Electrical characterization of dry and wet processed interface layer in Ge/High-K devices (English)
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In:
Journal of vacuum science and technology / B
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34
, 2
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2016
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ISSN:
- Article (Journal) / Print
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Title:Electrical characterization of dry and wet processed interface layer in Ge/High-K devices
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Contributors:Ding, Y. M ( author ) / Misra, D / Bhuyian, M. N / Tapily, Kandabara / Clark, Robert D / Consiglio, Steve / Wajda, Cory S / Leusink, Gert J
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Place of publication:New York, NY
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Publication date:2016
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Table of contents – Volume 34, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Design optimizations of InGaAsN(Sb) subcells for concentrator photovoltaic systemsCheriton, Ross / Wilkins, Matthew M. / Sharma, Pratibha / Valdivia, Christopher E. / Trojnar, Anna H. / Schriemer, Henry / Hinzer, Karin / Gupta, James / Bouzazi, Boussairi / Kolhatkar, Gitanjali et al. | 2016
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Focused gas beam injection for efficient ammonia-molecular beam epitaxial growth of III-nitride semiconductorsBoucherif, Abderrahim Rahim / Rondeau, Maxime / Pelletier, Hubert / Provost, Philippe-Olivier / Boucherif, Abderraouf / Dubuc, Christian / Maher, Hassan / Arès, Richard et al. | 2016
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High quality extremely thin SOI fabricated by facilitated ion-cut with H-trapping effectChang, Yongwei / Xue, Zhongying / Chen, Da / Cheng, Shi / Zhang, Miao / Di, Zengfeng / Wei, Xing / Wang, Xi et al. | 2016
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Pattern transfer to GaAs substrates and epitaxial growth of GaAs nanostructures using self-organized porous templatesKumari, Archana / Hatch, John Byron / Kim, Chaehyun / Barman, Biplob / Kwon, Jaesuk / Petrou, Athos / Zeng, Hao / Luo, Hong et al. | 2016
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Improved resistive switching properties in SiOx-based resistive random-access memory cell with Ti buffer layerKim, Sungjun / Cho, Seongjae / Park, Byung-Gook et al. | 2016
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Growth of Bi2Se3 topological insulator films using a selenium cracker sourceGinley, Theresa P. / Law, Stephanie et al. | 2016
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Liquid-metal-enabled synthesis of aluminum-containing III-nitrides by plasma-assisted molecular beam epitaxyLiang, Yu-Han / Nuhfer, Noel T. / Towe, Elias et al. | 2016
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Improvement of electron field emission properties of nanocrystalline diamond films by a plasma post-treatment process for cathode application in microplasma devicesLin, Sheng-Chang / Yeh, Chien-Jui / Leou, Keh-Chyang / Manoharan, Divinah / Lin, I-Nan et al. | 2016
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Electrical characterization of dry and wet processed interface layer in Ge/High-K devicesDing, Y. M. / Misra, D. / Bhuyian, M. N. / Tapily, Kandabara / Clark, Robert D. / Consiglio, Steve / Wajda, Cory S. / Leusink, Gert J. et al. | 2016
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PECVD low and ultralow dielectric constant materials: From invention and research to productsGrill, Alfred et al. | 2016
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Normally-off matrix layout p-GaN gate AlGaN/GaN power HEMT with a through-substrate via processChiu, Hsien-Chin / Peng, Li-Yi / Yang, Chih-Wei / Wang, Hsiang-Chun / Mai, Kai-Di / Kao, Hsuan-Ling / Tung, Chien-Kai / Chang, Tsung-Cheng / Hon, Schang-jing / Lin, Jia-Ching et al. | 2016
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Thermal transport and thermal stress in a molybdenum film–glass substrate systemMiao, Tingting / Ma, Weigang / Yan, Shen / Zhang, Xing / Kohno, Masamichi / Takata, Yasuyuki / Ikoma, Yoshifumi et al. | 2016
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Highly stable carbon nanotube cathode for electron beam applicationKang, Jung Su / Hong, Ji Hwan / Chung, Min Tae / Park, Kyu Chang et al. | 2016
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In situ synthesis of metallic nanowire arrays for ionization gauge electron sourcesRoustaie, Farough / Quednau, Sebastian / Dassinger, Florian / Schlaak, Helmut F. / Lotz, Marcel / Wilfert, Stefan et al. | 2016
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Growth of free-standing wurtzite AlGaN by MBE using a highly efficient RF plasma sourceNovikov, Sergei V. / Staddon, Chris R. / Whale, Josh / Kent, Anthony J. / Foxon, C. Thomas et al. | 2016
