasersCaballero, J.A. et al. | 2004
- 870
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Excimer laser annealing of p-type perovskite thin filmsDu, X. et al. | 2004
- 870
-
Excimer laser annealing of p-type perovskite thin filmsDu, X. / Dubowski, J. J. / Post, M. / Wang, D. / Tunney, J. et al. | 2004
- 874
-
Passivation of GaAs using andFanaei S., T. / Aktik, C. et al. | 2004
- 874
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Passivation of GaAs using P2S5-(NH4)2S+Se and (NH4)2S+SeFanaei, T.S. et al. | 2004
- 879
-
Optical and electrical properties of sputtered vanadium oxide filmsGan, F. Y. / Laou, P. et al. | 2004
- 879
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Optical and electrical properties of sputtered vanadium oxide filmsGan, F.Y. et al. | 2004
- 883
-
Optical and compositional characterization of and thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor depositionRoschuk, T. / Wojcik, J. / Tan, X. / Davies, J. A. / Mascher, P. et al. | 2004
- 883
-
Papers from the 11th Canadian Semiconductor Technology Conference - Thin Films - Optical and compositional characterization of SiOxNy and SiOx thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor depositionRoschuk, T. et al. | 2004
- 887
-
Papers from the 11th Canadian Semiconductor Technology Conference - Quantum Confined Structures - Laser-induced selective area tuning of GaAs-AlGaAs quantum well microstructures for two-color IR detector operationDubowski, J.J. et al. | 2004
- 887
-
Laser-induced selective area tuning of GaAs/AlGaAs quantum well microstructures for two-color IR detector operationDubowski, J. J. / Song, C. Y. / Lefebvre, J. / Wasilewski, Z. / Aers, G. / Liu, H. C. et al. | 2004
- 891
-
Papers from the 11th Canadian Semiconductor Technology Conference - Quantum Confined Structures - Study of lateral-carrier transport in InAs quantum-dot heterostructures by optical spectroscopyLin, Ray-Ming et al. | 2004
- 891
-
Study of lateral-carrier transport in InAs quantum-dot heterostructures by optical spectroscopyLin, Ray-Ming / Cheng, Chao-Ching / Shen, Hui-Tang / Nee, Tzer-En et al. | 2004
- 894
-
Quantum states in a crossed wire systemParanjape, V. V. et al. | 2004
- 894
-
Papers from the 11th Canadian Semiconductor Technology Conference - Quantum Confined Structures - Quantum states in a crossed wire systemParanjape, V.V. et al. | 2004
- 897
-
Interface layers in superlatticesRowell, N. L. / Yu, G. / Lockwood, D. J. / Poole, P. J. et al. | 2004
- 897
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Interface layers in In0.532Ga0.468As-InP superlatticesRowell, N.L. et al. | 2004
- 902
-
Use of the focused ion beam to locate failure sites within electrically erasable read only memory microcircuitsHaythornthwaite, Ray / Nxumalo, Jochonia / Phaneuf, Michael W. et al. | 2004
- 902
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Use of the focused ion beam to locate failure sites within electrically erasable read only memory microcircuitsHaythornthwaite, Ray et al. | 2004
- 908
-
Characterization of epitaxial layers by ion beam analysisWei, P. / Chicoine, M. / Gujrathi, S. / Schiettekatte, F. / Beaudry, J.-N. / Masut, R. A. / Desjardins, P. et al. | 2004
- 908
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Characterization of GaAs1-xNx epitaxial layers by ion beam analysisWei, P. et al. | 2004
- 912
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Metalorganic vapor phase diffusion using dimethylzinc. Part I: Analysis of the reproducibility of the resulting diffusion profile as measured by secondary ion mass spectrometryHampel, C.A. et al. | 2004
- 912
-
Metalorganic vapor phase diffusion using dimethylzinc. Part I: Analysis of the reproducibility of the resulting diffusion profile as measured by secondary ion mass spectrometryHampel, C. A. / Blaauw, C. / Calder, I. D. / Glew, R. / Macquistan, D. / Bryskiewicz, T. / Guillon, S. et al. | 2004
- 916
-
Metalorganic vapor phase diffusion using DMZn Part II: Determination of the interstitial zinc charge state from secondary ion mass spectroscopy measurements using the Boltzmann–Matano techniqueHampel, C. A. / Blaauw, C. / Haysom, J. E. / Glew, R. / Calder, I. D. / Guillon, S. / Bryskiewicz, T. / Puetz, N. et al. | 2004
- 916
