Elucidating surface properties of dry-etched ZnO using H2/CH4 and H2/CH4/Ar plasma (English)
- New search for: Hsueh, Kuang-Po
- New search for: Hsueh, Kuang-Po
In:
Applied surface science
;
257
, 3
; 969-974
;
2010
-
ISSN:
- Article (Journal) / Print
-
Title:Elucidating surface properties of dry-etched ZnO using H2/CH4 and H2/CH4/Ar plasma
-
Contributors:Hsueh, Kuang-Po ( author )
-
Published in:Applied surface science ; 257, 3 ; 969-974
-
Publisher:
- New search for: Elsevier
-
Place of publication:Amsterdam [u.a.]
-
Publication date:2010
-
ISSN:
-
ZDBID:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 52.78 / 35.18 / 33.68
- Further information on Basic classification
- New search for: 535/3485
-
Keywords:
-
Classification:
-
Source:
Table of contents – Volume 257, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 665
-
Superhydrophobic wind turbine blade surfaces obtained by a simple deposition of silica nanoparticles embedded in epoxyKarmouch, Rachid / Ross, Guy G. et al. | 2010
- 670
-
Correlation between microstructure and optical properties of nano-crystalline TiO2 thin films prepared by sol–gel dip coatingMechiakh, R. / Sedrine, N. Ben / Chtourou, R. / Bensaha, R. et al. | 2010
- 677
-
Synthesis and photoluminescence properties of ZnO nanorods and nanotubesLiu, W.J. / Meng, X.Q. / Zheng, Yi / Xia, Wei et al. | 2010
- 680
-
Synthesis of 10nm Ag nanoparticle polymer composite pastes for low temperature production of high conductivity filmsHu, PingAn / O’Neil, William / Hu, Qin et al. | 2010
- 686
-
Formation of periodic surface nanostructures on Ti3+:Al2O3 crystals using femtosecond laser pulsesKodama, Nobuhiro / Saito, Koshun / Nakaya, Takayuki / Takahashi, Tomoko / Shibata, Daisuke / Takeda, Hidetoshi et al. | 2010
- 691
-
Surface hardening of titanium by pulsed Nd:YAG laser irradiation at 1064- and 532-nm wavelengths in nitrogen atmosphereOhtsu, Naofumi / Yamane, Misao / Kodama, Kenji / Wagatsuma, Kazuaki et al. | 2010
- 696
-
A study of TaxC1−x coatings deposited on biomedical 316L stainless steel by radio-frequency magnetron sputteringDing, M.H. / Wang, B.L. / Li, L. / Zheng, Y.F. et al. | 2010
- 704
-
Characterization of TiO2/Au/TiO2 films deposited by magnetron sputtering on polycarbonate substratesKim, Daeil et al. | 2010
- 708
-
Highly conductive and transparent laser ablated nanostructured Al: ZnO thin filmsVinodkumar, R. / Navas, I. / Chalana, S.R. / Gopchandran, K.G. / Ganesan, V. / Philip, Reji / Sudheer, S.K. / Mahadevan Pillai, V.P. et al. | 2010
- 717
-
Electrodeposition of Ni–Co composites containing nano-CeO2 and their structure, propertiesSrivastava, Meenu / William Grips, V.K. / Rajam, K.S. et al. | 2010
- 723
-
Fragmentation of gold flowers into nanopetals by high energy electron irradiationDhumale, Vinayak A. / Shah, Preeti V. / Bhoraskar, Vasant N. / Sharma, Rishi B. et al. | 2010
- 727
-
CuPd interface charge and energy quantum entrapment: A tight-binding and XPS investigationNie, Yanguang / Wang, Yan / Sun, Yi / Pan, Ji Sheng / Mehta, B.R. / Khanuja, Manika / Shivaprasad, S.M. / Sun, Chang Q. et al. | 2010
- 731
-
Grafting poly(ethylene glycol) monomethacrylate onto Fe3O4 nanoparticles to resist nonspecific protein adsorptionQin, Shaoxiong / Wang, Linlin / Zhang, Xu / Su, Gaosheng et al. | 2010
- 736
-
Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer-coated paperboardHirvikorpi, Terhi / Vähä-Nissi, Mika / Harlin, Ali / Marles, Jaana / Miikkulainen, Ville / Karppinen, Maarit et al. | 2010
