Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition (English)
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In:
Thin solid films
;
518
, 18
; 5169-5173
;
2010
-
ISSN:
- Article (Journal) / Print
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Title:Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition
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Contributors:Lee, Taeyoon ( author ) / Seo, H. / Hwang, H. / Howe, B. / Kodambaka, S. / Greene, J.E. / Petrov, I.
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Published in:Thin solid films ; 518, 18 ; 5169-5173
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Place of publication:Amsterdam [u.a.] Elsevier
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Publication date:2010
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ISSN:
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ZDBID:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 33.68
- Further information on Basic classification
- New search for: 535/3485
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Keywords:
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Source:
Table of contents – Volume 518, Issue 18
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 5033
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Differential superhydrophobicity and hydrophilicity on a thin cellulose layerSarkar, Manas K. / He, Fuan / Fan, Jintu et al. | 2010
- 5040
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Non-catalytic growth of graphene-like thin film near pattern edges fabricated on SiO2 substratesSuzuki, Satoru / Kobayashi, Yoshihiro / Mizuno, Tomoyuki / Maki, Hideyuki et al. | 2010
- 5044
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Using nanoparticles to synthesize erbium-doped light-emitting thin filmLin, Ching-Fuh / Sun, Kuo-Jui / Shih, Ping-Hung / Hui, Yuen Yung et al. | 2010
- 5047
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Analysis of powder X-ray diffraction resolution using collimating and focusing polycapillary opticsZhou, Wei / Mahato, Dip N. / MacDonald, C.A. et al. | 2010
- 5057
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Combined spectroscopic ellipsometry and attenuated total reflection analyses of Al2O3/HfO2 nanolaminatesBonvalot, M. / Kahn, M. / Vallée, C. / Gourvest, E. / Abed, H. / Jorel, C. / Dubourdieu, C. et al. | 2010
- 5061
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Solid on liquid depositionCharmet, J. / Banakh, O. / Laux, E. / Graf, B. / Dias, F. / Dunand, A. / Keppner, H. / Gorodyska, G. / Textor, M. / Noell, W. et al. | 2010
- 5066
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Polyaniline micropattern onto flexible substrate by vapor deposition polymerization-mediated inkjet printingCho, Joonhyuk / Shin, Kyoung-Hwan / Jang, Jyongsik et al. | 2010
- 5071
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Reactive chemical vapor deposition of Ti3SiC2 with and without pressure pulses: Effect on the ternary carbide textureJacques, S. / Fakih, H. / Viala, J.-C. et al. | 2010
- 5078
-
Properties of zirconium oxide films prepared by filtered cathodic vacuum arc deposition and pulsed DC substrate biasMartin, P.J. / Bendavid, A. et al. | 2010
- 5083
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Influence of growth parameters on the fabrication of high-quality colloidal crystals via a controlled evaporation self-assembly methodLiu, G.Q. / Wang, Z.S. / Ji, Y.H. et al. | 2010
- 5091
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Blue electroluminescent materials based on 2,7-distyrylfluorene for organic light-emitting diodesLee, Kum Hee / Kang, Lee Kyung / Kwon, Young Soo / Lee, Jin Yong / Kang, Sunwoo / Kim, Gu Young / Seo, Ji Hoon / Kim, Young Kwan / Yoon, Seung Soo et al. | 2010
- 5098
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Facile synthesis of SnO2 nanograss array films by hydrothermal methodWang, Yali / Guo, Min / Zhang, Mei / Wang, Xidong et al. | 2010
- 5104
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Carbide and nanocomposite thin films in the Ti–Pt–C systemLewin, Erik / Buchholt, Kristina / Lu, Jun / Hultman, Lars / Spetz, Anita Lloyd / Jansson, Ulf et al. | 2010
- 5110
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Facile conversion of bulk metal surface to metal oxide single-crystalline nanostructures by microwave irradiation: Formation of pure or Cr-doped hematite nanostructure arraysCho, Seungho / Jeong, Haeyoon / Lee, Kun-Hong et al. | 2010
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Synthesis and investigation of p-conjugated azomethine self-assembled multilayers by layer-by-layer growthKamura, M. / Kuzumoto, Y. / Aomori, S. / Houjou, H. / Kitamura, M. / Arakawa, Y. et al. | 2010
- 5115
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Synthesis and investigation of π-conjugated azomethine self-assembled multilayers by layer-by-layer growthKamura, Masakazu / Kuzumoto, Yasutaka / Aomori, Shigeru / Houjou, Hirohiko / Kitamura, Masatoshi / Arakawa, Yasuhiko et al. | 2010
- 5121
