SOI/DRIE all-fiber optical switch for high-power applications (English)
- New search for: Liu, Jing
- New search for: Fan, Lawrence
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- New search for: Liu, Jing
- New search for: Fan, Lawrence
- New search for: DeVoe, Don L.
In:
Proc. SPIE
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4983
; 65
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2003
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:SOI/DRIE all-fiber optical switch for high-power applications
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Contributors:
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Conference:MOEMS and Miniaturized Systems III ; 2003 ; San Jose,CA,United States
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Published in:Proc. SPIE ; 4983 ; 65
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Publisher:
- New search for: SPIE
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Publication date:2003-01-21
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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European roadmaps for MOEMS applicationsSalomon, Patric R. et al. | 2003
- 1
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European roadmaps for MOEMS applications (Invited Paper) [4983-02]Salomon, P. R. / International Society for Optical Engineering et al. | 2003
- 11
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Novel optoelectronic methodology for testing MOEMS (Invited Paper) [4983-03]Pryputniewicz, R. J. / Furlong, C. / International Society for Optical Engineering et al. | 2003
- 11
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Novel optoelectronic methodology for testing of MOEMSPryputniewicz, Ryszard J. / Furlong, Cosme et al. | 2003
- 26
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Measurement of thermal-mechanical noise in MEMS microstructures [4983-04]Stievater, T. H. / Rabinovich, W. S. / Newman, H. S. / Mahon, R. / Goetz, P. G. / Ebel, J. L. / McGee, D. J. / International Society for Optical Engineering et al. | 2003
- 26
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Measurement of thermal-mechanical noise in MEMS microstructuresStievater, Todd H. / Rabinovich, William S. / Newman, Harvey S. / Mahon, Rita / Goetz, Peter G. / Ebel, Jack L. / McGee, David J. et al. | 2003
- 34
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Integrated otpical monitoring of MEMS for closed-loop controlDawson, Jeremy M. / Wang, Limin / McCormick, W. B. / Rittenhouse, S. A. / Famouri, Parviz F. / Hornak, Lawrence A. et al. | 2003
- 34
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Integrated optical monitoring of MEMS for closed-loop control [4983-05]Dawson, J. M. / Wang, L. / McCormick, W. B. / Rittenhouse, S. A. / Famouri, P. F. / Hornak, L. A. / International Society for Optical Engineering et al. | 2003
- 44
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Fiber optic switch concept with analog micromirror deviceLausch, Christine / Goering, Rolf / Wippermann, Frank et al. | 2003
- 44
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Fiber optic switch concept with analog micromirror device [4983-39]Lausch, C. / Goering, R. / Wippermann, F. / International Society for Optical Engineering et al. | 2003
- 53
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Single-chip 1x84 MEMS mirror array for optical telecommunication applications (Invited Paper) [4983-06]Juneau, T. N. / Chen, T. / Brosnihan, T. / Rajaraman, S. / Chau, K. H. / Judy, M. / International Society for Optical Engineering et al. | 2003
- 53
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Single-chip 1×84 MEMS mirror array for optical telecommunication applicationsJuneau, Thor N. / Chen, Tony / Brosnihan, Tim / Rajaraman, Swaminathan / Chau, Kevin H. / Judy, Michael et al. | 2003
- 65
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SOI/DRIE all-fiber optical switch for high-power applicationsLiu, Jing / Fan, Lawrence / DeVoe, Don L. et al. | 2003
- 65
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SOI/DRIE all-fiber optical switch for high-power applications [4983-07]Liu, J. / Fan, L. / DeVoe, D. L. / International Society for Optical Engineering et al. | 2003
- 75
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High-power optical microswitch fabricated by deep reactive ion etching (DRIE)Cochran, Kevin R. / Fan, Lawrence / DeVoe, Don L. et al. | 2003
- 75
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High-power optical microswitch fabricated by deep reactive ion etching (DRIE) [4983-08]Cochran, K. R. / Fan, L. / DeVoe, D. L. / International Society for Optical Engineering et al. | 2003
- 87
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Stress and curvature in MEMS mirrorsGass, Fawn R. / Dagel, Daryl J. / Adams, David P. / Grossetete, Grant D. / Blum Spahn, Olga / Kemme, Shanalyn A. / Mani, Seethambal S. / Malloy, Kevin J. et al. | 2003
- 87
