TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers (English)
- New search for: Taylor, Patrick A.
- New search for: Dawson, Dean J.
- New search for: Taylor, Patrick A.
- New search for: Dawson, Dean J.
In:
Proc. SPIE
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3619
; 128
;
1999
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers
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Contributors:Taylor, Patrick A. ( author ) / Dawson, Dean J. ( author )
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Conference:Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays ; 1999 ; San Jose,CA,USA
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Published in:Proc. SPIE ; 3619 ; 128
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Publisher:
- New search for: SPIE
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Publication date:1999-03-29
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2
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Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devices [3619-01]Bloomer, I. / Harrison, D. / Prakash, S. / Zhang, K. / SPIE et al. | 1999
- 2
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Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devicesBloomer, Iris / Harrison, Dale A. / Prakash, Shiva / Zhang, Kai / Lian, Sean et al. | 1999
- 18
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Measurements of thin film disks by surface reflectance analysis [3619-02]Klein, D. L. / Vurens, G. H. / SPIE et al. | 1999
- 18
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Measurements of thin film disks by surface reflectance analysisKlein, David / Vurens, Gerard H. et al. | 1999
- 27
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Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers [3619-03]Vurens, G. H. / Klein, D. L. / SPIE et al. | 1999
- 27
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Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzersVurens, Gerard H. / Klein, David et al. | 1999
- 35
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Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MSCamenzind, Mark J. / Ahmed, Latif / Kumar, Anurag et al. | 1999
- 35
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Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS [3619-04]Camenzind, M. / Ahmed, L. / Kumar, A. / SPIE et al. | 1999
- 48
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BeamM2AP: real-time focus, alignment, and M2measurement of tightly focussed laser beamsMacGregor, Andrew D. / Garvey, Steven E. et al. | 1999
- 48
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BeamM^2Ap: real-time focus, alignment, and M^2 measurement of tightly focused laser beams [3619-20]MacGregor, A. D. / Garvey, S. E. / SPIE et al. | 1999
- 53
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MR glide inspection for hard disk defect detection [3619-05]Boyd, M. E. / Xu, X. / SPIE et al. | 1999
- 53
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MR glide inspection for hard disk defect detectionBoyd, Michael E. / Xu, Xiaopeng et al. | 1999
- 65
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Modeled and measured scatter from viasStover, John C. / Scheer, Craig A. / Ivakhnenko, Vladimir I. / Eremin, Yuri A. / Grishina, Natalia et al. | 1999
- 65
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Modeled and measured scatter from vias [3619-07]Stover, J. C. / Scheer, C. A. / Ivakhnenko, V. I. / Eremin, Y. / SPIE et al. | 1999
- 72
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Measurement of scatter from PSL standard spheres deposited on disk surfaces [3619-08]Scheer, C. A. / Stover, J. C. / SPIE et al. | 1999
- 72
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Measurement of scatter from PSL standard spheres deposited on disk surfacesScheer, Craig A. / Stover, John C. et al. | 1999
- 80
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Polarization of light scattered by particles on silicon wafersSung, Lipiin / Mulholland, George W. / Germer, Thomas A. et al. | 1999
- 80
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Polarization of light scattered by particles on silicon wafers [3619-09]Sung, L. / Mulholland, G. W. / Germer, T. A. / SPIE et al. | 1999
- 92
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High-speed interferometric aluminum disk blank testerOlszak, Artur G. / Stumpe, Ken / Copenhaver, Raymond M. / Angeli, George Z. et al. | 1999
- 92
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High-speed interferometric aluminum disk blank tester [3619-10]Olszak, A. G. / Stumpe, K. / Copenhaver, R. M. / Angeli, G. Z. / SPIE et al. | 1999
- 101
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Laser Fizeau interferometer for silicon wafer site flatness testing [3619-11]Novak, E. / Olszak, A. G. / Stumpe, K. / Knowlden, R. E. / SPIE et al. | 1999
- 101
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Laser Fizeau interferometer for silicon wafer site flatness testingNovak, Erik / Olszak, Artur G. / Stumpe, Ken / Knowlden, Robert E. / Malevanchik, Leonid / Angeli, George Z. et al. | 1999
- 112
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Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans [3619-13]Rothe, H. / Hueser, D. / Kasper, A. / Rinder, T. / SPIE et al. | 1999
- 112
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Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scansRothe, Hendrik / Hueser, Dorothee / Kasper, Andre / Rinder, Thomas et al. | 1999
- 121
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Roughness characterization of ultrasmooth surfaces using common-path interferometry [3619-16]Wang, B. S. / Marchese-Ragona, S. P. / Bristow, T. C. / SPIE et al. | 1999
- 121
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Roughness characterization of ultrasmooth surfaces using common-path interferometryWang, Baishi / Marchese-Ragona, S. P. / Bristow, Thomas C. et al. | 1999
- 128
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TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers [3619-18]Taylor, P. A. / Dawson, D. J. / SPIE et al. | 1999
- 128
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TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafersTaylor, Patrick A. / Dawson, Dean J. et al. | 1999