Automatic Flatness Tester For Very Large Scale Integrated Circuit Wafers (Unknown)
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- New search for: Nakano, Hideki
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- New search for: Yatagai, Toyohiko
- New search for: Inaba, Shigeru
- New search for: Nakano, Hideki
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In:
Optical Engineering
;
23
, 4
;
234401
;
1984
- Article (Journal) / Electronic Resource
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Title:Automatic Flatness Tester For Very Large Scale Integrated Circuit Wafers
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Additional title:Opt. Eng.
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Contributors:Yatagai, Toyohiko ( author ) / Inaba, Shigeru ( author ) / Nakano, Hideki ( author ) / Suzuki, Masane ( author )
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Published in:Optical Engineering ; 23, 4 ; 234401
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Publisher:
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Publication date:1984-08-01
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:Unknown
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Source:
Table of contents – Volume 23, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 443
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Threshold Laser Powers Of Textured Optical Storage MediaNiklasson, G. A. / Craighead, H. G. et al. | 1984
- 234100
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Forum: Strobe Photography: A Brief HistoryEdgerton, Harold E. et al. | 1984
- 234349
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Guest Editorial Precision Surface MetrologyWyant, James C. et al. | 1984
- 234350
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Generalized Data Reduction For Heterodyne InterferometryGreivenkamp, J. E. et al. | 1984
- 234353
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Stability Of A Lateral-Shearing Heterodyne Twyman-Green InterferometerSeligson, J. L. / Callari, C. A. / Greivenkamp, J. E. / Ward, J. W. et al. | 1984
- 234357
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Aspherical Surface Testing With Shearing Interferometer Using Fringe Scanning Detection MethodYatagai, Toyohiko / Kanou, Toshio et al. | 1984
- 234361
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Instantaneous Phase Measuring InterferometrySmythe, R. / Moore, R. et al. | 1984
- 234365
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Optical Heterodyne ProfilometerHuang, C C. et al. | 1984
- 234371
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Charge-Coupled Device Image Acquisition For Digital Phase Measurement InterferometryPrettviohns, Keith N. et al. | 1984
- 234379
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Absolute Calibration Of An Optical FlatFritz, Bernard S. et al. | 1984
- 234384
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Set Of Orthonormal Surface Error Descriptors For Near-Cylindrical OpticsGlenn, Paul et al. | 1984
- 234391
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Interferometric Phase Measurement Using Spatial Synchronous DetectionWomack, K. H. et al. | 1984
- 234396
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Frequency Domain Description Of Interferogram AnalysisWomack, K. H. et al. | 1984
- 234401
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Automatic Flatness Tester For Very Large Scale Integrated Circuit WafersYatagai, Toyohiko / Inaba, Shigeru / Nakano, Hideki / Suzuki, Masane et al. | 1984
- 234406
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Calculation Of Surface Statistics From Light ScatterStover, John C. / Serati, Steven A. / Gillespie, Calvin H. et al. | 1984
- 234413
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System Design Considerations In Bar-Code Laser ScanningBarkan, Eric / Swartz, Jerome et al. | 1984
- 234421
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Application Of Floquet Theory To The Laser Field-Molecule Interaction ProblemBruzzese, R. / d'Ambrosio, C. / Lancellotti, B. / Sacerdoti, G. et al. | 1984
- 234426
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Straightness Measurement System For SlitsHuang, C. C. / Hodor, J. R. et al. | 1984
- 234431
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Optimal Electronics Response For Parallel Thermal Imaging SystemsVortman, J. / Bar-Lev, A. et al. | 1984
- 234436
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Characterization Of Rotating Flexible Disks Using A Laser Doppler VibrometerWlezien, R. w. / Miu, D. K. / Kibens, V. et al. | 1984
- 234448
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Optical System For Target Acquisition And RangingTam, S. C. et al. | 1984
- 234453
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Speckle Statistics With A Small Number Of ScatterersJakeman, E. et al. | 1984
- 234462
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Infrared Heterodyning Using Silver Halide FibersKatzir, A. / Simhony, S. / Salzman, J. / Schoenberg, A. / Kapon, E. et al. | 1984
- 234465
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Germanate Glass Optical Fibers For 2 To 3 μm Band Fabricated By Vapor-Phase Axial Deposition MethodTakahashi, H. / Sugimoto, I. / Sato, T. / Yoshida, S. et al. | 1984
- 234470
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Laser Chemical Vapor Deposition Using Continuous Wave And Pulsed LasersAllen, S. D. / Trigubo, A. B. / Liu, Y. C. et al. | 1984
- 234475
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Applications Of Lasers To Magnetic Confinement Fusion PlasmasDanielewicz, E. J. / Luhmann, Jr., N. C. / Peebles, W. A. et al. | 1984
- 244106
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Book ReviewsBruegge, Tom et al. | 1984