Effect of vacuum venting and mold wettability on the replication of micro-structured surfaces (English)
- New search for: Sorgato, Marco
- Further information on Sorgato, Marco:
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https://orcid.org/0000-0001-7293-0547
- New search for: Masato, Davide
- New search for: Lucchetta, Giovanni
- New search for: Sorgato, Marco
- Further information on Sorgato, Marco:
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https://orcid.org/0000-0001-7293-0547
- New search for: Masato, Davide
- New search for: Lucchetta, Giovanni
In:
Microsystem Technologies
;
23
, 7
; 2543-2552
;
2016
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Effect of vacuum venting and mold wettability on the replication of micro-structured surfaces
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Contributors:
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Published in:Microsystem Technologies ; 23, 7 ; 2543-2552
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Publisher:
- New search for: Springer Berlin Heidelberg
- New search for: Springer
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Place of publication:Berlin
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Publication date:2016
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ISSN:
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ZDBID:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
- New search for: 50.94
- Further information on Basic classification
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Keywords:
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Classification:
BKL: 50.94 Mikrosystemtechnik, Nanotechnologie -
Source:
Table of contents – Volume 23, Issue 7
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2321
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Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulationLee, Jin-Hyung / Cho, Il-Joo / Ko, Kyungmin / Yoon, Eui-Sung / Park, Hyung-Ho / Kim, Tae Song et al. | 2016
- 2329
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MEMS design and modelling based on resonant gate transistor for cochlear biomimetical applicationLatif, R. / Majlis, B. Y. / Cheung, R. et al. | 2016
- 2343
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Centrifuge-based micromixer with three-dimensional square-wave microchannel for blood plasma mixingKuo, Ju-Nan / Li, Yi-Siou et al. | 2016
- 2355
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Ultraviolet irradiation of lubricant and additives thin films to reduce wear to the magnetic headWah, Lawrence Ng / Kazuo, Nimura / Meng, Yonggang et al. | 2016
- 2363
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Design and experimental validation of a linear piezoelectric micromotor for dual-slider positioningPeng, Yuxin / Wang, Huiying / Wang, Shu / Wang, Jian / Cao, Jie / Yu, Haoyong et al. | 2016
- 2371
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Optimization of structures of DC RF MEMS series switches for low actuationS, Lakshmi / Manohar, Premila / P, Naga Sayanu et al. | 2016
- 2381
-
Frequency response of an electrostatically actuated micro resonator in contact with incompressible fluidJabbari, Ghader / Shabani, Rasoul / Rezazadeh, Ghader et al. | 2016
- 2393
-
Coupled twist–bending static and dynamic behavior of a curved single-walled carbon nanotube based on nonlocal theoryHayati, Hasti / Hosseini, Seyyed Amirhosein / Rahmani, Omid et al. | 2016
- 2403
-
Coupled electromechanical analysis of MEMS-based energy harvesters integrated with nonlinear power extraction circuitsPasharavesh, Abdolreza / Ahmadian, M. T. / Zohoor, H. et al. | 2016
- 2421
-
Experimental study and analysis of unimorph piezoelectric energy harvester with different substrate thickness and different proof mass shapesSunithamani, S. / Lakshmi, P. et al. | 2016