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Electron energy loss spectroscopy of nano-scale CrAlYN/CrN–CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputteringRoss, I.M. / Rainforth, W.M. / Seabourne, C.R. / Scott, A.J. / Wang, P. / Mendis, B.G. / Bleloch, A.L. / Reinhard, C. / Hovsepian, P.Eh. et al. | 2010
- 5128
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Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systemsOlivares, J. / Clement, M. / González-Castilla, S. / Vergara, L. / Iborra, E. / Sangrador, J. et al. | 2010
- 5134
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Transparent, amorphous and organics-free ZnO thin films produced by chemical solution deposition at 150^oCTellier, J. / Kuscer, D. / Malic, B. / Cilensek, J. / Skarabot, M. / Kovac, J. / Goncalves, G. / Musevic, I. / Kosec, M. et al. | 2010
- 5134
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Transparent, amorphous and organics-free ZnO thin films produced by chemical solution deposition at 150°CTellier, J. / Kuščer, D. / Malič, B. / Cilenšek, J. / Škarabot, M. / Kovač, J. / Gonçalves, G. / Muševič, I. / Kosec, M. et al. | 2010
- 5140
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Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH filmsLicitra, C. / Bouyssou, R. / Chevolleau, T. / Bertin, F. et al. | 2010
- 5146
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Formation of aligned ZnO nanotube arrays by chemical etching and coupling with CdSe for photovoltaic applicationLuo, Lijuan / Lv, Gang / Li, Bihui / Hu, Xiaoyan / Jin, Lei / Wang, Jianbo / Tang, Yiwen et al. | 2010
- 5153
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Microstructural development of an electrodeposited Ni layerShibata, Akinobu / Noda, Homuro / Sone, Masato / Higo, Yakichi et al. | 2010
- 5159
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Effect of bromide ions and polyethylene glycol on morphological control of electrodeposited copper foamTan, Kai / Tian, Min-Bo / Cai, Qiang et al. | 2010
- 5164
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Growth of ZnO/sapphire heteroepitaxial thin films by radio-frequency sputtering with a raw powder targetSeo, S.H. / Kang, H.C. et al. | 2010
- 5169
-
Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter depositionLee, Taeyoon / Seo, H. / Hwang, H. / Howe, B. / Kodambaka, S. / Greene, J.E. / Petrov, I. et al. | 2010
- 5173
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Epitaxial EuO thin films by pulsed laser deposition monitored by in situ x-ray photoelectron spectroscopyBeukers, J.N. / Kleibeuker, J.E. / Koster, G. / Blank, D.H.A. / Rijnders, G. / Hilgenkamp, H. / Brinkman, A. et al. | 2010
- 5177
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Nanoscale effects in carbon structures fabricated using focused ion beam-chemical vapor depositionKim, Chung-Soo / Ahn, Sung-Hoon / Jang, Dong-Young et al. | 2010
- 5183
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Synthesis and characterization of carbon/silica superhydrophobic multi-layer filmsTian, Hui / Yang, Taisheng / Chen, Yuqing et al. | 2010
- 5188
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Influence of liquid environments on femtosecond laser ablation of siliconLiu, Hewei / Chen, Feng / Wang, Xianhua / Yang, Qing / Bian, Hao / Si, Jinhai / Hou, Xun et al. | 2010
- 5195
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NH3 and H2S adsorption on Au3Pt3 cluster studied by a first principles calculationAktürk, Olcay Üzengi / Tomak, Mehmet et al. | 2010
- 5204
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Fabrication of high-quality colloidal crystal films by vertical deposition method integrated with a piezoelectric actuatorZhang, Jihao / Luo, Xiaoya / Yan, Xuejian / Zhu, Guodong et al. | 2010
- 5209
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Surface modification of magnesium alloy AZ31 by hydrofluoric acid treatment and its effect on the corrosion behaviourda Conceicao, T.F. / Scharnagl, N. / Blawert, C. / Dietzel, W. / Kainer, K.U. et al. | 2010
- 5219
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Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasmaLee, Hyo-Chang / Chung, Chin-Wook et al. | 2010
- 5223
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Characterization of protective sol–gel coatings on magnesium based on phenyl-triethoxysilane precursorYekehtaz, M. / Sittner, F. / Ugas-Carrión, R. / Flege, S. / Brötz, J. / Ensinger, W. et al. | 2010
- 5227
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Synthesis and characterization of Cu3N–WC nanocomposite films prepared by direct current magnetron sputteringZhang, Shihong / He, Yinsheng / Li, Mingxi / He, Yizhu / Kwon, Sikchol / Yoon, Jaehong / Cho, Tongyul et al. | 2010
- 5233
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Evidence of vacuum between buckled films and their substratesCoupeau, C. / Grilhé, J. / Dion, E. / de Morais, L. Dantas / Colin, J. et al. | 2010
- 5237
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X-ray diffraction analysis of thermally-induced stress relaxation in ZnO films deposited by magnetron sputtering on (100) Si substratesConchon, F. / Renault, P.O. / Goudeau, P. / Le Bourhis, E. / Sondergard, E. / Barthel, E. / Grachev, S. / Gouardes, E. / Rondeau, V. / Gy, R. et al. | 2010
