Dry Etching for Micromachining Applications (English)
- New search for: Tadigadapa, Srinivas
- New search for: Lärmer, Franz
- New search for: Tadigadapa, Srinivas
- New search for: Lärmer, Franz
In:
MEMS Materials and Processes Handbook
;
403-456
;
2011
-
ISSN:
- Article/Chapter (Book) / Electronic Resource
-
Title:Dry Etching for Micromachining Applications
-
Contributors:Tadigadapa, Srinivas ( author ) / Lärmer, Franz ( author )
-
Published in:MEMS Materials and Processes Handbook ; 403-456MEMS Reference Shelf ; 1 ; 403-456
-
Publisher:
- New search for: Springer US
-
Place of publication:Boston, MA
-
Publication date:2011-01-01
-
Size:54 pages
-
ISBN:
-
ISSN:
-
DOI:
-
Type of media:Article/Chapter (Book)
-
Type of material:Electronic Resource
-
Language:English
-
Keywords:
-
Source:
Table of contents eBook
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
-
The MEMS Design ProcessLamers, Tina L. / Pruitt, Beth L. et al. | 2011
- 2
-
Additive Processes for Semiconductors and Dielectric MaterialsZorman, Christian A. / Roberts, Robert C. / Chen, Li et al. | 2011
- 137
-
Additive Processes for MetalsArnold, David P. / Saumer, Monika / Yoon, Yong-Kyu et al. | 2011
- 4
-
Additive Processes for Polymeric MaterialsMeng, Ellis / Zhang, Xin / Benard, William et al. | 2011
- 5
-
Additive Processes for Piezoelectric Materials: Piezoelectric MEMSPolcawich, Ronald G. / Pulskamp, Jeffrey S. et al. | 2011
- 6
-
Materials and Processes in Shape Memory AlloyMineta, Takashi / Haga, Yoichi et al. | 2011
- 403
-
Dry Etching for Micromachining ApplicationsTadigadapa, Srinivas / Lärmer, Franz et al. | 2011
- 8
-
MEMS Wet-Etch Processes and ProceduresBurns, David W. et al. | 2011
- 9
-
MEMS Lithography and Micromachining TechniquesHines, Daniel R. / Siwak, Nathan P. / Mosher, Lance A. / Ghodssi, Reza et al. | 2011
- 10
-
Doping Processes for MEMSRaisanen, Alan D. et al. | 2011
- 11
-
Wafer BondingCunningham, Shawn J. / Kupnik, Mario et al. | 2011
- 879
-
MEMS Packaging MaterialsDarrin, Ann Garrison / Osiander, Robert et al. | 2011
- 13
-
Surface Treatment and PlanarizationLin, Pinyen / Maboudian, Roya / Carraro, Carlo / Tseng, Fan-Gang / Wang, Pen-Cheng / Lan, Yongqing et al. | 2011
- 14
-
MEMS Process IntegrationHuff, Michael A. / Bart, Stephen F. / Lin, Pinyen et al. | 2011