Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges (English)
- New search for: Li, Hong
- New search for: Li, Hong
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- New search for: Zhang, Yu-Ru
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In:
Journal of applied physics
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121
, 23
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2017
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ISSN:
- Article (Journal) / Print
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Title:Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges
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Contributors:
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Published in:Journal of applied physics ; 121, 23
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Publisher:
- New search for: AIP
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Place of publication:Melville, NY
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Publication date:2017
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ISSN:
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ZDBID:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Table of contents – Volume 121, Issue 23
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Measurement of plasma sheath overlap above a trenchSheridan, T. E. / Steinberger, Thomas E. et al. | 2017
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Influence of the organic film thickness on the second order distributed feedback resonator properties of an organic semiconductor laserBencheikh, F. / Sandanayaka, A. S. D. / Matsushima, T. / Ribierre, J. C. / Adachi, C. et al. | 2017
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Variation of crystal structure and optical properties of wurtzite-type oxide semiconductor alloys of β-Cu(Ga,Al)O2Nagatani, Hiraku / Mizuno, Yuki / Suzuki, Issei / Kita, Masao / Ohashi, Naoki / Omata, Takahisa et al. | 2017
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Metal-insulator transition and nonlinear optical responseof sputter-deposited V3O5 thin filmsRúa, Armando / Díaz, Ramón D. / Kumar, Nardeep / Lysenko, Sergiy / Fernández, Félix E. et al. | 2017
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Electric field metrology for SI traceability: Systematic measurement uncertainties in electromagnetically induced transparency in atomic vaporHolloway, Christopher L. / Simons, Matt T. / Gordon, Joshua A. / Dienstfrey, Andrew / Anderson, David A. / Raithel, Georg et al. | 2017
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A vacuum-sealed, gigawatt-class, repetitively pulsed high-power microwave sourceXun, Tao / Fan, Yu-wei / Yang, Han-wu / Zhang, Zi-cheng / Chen, Dong-qun / Zhang, Jian-de et al. | 2017
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Exciton center-of-mass localization and dielectric environment effect in monolayer WS2Hichri, Aïda / Ben Amara, Imen / Ayari, Sabrine / Jaziri, Sihem et al. | 2017
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Optical bandgap of semiconductor nanostructures: Methods for experimental data analysisRaciti, R. / Bahariqushchi, R. / Summonte, C. / Aydinli, A. / Terrasi, A. / Mirabella, S. et al. | 2017
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Surface passivation and aging of InGaAs/InP heterojunction phototransistorsPark, Min-Su / Razaei, Mohsen / Barnhart, Katie / Tan, Chee Leong / Mohseni, Hooman et al. | 2017
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Linear and nonlinear microwave responses of a microwave photonic filter based on a photonic crystal microcavityLong, Yun / Zhang, Yong / Zhang, Xinliang / Xia, Jinsong / Dong, Jianji / Wang, Jian et al. | 2017
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Evaluation of the acoustoelectric effect in the thickness direction of c-plane ZnO single crystals by Brillouin scatteringTomita, Shota / Yanagitani, Takahiko / Takayanagi, Shinji / Ichihashi, Hayato / Shibagaki, Yoshiaki / Hayashi, Hiromichi / Matsukawa, Mami et al. | 2017
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Significant performance enhancement of inverted organic light-emitting diodes by using ZnIx as a hole-blocking layerCheng, Chuan-Hui / Zhang, Bi-Long / Sun, Chao / Li, Ruo-Xuan / Wang, Yuan / Tian, Wen-Ming / Zhao, Chun-Yi / Jin, Sheng-Ye / Liu, Wei-Feng / Luo, Ying-Min et al. | 2017
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Dose-rate dependence of damage buildup in 3C-SiCBayu Aji, L. B. / Li, T. T. / Wallace, J. B. / Kucheyev, S. O. et al. | 2017
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Sub-grain induced crack deviation in multi-crystalline siliconZhao, Lv / Nelias, Daniel / Bardel, Didier / Wang, Meng / Marie, Benoit et al. | 2017
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Three-dimensional transverse vibration of microtubulesLi, Si / Wang, Chengyuan / Nithiarasu, Perumal et al. | 2017