- 2431
-
Higher resonant mode effect on the performance of piezo actuated 2-DOF rectangular cantilever shaped resonators (2-DOF RCR) for liquid viscosity and density sensingSathiya, S. / Vasuki, B. et al. | 2016
- 2447
-
Application of fractional order theory of magneto-thermoelasticity to an infinite perfect conducting body with a cylindrical cavityEzzat, Magdy A. / El-Bary, Alaa. A. et al. | 2016
- 2459
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Modeling and verification of a piezoelectric frequency-up-conversion energy harvesting systemChen, Shun / Ma, Li / Chen, Tao / Liu, Huicong / Sun, Lining / Wang, Jianxiang et al. | 2016
- 2467
-
Fabrication of a silicon based vertical sensitive low-g inertial micro-switch for linear acceleration sensingZhang, Fengtian / Yuan, Mingquan / Jin, Weifeng / Xiong, Zhuang et al. | 2016
- 2475
-
Microfabricated centrifugal pump driven by an integrated synchronous micromotorMatar, M. / Al-Halhouli, A. T. / Dietzel, A. / Büttgenbach, S. et al. | 2016
- 2485
-
Design, modeling and test of a novel compliant orthogonal displacement amplification mechanism for the compact micro-grasping systemChen, Weilin / Zhang, Xianmin / Fatikow, Sergej et al. | 2016
- 2499
-
Precision positioning using a novel six axes compliant nano-manipulatorAkbari, Samin / Pirbodaghi, Tohid et al. | 2016
- 2509
-
Development of a continuous injection direct rolling imprint system for microstructure thin-plateLou, Yan / Wu, Guohui / Li, Jibin / Wang, Haixiong / Bai, Chen et al. | 2016
- 2521
-
Performance and reliability concern scheme for efficient garbage collection and wear leveling on flash memory-based solid state diskAlsalibi, Ahmed Izzat / Sumari, Putra / Alomari, Saleh A. / Al-Betar, Mohammed Azmi et al. | 2016
- 2537
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Shear effect on dynamic behavior of microcantilever beam with manufacturing process defectsBourouina, Hicham / Yahiaoui, Réda / Yusifli, Elmar / Benamar, Mohammed El Amine / Ghoumid, Kamal / Herlem, Guillaume et al. | 2016
- 2543
-
Effect of vacuum venting and mold wettability on the replication of micro-structured surfacesSorgato, Marco / Masato, Davide / Lucchetta, Giovanni et al. | 2016
- 2553
-
A WR-3 dual-band bandpass filter based on parallel coupling structureHuang, Yulin / Li, Xinyi / Bao, Jingfu / Zhao, Xinghai / Zheng, Yingbin / Du, Yijia / Wang, Yiling et al. | 2016
- 2561
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The effect of nonlinear elasticity on the large amplitude free vibration behavior of elastic plates at small scaleZeng, S. / Wang, B. L. et al. | 2016
- 2569
-
Bistability in a symmetric out-of-plane microstructureLucas, T. M. / Porter, D. A. / Beharic, J. / Berfield, T. A. / Harnett, C. K. et al. | 2016
- 2577
-
Analysis of effective vibration frequency of cable-driven parallel robot using mode tracking and quasi-static methodDo, Hyun-Dong / Park, Kyoung-Su et al. | 2016
- 2587
-
Back heating effect of media hot spot at nanoscale head–disk interfaceMyo, Kyaw Sett / Zhou, Weidong / Huang, Xiaoyang / Yu, Peng et al. | 2016
- 2599
-
A resonant microstructure tunability analysis for an out-of-plane capacitive detection MEMS magnetometerSaid, Mohamed Hadj / Tounsi, Farès / Gkotsis, Petros / Mezghani, Brahim / Francis, Laurent A. et al. | 2016
- 2609
-
Evaluation of Si liquid cooling structure with microchannel and TSV for 3D applicationPark, Manseok / Kim, Sungdong / Kim, Sarah Eunkyung et al. | 2016
- 2615
-
Workspace analysis of a 6-DOF cable-driven parallel robot considering pulley bearing friction under ultra-high accelerationHeo, Jun-Mu / Choi, Sung-Hyun / Park, Kyoung-Su et al. | 2016
- 2629
-
Thermal behavior modeling and characteristics analysis of electrothermal microactuatorsShan, Tiqiang / Qi, Xinglin / Cui, Liang / Zhou, Xiaodong et al. | 2016
