Development of silicon accelerometers using epi-micromachining (English)
- New search for: Gennissen, Paul T. J.
- New search for: French, Patrick J.
- New search for: Gennissen, Paul T. J.
- New search for: French, Patrick J.
In:
Proc. SPIE
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3876
; 84
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1999
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Development of silicon accelerometers using epi-micromachining
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Contributors:Gennissen, Paul T. J. ( author ) / French, Patrick J. ( author )
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Conference:Micromachined Devices and Components V ; 1999 ; Santa Clara,CA,USA
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Published in:Proc. SPIE ; 3876 ; 84
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Publisher:
- New search for: SPIE
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Publication date:1999-08-31
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 2
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Electrokinetic microfluidic systems [3874-100]Bousse, L. J. / SPIE et al. | 1999
- 9
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3D silicon photonic lattices: cornerstone of an emerging photonics revolution [3874-200]Fleming, J. G. / Lin, S.-Y. / SPIE et al. | 1999
- 20
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MEMS-based interferometric modulator for display applications [3876-01]Miles, M. W. / SPIE et al. | 1999
- 20
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MEMS-based interferometric modulator for display applicationsMiles, Mark W. et al. | 1999
- 29
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Material-related effects on wet chemical micromachining of smart MEMS devices [3876-02]Hein, A. / Finkbeiner, S. / Marek, J. / Obermeier, E. / SPIE et al. | 1999
- 29
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Material-related effects on wet chemical micromachining of smart MEMS devicesHein, Aylin / Finkbeiner, Stefan / Marek, Jiri / Obermeier, Ernst et al. | 1999
- 38
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Pressure and flow sensor for use in cathetersGoosen, Hans F. / French, Patrick J. / Sarro, Pasqualina M. et al. | 1999
- 38
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Pressure and flow sensor for use in catheters [3876-03]Goosen, J. F. L. / French, P. J. / Sarro, P. M. / SPIE et al. | 1999
- 46
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Acceleration sensitivity of micromachined pressure sensorsAugust, Richard / Maudie, Theresa / Miller, Todd F. / Thompson, Erik et al. | 1999
- 46
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Acceleration sensitivity of micromachined pressure sensors [3876-04]August, R. / Maudie, T. / Miller, T. F. / Thompson, E. / SPIE et al. | 1999
- 54
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Wireless surface-acoustic-wave-based humidity sensorHollinger, Richard D. / Tellakula, Anikumar R. / Li, C.-T. / Varadan, Vasundara V. / Varadan, Vijay K. et al. | 1999
- 54
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Wireless surface-acoustic-wave-based humidity sensor [3876-05]Hollinger, R. D. / Tellakula, A. R. / Li, C.-T. / Varadan, V. V. / SPIE et al. | 1999
- 64
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Advances in MEMS using SFB and DRIE technology (Invited Paper) [3876-06]Van Drieenhuizen, B. P. / SPIE et al. | 1999
- 64
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Advances in MEMS using SFB and DRIE technologyVan Drieenhuizen, Bert P. et al. | 1999
- 74
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Single-crystal silicon gyroscope with decoupled drive and senseAdams, Scott G. / Groves, James / Shaw, Kevin A. / Davis, Timothy J. / Cardarelli, Dan / Carroll, Raymond / Walsh, Joseph G. / Fontanella, Mark D. et al. | 1999
- 74
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Single-crystal silicon gyroscope with decoupled drive and sense [3876-07]Adams, S. G. / Groves, J. / Shaw, K. A. / Davis, T. J. / SPIE et al. | 1999
- 84
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Development of silicon accelerometers using epi-micromachining [3876-08]Gennissen, P. T. J. / French, P. J. / SPIE et al. | 1999
- 84
