CF and CF2 radical kinetics and transport in a pulsed CF4 ICP (Unknown)
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- New search for: Abada, H.
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In:
Plasma sources science & technology
;
14
, 2
; 273-282
;
2005
-
ISSN:
- Article (Journal) / Print
-
Title:CF and CF2 radical kinetics and transport in a pulsed CF4 ICP
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Contributors:
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Published in:Plasma sources science & technology ; 14, 2 ; 273-282
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Publisher:
- New search for: IOP Publ.
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Place of publication:Bristol
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Publication date:2005
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ISSN:
-
ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:Unknown
- New search for: 275/3440
- New search for: 50.39 / 33.80
- Further information on Basic classification
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Classification:
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Source:
Table of contents – Volume 14, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 209
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Two-dimensional PIC–MCC simulations of a capacitively coupled radio frequency discharge in methaneA L Alexandrov / I V Schweigert et al. | 2005
- 209
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Two-dimensional PIC#8211MCC simulations of a capacitively coupled radio frequency discharge in methaneAlexandrov, A.L. et al. | 2005
- 219
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Application of similarity theory to the characterization of non-transferred laminar plasma jet generationGang Li / Wenxia Pan / Xian Meng / Chengkang Wu et al. | 2005
- 226
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Measurements of spatial structures of different discharge modes in a helicon sourceChristian M Franck / Olaf Grulke / Albrecht Stark / Thomas Klinger / Earl E Scime / Gérard Bonhomme et al. | 2005
- 236
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Non-local radiation transport via coupling constants for the radially inhomogeneous Hg–Ar positive columnJ L Giuliani / G M Petrov / J P Apruzese / J Davis et al. | 2005
- 236
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Non-local radiation transport via coupling constants for the radially inhomogeneous Hg#8211Ar positive columnGiuliani, J.L. et al. | 2005
- 250
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Simulation for the transition from non-thermal to thermal dischargesA P Papadakis / G E Georghiou / A C Metaxas et al. | 2005
- 259
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Using a nitrogen dielectric barrier discharge for surface treatmentG Borcia / C A Anderson / N M D Brown et al. | 2005
- 268
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Experimental study of gas-puff z-pinch plasmaXiaobing Zou / Xinxin Wang / Chengmu Luo / Min Han et al. | 2005
- 273
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CF and CF2 radical kinetics and transport in a pulsed CF4 ICPJ P Booth / H Abada / P Chabert / D B Graves et al. | 2005
- 283
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Control of nitrogen species in helicon plasmasR F Boivin / E E Scime et al. | 2005
- 293
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Transport coefficients for electrons in argon in crossed electric and magnetic rf fieldsZ M Raspopović / S Dujko / T Makabe / Z Lj Petrović et al. | 2005
- 301
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Self-running pulsed–periodical streamer discharge in static argon sustained in a packed-bed reactor under steady-state supplying voltageR Morent / Yu Akishev / C Leys et al. | 2005
- 301
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Self-running pulsed#8211periodical streamer discharge in static argon sustained in a packed-bed reactor under steady-state supplying voltageMorent, R. et al. | 2005
- 308
-
Enhancement of the plasma chemistry process in a three-phase discharge reactorZhang Ruo-bing / Wu Yan / Li Guofeng et al. | 2005
- 314
-
Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modesX Yang / M Moravej / G R Nowling / S E Babayan / J Panelon / J P Chang / R F Hicks et al. | 2005
- 314
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Comparison of an atmospheric pressure, radio-frequency discharge operating in the a and g modesYang, X. et al. | 2005
- 314
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Comparison of an atmospheric pressure, radio-frequency discharge operating in the alpha and gamma modesYang, X. / Moravej, M. / Nowling, G. R. / Babayan, S. E. / Panelon, J. / Chang, J. P. / Hicks, R. F. et al. | 2005
