Assembly and interconnect formation in MEMS/MOEMS application (English)
- New search for: Oppermann, Hermann
- New search for: Oppermann, Hermann
In:
Proc. SPIE
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8250
; 825002
;
2012
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ISBN:
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ISSN:
- Conference paper / Electronic Resource
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Title:Assembly and interconnect formation in MEMS/MOEMS application
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Contributors:Oppermann, Hermann ( author )
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Conference:Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI ; 2012 ; San Francisco,California,USA
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Published in:Proc. SPIE ; 8250 ; 825002
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Publisher:
- New search for: SPIE
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Publication date:2012-02-02
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ISBN:
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 82500A
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Reliability of high I/O high density CCGA interconnect electronic packages under extreme thermal environmentsRamesham, Rajeshuni et al. | 2012
- 82500B
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Characterization of flourocarbon SAM coated MEMS tribogaugeVijayasai, Ashwin / Ramachandran, Gautham / Sivakumar, Ganapathy / Anderson, Charlie / Gale, Richard / Dallas, Tim et al. | 2012
- 82500C
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Characterization of a nanocoating using a MEMS tribogaugeVijayasai, Ashwin / Ramachandran, Gautham / Sivakumar, Ganapathy / Anderson, Charlie / Gale, Richard / Dallas, Tim et al. | 2012
- 82500H
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The unsettled world of leak rate physics: 1 atm large-volume considerations do not apply to MEMS packages: a practitioner's perspectiveKullberg, Richard C. / Jonath, Arthur / Lowry, Robert K. et al. | 2012
- 82500I
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MEMS technology for miniaturized space systems: needs, status, and perspectivesGill, E. / Guo, J. et al. | 2012
- 82500J
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MOEMS devices designed and tested for astronomical instrumentation in spaceZamkotsian, Frederic / Noell, Wilfried et al. | 2012
- 82500K
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Performance prediction and characterization of highly insulated microbolometers for space applicationsXu, Zhiqiang / Ngo Phong, Linh / Pope, Timothy D. et al. | 2012
- 82500L
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Enhanced terahertz transmission by surface plasmon resonanceWen, Yongzheng / Yang, Jiancheng / Yu, Xiaomei / Zhao, Yuejin / Liu, Xiaohua / Dong, Liquan et al. | 2012
- 825001
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Front Matter: Volume 8250| 2012
- 825002
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Assembly and interconnect formation in MEMS/MOEMS applicationOppermann, Hermann et al. | 2012
- 825003
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Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yieldNieva, Patricia M. / Godin, Jeremy R. / Norris, Ryan C. / Najafi Sohi, Ali / Leung, Timothy et al. | 2012
- 825004
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Evaluation of surface control and durability CNT and ITO coated PET transparent electrode under different dry conditionsPark, Joung-Man / Kwon, Dong-Jun / Wang, Zuo-Jia / Gu, Ga-Young / DeVries, Lawrence et al. | 2012
- 825005
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Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structuresOak, Sahil / Ramachandran, Gautham / Dallas, Tim et al. | 2012
- 825006
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Planar refractive microlens arrays with high fill-factor fabricated by polymer replication techniqueNam, Minwoo / Yang, Sang Sik / Lee, Kee-Keun et al. | 2012
- 825007
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Axial phase measurements of light interacting with microstructuresKim, Myun-Sik / Scharf, Toralf / Herzig, Hans Peter et al. | 2012
- 825008
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Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometryHeikkinen, V. / Hanhijärvi, K. / Aaltonen, J. / Grigoras, K. / Kassamakov, I. / Franssila, S. / Haeggström, E. et al. | 2012
- vii
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Powering the wireless world with MEMS (Plenary Paper) [8248-102]Schaevitz, S.B. / SPIE (Society) et al. | 2012
- xxiii
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New optical, acoustic, and electrical diagnostics for the developing world (Plenary Paper) [8251-103]Neale, S.L. / Witte, C. / Bourquin, Y. / Kremer, C. / Menachery, A. / Zhang, Y. / Wilson, R. / Reboud, J. / Cooper, J.M. / SPIE (Society) et al. | 2012
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Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures [8250-04]Oak, S. / Ramachandran, G. / Dallas, T. / SPIE (Society) et al. | 2012
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Assembly and interconnect formation in MEMS/MOEMS application (Invited Paper) [8250-01]Oppermann, H. / SPIE (Society) et al. | 2012
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The unsettled world of leak rate physics: 1 atm large-volume considerations do not apply to MEMS packages: a practitioner's perspective [8250-20]Kullberg, R.C. / Jonath, A. / Lowry, R.K. / SPIE (Society) et al. | 2012
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Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique [8250-05]Nam, M. / Yang, S.S. / Lee, K.-K. / SPIE (Society) et al. | 2012
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Reliability of high I/O high density CCGA interconnect electronic packages under extreme thermal environments [8250-09]Ramesham, R. / SPIE (Society) et al. | 2012
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Characterization of a nanocoating using a MEMS tribogauge [8250-11]Vijayasai, A. / Ramachandran, G. / Sivakumar, G. / Anderson, C. / Gale, R. / Dallas, T. / SPIE (Society) et al. | 2012
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Performance prediction and characterization of highly insulated microbolometers for space applications [8250-18]Xu, Z. / Phong, L.N. / Pope, T.D. / SPIE (Society) et al. | 2012
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Characterization of flourocarbon SAM coated MEMS tribogauge [8250-10]Vijayasai, A. / Ramachandran, G. / Sivakumar, G. / Anderson, C. / Gale, R. / Dallas, T. / SPIE (Society) et al. | 2012
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MEMS technology for miniaturized space systems: needs, status, and perspectives (Invited Paper) [8250-16]Gill, E. / Guo, J. / SPIE (Society) et al. | 2012
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Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry [8250-07]Heikkinen, V. / Hanhijarvi, K. / Aaltonen, J. / Grigoras, K. / Kassamakov, I. / Franssila, S. / Hoeggstrom, E. / SPIE (Society) et al. | 2012
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MOEMS devices designed and tested for astronomical instrumentation in space (Invited Paper) [8250-17]Zamkotsian, F. / Noell, W. / SPIE (Society) et al. | 2012
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Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield (Invited Paper) [8250-02]Nieva, P.M. / Godin, J.R. / Norris, R.C. / Sohi, A.N. / Leung, T. / SPIE (Society) et al. | 2012
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Evaluation of surface control and durability CNT and ITO coated PET transparent electrode under different dry conditions [8250-03]Park, J.-M. / Kwon, D.-J. / Wang, Z.-J. / Gu, G.-Y. / DeVries, L. / SPIE (Society) et al. | 2012
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Axial phase measurements of light interacting with microstructures [8250-06]Kim, M.-S. / Scharf, T. / Herzig, H.P. / SPIE (Society) et al. | 2012
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Enhanced terahertz transmission by surface plasmon resonance [8250-19]Wen, Y. / Yang, J. / Yu, X. / Zhao, Y. / Liu, X. / Dong, L. / SPIE (Society) et al. | 2012