- 2641
-
Electro-thermo-mechanical nonlinear free vibration of nanobeam resting on the winkler-pasternak foundations based on nonlocal elasticity using differential transform methodZarepour, Misagh / Hosseini, Seyyed Amirhosein / Kokaba, Mohammad Reza et al. | 2016
- 2649
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A novel research on serpentine microchannels of passive micromixersChen, Xueye / Li, Tiechuan / Hu, Zengliang et al. | 2016
- 2657
-
A micropipette system based on low driving voltage carbon nanotube actuatorGoya, Kenji / Fuchiwaki, Yusuke / Tanaka, Masato / Addinall, Raphael / Ooie, Toshihiko / Sugino, Takushi / Asaka, Kinji et al. | 2016
- 2663
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Comparative study of conventional and magnetically coupled piezoelectric energy harvester to optimize output voltage and bandwidthIbrahim, Dauda Sh. / Muthalif, Asan G. A. / Nordin, N. H. Diyana / Saleh, Tanveer et al. | 2016
- 2675
-
Study on solving method for output signal of frequency resonant gyroscopeCao, Le / Fan, Shangchun / Guo, Zhanshe / Li, Cheng et al. | 2016
- 2685
-
Experimental and computational study of gas bubble removal in a microfluidic system using nanofibrous membranesDerami, Hamed Gholami / Vundavilli, Ravindra / Darabi, Jeff et al. | 2016
- 2699
-
Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatformGuo, Lianfeng / Xu, Lei / Xu, Zongke / Duan, Guotao / Wang, Yi / Zhou, Hong / Liu, Yanxiang / Cai, Weiping / Wang, Yuelin / Li, Tie et al. | 2016
- 2707
-
Comparative evaluation of detachable mold fixing methods aimed at low energy loss for ultrasonic nanoimprint lithographyMekaru, Harutaka / Yano, Takayuki et al. | 2016
- 2719
-
Quantitative analysis of temperature effect on SOI piezoresistive pressure sensorsBelwanshi, Vinod / Topkar, Anita et al. | 2016
- 2727
-
Fringing capacitance and tolerance of DRIE effect on the performance of bulk silicon comb-drive actuatorCai, Chunhua / Qin, Ming et al. | 2016
- 2739
-
Buckling of double functionally-graded nanobeam system under axial load based on nonlocal theory: an analytical approachRahmani, O. / Hosseini, S. A. H. / Parhizkari, M. et al. | 2016
- 2753
-
Thermal annealing effects on the stress stability in silicon dioxide films grown by plasma-enhanced chemical vapor depositionFu, Jianyu / Shang, Haiping / Li, Zhigang / Wang, Weibing / Chen, Dapeng et al. | 2016
- 2759
-
Design and simulation of a novel flip-chip structure for THz detector packageHao, Haidong / Tang, Zhen / Lu, Hongda / Cheng, Lifeng / Lv, Xin et al. | 2016
- 2767
-
Efficient batch-mode mixing and flow patterns in a microfluidic centrifugal platform: a numerical and experimental studyMortazavi, Sayyed Mohammad Ali / Tirandazi, Pooyan / Normandie, Modjtaba / Saidi, Mohammad Said et al. | 2016
- 2781
-
Research on a micromachined flexible hot-wire sensor array for underwater wall shear stress measurementTang, Jian / Zhang, Weiping / Liu, Wu / Chen, Honghai / Sun, Yongming et al. | 2016
- 2789
-
Electrostatic tuning in linear regime for 25.9-MHz micromechanical resonator with 120-nm capacitive gapYou, Weilong / Zhang, Lei / Wang, Xiaofei / Wei, Wenshan / Xia, Weifeng / Yang, Heng / Li, Xinxin et al. | 2016
- 2797
-
Simulation of CNT based mass resonator sensor and investigation on the effect of vacancy defect on sensing performancesGharaei, Hassan / Nikfarjam, Alireza / Saniei, Foad / Abbasi, Ahmad et al. | 2016
- 2807
-
Layer-dependent characterization of wear behaviour on variothermal injection moulded micro parts using pin on disc measurementsMeister, Steve / Hertle, Sebastian / Drummer, Dietmar et al. | 2016
- 2815
-
12-inch X-ray optics based on MEMS processIshikawa, Kumi / Ezoe, Yuichiro / Numazawa, Masaki / Ogawa, Tomohiro / Sato, Mayu / Nakamura, Kasumi / Ohashi, Takaya / Mitsuda, Kazuhisa / Maeda, Ryutaro / Hiroshima, Hiroshi et al. | 2016