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Metalorganic vapor phase diffusion using DMZn. Part II: Determination of the interstitial zinc charge state from secondary ion mass spectroscopy measurements using the Boltzmann-Matano techniqueHampel, C.A. et al. | 2004
- 921
-
Photoluminescence measurements of Er-doped chalcogenide glassesAllen, T. W. / Hawkeye, M. M. / Haugen, C. J. / DeCorby, R. G. / McMullin, J. N. / Tonchev, D. / Koughia, K. / Kasap, S. O. et al. | 2004
- 921
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Photoluminescence measurements of Er-doped chalcogenide glassesAllen, T.W. et al. | 2004
- 925
-
Implant isolation in an indium phosphide optoelectronic device: A scanning spreading resistance microscopy studyDixon-Warren, St. J. / Haysom, J. E. / Betty, I. / Lu, J. / Hewitt, K. et al. | 2004
- 925
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Implant isolation in an indium phosphide optoelectronic device: A scanning spreading resistance microscopy studyDixon-Warren, St J. et al. | 2004
- 930
-
Focused ion beam and transmission electron microscopy method for root cause analysis of InP ridge laser devicesGriswold, E. M. / Sharma, U. / Phaneuf, M. W. et al. | 2004
- 930
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Focused ion beam and transmission electron microscopy method for root cause analysis of InP ridge laser devicesGriswold, E.M. et al. | 2004
- 935
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Optical phonons in InSb1-xAsx-InSbRowell, N.L. et al. | 2004
- 935
-
Optical phonons inRowell, N. L. / Lockwood, D. J. / Yu, G. / Gao, Y. Z. / Gong, X. Y. / Aoyama, M. / Yamaguchi, T. et al. | 2004
- 939
-
Dopant layer abruptness in strained heterostructuresRowell, N. L. / Houghton, D. C. / Berbezier, I. / Ronda, A. / Webb, D. / Ward, M. et al. | 2004
- 939
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Dopant layer abruptness in strained Si1-xGex heterostructuresRowell, N.L. et al. | 2004
- 943
-
Raman and transmission electron microscopy study of disordered silicon grown by molecular beam epitaxyTay, L. / Lockwood, D. J. / Baribeau, J.-M. / Wu, X. / Sproule, G. I. et al. | 2004
- 943
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Raman and transmission electron microscopy study of disordered silicon grown by molecular beam epitaxyTay, L. et al. | 2004
- 948
-
Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopyWeng, Z. / Kaminski, T. / Bridges, G. E. / Thomson, D. J. et al. | 2004
- 948
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Resolution enhancement in probing of high-speed integrated circuits using dynamic electrostatic force-gradient microscopyWeng, Z. et al. | 2004
- 954
-
Energy band gaps of InN containing oxygen and of the interface layer formed during InN film growthAlexandrov, Dimiter / Scott, K. / Butcher, A. / Wintrebert-Fouquet, Marie et al. | 2004
- 954
-
Papers from the 11th Canadian Semiconductor Technology Conference - Processing and Characterization - Energy band gaps of InN containing oxygen and of the InxAl1-xN interface layer formed during InN film growthAlexandrov, Dimiter et al. | 2004
- 962
-
Papers from the 11th Canadian Semiconductor Technology Conference - Deposition - Single crystal growth of Ge1-xSix alloys using the traveling solvent methodLabrie, D. et al. | 2004
- 962
-
Single crystal growth of alloys using the traveling solvent methodLabrie, D. / George, A. E. / Jamieson, M. / Obruchkov, S. / Healey, J. P. / Paton, B. E. / Saghir, M. Z. et al. | 2004
- 966
-
Stress-assisted nickel-induced crystallization of silicon on glassHashemi, P. / Derakhshandeh, J. / Mohajerzadeh, S. / Robertson, M. / Tonita, A. et al. | 2004
- 966
-
Papers from the 11th Canadian Semiconductor Technology Conference - Deposition - Stress-assisted nickel-induced crystallization of silicon on glassHashemi, P. et al. | 2004
- 971
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Two-dimensional a-Si:H based n-i-p sensor arrayChang, J.H. et al. | 2004
- 971
-
Two-dimensional a-Si:H based sensor arrayChang, J. H. / Vygranenko, Yu. / Nathan, A. et al. | 2004
- 975
-
Charge collection and absorption-limited x-ray sensitivity of pixellated x-ray detectorsKabir, M. Zahangir / Kasap, S. O. et al. | 2004
- 975
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Charge collection and absorption-limited x-ray sensitivity of pixellated x-ray detectorsZahangir Kabir, M. et al. | 2004
- 981
-