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Determination of the depletion layer width and effects on the formation of double-2DEG in AlGaAs/GaAs heterostructuresCortes-Mestizo, Irving Eduardo / Espinosa-Vega, Leticia Ithsmel / Espinoza-Figueroa, Jose Angel / Cisneros-de-la-Rosa, Alejandro / Eugenio-Lopez, Eric / Mendez-Garcia, Victor Hugo / Briones, Edgar / Briones, Joel / Zamora-Peredo, Luis / Droopad, Ravindranath et al. | 2016
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Incorporation of Be dopant in GaAs core and core–shell nanowires by molecular beam epitaxyOjha, Sai Krishna / Kasanaboina, Pavan Kumar / Lewis Reynolds, Claude / Rawdanowicz, Thomas A. / Liu, Yang / White, Ryan M. / Iyer, Shanthi et al. | 2016
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Novel low-temperature fabrication process for integrated high-aspect ratio zinc oxide nanowire sensorsClavijo, William P. / Atkinson, Gary M. / Castano, Carlos E. / Pestov, Dmitry et al. | 2016
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Growth and characterization of GaAs1−x−ySbxNy/GaAs heterostructures for multijunction solar cell applicationsMaros, Aymeric / Faleev, Nikolai / King, Richard R. / Honsberg, Christiana B. et al. | 2016
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Enhanced field emission properties from oxygen-deficient α-Fe2O3 nanorod arraysLiao, Ai-Zhen / Chen, Jian-Biao / Wang, Cheng-Wei / Su, Xiao-Feng / Li, Yan / Wang, Jian et al. | 2016
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Emission wavelength control in InAs(Sb) quantum dashes-in-a-well structuresAddamane, Sadhvikas / Mansoori, Ahmad / Dawson, Noel / Hains, Christopher / Dawson, Ralph / Balakrishnan, Ganesh et al. | 2016
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Growth optimization for self-catalyzed GaAs-based nanowires on metal-induced crystallized amorphous substrateRen, Dingding / Høiaas, Ida M. / Reinertsen, Johannes F. / Dheeraj, Dasa L. / Munshi, A. Mazid / Kim, Dong-Chul / Weman, Helge / Fimland, Bjørn-Ove et al. | 2016
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Critical thickness investigation of MBE-grown GaInAs/GaAs and GaAsSb/GaAs heterostructuresMaros, Aymeric / Faleev, Nikolai / King, Richard R. / Honsberg, Christiana B. / Convey, Diana / Xie, Hongen / Ponce, Fernando A. et al. | 2016
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Structural and optical properties of β-Ga2O3 thin films grown by plasma-assisted molecular beam epitaxyGhose, Susmita / Rahman, Md. Shafiqur / Rojas-Ramirez, Juan Salvador / Caro, Manuel / Droopad, Ravi / Arias, Abraham / Nedev, Nicola et al. | 2016
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Mechanical properties of TiN coatings studied via nanoindentation and nanoscratch testZeng, Huazhi / Wang, Hai / Shen, Jun et al. | 2016
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Effects of growth temperature on the incorporation of nitrogen in GaNAs layersEspinoza-Figueroa, José Ángel / Méndez-García, Víctor Hugo / Vidal, Miguel Ángel / Cruz-Hernández, Esteban / López-López, Máximo / Gallardo-Hernández, Salvador et al. | 2016
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Cubic GaN films grown below the congruent sublimation temperature of (0 0 1) GaAs substrates by plasma-assisted molecular beam epitaxyAlanís, Arturo / Vilchis, Heber / López, Edgar / Vidal, Miguel A. et al. | 2016
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Characterization of curved surface layer by Mueller matrix ellipsometryLi, Weiqi / Jiang, Hao / Zhang, Chuanwei / Chen, Xiuguo / Gu, Honggang / Liu, Shiyuan et al. | 2016
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Enhanced wall-plug efficiency in monolithically integrated vertical light-emitting-diode cells based on III-nitride heterostructuresPark, Hyung Jo / Bae, Hyo Jung / Park, Jun Beom / Ha, Jun Seok / Jeong, Tak / Baek, Jong Hyeob / Kim, Seung Hwan / Ryou, Jae-Hyun et al. | 2016
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Improved field emission properties of CuO nanowire arrays by coating of graphene oxide layersYu, Weiming / Hu, Hailong / Zhang, Dian / Huang, Hang / Guo, Tailiang et al. | 2016
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Experimental and computational study of zero dimensional metallic behavior at the LaLuO3/SrTiO3 interfaceShekhter, Pini / Uzan-Saguy, Cecile / Schubert, Jürgen / Amouyal, Yaron / Eizenberg, Moshe et al. | 2016
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Possible mechanisms in atomic force microscope-induced nano-oxidation lithography in epitaxial La0.67Ba0.33MnO3-δ thin filmsYong, Grace J. / Vanderlinde, William E. / Tanyi, Ekembu Kevin / Schaefer, David M. / Stumpf, Christopher / Kolagani, Rajeswari M. et al. | 2016
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At the edge between metal organic chemical vapor deposition and atomic layer deposition: Fast Atomic Sequential Technique, for high throughput conformal depositionPiallat, Fabien / Vitiello, Julien et al. | 2016
