Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage (English)
- New search for: Samaali, Hatem
- New search for: Najar, Fehmi
- Further information on Najar, Fehmi:
- https://orcid.org/0000-0003-3545-809X
- New search for: Samaali, Hatem
- New search for: Najar, Fehmi
- Further information on Najar, Fehmi:
- https://orcid.org/0000-0003-3545-809X
In:
Microsystem Technologies
;
23
, 12
; 5317-5327
;
2017
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ISSN:
- Article (Journal) / Print
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Title:Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage
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Contributors:Samaali, Hatem ( author ) / Najar, Fehmi ( author )
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Published in:Microsystem Technologies ; 23, 12 ; 5317-5327
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Publisher:
- New search for: Springer Berlin Heidelberg
- New search for: Springer
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Place of publication:Berlin
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Publication date:2017
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ISSN:
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ZDBID:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 50.94
- Further information on Basic classification
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Keywords:
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Classification:
BKL: 50.94 Mikrosystemtechnik, Nanotechnologie -
Source:
Table of contents – Volume 23, Issue 12
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 5271
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All-polymeric planar waveguide devices based on a gas-assisted thermal imprinting techniqueWan, Lei / Zhu, Ning / Zhang, Rui-ying / Mei, Ting et al. | 2017
- 5281
-
Analytical modeling, simulation and experimental study for nonlinear hybrid piezoelectric–electromagnetic energy harvesting from stochastic excitationLi, Ping / Gao, Shiqiao / Zhou, Xiaoya / Liu, Haipeng / Shi, Jitao et al. | 2017
- 5293
-
Design of VCM actuator with the chamfered edge magnet for cellphoneHsieh, Chang-Lin / Wang, Hsiao-Yu / Chang, Yu-Hao / Liu, Chien-Sheng et al. | 2017
- 5303
-
Nonlinear thermo-mechanical behaviour of MEMS resonatorsFarokhi, Hamed / Ghayesh, Mergen H. et al. | 2017
- 5317
-
Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltageSamaali, Hatem / Najar, Fehmi et al. | 2017
- 5329
-
Deflection of circular diaphragm-type piezoactuators coupling with gas compression in micropumpsHu, Yuanlin / Liang, Xin / Wang, Wen et al. | 2017
- 5343
-
Si (100) and (110) etching properties in 5, 15, 30 and 48 wt%KOH aqueous solution containing Triton-X-100Tanaka, Hiroshi / Takeda, Masato / Sato, Kazuo et al. | 2017
- 5351
-
Concentration and extraction chip of fetal nucleated red blood Cells (NRBCs) by micro gap with diaphragm for fetal DNA diagnosis from maternal bloodKumo, Takeshi / Tomizawa, Yuichi / Kita, Mikiko / Takabayashi, Haruo / Takamura, Yuzuru et al. | 2017
- 5357
-
Sensitivity improvement of a dual axis thermal accelerometer with modified cavity structureMukherjee, Rahul / Mandal, Pradip / Guha, Prasanta Kumar et al. | 2017
- 5365
-
A waveform design method for high DPI piezoelectric inkjet print-head based on numerical simulationWei, Hongfang / Xiao, Xiaolei / Yin, Zhifu / Yi, Maocong / Zou, Helin et al. | 2017
- 5375
-
Analysis and optimization of a micro-displacement sensor for compliant microgripperDao, Thanh-Phong / Ho, Nhat Linh / Nguyen, Tan Thang / Le, Hieu Giang / Thang, Pham Toan / Pham, Huy-Tuan / Do, Hoang-Thinh / Tran, Minh-Duc / Nguyen, Trung Thang et al. | 2017