Amorphous silicon shift registers for display driversKumar, A. / Sambandan, S. / Sakariya, K. / Servati, P. / Nathan, A. et al. | 2004
- 981
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Amorphous silicon shift registers for display driversKumar, A. et al. | 2004
- 987
-
Reset noise in active pixel image sensorsLai, Jackson / Nathan, Arokia et al. | 2004
- 987
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Reset noise in active pixel image sensorsLai, Jackson et al. | 2004
- 991
-
Highly conductive hydrogenated microcrystalline silicon and its application in thin film transistorsLee, Czang-Ho / Striakhilev, Denis / Nathan, Arokia et al. | 2004
- 991
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistorsLee, Czang-Ho et al. | 2004
- 996
-
Deep-ultraviolet-induced damage of charge coupled device sensorsLi, Flora / Nathan, Arokia / O, Nixon et al. | 2004
- 996
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Deep-ultraviolet-induced damage of charge coupled device sensorsLi, Flora et al. | 2004
- 1001
-
Analysis and characterization of self-compensating current programmed active matrix organic light-emitting diode pixel circuitsSakariya, Kapil / Sambandan, Sanjiv / Servati, Peyman / Nathan, Arokia et al. | 2004
- 1001
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Analysis and characterization of self-compensating current programmed a-Si:H active matrix organic light-emitting diode pixel circuitsSakariya, Kapil et al. | 2004
- 1005
-
X-ray-induced recombination effects in a-Se-based x-ray photoconductors used in direct conversion x-ray sensorsFogal, Bud / Kabir, M. Zahangir / O’Leary, Stephen K. / Johanson, Robert E. / Kasap, S. O. et al. | 2004
- 1005
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - X-ray-induced recombination effects in a-Se-based x-ray photoconductors used in direct conversion x-ray sensorsFogal, Bud et al. | 2004
- 1010
-
Noise performance of a current-mediated amplified pixel for large-area medical imagingKarim, Karim S. / Nathan, Arokia et al. | 2004
- 1010
-
Papers from the 11th Canadian Semiconductor Technology Conference - TFTs, Imaging, and Displays - Noise performance of a current-mediated amplified pixel for large-area medical imagingKarim, Karim S. et al. | 2004
- 1015
-
Fabrication and characterization of amorphous Si/crystalline Si heterojunction devices for photovoltaic applicationsBaroughi, M. Farrokh / Jeyakumar, R. / Vygranenko, Y. / Khalvati, F. / Sivoththaman, S. et al. | 2004
- 1015
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - Fabrication and characterization of amorphous Si-crystalline Si heterojunction devices for photovoltaic applicationsFarrokh Baroughi, M. et al. | 2004
- 1020
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - InGaN-AlGaN near-ultraviolet multiple quantum well light-emitting diodes with p-InGaN tunneling contact layerChen, C.H. et al. | 2004
- 1020
-
InGaN/AlGaN near-ultraviolet multiple quantum well light-emitting diodes with tunneling contact layerChen, C. H. / Chang, S. J. / Su, Y. K. et al. | 2004
- 1023
-
Monocrystalline photovoltaic cell of superior performanceDu, H. / Shih, I. / Champness, C. H. et al. | 2004
- 1023
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - Monocrystalline CuInSe2 photovoltaic cell of superior performanceDu, H. et al. | 2004
- 1027
-
Fabrication of passivated GaAs metal-insulator-semiconductor devices using low-frequency plasma-enhanced chemical vapor depositionJaouad, A. / Aimez, V. / Aktik, Ç. / Bellatreche, K. / Souifi, A. et al. | 2004
- 1027
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - Fabrication of (NH4)2S passivated GaAs metal-insulator-semiconductor devices using low-frequency plasma-enhanced chemical vapor depositionJaouad, A. et al. | 2004
- 1031
-
Temperature distribution and heating in multiple emitter SiGe HBTsMcAlister, S. P. / McKinnon, W. R. / Kovacic, S. J. / Lafontaine, H. et al. | 2004
- 1031
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - Temperature distribution and heating in multiple emitter SiGe HBTsMcAlister, S.P. et al. | 2004
- 1036
-
Inverse modeling of delta doped pseudomorphic high electron mobility transistorsMishra, Meena / Kumar, M. Jagadesh / Singh, Yashvir / Shukla, S. R. / Vyas, H. P. / Rawal, D. S. / Naik, A. / Sharma, H. S. / Sehgal, B. K. / Gulati, R. et al. | 2004
- 1036
-
