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To solve the crossing-linkable polyethylene (XLPE) insulation compound purity evaluation problem, a high speed scanning measurement system was designed according to FPGA. With the updated information technology and advanced electronic devices, it is possible to develop a new inspecting technology for sorting, checking and evaluating material quality, by which defects microscopic images can be real-time recorded, processed and displayed. The result shows that this system can measure the size of impurity particles of XLPE cable materials correctly, it also can find out the accurate location and numbers of impurity particles. The resolving power of this method can reach 20 m and the error is less than 10%. The possibility that the impurity particles can be checked out is up to 100%.