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Stress and curvature in MEMS mirrors [4983-09]Gass, F. R. / Dagel, D. J. / Adams, D. P. / Grossetete, G. D. / Spahn, O. B. / Kemme, S. A. / Mani, S. S. / Malloy, K. J. / International Society for Optical Engineering et al. | 2003
- 94
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Optical system properties of a reconfigurable MEMS interconnectKemme, Shanalyn A. / Blum-Spahn, Olga / Gass, Fawn R. / Dagel, Daryl J. / Grossetete, Grant D. et al. | 2003
- 94
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Optical system properties of a reconfigurable MEMS interconnect [4983-10]Kemme, S. A. / Spahn, O. B. / Gass, F. R. / Dagel, D. J. / Grossetete, G. D. / International Society for Optical Engineering et al. | 2003
- 102
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MOEMS device design, development, and integration for interconnect applications [4983-11]Castracane, J. / Xu, B. / Madison, S. / Verheggen, J. / Yan, D. / International Society for Optical Engineering et al. | 2003
- 102
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MOEMS device design, development, and integration for interconnect applicationsCastracane, James / Xu, Bai / Madison, Seth / Verheggen, Jaap / Yan, Dong et al. | 2003
- 109
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Development of 1x4 micro-optical switch based on SOI vertical micromirror technology [4983-12]Wang, Z. F. / Shan, X. C. / Wang, Z. P. / Cao, W. Q. / Xu, J. F. / Lim, S. P. / Noell, W. / de Rooij, N. F. / International Society for Optical Engineering et al. | 2003
- 109
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Development of 1×4 micro optical switch based on SOI vertical micromirror technologyWang, Zhenfeng P. / Shan, Xue Chuan / Wang, Zhiping / Cao, Wenqing / Xu, Jianfeng / Lim, Siak-Piang / Noell, Wilfried / de Rooij, Nico F. et al. | 2003
- 114
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Out-of-plane rotary micromirrors for reconfigurable photonic applicationsDagel, Daryl J. / Blum Spahn, Olga / Allen, James J. / Kemme, Shanalyn A. / Grossetete, Grant D. / Gass, Fawn R. et al. | 2003
- 114
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Out-of-plane rotary micromirrors for reconfigurable photonic applications [4983-13]Dagel, D. J. / Spahn, O. B. / Allen, J. J. / Kemme, S. A. / Grossetete, G. D. / Gass, F. R. / International Society for Optical Engineering et al. | 2003
- 122
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Microelectromechanical optical switch [4983-14]Mukhurov, N. I. / Efremov, G. I. / International Society for Optical Engineering et al. | 2003
- 122
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Microelectromechanical optical switchMukhurov, Nikolay I. / Efremov, Georgy I. et al. | 2003
- 127
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Thin-film-technology-based micro-Fourier spectrometer [4983-15]Knipp, D. / Stiebig, H. / Bhalotra, S. R. / Kung, H. L. / Miller, D. A. B. / International Society for Optical Engineering et al. | 2003
- 127
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Thin-film-technology-based micro-Fourier spectrometerKnipp, Dietmar / Stiebig, Helmut / Bhalotra, Sameer R. / Kung, Helen L. / Miller, David A. B. et al. | 2003
- 139
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Miniature thermoacoustic cryocooler driven by a vertical comb-driveHao, Zhili / Fowler, Mark / Hammer, Jay A. / Whitley, Michael R. / Brown, David et al. | 2003
- 139
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Miniature thermoacoustic cryocooler driven by a vertical comb-drive [4983-16]Hao, Z. / Fowler, M. / Hammer, J. A. / Whitley, M. R. / Brown, D. / International Society for Optical Engineering et al. | 2003
- 149
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Micromachined near-field probe arrays [4983-17]Srinivasan, P. / Beyette, F. R. / Papautsky, I. / International Society for Optical Engineering et al. | 2003
- 149
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Micromachined near-field probe arraysSrinivasan, Pradeep / Beyette, Fred R. / Papautsky, Ian et al. | 2003
- 159
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Novel micro fiber spectrometer [4983-18]Wen, Z. / Chen, G. / Huang, S. / International Society for Optical Engineering et al. | 2003
- 159
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Novel micro fiber spectrometerWen, Zhiyu / Chen, Gang / Huang, Shanglian et al. | 2003
- 167
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DWDM variable attenuator and multiple-channel power equalizer using MEMS technology [4983-19]Liu, A. Q. / Zhang, X. M. / Chan, C. W. / Thian, C. S. / Wang, F. / Lu, C. / Liu, Z. S. / International Society for Optical Engineering et al. | 2003
- 167
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DWDM variable attenuator and multiple-channel power equlizer using MEMS technologyLiu, Ai Q. / Zhang, Xu M. / Wei, Chan C. / Sheong, Thian C. / Wang, F. / Lu, C. / Liu, Zishun et al. | 2003
- 172