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TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomographyMühlbacher, Marlene / Greczynski, Grzegorz / Sartory, Bernhard / Mendez-Martin, Francisca / Schalk, Nina / Lu, Jun / Hultman, Lars / Mitterer, Christian et al. | 2016
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Micromachined multiple focused-ion-beam devicesYoshida, Ryo / Hara, Motoaki / Oguchi, Hiroyuki / Kuwano, Hiroki et al. | 2016
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Effect of excess hafnium on HfO2 crystallization temperature and leakage current behavior of HfO2/Si metal-oxide-semiconductor devicesBiswas, Debaleen / Singh, Manavendra Narayan / Sinha, Anil Kumar / Bhattacharyya, Satyaranjan / Chakraborty, Supratic et al. | 2016
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Electrostatic modeling of an in-plane gated field emission cathodeSabaut, Lucie / Ponard, Pascal / Mazellier, Jean-Paul / Legagneux, Pierre et al. | 2016
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Minority carrier lifetimes in very long-wave infrared InAs/GaInSb superlatticesHaugan, Heather J. / Brown, Gail J. / Olson, Benjamin V. / Kadlec, Emil A. / Kim, Jin K. / Shaner, Eric A. et al. | 2016
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Pulsed laser deposition of highly oriented stoichiometric thin films of topological insulator Sb2Te3Saha, Biswajit / Chaturvedi, Pragati / Yadav, Anil K. / Saha, Dipankar / Ganguly, Swaroop et al. | 2016
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MBE grown GaN/AlGaN lateral Schottky barrier diodes for high frequency applicationsCywiński, Grzegorz / Szkudlarek, Krzesimir / Kruszewski, Piotr / Yahniuk, Ivan / Yatsunenko, Sergey / Muzioł, Grzegorz / Siekacz, Marcin / Skierbiszewski, Czesław / Rumyantsev, Sergey / Knap, Wojciech et al. | 2016
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Interface-state-phonon-assisted energy relaxation of hot electrons in CdSe quantum dotsZhang, Shengkun / Zeylikovich, Iosif / Gayen, Taposh K. / Das, Bidyut / Alfano, Robert R. / Shen, Aidong / Tamargo, Maria C. et al. | 2016
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Structural characterization of AlGaAs:Si/GaAs (631) heterostructures as a function of As pressureEspinosa-Vega, Leticia Ithsmel / Vidal-Borbolla, Miguel Ángel / Rodríguez-Vázquez, Ángel Gabriel / Cortes-Mestizo, Irving Eduardo / Cruz-Hernández, Esteban / Méndez-García, Víctor Hugo / Shimomura, Satoshi / Vázquez-Cortés, David et al. | 2016
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Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabricationLiu, Hangyu / Herrnsdorf, Johannes / Gu, Erdan / Dawson, Martin D. et al. | 2016
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Polymer lenses with antireflection structures prepared using anodic porous alumina moldsYanagishita, Takashi / Hidaka, Takeshi / Suzuki, Mari / Masuda, Hideki et al. | 2016
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Highly scalable resistive switching memory in metal nanowire crossbar arrays fabricated by electron beam lithographyNiu, Jiebin / Zhang, Meiyun / Li, Yang / Long, Shibing / Lv, Hangbing / Liu, Qi / Liu, Ming et al. | 2016
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Field emission properties of p-type black silicon on pillar structuresLanger, Christoph / Prommesberger, Christian / Ławrowski, Robert / Schreiner, Rupert / Serbun, Pavel / Müller, Günter / Düsberg, Felix / Hofmann, Martin / Bachmann, Michael / Pahlke, Andreas et al. | 2016
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Nucleation and growth of ultrathin BaTiO3 films on single terminated Nb:SrTiO3 (100) substrates for ferroelectric tunnel junctionsAmbriz-Vargas, Fabian / Velasco-Davalos, Ivan / Thomas, Reji / Ruediger, Andreas et al. | 2016
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Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasmaLee Sang, Bruno / Gour, Marie-Josée / Darnon, Maxime / Ecoffey, Serge / Jaouad, Abdelatif / Sadani, Benattou / Drouin, Dominique / Souifi, Abdelkader et al. | 2016
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Self-catalyzed Ga(N)AsP nanowires and GaAsP/GaNAsP core–shell nanowires grown on Si (111) by gas-source molecular beam epitaxyLa, Rui / Pan, Janet L. / Bastiman, Faebian / Tu, Charles W. et al. | 2016
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Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays. I. ExperimentsWu, Hao / Yi, Peiyun / Peng, Linfa / Lai, Xinmin et al. | 2016
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Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arraysNagao, Masayoshi / Gotoh, Yasuhito / Neo, Yoichiro / Mimura, Hidenori et al. | 2016
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High temperature MBE of graphene on sapphire and hexagonal boron nitride flakes on sapphireCheng, Tin S. / Davies, Andrew / Summerfield, Alex / Cho, YongJin / Cebula, Izabela / Hill, Richard J. A. / Mellor, Christopher J. / Khlobystov, Andrei N. / Taniguchi, Takashi / Watanabe, Kenji et al. | 2016