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Development of silicon accelerometers using epi-micromachiningGennissen, Paul T. J. / French, Patrick J. et al. | 1999
- 93
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Programmable micro accelerometers and gyroscopes [3876-10]Varadan, V. K. / Varadan, V. V. / SPIE et al. | 1999
- 93
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Programmable micro accelerometers and gyroscopesVaradan, Vijay K. / Varadan, Vasundara V. et al. | 1999
- 104
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Analysis of noise and fluctuations in micromachined devices (Invited Paper) [3876-11]Greiner, A. / Korvink, J. G. / SPIE et al. | 1999
- 104
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Analysis of noise and fluctuations in micromachined devicesGreiner, Andreas / Korvink, Jan G. et al. | 1999
- 113
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Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generationCrary, Selden B. / Cousseau, Peter / Mok, Eva H. / Woodcock, David M. / Renaud, Philippe et al. | 1999
- 113
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Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation [3876-12]Crary, S. B. / Cousseau, P. / Mok, E. H. / Woodcock, D. M. / SPIE et al. | 1999
- 122
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MEMS control moment gyroscope design and wafer-based spacecraft chassis studyReiter, Joel / Boehringer, Karl F. / Campbell, Mark et al. | 1999
- 122
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MEMS control moment gyroscope design and wafer-based spacecraft chassis study [3876-14]Reiter, J. / Boehringer, K. F. / Campbell, M. / SPIE et al. | 1999
- 129
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MEMS fixtures for handling and assembly of microparts [3876-15]Tahhan, I. N. / Zhuang, Y. / Boehringer, K. F. / Pister, K. S. J. / SPIE et al. | 1999
- 129
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MEMS fixtures for handling and assembly of micropartsTahhan, Isam N. / Zhuang, Yan / Boehringer, Karl F. / Pister, Kristofer S. J. / Goldberg, Ken et al. | 1999
- 142
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MEMS millimeter-wave transceiver architecturesChiao, Jung-Chih / Choudhury, Debabani et al. | 1999
- 142
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MEMS millimeter-wave transceiver architectures [3876-16]Chiao, J.-C. / Choudhury, D. / SPIE et al. | 1999
- 153
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New fabrication method for high-Q on-chip spiral inductor [3876-17]Jiang, H. / Yeh, J.-L. A. / Tien, N. C. / SPIE et al. | 1999
- 153
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New fabrication method for high-Q on-chip spiral inductorJiang, Hongrui / Yeh, Jer-Liang A. / Tien, Norman C. et al. | 1999
- 162
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Static and dynamic characterization of polysilicon surface-micromachined actuatorsLaible, Volker / Hagelin, Paul M. / Solgaard, Olav / Obermeier, Ernst et al. | 1999
- 162
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Static and dynamic characterization of polysilicon surface-micromachined actuators [3876-19]Laible, V. / Hagelin, P. M. / Solgaard, O. / Obermeier, E. / SPIE et al. | 1999
- 172
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Polymers: an excellent and increasingly used material for microsystemsBley, Peter et al. | 1999
- 172
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Polymers: an excellent and increasingly used material for microsystems (Invited Paper) [3876-20]Bley, P. / SPIE et al. | 1999
- 185
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Additive electroplating technology as a new integration concept for MEMSBinder, Josef / Benecke, Wolfgang et al. | 1999
- 185
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Additive electroplating technology as a new integration concept for MEMS (Invited Paper) [3876-21]Binder, J. / Benecke, W. / SPIE et al. | 1999
- 198
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Parallel-plate electrostatic dual-mass resonator [3876-22]Dyck, C. W. / Allen, J. J. / Huber, R. J. / SPIE et al. | 1999
- 198
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Parallel-plate electrostatic dual-mass resonatorDyck, Christopher W. / Allen, James J. / Huber, Robert J. et al. | 1999
- 212