- 321
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Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurementsLudovic de Poucques / Jean-Christophe Imbert / Caroline Boisse-Laporte / Petr Vasina / Jean Bretagne / Lionel Teulé-Gay / Michel Touzeau et al. | 2005
- 329
-
Simulations of magnetized capacitively coupled plasmas operating at constant power and voltageShahid Rauf et al. | 2005
- 336
-
Arc discharge efficiency of a multi-megawatt long pulse ion source for the KSTAR neutral beam injectorDoo-Hee Chang / Seung-Ho Jeong / Byung-Hoon Oh / Kwang-Won Lee / Chang-Seog Seo et al. | 2005
- 342
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Plasma emission imaging of a low-pressure argon breakdownE Wagenaars / M D Bowden / G M W Kroesen et al. | 2005
- 351
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Effects of foreign gases on H− formation in a magnetic multipole hydrogen plasma sourceT Mosbach et al. | 2005
- 363
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Analysis of polymer surface treated by dielectric barrier dischargeJai Hyuk Choi / Eung Suok Lee / Hong Koo Baik / Se-Jong Lee / Kie Moon Song / Yong Sik Lim et al. | 2005
- 368
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Current sheath curvature correlation with the neon soft x-ray emission from plasma focus deviceT Zhang / X Lin / K A Chandra / T L Tan / S V Springham / A Patran / P Lee / S Lee / R S Rawat et al. | 2005
- 375
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Absolute atomic oxygen density measurements by two-photon absorption laser-induced fluorescence spectroscopy in an RF-excited atmospheric pressure plasma jetK Niemi / V Schulz-von der Gathen / H F Döbele et al. | 2005
- 387
-
Controlled generation of pulse-modulated RF plasmas for materials processingRubin Ye / Takamasa Ishigaki / Tadahiro Sakuta et al. | 2005
- 397
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Split-ring resonator microplasma: microwave model, plasma impedance and power efficiencyF Iza / J Hopwood et al. | 2005
- S1
-
He~2^+ molecular ions in helium glow discharges: the effect of bulk electron temperatureKutasi, K. / Hartmann, P. / Bano, G. / Donko, Z. et al. | 2005
- S1
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molecular ions in helium glow discharges: the effect of bulk electron temperatureKinga Kutasi / Péter Hartmann / Gergely Bánó / Zoltán Donkó et al. | 2005
- S9
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State to state vibrational kinetics in the boundary layer of an entering body in earth atmosphere: particle distributions and chemical kineticsI Armenise / M Capitelli et al. | 2005
- S18
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Negative corona, glow and spark discharges in ambient air and transitions between themYu Akishev / M Grushin / I Kochetov / V Karal'nik / A Napartovich / N Trushkin et al. | 2005
- S26
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Energetics, kinetics and dynamics of decaying metastable ions studied with a high-resolution three-sector field mass spectrometerS Matt-Leubner / S Feil / K Gluch / J Fedor / A Stamatovic / O Echt / P Scheier / K Becker / T D Märk et al. | 2005
- S31
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Laser-induced fluorescence measurements of absolute atomic densities: concepts and limitationsH F Döbele / T Mosbach / K Niemi / V Schulz-von der Gathen et al. | 2005
- S42
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Plasma–wall interactions during silicon etching processes in high-density HBr/Cl2/O2 plasmasG Cunge / M Kogelschatz / O Joubert / N Sadeghi et al. | 2005
- S53
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Numerical investigation of dual frequency capacitively coupled hydrogen plasmasAurel Salabaş / Ralf Peter Brinkmann et al. | 2005
- S60
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Electrical characterization of radio frequency dischargesC M O Mahony / P D Maguire / W G Graham et al. | 2005
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IMG SRC="http: ej.iop.org-images-0963-0252-14-2-S01-psst195300in001.gi- f"ALIGN="MIDDLE"ALT="{\rm He}2 + "> molecular ions in helium glow discharges: the effect of bulk electron temperatureKutasi, Kinga et al. | 2005
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IMG molecular ions in helium glow discharges: the effect of bulk electron temperatureKutasi, Kinga et al. | 2005
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PREFACE: 17th European Conference on Atomic and Molecular Physics of Ionized Gases| 2005
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Plasma#8211wall interactions during silicon etching processes in high-density HBr-Cl2-O2 plasmasCunge, G. et al. | 2005