- 741
-
Characterization on titanium surfaces and its effect on photocatalytic bactericidal activityJoo, Hyeon-Cheol / Lim, Young-Jun / Kim, Myung-Joo / Kwon, Ho-Beom / Han, Jun-Hyun et al. | 2010
- 747
-
Preparation and characterization of graphene/CdS nanocompositesWu, Jili / Bai, Song / Shen, Xiaoping / Jiang, Lei et al. | 2010
- 752
-
Surface modification of indium tin oxide films by amino ion implantation for the attachment of multi-wall carbon nanotubesJiao, Jiao / Liu, Chenyao / Chen, Qunxia / Li, Shuoqi / Hu, Jingbo / Li, Qilong et al. | 2010
- 756
-
Preparation of titania hollow spheres by catalyst-free hydrothermal method and their high thermal stabilitiesFeng, Xuan / Yang, Ling / Liu, Yingliang et al. | 2010
- 762
-
Surface fractal analysis of pore structure of high-volume fly-ash cement pastesZeng, Qiang / Li, Kefei / Fen-Chong, Teddy / Dangla, Patrick et al. | 2010
- 769
-
Adsorption of hexavalent chromium onto montmorillonite modified with hydroxyaluminum and cetyltrimethylammonium bromideHu, Bingjie / Luo, Hanjin et al. | 2010
- 776
-
Laser direct patterning of the T-shaped ITO electrode for high-efficiency alternative current plasma display panelsLi, Zhao-Hui / Cho, Eou Sik / Kwon, Sang Jik et al. | 2010
- 781
-
Simple routes to synthesis and characterization of nanosized tin telluride compoundsSalavati-Niasari, Masoud / Bazarganipour, Mehdi / Davar, Fatemeh / Fazl, Alireza Amini et al. | 2010
- 786
-
X-ray photoelectron spectroscopy study of the passive films formed on thermally sprayed and wrought Inconel 625Bakare, M.S. / Voisey, K.T. / Roe, M.J. / McCartney, D.G. et al. | 2010
- 795
-
Enhanced photoactivity of CuPp-TiO2 photocatalysts under visible light irradiationLü, Xiang-fei / Li, Jun / Wang, Chen / Duan, Ming-yue / Luo, Yun / Yao, Gui-ping / Wang, Jun-Long et al. | 2010
- 802
-
A fluorescent probe for zinc detection based on organically functionalized SBA-15Dong, Zhengping / Dong, Zihao / Wang, Pan / Tian, Xin / Geng, Huamei / Li, Rong / Ma, Jiantai et al. | 2010
- 807
-
First-principles study on the structural and electronic properties of graphene upon benzene and naphthalene adsorptionAlZahrani, A.Z. et al. | 2010
- 811
-
Silica–tin nanotubes prepared from rice husk ash by sol–gel method: Characterization and its photocatalytic activityAdam, Farook / Appaturi, Jimmy Nelson / Thankappan, Radhika / Nawi, Mohd Asri Mohd et al. | 2010
- 817
-
The optoelectronic properties of silicon films deposited by inductively coupled plasma CVDQin, Yanli / Yan, Hengqing / Li, Fei / Qiao, Li / Liu, Qiming / He, Deyan et al. | 2010
- 823
-
Fabrication of superhydrophobic polyurethane/organoclay nano-structured composites from cyclomethicone-in-water emulsionsBayer, I.S. / Steele, A. / Martorana, P.J. / Loth, E. et al. | 2010
- 827
-
Morphology, luminescence, and electrical resistance response to H2 and CO gas exposure of porous InP membranes prepared by electrochemistry in a neutral electrolyteVolciuc, O. / Monaico, E. / Enachi, M. / Ursaki, V.V. / Pavlidis, D. / Popa, V. / Tiginyanu, I.M. et al. | 2010
- 832
-
Photoemission study of fluorination atmospheric pressure plasma processes on EPDM: Influence of the carrier and fluorinating gasMartínez, L. / Huttel, Y. / Verheyde, B. / Vanhulsel, A. / Román, E. et al. | 2010
- 837
-
Formation and disruption of current paths of anodic porous alumina films by conducting atomic force microscopyOyoshi, K. / Nigo, S. / Inoue, J. / Sakai, O. / Kitazawa, H. / Kido, G. et al. | 2010
