MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000 °C (English)
- New search for: Miyakawa, Natsuki
- New search for: Legner, Wolfgang
- New search for: Ziemann, Thomas
- New search for: Telitschkin, Dimitri
- New search for: Fecht, Hans-Jörg
- New search for: Friedberger, Alois
- New search for: Miyakawa, Natsuki
- New search for: Legner, Wolfgang
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In:
Smart Sensors, Actuators, and MEMS, 2011, Connecting Minds for Global Solutions, EMT, Spie Europe Microtechnologies Conferences, 5
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1077-1087
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2012
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ISSN:
- Conference paper / Print
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Title:MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000 °C
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Contributors:Miyakawa, Natsuki ( author ) / Legner, Wolfgang ( author ) / Ziemann, Thomas ( author ) / Telitschkin, Dimitri ( author ) / Fecht, Hans-Jörg ( author ) / Friedberger, Alois ( author )
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Published in:Microsystem Technologies ; 18, 7/8 ; 1077-1087
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Publisher:
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Publication date:2012
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Size:11 Seiten, 14 Bilder, 1 Tabelle, 33 Quellen
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ISSN:
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DOI:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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