- 5397
-
Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airwayHarada, Naoaki / Hasegawa, Yoshihiro / Ono, Ryota / Matsushima, Miyoko / Kawabe, Tsutomu / Shikida, Mitsuhiro et al. | 2017
- 5407
-
A new method to increase MEMS microphone sensitivity using small circular diaphragm with fixed centerNademi, Nastaran / karamdel, Javad / Ganji, Bahram Azizollah et al. | 2017
- 5415
-
A low-stress and low temperature gradient microgripper for biomedical applicationsGaafar, Einas / Zarog, Musaab / IEEE senior member et al. | 2017
- 5423
-
An improved rotation scheme for Tri-axis rotational inertial navigation systemLiu, Zengjun / Wang, Lei / Wang, Wei / Gao, Pengyu et al. | 2017
- 5435
-
Thermo-mechanical interactions in a fractional order generalized thermoelastic solid with diffusionChoudhary, Suman / Kumar, Sunil / Sikka, Jitander Singh et al. | 2017
- 5447
-
Growth of nanotubes using IC-PECVD as benzene carbon carrierShoukat, Rizwan / Khan, Muhammad Imran et al. | 2017
- 5455
-
Study on characteristics of the piezoelectric energy-harvesting from the torsional vibration of thin-walled cantilever beamsGao, Shiqiao / Zhang, Guangyi / Jin, Lei / Li, Ping / Liu, Haipeng et al. | 2017
- 5467
-
Experimental study of micro patterns on conductive ink transfer in a plate-to-roll systemJeong, Sihun / Lee, Cheonghwan / Shim, Jaesool / Bai, Chulho et al. | 2017
- 5477
-
Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applicationsSaleem, Muhammad Mubasher / Danish, Adnan Murtaza / Iqbal, Javed / Bazaz, Shafaat Ahmed et al. | 2017
- 5491
-
A new modulation method to generate all-optical logic gates in an AOTFOliveira, M. V. N. / Coelho, A. G. Jr / Sobrinho, C. S. / Ferreira, A. C. / Sales, J. C. / Sousa, J. R. R. / Guimarães, G. F. / Menezes, J. W. M. / Lyra, M. L. / Sombra, A. S. B. et al. | 2017
- 5505
-
Ultrasonic fabrication of micro fluidic channels from polyether ether ketone (PEEK)Kosloh, J. / Sackmann, J. / Schomburg, W. K. et al. | 2017
- 5515
-
A rapid and high-precision initial alignment scheme for dual-axis rotational inertial navigation systemSong, Tianxiao / Li, Kui / Wang, Lei / Sui, Jie / Wang, Lingcao et al. | 2017
- 5527
-
Development of a multi frequency impedance measurement system for use in MEMS flow cytometersCole, Neil J. / Richardson, Andrew M. / Abdul-Hafiz, Alako et al. | 2017
- 5545
-
Design and optimization of slit-resonant beam in a MEMS pressure sensor based on uncertainty analysisShi, Huichao / Fan, Shangchun / Zhang, Yuwen et al. | 2017
- 5561
-
Fabrication process induced changes in scattering parameters of meander type RFMEMS shunt switchSharma, Updesh / Kumar, Manoj / Sharma, Renu / Saha, Tulana / Jain, K. K. / Dutta, Shankar / Sharma, E. K. et al. | 2017
- 5571
-
Modelling and characterization of a robust, low-power and wide-range thermal wind sensorZhu, Yanqing / Qin, Ming / Ye, Yizhou / Yi, Zhenxiang / Long, Kewen / Huang, Qing-an et al. | 2017
- 5587
-
Effect of initial stress on a semiconductor material with temperature dependent properties under DPL modelOthman, Mohamed I. A. / Tantawi, Ramadan S. / Eraki, Ebtesam E. M. et al. | 2017
- 5599
-
Influence of magnetic field on generalized piezo-thermoelastic rotating medium with two relaxation timesOthman, Mohamed I. A. / Elmaklizi, Yassmin D. / Ahmed, Ethar A. A. et al. | 2017
- 5613
-
A novel SU-8 nanofluidic chip fabrication technique based on traditional UV photolithographyYin, Zhifu / Lu, Bolin / Zou, Helin et al. | 2017
- 5621
-
An innovative fuzzy backstepping sliding mode controller for a Tri-Rotor Unmanned Aerial VehicleWang, Shiqian / Zhang, Jingjuan / Zhang, Qian / Pei, Chaoying et al. | 2017