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MOEMS spatial light modulator development at the Center for Adaptive OpticsKrulevitch, Peter A. / Bierden, Paul A. / Bifano, Thomas / Carr, Emily / Dimas, Clara E. / Dyson, Harold / Helmbrecht, Michael A. / Kurczynski, Peter / Muller, Richard S. / Olivier, Scot S. et al. | 2003
- 179
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Micromachined VOA with perpendicularly aligned tapered optic fibers [4983-20]Jung, S. / Hong, Y. / Lee, J. / Lee, Y. / International Society for Optical Engineering et al. | 2003
- 179
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Micromachined VOA with perpendicularly aligned tapered optic fibersJung, Sungcheon / Hong, Yoonshik / Lee, Junghyun / Lee, Yeoungyu et al. | 2003
- 180
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Improved vision by eye aberration correction using an active-matrix-addressed micromirror arrayGehner, Andreas / Wildenhain, Michael / Doleschal, Wolfgang / Elgner, Andreas / Schenk, Harald / Lakner, Hubert et al. | 2003
- 188
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Widely tunable lasers using MEMS gratings and mirrorsZhang, Xu M. / Li, J. / Tang, Ding Y. / Lu, Chao / Liu, Ai Q. et al. | 2003
- 188
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Widely tunable lasers using MEMS gratings and mirrors [4983-21]Zhang, X. M. / Li, J. / Tang, D. Y. / Lu, C. / Liu, A. Q. / International Society for Optical Engineering et al. | 2003
- 193
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MEMS spatial light modulators with integrated electronicsBecker, Thomas / Bifano, Thomas G. / Lee, Hocheol / Miller, Michele / Bierden, Paul A. / Cornelissen, Steven et al. | 2003
- 195
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Micromachined in-plane tunable optical filter using thermo-optic effectYun, Sungsik / Lee, Jong H. et al. | 2003
- 195
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Micromachined in-plane tunable optical filter using thermo-optic effect [4983-23]Yun, S. S. / Lee, J. H. / International Society for Optical Engineering et al. | 2003
- 203
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Bionics: precise color tuning by interference in nature and technology: applications in surface-micromachined 1.55-mum vertical air-cavity filters [4983-24]Hillmer, H. / Daleiden, J. / Prott, C. / Irmer, S. / Romer, F. / Ataro, E. / Tarraf, A. / Ruhling, H. / Maniak, M. / Strassner, M. et al. | 2003
- 203
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Bionics: prcise color tuning by interference in nature and technology-applications in surface-micromachined 1.55μm vertical air-cavity filtersHillmer, Hartmut / Daleiden, Juergen / Prott, Cornelia / Irmer, Soeren / Roemer, Friedhard / Ataro, Edwin / Tarraf, Amer / Ruehling, H. / Maniak, Markus / Strassner, Martin et al. | 2003
- 204
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Large-scale polysilicon surface-micromachined spatial light modulatorDimas, Clara E. / Perreault, Julie / Cornelissen, Steven / Dyson, Harold / Krulevitch, Peter / Bierden, Paul / Bifano, Thomas et al. | 2003
- 215
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Tunable Fabry-Perot interferometer for 3- to 4.5-mum wavelength with bulk micromachined reflector carrier [4983-25]Kurth, S. / Hiller, K. / Neumann, N. / Heinze, M. / Dotzel, W. / Gessner, T. / International Society for Optical Engineering et al. | 2003
- 215
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Tunable Fabry-Perot-Interferometer for 3-5 μm wavelength with bulk micromachined reflector carrierKurth, Steffen / Hiller, Karla / Neumann, Norbert / Heinze, Matthias / Doetzel, Wolfram / Gessner, Thomas et al. | 2003
- 227
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MOEMS spatial light modulator development at the Center for Adaptive Optics [4983-26]Krulevitch, P. A. / Bierden, P. A. / Bifano, T. G. / Carr, E. / Dimas, C. E. / Dyson, H. / Helmbrecht, M. A. / Kurczynski, P. / Muller, R. S. / Olivier, S. S. et al. | 2003
- 230
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A micromachined deformable mirror for adaptive opticsSchwartz, Wilfrid / Divoux, Claire / Margail, Jacques / Jocou, Laurent / Charton, Julien / Stadler, Eric / Jager, Thomas / Casset, Fabrice / Enot, T. et al. | 2003
- 235
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Improved vision by eye aberration correction using an active-matrix addressed micromirror array (Invited Paper) [4983-27]Gehner, A. / Wildenhain, M. / Doleschal, W. / Elgner, A. / Schenk, H. / Lakner, H. K. / International Society for Optical Engineering et al. | 2003
- 242
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DLP switched blaze grating: the heart of optical signal processingDuncan, Walter M. / Lee, Benjamin L. / Rancuret, Paul / Sawyers, Bryce D. / Endsley, Lynn / Powell, Donald et al. | 2003
- 248
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MEMS spatial light modulators with integrated electronics [4983-28]Becker, T. / Bifano, T. G. / Lee, H. / Miller, M. / Bierden, P. A. / Cornelissen, S. / International Society for Optical Engineering et al. | 2003
- 250