- 2823
-
Design of a micro manipulation device for cell microinjectionLv, Pin / Zhu, Xiaolu / Ji, Aimin et al. | 2016
- 2833
-
Uncertainty analysis for design and optimization of a micro Coriolis mass flow sensorFeng, Dan / Fan, Shangchun / Zheng, Dezhi / Shi, Huichao et al. | 2016
- 2847
-
Sidewall spacer layer engineering for improvement of analog/RF performance of nanoscale double-gate junctionless transistorsRoy, Debapriya / Biswas, Abhijit et al. | 2016
- 2859
-
Buckling analysis of graphene sheets using nonlocal isogeometric finite element method for NEMS applicationsSoleimani, Ahmad / Naei, Mohammad Hasan / Mashhadi, Mahmoud Mosavi et al. | 2016
- 2873
-
Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrationsInomata, Naoki / Pan, Libao / Wang, Zhuqing / Kimura, Mitsuteru / Ono, Takahito et al. | 2016
- 2881
-
Numerical Investigations on Mixing in Microchannels with Transverse Hydrophobic StripsJaimon, Cletus / Ranjith, S. Kumar et al. | 2016
- 2891
-
Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applicationsSasaki, Takashi / Hayakawa, Yuta / Hane, Kazuhiro et al. | 2016
- 2899
-
Analytical study on effect of piezoelectric patterns on frequency shift and support loss in ring-shaped resonators for biomedical applicationsLiu, Yang / Wang, Dingkang / Wang, Dong F. et al. | 2016
- 2911
-
Warpage of embossed thermoplastic substrates and the effects on solvent bondingChen, Pin-Chuan / Yen, Ya-Chiao et al. | 2016
- 2921
-
Investigation of asymmetric high-k underlap spacer (AHUS) hybrid FinFET from temperature perspectivePradhan, K. P. / Sahu, P. K. et al. | 2016
- 2927
-
Development of thick film, CMOS compatible planar millimetre-wave antenna for antennas in package applicationsSandoval Granados, L. K. / Murphy Arteaga, R. S. et al. | 2016
- 2931
-
Modeling the effect of microstructure on the coupled torsion/bending instability of rotational nano-mirror in Casimir regimeKeivani, M. / Koochi, A. / Mokhtari, J. / Abadian, N. / Abadyan, M. et al. | 2016
- 2943
-
Polyurethane-rubber punching process for micro-hole arraysSun, Jing / Zhou, Shining / Yang, Xiaolong / Xing, Yingjie / Liu, Xin et al. | 2016
- 2951
-
A smartphone-based point-of-care diagnosis of H1N1 with microfluidic convection PCRQiu, Xianbo / Ge, Shengxiang / Gao, Pengfei / Li, Ke / Yang, Shuo / Zhang, Shiyin / Ye, Xiangzhong / Xia, Ningshao / Qian, Shizhi et al. | 2016
- 2957
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Facile fabrication of helical microfluidic channel based on rope coiling effectYang, Wei-min / Zhu, Tang-kui / Jin, Yu-an / Fu, Jian-zhong et al. | 2016
- 2965
-
Low-noise and small-area integrated amplifier circuit for mems-based implantable hearing aid applicationsZargarpour, Nazli / Abdi, Hamid / Bahador, Hamid Jangi et al. | 2016
- 2973
-
Non-linear static stability of bi-layer carbon nanosheets resting on an elastic matrix under various types of in-plane shearing loads in thermo-elasticity using nonlocal continuumMalikan, Mohammad / Jabbarzadeh, Mehrdad / Dastjerdi, Shahriar et al. | 2016
- 2993
-
Development of a novel large stroke 2-DOF micromanipulator for micro/nano manipulationXiao, Xiao / Li, Yangmin / Xiao, Shunli et al. | 2016
- 3005
-
Reducing electrowetting-on-dielectric actuation voltage using a novel electrode shape and a multi-layer dielectric coatingSamad, M. F. / Kouzani, Abbas Z. / Hossain, M. F. / Mohammed, M. I. / Alam, M. N. H. et al. | 2016
- 3015
-
Erratum to: Dynamic analysis of a recirculation system of micro functional fluids for ink-jet applicationsArango, Ivan / Cañas, Manuel et al. | 2017
- 3017
-
Erratum to: Temperature control and readout circuit interface for Mox based $ NH_{3} $ gas sensorSharma, Dharmendra Kumar / Dwara, Rama Sai Vinay / Botre, B. A. / Akbar, S. A. / Kishore, Kaushal et al. | 2017