- 5631
-
4H-SiC electrostatic microactuator with optically controlled actuationZhao, Feng / Trimble, Marcus Daniel et al. | 2017
- 5635
-
Magnetothermoelstic analysis for an infinite solid cylinder with variable thermal conductivity due to harmonically varying heatOthman, Mohamed I. A. / Abouelregal, Ahmed E. et al. | 2017
- 5645
-
Microfluidic disk for the determination of human blood typesLi, Haiwen / Wu, Ligang / Zhou, Wuping / Jiang, Keming / Fu, Weiwei / Dong, Yuefang / Chen, Shi / Liu, Cong / Zhang, Tao / Ding, Shaohua et al. | 2017
- 5653
-
Low-cost and fast fabrication of the ultrasonic embossing on polyethylene terephthalate (PET) films using laser processed moldsZhu, Jiajing / Tian, Yanling / Yang, Chengjuan / Cui, Liangyu / Wang, Fujun / Zhang, Dawei / Liu, Xianping et al. | 2017
- 5669
-
Development of new electrostatic micro cam system driven by elastic wingsPham, Phuc Hong / Dang, Lam Bao / Nguyen, Viet Hoang / Dau, Van Thanh et al. | 2017
- 5677
-
The design and analysis of a novel structural piezoresistive pressure sensor for low pressure measurementLi, Chuang / Cordovilla, Francisco / Ocaña, José L. et al. | 2017
- 5689
-
Processing optimization of Fresnel lenses manufacturing in the injection molding considering birefringence effectLin, Chao-Ming / Hsieh, Hsiang-Keng et al. | 2017
- 5697
-
Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-driveLanga, S. / Conrad, H. / Kaiser, B. / Stolz, M. / Gaudet, M. / Uhlig, S. / Schimmanz, K. / Schenk, H. et al. | 2017
- 5709
-
Deformation-based micro surface texturing using soft backing self-alignment for polymeric materialOh, J. A. S. / Danno, A. / Zhai, Wei / Song, Xu et al. | 2017
- 5717
-
Fabrication and performance characterization of miniature axial fansKeramati, Hamed / Chan, Weng-Kong / Miao, Jianmin et al. | 2017
- 5727
-
Nonlinear size-dependent dynamic buckling analysis of embedded micro cylindrical shells reinforced with agglomerated CNTs using strain gradient theoryTohidi, H. / Hosseini-Hashemi, S. H. / Maghsoudpour, A. et al. | 2017
- 5745
-
SiO2 caped Fe3O4 nanostructures as an active heterogeneous catalyst for 4-nitrophenol reductionShah, Muhammad Tariq / Balouch, Aamna / Sirajuddin / Pathan, Ashfaque Ahmed / Abdullah / Mahar, Ali Muhammad / Sabir, Saman / Khattak, Rozina / Umar, Akrajas Ali et al. | 2017
- 5759
-
Optimization for output power and band width in out-of-plane vibration energy harvesters employing electrets theoretically, numerically and experimentallyGao, Chunhui / Gao, Shiqiao / Liu, Haipeng / Jin, Lei / Lu, Junhu / Li, Ping et al. | 2017
- 5771
-
Target ssDNA detection of E.coli O157:H7 through electrical based DNA biosensorRajapaksha, R. D. A. A. / Hashim, U. / Uda, M. N. / Fernando, C. A. N. / Silva, S. N. T. et al. | 2017
- 5781
-
Design and modelling of droplet based microfluidic system enabled by electroosmotic micropumpGallah, Nader / Habbachi, Nizar / Besbes, Kamel et al. | 2017
- 5789
-
A comparative study on the design and simulation of TFBAR and polyimide-TFBAR based RF bandpass filtersDutta, Jyotirmoy / Singh, Atul Vir / Singhal, Sonal / Upadhayay, Madhur Deo et al. | 2017
- 5797
-
Efficiency enhanced novel 3T heads V-beam microactuator for low power applicationsJoshitha, C. / Sreeja, B. S. / Sasi Princy, S. / Radha, S. et al. | 2017
- 5805
-
Impact analysis of convected motion on the carrier frequency of a carrier-driven gyroscope signalWang, Ling / Zhang, Wei / Liu, Yuan-an / Zhang, Zeng-ping / Zhang, Fu-xue et al. | 2017
- 5815
-
Size-dependent static stability of magneto-electro-elastic CNT/MT-based composite nanoshells under external electric and magnetic fieldsFarajpour, A. / Rastgoo, A. et al. | 2017