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Electrostatically actuated membrane mirrors for adaptive opticsKurczynski, Peter / Bogart, Gregory R. / Lai, Warren Y. / Lifton, Victor / Mansfield, William M. / Tyson, J. Anthony / Sadoulet, Bernard / Williams, David R. et al. | 2003
- 259
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Design and fabrication of a continuous membrane deformable mirrorHammer, Jay A. / Banish, Michele R. / Whitley, Michael R. / Hao, Zhili / Warren, Keith O. / Sanchez, Sharon / Harchanko, John S. et al. | 2003
- 259
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Large-scale polysilicon surface-micromachined spatial light modulator [4983-29]Dimas, C. E. / Perreault, J. / Cornelissen, S. / Dyson, H. / Krulevitch, P. A. / Bierden, P. A. / Bifano, T. G. / International Society for Optical Engineering et al. | 2003
- 266
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Characterization of spatial light modulators for microlithography [4985-18]Durr, P. / Dauderstadt, U. / Kunze, D. / Auvert, M. / Bakke, T. / Schenk, H. / Lakner, H. K. / International Society for Optical Engineering et al. | 2003
- 271
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Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrorsYang, Eui-Hyeok / Shcheglov, Kirill / Trolier-McKinstry, Susan et al. | 2003
- 277
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Operation of spatial light modulators in DUV light [4985-19]Dauderstadt, U. / Durr, P. / Krellmann, M. / Karlin, T. / Berzinsh, U. / Leonardsson, L. / Wendrock, H. / International Society for Optical Engineering et al. | 2003
- 285
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A micromachined deformable mirror for adaptive optics [4983-31]Schwartz, W. / Divoux, C. / Margail, J. / Jocou, L. / Charton, J. / Stadler, E. / Jager, T. / Casset, F. / Enot, T. / International Society for Optical Engineering et al. | 2003
- 287
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Nodal model for continuous face sheet deformable mirrorsPapavasiliou, Alexandros P. et al. | 2003
- 297
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DLP switched blaze grating: the heart of optical signal processing (Invited Paper) [4983-38]Duncan, W. M. / Lee, B. L. / Rancuret, P. / Sawyers, B. D. / Endsley, L. / Powell, D. / International Society for Optical Engineering et al. | 2003
- 305
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Electrostatically actuated membrane mirrors for adaptive optics [4983-32]Kurczynski, P. A. / Bogart, G. R. / Lai, W. Y.-C. / Lifton, V. / Mansfield, W. M. / Tyson, J. A. / Sadoulet, B. / Williams, D. R. / International Society for Optical Engineering et al. | 2003
- 314
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Design and fabrication of a continuous membrane deformable mirror [4983-33]Hammer, J. A. / Banish, M. R. / Whitley, M. R. / Hao, Z. / Warren, K. O. / Sanchez, S. / Harchanko, J. S. / International Society for Optical Engineering et al. | 2003
- 326
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Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors [4983-34]Yang, E.-H. / Shcheglov, K. / Trolier-McKinstry, S. / International Society for Optical Engineering et al. | 2003
- 334
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Technological approaches for fabrication of elastomer-based spatial light modulators [4985-20]Sakarya, S. / Vdovin, G. V. / Sarro, P. M. / International Society for Optical Engineering et al. | 2003
- 342
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Nodal model for continuous face sheet deformable mirrors [4983-35]Papavasiliou, A. P. / International Society for Optical Engineering et al. | 2003
- 351
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Off-axis variable focus and aberration control mirrors [4985-21]Himmer, P. A. / Dickensheets, D. L. / International Society for Optical Engineering et al. | 2003
- 359
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Fabrication of micromachined focusing mirrors with seamless reflective surface [4983-36]Hou, M. T.-K. / Liao, K.-M. / Yeh, H.-Z. / Cheng, B.-W. / Hong, P.-Y. / Chen, R. / International Society for Optical Engineering et al. | 2003
- 359
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Fabrication of micromachined focusing mirrors with seamless reflective surfaceHou, Max Ti-Kuang / Liao, Ke-Min / Yeh, Hong-Zhen / Cheng, Bo-Wen / Hong, Pei-Yuan / Chen, Rongshun et al. | 2003
- xiii
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Micropackaging technologies for integrated microsystems: applications to MEMS and MOEMS [4979-200]Najafi, K. / International Society for Optical Engineering et al. | 2003
- xxxiii
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NEXUS: roadmaps and applications [4979-201]El-Fatatry, A. / International Society for Optical Engineering et al. | 2003
- xxxix
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MEMS and MOEMS for National Security applications [4979-202]Scott, M. W. / International Society for Optical Engineering et al. | 2003