- 842
-
Microwave absorption properties of a wave-absorbing coating employing carbonyl-iron powder and carbon blackLiu, Lidong / Duan, Yuping / Ma, Lixin / Liu, Shunhua / Yu, Zhen et al. | 2010
- 847
-
Mechanical and tribological properties of Ni/Al multilayers—A molecular dynamics studyCao, Yongzhi / Zhang, Junjie / Liang, Yingchun / Yu, Fuli / Sun, Tao et al. | 2010
- 852
-
Protective performances of two anti-graffiti treatments towards sulfite and sulfate formation in SO2 polluted model environmentCarmona-Quiroga, Paula María / Panas, Itai / Svensson, Jan-Erik / Johansson, Lars-Gunnar / Blanco-Varela, María Teresa / Martínez-Ramírez, Sagrario et al. | 2010
- 857
-
Regeneration of surface roughness by the Langevin equation using stochastic analysis on AFM image of a carbon fiberAllahkarami, Masoud / Hanan, Jay C. / Bale, Hrishikesh A. et al. | 2010
- 861
-
Chemical modification of glass surface with a monolayer of nonchromophoric and chromophoric methacrylate terpolymerJanik, Ryszard / Kucharski, Stanisław / Sobolewska, Anna / Barille, Regis et al. | 2010
- 867
-
Structural, photochemical and photocatalytic properties of zirconium oxide doped TiO2 nanocrystallitesZhang, Dongfang / Zeng, Fanbin et al. | 2010
- 872
-
Studies on the interactions of fluorescent-magnetic nanocomposites with biomolecules and cells labelingWang, Qisui / Fang, Tingting / Liu, Peng / Min, Xinmin / Li, Xi et al. | 2010
- 878
-
Quantitative analysis of graded Cu(In1−xPerkins, Craig L. et al. | 2010
- 878
-
Quantitative analysis of graded Cu(In1−x,Gax)Se2 thin films by AES, ICP-OES, and EPMAPerkins, Craig L. / Egaas, Brian / Repins, Ingrid / To, Bobby et al. | 2010
- 887
-
Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and ZnBiesinger, Mark C. / Lau, Leo W.M. / Gerson, Andrea R. / Smart, Roger St.C. et al. | 2010
- 899
-
Investigating the interfacial interaction of different aminosilane treated nano silicas with a polyurethane coatingRostami, M. / Ranjbar, Z. / Mohseni, M. et al. | 2010
- 905
-
Dry etching characteristics of GaN using Cl2/BCl3 inductively coupled plasmasZhou, Shengjun / Cao, Bin / Liu, Sheng et al. | 2010
- 911
-
Effect of annealing on the nanoscratch behavior of multilayer Si0.8Ge0.2/Si filmsLian, Derming et al. | 2010
- 917
-
Theoretical analysis of fluorine-passivated germanium surface for high-k/Ge gate stack by molecular orbital methodLee, DongHun / Lee, Hyun / Kanashima, Takeshi / Okuyama, Masanori et al. | 2010
- 921
-
Fast response ultraviolet photoconductive detectors based on Ga-doped ZnO films grown by radio-frequency magnetron sputteringSun, Jian / Liu, Feng-Juan / Huang, Hai-Qin / Zhao, Jian-Wei / Hu, Zuo-Fu / Zhang, Xi-Qing / Wang, Yong-Sheng et al. | 2010
- 925
-
In vitro biocompatibility of magnesium-incorporated submicro-porous titanium oxide surface produced by hydrothermal treatmentPark, Jin-Woo / Kim, Youn-Jeong / Jang, Je-Hee / An, Chang-Hyeon et al. | 2010
- 932
-
Effect of sulfur on the growth of carbon nanotubes by detonation-assisted chemical vapor depositionWang, Can / Zhan, Liang / Wang, Yan-li / Qiao, Wen-Ming / Liang, Xiaoyi / Ling, Li-Cheng et al. | 2010
- 937
-
Surface of Zn–Mn–O and its role in room temperature ferromagnetism: An XPS analysisMilivojević, Dušan / Babić-Stojić, Branka / Kovač, Janez et al. | 2010
- 944
-
Photocatalysis and wave-absorbing properties of polyaniline/TiO2 microbelts composite by in situ polymerization methodLi, Qiaoling / Zhang, Cunrui / Li, Jianqiang et al. | 2010
