Front Matter: Volume 8466 (English)
Free access
In:
Proc. SPIE
;
8466
; 846601
-
ISBN:
-
ISSN:
- Conference paper / Electronic Resource
-
Title:Front Matter: Volume 8466
-
Conference:Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI ; 2012 ; San Diego,California,USA
-
Published in:Proc. SPIE ; 8466 ; 846601
-
Publisher:
- New search for: SPIE
-
ISBN:
-
ISSN:
-
DOI:
-
Type of media:Conference paper
-
Type of material:Electronic Resource
-
Language:English
-
Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 846601
-
Front Matter: Volume 8466
-
In-line control and characterization of nanomaterials synthesis from hyperspectral polarimetric light scattering: an experimental method [8466-5]Ceolato, R. / Riviere, N. / Biscans, B. / SPIE (Society) et al. | 2012
-
Optical testing for meter size aspheric optics [8466-26]Su, P. / Oh, C.J. / Zhao, C. / Burge, J.H. / SPIE (Society) et al. | 2012
-
Multiple-order imaging for optical critical dimension metrology using microscope characterization [8466-14]Qin, J. / Zhou, H. / Barnes, B.M. / Goasmat, F. / Dixson, R. / Silver, R.M. / SPIE (Society) et al. | 2012
-
Plasmonic-enhanced infrared photoexpansion nano-spectroscopy using tunable quantum cascade lasers [8466-17]Lu, F. / Belkin, M.A. / SPIE (Society) et al. | 2012
-
Metrology and instrumentation challenges with high-rate, roll-to-roll manufacturing of flexible electronic systems [8466-2]Subbaraman, H. / Lin, X. / Xu, X. / Dodabalapur, A. / Guo, L.J. / Chen, R.T. / SPIE (Society) et al. | 2012
-
A large-scale ceramic package of the CMOS image sensor chip for remote sensing application [8466-20]Chang, C.-H. / Ling, J. / Lo, S.-H. / Hsu, W.-C. / Liu, C. / SPIE (Society) et al. | 2012
-
A portable modular optical sensor capable of measuring complex multi-axis strain fields [8466-24]Zhao, W. / Beck, B.T. / Peterman, R.J. / Wu, C.-H.J. / SPIE (Society) et al. | 2012
-
Defect inspection strategies for 14 nm semiconductor technology [8466-6]Buengener, R. / SPIE (Society) et al. | 2012
-
Blue irradiance intercomparison in the medical field [8466-10]Ferreira, A.F.G. / SPIE (Society) et al. | 2012
-
Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors [8466-27]Wood, T. / Le Rouzo, J. / Flory, F. / Coudray, P. / Mastelaro, V.R. / Pelissari, P. / Zilio, S. / SPIE (Society) et al. | 2012
-
Advances in metrology for the determination of Young's modulus for low-k dielectric thin films [8466-9]King, S.W. / Antonelli, G.A. / Stan, G. / Cook, R.F. / Sooryakumar, R. / SPIE (Society) et al. | 2012
-
Active retroreflector to measure the rotational orientation in conjunction with a laser tracker [8466-18]Hofherr, O. / Wachten, C. / Muller, C. / Reinecke, H. / SPIE (Society) et al. | 2012
-
Performances and limitations of Lab-to-Fab strategies for inline optical metrology [8466-4]Nolot, E. / Andre, A. / Michallet, A. / SPIE (Society) et al. | 2012
-
High-rate, roll-to-roll nanomanufacturing of flexible systems (Invited Paper) [8466-1]Cooper, K.P. / Wachter, R.F. / SPIE (Society) et al. | 2012
-
Metrology challenges for high-rate nanomanufacturing of polymer structures [8466-3]Mead, J. / Barry, C. / Busnaina, A. / Isaacs, J. / SPIE (Society) et al. | 2012
-
First steps towards a scatterometry reference standard [8466-12]Bodermann, B. / Hansen, P.-E. / Burger, S. / Henn, M.-A. / Gross, H. / Bar, M. / Scholze, F. / Endres, J. / Wurm, M. / SPIE (Society) et al. | 2012
-
Graphene Raman imaging and spectroscopy processing: characterization of graphene growth [8466-22]Babenco, M.G. / Tao, L. / Akinwande, D. / SPIE (Society) et al. | 2012
-
Object-depending artifacts in confocal measurements [8466-8]Mauch, F. / Lyda, W. / Gronle, M. / Osten, W. / SPIE (Society) et al. | 2012
-
New reference material for transmission electron microscope calibration [8466-11]Filippov, M.N. / Gavrilenko, V.P. / Kovalchuk, M.V. / Mityukhlyaev, V.B. / Rakov, A.V. / Todua, P.A. / Vasiliev, A.L. / SPIE (Society) et al. | 2012
-
Imaging of short time microscopic scenes with strong light emission: revisited [8466-19]Hahlweg, C. / Zhao, W. / Vogeler, H. / Rothe, H. / SPIE (Society) et al. | 2012
-
Non-destructive 3D characterization of microchannels [8466-25]Heikkinen, V. / Nolvi, A. / Kassamakov, I. / Grigoras, K. / Franssila, S. / Haeggstrom, E. / SPIE (Society) et al. | 2012