Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation (English)
- New search for: Hung, Yung-Jr
- New search for: Hung, Yung-Jr
- New search for: Chang, Han-Jung
- New search for: Chang, Ping-Chien
- New search for: Lin, Jia-Jin
- New search for: Kao, Tzu-Chieh
In:
Journal of vacuum science and technology / B
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35
, 3
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2017
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ISSN:
- Article (Journal) / Print
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Title:Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation
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Place of publication:New York, NY
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Publication date:2017
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 51.30 / 50.94 / 53.55 / 53.56
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Table of contents – Volume 35, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Interaction study of nitrogen ion beam with siliconSchmidt, Marek E. / Zhang, Xiaobin / Oshima, Yoshifumi / Anh, Le The / Yasaka, Anto / Kanzaki, Teruhisa / Muruganathan, Manoharan / Akabori, Masashi / Shimoda, Tatsuya / Mizuta, Hiroshi et al. | 2017
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Periodically pulsed laser-assisted tunneling may generate terahertz radiationHagmann, Mark J. / Coombs, Dmtrij G. / Yarotski, Dmitry A. et al. | 2017
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Planar nanowires fabricated by thermal gratings on the GaAs(001) surfaceHaghizadeh, Anahita / Yang, Haeyeon et al. | 2017
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Inkjet printing of liquid-exfoliated, highly conducting graphene/poly(3,4 ethylenedioxythiophene):poly(styrenesulfonate) nanosheets for organic electronicsDesai, Jay A. / Biswas, Chandan / Kaul, Anupama B. et al. | 2017
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ToF-SIMS quantification of bromine based insecticide in mosquito nettingZhou, Chuanzhen / Stevie, Fred A. / Smith, Stephen C. et al. | 2017
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Polydimethylsiloxane and polyisoprene-based graphene composites for strain-sensingCatalán, Jorge A. / Kaul, Anupama B. et al. | 2017
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Simulated x-ray diffraction from pseudomorphic GaAs/In0.3Ga0.7As superlattice high electron mobility transistor heterostructures on GaAs (001) substratesAlthowibi, Fahad A. / Ayers, John E. et al. | 2017
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Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formationHung, Yung-Jr / Chang, Han-Jung / Chang, Ping-Chien / Lin, Jia-Jin / Kao, Tzu-Chieh et al. | 2017
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Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devicesSamanta, Piyas et al. | 2017
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Investigation of structural morphology and electrical properties of graphene-C60 hybridsChugh, Srishti / Biswas, Chandan / Echegoyen, Luis / Kaul, Anupama B. et al. | 2017
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Preparation and effects of O2 flow on the electrical characteristics of Li doped MgZnO thin film transistorsTian, Longjie / Gao, Song / Ma, Yaobin / Wang, Qi / Zhou, Dongzhan / Li, Ran / Zhang, Xiqing / Wang, Yongsheng et al. | 2017
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Simulation and characterization of short-channel organic thin-film transistors fabricated using ink-jet printing and an imprint processBae, Juhyun / Kim, Kyohyeok / Kwon, Namyong / Chung, Ilsub et al. | 2017
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Electrical and optical characteristics of gamma-ray irradiated AlGaN/GaN high electron mobility transistorsKhanal, Min P. / Ozden, Burcu / Kim, Kyunghyuk / Uprety, Sunil / Mirkhani, Vahid / Yapabandara, Kosala / Ahyi, Ayayi C. / Park, Minseo et al. | 2017
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Investigation on deep level defects in polycrystalline ZnO thin filmsTsiarapas, Christos / Girginoudi, Dimitra / Dimitriadis, Evangelos Ioannou / Georgoulas, Nikolaos et al. | 2017
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Review Article: Progress in fabrication of transition metal dichalcogenides heterostructure systemsDong, Rui / Kuljanishvili, Irma et al. | 2017
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1.5 MeV electron irradiation damage in β-Ga2O3 vertical rectifiersYang, Jiancheng / Ren, Fan / Pearton, Stephen J. / Yang, Gwangseok / Kim, Jihyun / Kuramata, Akito et al. | 2017
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Optimized process for fabrication of free-standing silicon nanophotonic devicesSeidler, Paul et al. | 2017