- 949
-
Ge/Sb2Te3 nanocomposite multilayer films for high data retention phase-change random access memory applicationWang, Changzhou / Zhai, Jiwei / Song, Zhitang / Shang, Fei / Yao, Xi et al. | 2010
- 954
-
Pulsed laser deposition of fluoride glass thin filmsGanser, Dimitri / Gottmann, Jens / Mackens, Uwe / Weichmann, Ulrich et al. | 2010
- 960
-
Surface textured ZnO:Al thin films by pulsed DC magnetron sputtering for thin film solar cells applicationsYen, W.T. / Lin, Y.C. / Ke, J.H. et al. | 2010
- 969
-
Elucidating surface properties of dry-etched ZnO using H2/CH4 and H2/CH4/Ar plasmaHsueh, Kuang-Po et al. | 2010
- 974
-
Synthesis and bactericidal ability of Ag/TiO2 composite films deposited on titanium plateMai, Lixiang / Wang, Dawei / Zhang, Sheng / Xie, Yongjian / Huang, Chunming / Zhang, Zhiguang et al. | 2010
- 979
-
The effect of surface nanocrystallization on plasma nitriding behaviour of AISI 4140 steelLi, Yang / Wang, Liang / Zhang, Dandan / Shen, Lie et al. | 2010
- 985
-
Morphology and photoluminescence study of electrodeposited ZnO filmsSun, Sheng-Nan / Marí, B. / Wu, Hong-Lin / Mollar, M. / Cui, Hai-Ning et al. | 2010
- 990
-
Experimental and computational study on hydrolysis and condensation kinetics of g-glycidoxypropyltrimethoxysilane (g-GPS)Yang, L. / Feng, J. / Zhang, W. / Qu, J. e. et al. | 2010
- 990
-
Experimental and computational study on hydrolysis and condensation kinetics of γ-glycidoxypropyltrimethoxysilane (γ-GPS)Yang, Lixia / Feng, Jun / Zhang, Wenguang / Qu, Jun-e et al. | 2010
- 997
-
Upon a magnetic composite preparation based on magnetite and poly(succinimide)-b-poly(ethylene glycol) shellChiriac, Aurica P. / Niţă, Loredana E. / Neamţu, Iordana / Badescu, Vasile et al. | 2010
- 1002
-
Calculated influence of work function on SE escape probability and Secondary Electron Emission yieldCazaux, Jacques et al. | 2010
- 1010
-
Green chemical functionalization of multiwalled carbon nanotubes with poly(ɛ-caprolactone) in ionic liquidsYang, Yingkui / Qiu, Shengqiang / He, Chengen / He, Wenjie / Yu, Linjuan / Xie, Xiaolin et al. | 2010
- 1015
-
Fabrication of ultrahydrophobic poly(lauryl acrylate) brushes on silicon wafer via surface-initiated atom transfer radical polymerizationÖztürk, Esra / Turan, Eylem / Caykara, Tuncer et al. | 2010
- 1021
-
Surface plasmon resonance biosensor modified with multilayer silver nanoparticles filmsChen, Yanling / Dong, Bingyang / Zhou, Wenyun et al. | 2010
- 1027
-
Effective electrodeposition of Co–Ni–Cu alloys nanoparticles in the presence of alkyl polyglucoside surfactantBudi, Setia / Daud, A.R. / Radiman, S. / Umar, Akrajas Ali et al. | 2010
- 1034
-
The relationship between the adhesion work, the wettability and composition of the surface layer in the systems polymer/aqueous solution of anionic surfactants and alcohol mixturesZdziennicka, Anna / Jańczuk, Bronisław et al. | 2010
- 1043
-
Atomic layer deposition of HfO2: Effect of structure development on growth rate, morphology and optical properties of thin filmsRammula, Raul / Aarik, Jaan / Mändar, Hugo / Ritslaid, Peeter / Sammelselg, Väino et al. | 2010
- 1053
-
A close correlation between induced ferromagnetism and oxygen deficiency in Fe doped In2O3Singhal, R.K. / Samariya, A. / Kumar, Sudhish / Sharma, S.C. / Xing, Y.T. / Deshpande, U.P. / Shripathi, T. / Saitovitch, E. et al. | 2010
- 1058
-