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Microelectromechanical high-density energy storage/rapid release systemRodgers, M. Steven / Allen, James J. / Meeks, Kent D. / Jensen, Brian D. / Miller, Samuel L. et al. | 1999
- 212
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Microelectromechanical high-density energy storage/rapid release system [3876-24]Rodgers, M. S. / Allen, J. J. / Meeks, K. D. / Jensen, B. D. / SPIE et al. | 1999
- 223
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Novel thin film solid-oxide fuel cell for microscale energy conversion [3876-25]Morse, J. D. / Jankowski, A. F. / Hayes, J. P. / Graff, R. T. / SPIE et al. | 1999
- 223
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Novel thin film solid-oxide fuel cell for microscale energy conversionMorse, Jeffrey D. / Jankowski, Alan F. / Hayes, Jeffrey P. / Graff, Robert T. et al. | 1999
- 227
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Production-ready silicon microvalve [3876-26]Wang, T. K. / Barth, P. W. / Alley, R. / Baker, J. / SPIE et al. | 1999
- 227
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Production-ready silicon microvalveWang, Tak K. / Barth, Phillip W. / Alley, Rod / Baker, James / Yates, David / Field, Leslie A. / Gordon, Gary / Beatty, Christopher C. / Tully, Lori et al. | 1999
- 238
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Micromachined flame ionization detector and flame spectrometer [3876-27]Zimmermann, S. / Wischhusen, S. / Mueller, J. / SPIE et al. | 1999
- 238
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Micromachined flame ionization detector and flame spectrometerZimmermann, Stefan / Wischhusen, S. / Mueller, Joerg et al. | 1999
- 248
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Development of novel piezoresistive sensorLin, Zhongshen / Fang, Weileun et al. | 1999
- 248
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Development of novel piezoresistive sensor [3876-29]Lin, Z. / Fang, W. / SPIE et al. | 1999
- 256
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Linear arrays of uncoolded poly SiGe microbolometers for IR detection [3876-30]De Moor, P. / Sedky, S. / Sabuncuoglu, D. / Van Hoof, C. A. / SPIE et al. | 1999
- 256
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Linear arrays of uncoolded poly SiGe microbolometers for IR detectionDe Moor, Piet / Sedky, Sherif / Sabuncuoglu, Deniz / Van Hoof, Chris A. et al. | 1999
- 260
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Micro pressure sensor with submillimeter size by silicon bulk micromachiningYang, Lung Jieh / Chang, Yih-Min et al. | 1999
- 260
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Micro pressure sensor with submillimeter size by silicon bulk micromachining [3876-32]Yang, L.-J. / Chang, Y.-M. / SPIE et al. | 1999
- 267
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Polysilicon xylophone bar magnetometers [3876-33]Wickenden, D. K. / Champion, J. L. / Givens, R. B. / Kistenmacher, T. J. / SPIE et al. | 1999
- 267
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Polysilicon xylophone bar magnetometersWickenden, Dennis K. / Champion, John L. / Givens, Robert B. / Kistenmacher, Thomas J. / Lamb, James L. / Osiander, Robert et al. | 1999
- 274
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Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs [3876-34]Lee, J. H. / Lee, M. L. / Jang, W. I. / Choi, C. A. / SPIE et al. | 1999
- 274
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Bistable planar polysilicon microactuator with shallow arch-shaped leaf springsLee, Jong-Hyun / Lee, Myung-Hyun / Jang, Won-Ick / Choi, Chang-Auck / Joo, Jin W. et al. | 1999
- 280
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Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequencyHong, Yoonshik / Lee, Jong-Hyun / Kim, Soo Hyun et al. | 1999
- 280
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Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency [3876-35]Hong, Y. / Lee, J. H. / Kim, S. / SPIE et al. | 1999
- 291
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Linear magnetic position sensor for automotive applications [3876-36]Liu, Z. / Tian, L. / Parham, J. / Frazier, A. B. / SPIE et al. | 1999
- 291
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Linear magnetic position sensor for automotive applicationsLiu, Zhixiang / Tian, Li / Parham, Jim / Frazier, A. Bruno et al. | 1999