- 5833
-
Double-sided UV roller imprinting of microstructures on transparent platesChang, Nai-Wen / Yang, Cheng-Huan / Yang, Sen-Yeu et al. | 2017
- 5841
-
Design and development of triple band ACS fed antenna with M and rectangular shaped radiating branches for 2.45/5 GHz wireless applicationsNaidu, Praveen V. / Kumar, Arvind et al. | 2017
- 5849
-
Design and simulation of small size MEMS bimaterial cantilever solar cell using piezoelectric layerMehdizadeh, S. Nazi / Ganji, Bahram Azizollah et al. | 2017
- 5855
-
Analytical modeling and optimization of electret-based microgenerators under sinusoidal excitationsNguyen, Cuong C. / Ranasinghe, Damith C. / Al-Sarawi, Said F. et al. | 2017
- 5867
-
Investigation of parasitic capacitances of In2O5Sn gate electrode recessed channel MOSFET for ULSI switching applicationsKumar, Ajay / Tripathi, M. M. / Chaujar, Rishu et al. | 2017
- 5875
-
Thermoelastic damping in microstretch thermoelastic rectangular platePartap, Geeta / Chugh, Nitika et al. | 2017
- 5887
-
Preparation of hollow out-of-plane hafnium oxide microneedle arrays for transdermal drug deliveryZhang, Yong-hua / Campbell, Stephen A. / Karthikeyan, Sreejith et al. | 2017
- 5893
-
Hydrodynamically efficient micropropulsion through a new artificial cilia beating conceptWu, Yu-An / Panigrahi, Bivas / Chen, Chia-Yuan et al. | 2017
- 5903
-
Comprehensive numerical modeling of the nonlinear structural behavior of MEMS/NEMS electrostatic actuators under the effect of the van der Waals forcesOuakad, Hassen M. et al. | 2017
- 5911
-
Dynamic response of a nanobeam induced by ramp-type heating and subjected to a moving loadAbouelregal, Ahmed E. / Zenkour, Ashraf M. et al. | 2017
- 5921
-
A biocompatible and flexible polyimide for wireless sensorsHerth, Etienne / Guerchouche, Kamel / Rousseau, Lionel / Calvet, Laurie E. / Loyez, Christophe et al. | 2017
- 5931
-
Nonlinear analysis of rotating nanocrystalline silicon microbeams for microgyroscope applicationsGhommem, M. / Abdelkefi, A. et al. | 2017
- 5947
-
Dynamic characterization of fabricated guided two beam and four beam cantilever type MEMS based piezoelectric energy harvester having pyramidal shape seismic massSaxena, Shanky / Sharma, Ritu / Pant, B. D. et al. | 2017
- 5959
-
RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filtersContreras, A. / Casals-Terré, J. / Pradell, L. / Ribó, M. / Heredia, J. / Giacomozzi, F. / Margesin, B. et al. | 2017
- 5977
-
Numerical and experimental study of passive fluids mixing in micro-channels of different configurationsDas, Sankha Shuvra / Tilekar, Shivkant D. / Wangikar, Sandeep S. / Patowari, Promod K. et al. | 2017
- 5989
-
Parametric modeling of a novel longitudinal vibration-based energy harvester using magneto-electro-elastic materialsShirbani, Meisam Moory / Shishesaz, Mohammad / Sedighi, Hamid Mohammad / Hajnayeb, Ali et al. | 2017
- 6005
-
Design, development and implementation of a low power and high speed pipeline A/D converter in submicron CMOS technologyKhan, Muhammad Imran / Qamar, Affaq / Shabbir, Faisal / Shoukat, Rizwan et al. | 2017
- 6015
-
Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeamsLotfi, Maedeh / Moghimi Zand, Mahdi / Isaac Hosseini, Imman / Baghani, Mostafa / Dargazany, Roozbeh et al. | 2017
- 6025
-
Erratum to: Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeamsLotfi, Maedeh / Zand, Mahdi Moghimi / Hosseini, Imman Isaac / Baghani, Mostafa / Dargazany, Roozbeh et al. | 2017
- 6027
-
Erratum to: Micro real-time PCR device using a circulation pumpMun, Byung-Phil / Park, Chang-Ju / Lee, Jae-Kwon / Park, Kyoungsook / Lee, Jong-Hyun et al. | 2017