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Structural and optical properties of alumina passivated amorphous Si slanted columnar thin films during electrochemical Li-ion intercalation and deintercalation observed by in situ generalized spectroscopic ellipsometrySekora, Derek / Lai, Rebecca Y. / Schmidt, Daniel / Schubert, Mathias / Schubert, Eva et al. | 2017
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Method for patterning poly(acrylic acid) sacrificial layers for use in solder-based self-assemblySmith, Connor S. / Feng, Ying / Burkett, Susan L. et al. | 2017
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Effect of resin accumulation on filling process in roll-to-roll UV imprint lithographyZhou, Youquan / Li, Mujun / Shen, Lianguan / Ye, Huichun / Wang, Jianping / Huang, Shengzhou et al. | 2017
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Study of device instability of bottom-gate ZnO transistors with sol–gel derived channel layersYapabandara, Kosala / Mirkhani, Vahid / Sultan, Muhammad Shehzad / Ozden, Burcu / Khanal, Min P. / Park, Minseo / Wang, Shiqiang / Hamilton, Michael C. / Chung, Yoonsung / Kim, Dong-Joo et al. | 2017
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Low temperature carrier transport mechanism in high-mobility zinc oxynitride thin-film transistorsKim, Hee-Joong / Hong, Sae-Young / Kim, Dae-Hwan / Jeong, Hwan-Seok / Kwon, Hyuck-In et al. | 2017
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Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced depositionTu, Fan / Späth, Andreas / Drost, Martin / Vollnhals, Florian / Krick Calderon, Sandra / Fink, Rainer H. / Marbach, Hubertus et al. | 2017
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SiC emitters for nanoscale vacuum electronics: A systematic study of cathode–anode gap by focused ion beam etchingLiu, Meng / Li, Tie / Wang, Yuelin et al. | 2017
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Handling, transfer, storage, and shipping of commercial thin film hydride disk target samplesProvo, James L. et al. | 2017
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Probing kinetically excited hot electrons using Schottky diodesKulkarni, Dhruva D. / Field, Daniel A. / Cutshall, Daniel B. / Harriss, James E. / Harrell, William R. / Sosolik, Chad E. et al. | 2017
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Electrical behavior of β-Ga2O3 Schottky diodes with different Schottky metalsYao, Yao / Gangireddy, Raveena / Kim, Jaewoo / Das, Kalyan Kumar / Davis, Robert F. / Porter, Lisa M. et al. | 2017
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X-ray analysis of metamorphic InxGa1-xAs/InyGa1-yAs superlattices on GaAs (001) substratesAlthowibi, Fahad A. / Ayers, John E. et al. | 2017
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Inductively coupled plasma etching of bulk, single-crystal Ga2O3Yang, Jiancheng / Ahn, Shihyun / Ren, Fan / Pearton, Stephen / Khanna, Rohit / Bevlin, Kristen / Geerpuram, Dwarakanath / Kuramata, Akito et al. | 2017
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Study of tungsten films deposited by DC sputtering dedicated to integrated heatersVerbrugghe, Nathalie / Fasquelle, Didier / Duponchel, Benoît / Députier, Stéphanie et al. | 2017
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Nanodiamond vacuum field emission microtriodeHsu, Shao-Hua / Kang, Weng Poo / Raina, Supil / Howell, Mick / Huang, Jin-Hua et al. | 2017
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Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beamsStanford, Michael G. / Lewis, Brett B. / Mahady, Kyle / Fowlkes, Jason D. / Rack, Philip D. et al. | 2017
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High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lensesRichter, Karola / Mocker, André / Bartha, Johann-Wolfgang et al. | 2017
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Incorporation of dopants in epitaxial SiC layers grown with fluorinated CVD chemistryStenberg, Pontus / Janzén, Erik / Pedersen, Henrik et al. | 2017
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Voltage-amplitude-controlled complementary and self-compliance bipolar resistive switching of slender filaments in Pt/HfO2/HfOx/Pt memory devicesYang, Mei / Wang, Hong / Ma, Xiaohua / Gao, Haixia / Hao, Yue et al. | 2017
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Enhancing the electrical conductivity of vacuum-ultraviolet-reduced graphene oxide by multilayered stackingTu, Yudi / Utsunomiya, Toru / Ichii, Takashi / Sugimura, Hiroyuki et al. | 2017
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Circuit design considerations for current preamplifiers for scanning tunneling microscopyPetersen, Jacob P. / Kandel, S. Alex et al. | 2017
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Review Article: Overview of lanthanide pnictide films and nanoparticles epitaxially incorporated into III-V semiconductorsBomberger, Cory C. / Lewis, Matthew R. / Vanderhoef, Laura R. / Doty, Matthew F. / Zide, Joshua M. O. et al. | 2017