- 5242
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Effect of substrate roughness on the contact damage of thin brittle films on brittle substratesWeidner, Mirko / Borrero-López, Oscar / Hoffman, Mark / Bendavid, Avi / Martin, Phil J. et al. | 2010
- 5249
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Evaluation of incipient plasticity from interfaces between ultra-thin gold films and compliant substratesHirakata, Hiroyuki / Ogiwara, Hiroki / Yonezu, Akio / Minoshima, Kohji et al. | 2010
- 5257
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Influence of cobalt doping on the crystalline structure, optical and mechanical properties of ZnO thin filmsBahadur, Nupur / Srivastava, A.K. / Kumar, Sushil / Deepa, M. / Nag, Bhavya et al. | 2010
- 5265
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Tuning the colour of white polymer light emitting diodesde Kok, Margreet / Sarfert, Wiebke / Paetzold, Ralph et al. | 2010
- 5272
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Structure and property changes of ZrO2/Al2O3/ZrO2 laminate induced by low-temperature NH3 annealing applicable to metal–insulator–metal capacitorLi, Ming-Yen / Tsai, Bin-Siang / Jiang, Pei-Chuen / Wu, Hsiao-Che / Wu, Yung-Hsien / Lin, Yu-Jen et al. | 2010
- 5278
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Performance study of InAs/GaAs quantum dot covered by graded InxGa1−xAs layerHuang, Lirong / Tian, Peng / Yu, Yi / Huang, Dexiu et al. | 2010
- 5282
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High performance encapsulation structures utilizing Russian Doll architecturesGranstrom, Jimmy / Gällstedt, Mikael / Villet, Michael / Moon, Ji Sun / Chatterjee, Tirtha et al. | 2010
- 5288
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Metal-semiconductor transition in Nb-doped ZnO thin films prepared by pulsed laser depositionShao, Jingzhen / Dong, Weiwei / Li, Da / Tao, Ruhua / Deng, Zanhong / Wang, Tao / Meng, Gang / Zhou, Shu / Fang, Xiaodong et al. | 2010
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Investigation of photophysical, morphological and photovoltaic behavior of poly(p-phenylene vinylene) based polymer/oligomer blendsOo, T.Z. / Mathews, N. / Tam, T.L. / Xing, G.C. / Sum, T.C. / Sellinger, A. / Wong, L.H. / Mhaisalkar, S.G. et al. | 2010
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Formation and magnetization reversal mechanisms of nano-size Fe arrays prepared on anodic aluminum oxide templatesHuang, Kai-Tze / Kuo, Po-Cheng / Lin, Ger-Pin / Shen, Chih-Lung / Yao, Yeong-Der et al. | 2010
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Deposition of α–SiΜο12Ο404−-[Ru(bipyridine)(terpyridine)Cl]+ multilayer film on single wall carbon nanotube modified glassy carbon electrode: Improvement of the electrochemical properties and chemical stabilitySalimi, Abdollah / Korani, Aazam / Hallaj, Rahman / Soltanian, Saied / Hadadzadeh, Hasan et al. | 2010
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Deposition of a-SiMo12O40^4^--[Ru(bipyridine)(terpyridine)Cl]^+ multilayer film on single wall carbon nanotube modified glassy carbon electrode: Improvement of the electrochemical properties and chemical stabilitySalimi, A. / Korani, A. / Hallaj, R. / Soltanian, S. / Hadadzadeh, H. et al. | 2010
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Comparison of p-channel transistors based on α,ω-hexyl-distyryl-bithiophene prepared using various film deposition methodsDidane, Y. / Martini, C. / Barret, M. / Sanaur, S. / Collot, P. / Ackermann, J. / Fages, F. / Suzuki, A. / Yoshimoto, N. / Brisset, H. et al. | 2010
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Comparison of p-channel transistors based on a,-hexyl-distyryl-bithiophene prepared using various film deposition methodsDidane, Y. / Martini, C. / Barret, M. / Sanaur, S. / Collot, P. / Ackermann, J. / Fages, F. / Suzuki, A. / Yoshimoto, N. / Brisset, H. et al. | 2010
- 5321
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Sessile droplet formation in the laser-induced forward transfer of liquids: A time-resolved imaging studyDuocastella, M. / Fernández-Pradas, J.M. / Serra, J.L. Morenza, P. et al. | 2010
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Improved properties of Pt–HfO2 gate insulator–ZnO semiconductor thin film structure by annealing of ZnO layerNa, Kwang Duk / Kim, Jeong Hwan / Park, Tae Joo / Song, Jaewon / Hwang, Cheol Seong / Choi, Jung-Hae et al. | 2010
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Study of the refractive index change in a-Si:H thin films patterned by 532nm laser radiation for photovoltaic applicationsColina, M. / Molpeceres, C. / Holgado, M. / Gandia, J. / Nos, O. / Ocaña, J.L. et al. | 2010
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Influence of microstructure and hydrogen concentration on amorphous silicon crystallizationBudini, N. / Rinaldi, P.A. / Schmidt, J.A. / Arce, R.D. / Buitrago, R.H. et al. | 2010
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Simulation at high temperature of atomic deposition, islands coalescence, Ostwald and inverse Ostwald ripening with a general simple kinetic Monte Carlo codeLucas, S. / Moskovkin, P. et al. | 2010