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Mechanical properties of iron filled carbon nanotubes: Numerical simulationsMunizaga, Vicente / Ramírez, Ricardo / Kiwi, Miguel / García, Griselda et al. | 2017
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Thin-film magnetless Faraday rotators for compact heterogeneous integrated optical isolatorsKarki, Dolendra / Stenger, Vincent / Pollick, Andrea / Levy, Miguel et al. | 2017
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Shell morphology and Raman spectra of epitaxial Ge−SixGe1−x and Si−SixGe1−x core-shell nanowiresWen, Feng / Dillen, David C. / Kim, Kyounghwan / Tutuc, Emanuel et al. | 2017
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Nearest-neighbor sp3s* tight-binding parameters based on the hybrid quasi-particle self-consistent GW method verified by modeling of type-II superlatticesSawamura, Akitaka / Otsuka, Jun / Kato, Takashi / Kotani, Takao et al. | 2017
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Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon dischargesLi, Hong / Liu, Yang / Zhang, Yu-Ru / Gao, Fei / Wang, You-Nian et al. | 2017
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Hot electron inelastic scattering and transmission across graphene surfacesKong, Byoung Don / Champlain, James G. / Boos, J. Brad et al. | 2017
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Ultra-high terahertz index in deep subwavelength coupled bi-layer free-standing flexible metamaterialsSingh, Leena / Singh, Ranjan / Zhang, Weili et al. | 2017
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Crystal and band structures of ZnS, MgS, and ZnS-MgS alloysZhao, Changming / Duan, Yifeng / Gao, Jie / Dong, Huafeng et al. | 2017
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Anisotropic thermal conductivity of β-Ga2O3 at elevated temperatures: Effect of Sn and Fe dopantsSlomski, M. / Blumenschein, N. / Paskov, P. P. / Muth, J. F. / Paskova, T. et al. | 2017
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High light extraction efficiency into glass substrate in organic light-emitting diodes by patterning the cathode in graded superlattice with dual periodicity and dual basisHassan, Safaa / Lowell, David / Lin, Yuankun et al. | 2017
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Structural stability of high entropy alloys under pressure and temperatureAhmad, Azkar S. / Su, Y. / Liu, S. Y. / Ståhl, K. / Wu, Y. D. / Hui, X. D. / Ruett, U. / Gutowski, O. / Glazyrin, K. / Liermann, H. P. et al. | 2017
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Curvature induced out-of-plane spin accumulation in Rashba quantum waveguidesSiu, Zhuo Bin / Jalil, Mansoor B. A. / Tan, Seng Ghee et al. | 2017
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Defect analysis in GaN films of HEMT structure by cross-sectional cathodoluminescenceIsobe, Yasuhiro / Hung, Hung / Oasa, Kohei / Ono, Tasuku / Onizawa, Takashi / Yoshioka, Akira / Takada, Yoshiharu / Saito, Yasunobu / Sugiyama, Naoharu / Tsuda, Kunio et al. | 2017
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Surface localization of the Er-related optical active centers in Er doped zinc oxide filmsAzad, Fahad / Luo, Caiqin / Su, Shichen / Younas, Muhammad / Azeem, Waqar / Kuznetsov, Andrej / Azarov, Alexander / Shih, Kaimin / Liao, Changzhong / Maqsood, Asghari et al. | 2017
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The effect of an InP cap layer on the photoluminescence of an InxGa1–xAs1–yPy/InzAl1– zAs quantum well heterostructureEsmaielpour, Hamidreza / Whiteside, Vincent R. / Hirst, Louise C. / Tischler, Joseph G. / Walters, Robert J. / Sellers, Ian R. et al. | 2017
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Characterization of the electron emission properties of hafnium nitride field emitter arrays at elevated temperaturesGotoh, Yasuhito / Ohue, Wataru / Tsuji, Hiroshi et al. | 2017
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Modeling the effects of lanthanum, nitrogen, and fluorine treatments of Si-SiON-HfO2-TiN gate stacks in 28 nm high-k-metal gate technologyLeitsmann, Roman / Lazarevic, Florian / Drescher, Maximilian / Erben, Elke et al. | 2017
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Structure of superconducting layers in bronze-processed and internal-tin Nb3Sn-based wires of various designsDeryagina, I. / Popova, E. / Patrakov, E. / Valova-Zaharevskaya, E. et al. | 2017
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Improvement of both bandwidth and driving voltage of polymer phase modulators using buried in-plane coupled micro-strip driving electrodesHadjloum, Massinissa / El Gibari, Mohammed / Li, Hongwu / Daryoush, Afshin S. et al. | 2017
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Structure dependent negative and positive magnetoresistance of amorphous carbon filmsSaleemi, Awais Siddique / Sun, Wen / Singh, Rajan / Luo, Zhaochu / Zhang, Xiaozhong et al. | 2017