Scanning spreading resistance microscopy of defect engineered low dose SIMOX samples (English)
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In:
Microelectronic Engineering
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84
, 3
;
547-550
;
2007
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ISSN:
- Article (Journal) / Print
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Title:Scanning spreading resistance microscopy of defect engineered low dose SIMOX samples
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Contributors:
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Published in:Microelectronic Engineering ; 84, 3 ; 547-550
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Publisher:
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Publication date:2007
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Size:4 Seiten, 13 Quellen
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ISSN:
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Coden:
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 84, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 375
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Nanoscale imaging and metrology of devices and innovative materialsSpinella, Corrado / Raineri, Vito / Vandervorst, Wilfried / Ciappa, Mauro et al. | 2007
- 376
-
Scanning capacitance microscopy and the role of localized charges in dielectric films: Infering or challenging?Beyer, Reinhard / Schmidt, Bernd et al. | 2006
- 382
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Hierarchical roughness makes superhydrophobic states stableMichael, Nosonovsky / Bhushan, Bharat et al. | 2006
- 387
-
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devicesBhushan, Bharat et al. | 2006
- 413
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Two-dimensional dopant imaging of silicon carbide devices by secondary electron potential contrastBuzzo, M. / Ciappa, M. / Millan, J. / Godignon, P. / Fichtner, W. et al. | 2006
- 419
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Confocal Raman and TEM measurements at the same area on nanoparticlesCazayous, M. / Langlois, C. / Oikawa, T. / Ricolleau, C. / Sacuto, A. et al. | 2006
- 424
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A new methodology for quantifying the multi-scale similarity of imagesDalla Costa, M. / Bigerelle, M. / Najjar, D. et al. | 2006
- 431
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High resolution electrical characterisation of organic photovoltaic blendsDouhéret, O. / Swinnen, A. / Breselge, M. / Van Severen, I. / Lutsen, L. / Vanderzande, D. / Manca, J. et al. | 2006
- 437
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Evaluation of the junction delineation accuracy and reproducibility with the SSRM techniqueEyben, Pierre / Vanhaeren, Danielle / Janssens, Tom / Hantschel, Thomas / Vandervorst, Wilfried / Adachi, Kanna / Ishimaru, Kazunari et al. | 2006
- 441
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Breakdown kinetics at nanometer scale of innovative MOS devices by conductive atomic force microscopyFiorenza, Patrick / Lo Nigro, Raffaella / Raineri, Vito / Salinas, Dario et al. | 2006
- 446
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Carrier concentration and mobility profiling in quantum wells by scanning probe microscopyGiannazzo, F. / Raineri, V. / Mirabella, S. / Impellizzeri, G. / Priolo, F. et al. | 2006
- 450
-
High spatial and energy resolution characterization of lateral inhomogeneous Schottky barriers by conductive atomic force microscopyGiannazzo, F. / Roccaforte, F. / Raineri, V. et al. | 2006
- 454
-
Quantitative TEM characterizations of La/B4C and Mo/B4C ultrathin multilayer gratings by the geometric phase methodHäussler, D. / Spiecker, E. / Jäger, W. / Störmer, M. / Bormann, R. / Michaelsen, C. / Wiesmann, J. / Zwicker, G. / Benbalagh, R. / André, J.-M. et al. | 2006
- 460
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Mapping stress and strain in nanostructures by high-resolution transmission electron microscopyHÿtch, M.J. / Houdellier, F. et al. | 2006
- 464
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Convergent beam electron diffraction for strain determination at the nanoscaleHoudellier, F. / Roucau, C. / Casanove, M.-J. et al. | 2006
- 468
-
Experimental characterization of proteins immobilized on Si-based materialsLibertino, Sebania / Fichera, Manuela / Aiello, Venera / Statello, Giuliana / Fiorenza, Patrick / Sinatra, Fulvia et al. | 2006
- 474
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Quantitative analysis of thin film compositions using EFTEM combined with RBS and ERDALindner, J.K.N. / Häberlen, M. / Schwarz, F. / Thorwarth, G. / Hammerl, C. / Assmann, W. / Stritzker, B. et al. | 2006
- 479
-
Optical properties of proteins and protein adsorption studyLousinian, S. / Logothetidis, S. et al. | 2006
- 486
-
Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOxNicotra, G. / Bongiorno, C. / Caristia, L. / Coffa, S. / Spinella, C. et al. | 2006
- 490
-
Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopyPasseri, D. / Bettucci, A. / Germano, M. / Rossi, M. / Alippi, A. / Fiori, A. / Tamburri, E. / Orlanducci, S. / Terranova, M.L. / Vlassak, J.J. et al. | 2006
- 495
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Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFMPolspoel, W. / Vandervorst, W. et al. | 2006
- 501
-
Reliability of SiO2 and high-k gate insulators: A nanoscale study with conductive atomic force microscopyPorti, M. / Aguilera, L. / Blasco, X. / Nafrı´a, M. / Aymerich, X. et al. | 2006
- 506
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Atomic force microscope characterization of PAH/PAZO multilayersFerreira, Quirina / Gomes, Paulo J. / Nunes, Yuri / Maneira, Manuel J.P. / Ribeiro, Paulo A. / Raposo, Maria et al. | 2006
- 512
-
On the reliability of scanning probe based electrostatic force measurementsRatzke, Markus / Reif, Jürgen et al. | 2006
- 517
-
Sidewall damage in silica-based low-k material induced by different patterning plasma processes studied by energy filtered and analytical scanning TEMRichard, O. / Iacopi, F. / Bender, H. / Beyer, G. et al. | 2006
- 524
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Markers prepared by focus ion beam technique for nanopositioning proceduresRomanus, H. / Schadewald, J. / Cimalla, V. / Niebelschütz, M. / Machleidt, T. / Franke, K.-H. / Spiess, L. / Ambacher, O. et al. | 2006
- 528
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Preparation of defined structures on very thin foils for characterization of AFM probesRomanus, H. / Schadewald, J. / Cimalla, V. / Niebelschütz, M. / Machleidt, T. / Franke, K.-H. / Spiess, L. / Ambacher, O. et al. | 2006
- 532
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Structural and electrical characterization of gold nanoclusters in thin SiO2 films: Realization of a nanoscale tunnel rectifierRuffino, F. / Grimaldi, M.G. et al. | 2006
- 538
-
Applications of quantitative image analysis to the description of the morphology of ZrO2 including 10% Eu3+ and their polyurethane nanocompositesRyszkowska, Joanna et al. | 2006
- 542
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Combined shear-force/field emission microscope for local electrical surface investigationSikora, Andrzej / Gotszalk, Teodor / Szeloch, Roman et al. | 2006
- 547
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Scanning spreading resistance microscopy of defect engineered low dose SIMOX samplesVines, Lasse / Kögler, Reinhard / Kuznetsov, Andrej Yu. et al. | 2006
- CO2
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Inside Front Cover - Editorial Board| 2007
- II
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Contents Continued| 2007
- iv
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EMRS Volume list| 2007
- v
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Table of Contents| 2007