Integrated thermopile vacuum gauge with an XeF2 dry-etching process (English)
- New search for: Sun, Xiao
- New search for: Xu, Dehui
- New search for: Xiong, Bin
- New search for: Wang, Yuelin
- New search for: Sun, Xiao
- New search for: Xu, Dehui
- New search for: Xiong, Bin
- New search for: Wang, Yuelin
In:
Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems
;
228
, 3
;
154-158
;
2014
- Article (Journal) / Electronic Resource
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Title:Integrated thermopile vacuum gauge with an XeF2 dry-etching process
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Contributors:
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Published in:
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Publisher:
- New search for: SAGE Publications
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Publication date:2014-09-01
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Size:5 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 228, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 114
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A low-cost uncooled infrared aluminum microbolometer in a standard CMOS technologyShen, Ning / Tang, Zhen’an / Feng, Chong et al. | 2014
- 119
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Study on the channel effect of deposition characteristics of neutral atoms in the laser standing wave fieldBaohua, Zhu / Wentao, Zhang / Jiejun, Wang / Xianming, Xiong / Yuxin, Xiao et al. | 2014
- 124
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The research of micro–nano laser patterning system based on digital micromirror deviceHu, Jin / Pu, Dong-lin / Chen, Lin-sen et al. | 2014
- 129
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Natural convection heat and mass transfer from a sphere in non-Newtonian nanofluidsKumari, Mahesh / Subba Reddy Gorla, Rama et al. | 2014
- 139
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Two-stage decoupled micro-machined gyroscope and noncontact vibration testFenglin, Yao / Shiqiao, Gao / Jie, Zhao / Haipeng, Liu / Shaohua, Niu / Lei, Jin et al. | 2014
- 146
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Research on novel cathode structure of air-breathing micro-direct methanol fuel cellDeng, Huichao / Zhang, Yufeng / Li, Yang / Zhang, Xuelin / Liu, Xiaowei et al. | 2014
- 154
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Integrated thermopile vacuum gauge with an XeF2 dry-etching processSun, Xiao / Xu, Dehui / Xiong, Bin / Wang, Yuelin et al. | 2014