Papers from the 11th Canadian Semiconductor Technology Conference - Devices - Inverse modeling of delta doped pseudomorphic high electron mobility transistorsMishra, Meena et al. | 2004
- 1040
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Arrays of holes fabricated by electron-beam lithography combined with image reversal process using nickel pulse reversal platingAwad, Yousef et al. | 2004
- 1040
-
Arrays of holes fabricated by electron-beam lithography combined with image reversal process using nickel pulse reversal platingAwad, Yousef / Lavallée, Eric / Lau, Kien Mun / Beauvais, Jacques / Drouin, Dominique / Cloutier, Melanie / Turcotte, David / Yang, Pan / Kelkar, Prasad et al. | 2004
- 1044
-
Direct UV patterning of waveguide devices in thin filmsBryce, R. M. / Nguyen, H. T. / Nakeeran, P. / DeCorby, R. G. / Dwivedi, P. K. / Haugen, C. J. / McMullin, J. N. / Kasap, S. O. et al. | 2004
- 1044
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Direct UV patterning of waveguide devices in As2Se3 thin filmsBryce, R.M. et al. | 2004
- 1048
-
Thick film resist lithography for devices with high topography and long dry etch processesChan, Isaac / Nathan, Arokia et al. | 2004
- 1048
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Thick film resist lithography for a-Si:H devices with high topography and long dry etch processesChan, Isaac et al. | 2004
- 1054
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Etching of gain-coupled gratings into a multi-quantum-well laser with selective wet etchesFinlay, Richard et al. | 2004
- 1054
-
Etching of gain-coupled gratings into a multi-quantum-well laser with selective wet etchesFinlay, Richard et al. | 2004
- 1058
-
Inductively coupled plasma etching of GaAs low loss waveguides for a traveling waveguide polarization converter, using chlorine chemistryLu, J. / Meng, X. / SpringThorpe, A. J. / Shepherd, F. R. / Poirier, M. et al. | 2004
- 1058
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Inductively coupled plasma etching of GaAs low loss waveguides for a traveling waveguide polarization converter, using chlorine chemistryLu, J. et al. | 2004
- 1062
-
Techniques for achieving low leakage current in dry etched InGaAs waveguide PIN detectorsQian, Yahong Y. H. / An, Serguei / Betty, Ian / Rousina-Webb, Roghieh / Griswold, Ellen / Foster, Robert / Driad, Rachid et al. | 2004
- 1062
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Techniques for achieving low leakage current in dry etched InGaAs waveguide PIN detectorsQian, Yahong Y.H. et al. | 2004
- 1067
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Polymethylmethacrylate membrane for fluid encapsulation and release in microfluidic systemsSrivastava, Y.N. et al. | 2004
- 1067
-
Polymethylmethacrylate membrane for fluid encapsulation and release in microfluidic systemsSrivastava, Y. N. / Gadre, A. P. / Hylton, T. / Monica, A. H. / Schneider, T. W. / White, R. C. / Paranjape, M. / Currie, J. F. et al. | 2004
- 1073
-
Analysis of step-based silicon surfaces at facet boundaries during wet anisotropic etchingStateikina, I. / Elalamy, M.-Z. / Landsberger, L. M. / Kahrizi, M. et al. | 2004
- 1073
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Analysis of step-based silicon surfaces at facet boundaries during wet anisotropic etchingStateikina, I. et al. | 2004
- 1079
-
Process for uniformly electroplating a patterned wafer with electrically isolated devicesZhang, S. / Meng, X. / Zheng, X. / Das, S. R. / Shepherd, F. et al. | 2004
- 1079
-
Papers from the 11th Canadian Semiconductor Technology Conference - Fabrication - Process for uniformly electroplating a patterned wafer with electrically isolated devicesZhang, S. et al. | 2004
- 1083
-
CUMULATIVE AUTHOR INDEX| 2004
- L1
-
Atomic-level robustness of the surface following liquid phase chemical treatments in atmospheric pressure environmentsBaluch, A. S. / Guisinger, N. P. / Basu, R. / Foley, E. T. / Hersam, M. C. et al. | 2004
-
Atomic-level robustness of the Si(100)-2x1:H surface following liquid phase chemical treatments in atmospheric pressure environmentsBaluch, A. S. / Guisinger, N. P. / Basu, R. / Foley, E. T. / Hersam, M. C. et al. | 2004
-
Letters - Atomic-level robustness of the Si(100)-2X1:H surface following liquid phase chemical treatments in atmospheric pressure environmentsBaluch, A.S. et al. | 2004
-
Free Online Color for The Journal of Vacuum Science and Technology A| 2004