Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen (English)
- New search for: Müllerová, J.
- New search for: Müllerová, J.
- New search for: Šutta, P.
- New search for: van Elzakker, G.
- New search for: Zeman, M.
- New search for: Mikula, M.
In:
Applied surface science
;
254
, 12
; 3690-3695
;
2008
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ISSN:
- Article (Journal) / Print
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Title:Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
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Contributors:
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Published in:Applied surface science ; 254, 12 ; 3690-3695
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Publisher:
- New search for: Elsevier
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Place of publication:Amsterdam [u.a.]
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Publication date:2008
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 52.78 / 35.18 / 33.68
- Further information on Basic classification
- New search for: 535/3485
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Keywords:
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Source:
Table of contents – Volume 254, Issue 12
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 3613
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PrefaceTakahashi, Masao / Bezák, Viktor / Gašparík, Vladimír et al. | 2007
- 3615
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Wet-chemical passivation of atomically flat and structured silicon substrates for solar cell applicationAngermann, H. / Rappich, J. / Korte, L. / Sieber, I. / Conrad, E. / Schmidt, M. / Hübener, K. / Polte, J. / Hauschild, J. et al. | 2007
- 3626
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Electrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystalsBasa, P. / Alagoz, A.S. / Lohner, T. / Kulakci, M. / Turan, R. / Nagy, K. / Horváth, Zs.J. et al. | 2007
- 3630
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Tunnelling through randomly inhomogeneous barriers as a special problem of the scattering theoryBezák, Viktor et al. | 2007
- 3635
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Preparation and structural properties of MgO films grown on GaAs substrateChromik, Štefan / Španková, Marianna / Vávra, Ivo / Liday, Jozef / Vogrinčič, Peter / Lobotka, Peter et al. | 2007
- 3638
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Hg-based cuprate superconducting films patterned into structures for ultrafast photodetectorsChromik, Š. / Valeriánová, M. / Štrbík, V. / Gaži, Š. / Odier, P. / Li, X. / Xu, Y. / Sobolewski, R. / Hanic, F. / Plesch, G. et al. | 2007
- 3643
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Structural and optical properties of sputtered ZnO thin filmsFlickyngerova, S. / Shtereva, K. / Stenova, V. / Hasko, D. / Novotny, I. / V.Tvarozek / Sutta, P. / Vavrinsky, E. et al. | 2007
- 3648
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Study and applications of plasma-modified Si and porous Si surfacesGabouze, N. / Benzekkour, N. / Mahmoudi, Be / Belhousse, S. / Cheraga, H. / Ghellai, N. et al. | 2008
- 3653
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Mechanism and control of current transport in GaN and AlGaN Schottky barriers for chemical sensor applicationsHasegawa, Hideki / Akazawa, Masamichi et al. | 2007
- 3667
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Nitric acid oxidation method to form SiO2/3C–SiC structure at 120°CIm, Sung-Soon / Terakawa, Sumio / Iwasa, Hitoo / Kobayashi, Hikaru et al. | 2007
- 3667
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Nitric acid oxidation method to form SiO2/3C-SiC structure at 120degreeCIm, S. S. / Terakawa, S. / Iwasa, H. / Kobayashi, H. et al. | 2008
- 3672
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Solution of the optical parameters of the thin film systems and interfacesJurečka, S. / Pinčík, E. / Brunner, R. et al. | 2007
- 3677
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Optical inhomogeneity model for evaporated Y2O3 obtained from physical thickness measurementKasikov, A. et al. | 2007
- 3681
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Near-field scanning optical microscopy studies of thin film surfaces and interfacesKlapetek, Petr / Buršík, Jiří et al. | 2007
- 3685
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Nitric acid method for fabrication of gate oxides in TFTMizushima, Shigeaki / Imai, Shigeki / Asuha / Tanaka, Masato / Kobayashi, Hikaru et al. | 2007
- 3690
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Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogenMüllerová, J. / Šutta, P. / van Elzakker, G. / Zeman, M. / Mikula, M. et al. | 2007
- 3696
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In situ measurement of plasma charging on SiO2 hole bottoms and reduction by negative charge injection during etchingOhmori, T. / Makabe, T. et al. | 2007
- 3710
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Photoluminescence of very thin oxide/a-Si:H structures passivated in HCN solutionsPinčík, E. / Brunner, R. / Kobayashi, H. / Takahashi, M. / Kučera, M. et al. | 2007
- 3715
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Si cleaning method without surface morphology change by cyanide solutionsTakahashi, Masao / Liu, Yueh-Ling / Narita, Hiroaki / Kobayashi, Hikaru et al. | 2007