Thermal stability of alumina thin films containing γ-Al2O3 phase prepared by reactive magnetron sputteringMusil, J. / Blažek, J. / Zeman, P. / Prokšová, Š. / Šašek, M. / Čerstvý, R. et al. | 2010
- 1058
-
Thermal stability of alumina thin films containing g-Al2O3 phase prepared by reactive magnetron sputteringMusil, J. / Blazek, J. / Zeman, P. / Proksova, S. / Sasek, M. / Cerstvy, R. et al. | 2010
- 1063
-
Structural, electrical and optical properties of Ga-doped ZnO films on PET substrateKim, Byeong-Guk / Kim, Jeong-Yeon / Lee, Seok-Jin / Park, Jae-Hwan / Lim, Dong-Gun / Park, Mun-Gi et al. | 2010
- 1068
-
Favorable recycling photocatalyst TiO2/CFA: Effects of loading percent of TiO2 on the structural property and photocatalytic activityShi, Jian-wen / Chen, Shao-hua / Ye, Zhi-long / Wang, Shu-mei / Wu, Peng et al. | 2010
- 1075
-
Near field properties of nanoparticle arrays fabricated by laser annealing of thin Au and Ag filmsImamova, S. / Nedyalkov, N. / Dikovska, A. / Atanasov, P. / Sawczak, M. / Jendrzejewski, R. / Śliwiński, G. / Obara, M. et al. | 2010
- 1080
-
Investigation of etch characteristics of non-polar GaN by wet chemical etchingHsu, Hsiao-Chiu / Su, Yan-Kuin / Cheng, Shin-Hao / Huang, Shyh-Jer / Cao, Jia-Ming / Chen, Kuan-Chun et al. | 2010
- 1084
-
Catalyst-free growth of well-aligned arsenic-doped ZnO nanowires by chemical vapor deposition methodFeng, Q.J. / Hu, L.Z. / Liang, H.W. / Feng, Y. / Wang, J. / Sun, J.C. / Zhao, J.Z. / Li, M.K. / Dong, L. et al. | 2010
- 1088
-
Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substratesBittner, A. / Ababneh, A. / Seidel, H. / Schmid, U. et al. | 2010
- 1092
-
Silver nanoparticles on amidoxime fibers for photo-catalytic degradation of organic dyes in waste waterWu, Zhi-Chuan / Zhang, Yong / Tao, Ting-Xian / Zhang, Lifeng / Fong, Hao et al. | 2010
- 1098
-
Enhancement of surface mechanical properties by using TiN[BCN/BN]n/c-BN multilayer systemMoreno, H. / Caicedo, J.C. / Amaya, C. / Muñoz-Saldaña, J. / Yate, L. / Esteve, J. / Prieto, P. et al. | 2010
- 1105
-
Thermal annealing dependence of some optical properties of plasma-modified porous siliconBenyahia, Be. / Gabouze, N. / Guerbous, L. / Mahmoudi, Br. / Menari, H. et al. | 2010
- 1112
-
Study on the surface properties of wood/polyethylene composites treated under plasmaLiu, Yang / Tao, Yan / Lv, Xinying / Zhang, Yanhua / Di, Mingwei et al. | 2010
- 1119
-
Morphology of ablation craters generated by ultra-short laser pulses in dentin surfaces: AFM and ESEM evaluationDaskalova, A. / Bashir, S. / Husinsky, W. et al. | 2010
- 1125
-
Structural and optical properties of the S-doped ZnO particles synthesized by hydrothermal methodSun, Yuanping / He, Tao / Guo, Hongying / Zhang, Tao / Wang, Weitian / Dai, Zhenhong et al. | 2010
- 1129
-
Comparison of phase behavior between water soluble and insoluble surfactants at the air–water interfaceHossain, Md. Mufazzal / Iimura, Kenichi / Kato, Teiji et al. | 2010
- 1134
-
Optical properties of (nanometer MCM-41)–(malachite green) composite materialsLi, Xiao-Dong / Zhai, Qing-Zhou / Zou, Ming-Qiang et al. | 2010
- 1141
-
Photovoltaic behavior and work function of zinc oxides as solar cellsTan, Xun-qiong / Wu, Zheng-qiu / Zhi, Wen et al. | 2010
- 1145
-
Direct observation of surface and internal phase-separated structure of the active layer buried in organic photovoltaic cellsNarayama, Ifu / Baba, Daisuke / Takahara, Atsushi / Tanaka, Keiji et al. | 2010
- ii
-
Editorial Board| 2010