Electrical activation of boron-implanted silicon during rapid thermal annealing (English)
- New search for: Landi, E.
- New search for: Armigliato, A.
- New search for: Solmi, S.
- New search for: Kögler, R.
- New search for: Wieser, E.
- New search for: Landi, E.
- New search for: Armigliato, A.
- New search for: Solmi, S.
- New search for: Kögler, R.
- New search for: Wieser, E.
In:
Applied Physics A
;
47
, 4
; 359-366
;
1988
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ISSN:
- Article (Journal) / Print
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Title:Electrical activation of boron-implanted silicon during rapid thermal annealing
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Contributors:Landi, E. ( author ) / Armigliato, A. ( author ) / Solmi, S. ( author ) / Kögler, R. ( author ) / Wieser, E. ( author )
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Published in:Applied Physics A ; 47, 4 ; 359-366
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Publisher:
- New search for: Springer-Verlag
- New search for: Springer
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Place of publication:Berlin
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Publication date:1988
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ISSN:
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ZDBID:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 51.00 / 33.60 / 53.09
- Further information on Basic classification
- New search for: 020/3475/3485
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Keywords:
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Classification:
BKL: 51.00 Werkstoffkunde: Allgemeines / 33.60 Kondensierte Materie: Allgemeines / 53.09 Werkstoffe der Elektrotechnik Local classification TIB: 020/3475/3485 -
Source:
Table of contents – Volume 47, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 317
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The electron cut-off wavelength transistorNimtz, G. / Marquardt, P. et al. | 1988
- 319
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Wet-chemical etching of Mn-Zn ferrite by focused Ar+-laser irradiation in H3PO4Lu, Yong Feng / Takai, M. / Nagatomo, S. / Namba, S. et al. | 1988
- 327
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Manganese location and magnetic structure determination of SrMn2—W hexagonal ferrite by means of neutron diffractionLitsardakis, G. / Samaras, D. / Collomb, A. / Mignot, J. P. et al. | 1988
- 333
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An analytical technique for calculation of distributed resistance in a rectangular domainMaldonado, C. D. et al. | 1988
- 347
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The optical kerr effect in small metal particles and metal colloids: The case of goldHache, F. / Ricard, D. / Flytzanis, C. / Kreibig, U. et al. | 1988
- 359
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Electrical activation of boron-implanted silicon during rapid thermal annealingLandi, E. / Armigliato, A. / Solmi, S. / Kögler, R. / Wieser, E. et al. | 1988
- 367
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Brillouin spectroscopy on monodomains of thin polycrystalline layers of molecular crystalsMarx, A. / Krüger, J. K. / Unruh, H. -G. et al. | 1988
- 373
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Bevel fabrication for depth resolved studies of multiple quantum well structuresGermann, R. / Forchel, A. / Weimann, G. et al. | 1988
- 377
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Laser-induced chemical etching of silicon in chlorine atmosphereKullmer, R. / Bäuerle, D. et al. | 1988
- 387
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Nonlinear optical studies of relaxation times of carriers in MBE layers of PbSe and PbEuSeDorbath, K. / Häfele, H. -G. / Tacke, M. / Lambrecht, A. et al. | 1988
- 393
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Layer-by-layer growth of metal overlayersGermar, R. / Dürr, W. / Krewer, J. W. / Pescia, D. / Gudat, W. et al. | 1988
- 399
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Study of recombination reactions of particles adsorbed on fractal and multifractal substrataAlbano, E. V. / Mártin, H. O. et al. | 1988
- 409
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Experimentation with thin single crystal W foils as slow positron transmission mode moderatorsZafar, N. / Chevallier, J. / Jacobsen, F. M. / Charlton, M / Laricchia, G. et al. | 1988
- 413
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Preparation and imaging of macro-bicrystals in thin filmsArita, I. H. / Hernández, R. / Castaño, V. M. et al. | 1988
- 418
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ErratumSchott, K. / Hofmann, K. C. / Schulz, M. et al. | 1988
- A5
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Forthcoming papers| 1988